179 results about "Plasma jet" patented technology

The invention relates to a method for treating a reflective optical element (1) for the VUV wavelength range having an aluminum surface (3). The treatment of the reflective optical element (1) comprises irradiating the reflective optical element (1) with a hydrogen plasma jet (10) to remove the aluminum oxide layer (4) formed on the aluminum surface (3). The invention also relates to a reflective optical element (1) for use in the VUV wavelength range treated by such a method, and to an optical arrangement comprising at least one such optical element (1).

The invention provides a core-shell structure powder preparation method which comprises the following steps: in a reaction chamber in an inert gas atmosphere, melting a metal raw material by using plasma jet, and crushing the molten metal raw material into metal powder which is a metal core of a core-shell structure. And meanwhile, precursor gas is introduced into the reaction chamber, so that the precursor gas is cracked under the combined action of high-energy plasma, high temperature, metal surface catalysis and the like and is recombined into a deposition layer on the surface of the metal core, and the core-shell structure powder with the metal core inside and the deposition layer outside is obtained at the moment. According to the core-shell structure powder preparation method provided by the invention, the gas is used as a precursor material, and under the combined action of the high-energy plasma and the high-temperature metal, the precursor gas can immediately complete cracking deposition of the shell material while melting and crushing the metal raw material through plasma jet, so that the deposition efficiency is high; and in addition, the gaseous precursor is relatively high in purity, so that the metal powder can be effectively prevented from being oxidized.

The utility model discloses a high-efficiency furnace end and an electric flame stove. The high-efficiency furnace end comprises an upper shell, a lower shell and a plurality of anode needles arranged between the upper shell and the lower shell, the upper shell is provided with a plurality of cathode tubes corresponding to the anode needles, and upper ceramic tubes are arranged below the bottoms of the cathode tubes; the lower shell is provided with a plurality of arc striking pieces corresponding to the anode pins, lower ceramic tubes are arranged on the outer sides of the arc striking pieces, and the tops of the lower ceramic tubes abut against the bottoms of the upper ceramic tubes. According to the utility model, the two discharge areas are arranged to form an avalanche effect of secondary ionization, and finally an extremely high temperature plasma jet is formed, so that efficient heat transfer is realized; the cathode tubes, the upper ceramic tubes, the anode needles and the lower ceramic tubes of each group are connected in an abutting manner, and finally, plasma accessories are stabilized by utilizing tightening force between the upper shell and the lower shell, so that the mounting and dismounting efficiency is improved, the complexity of mounting and reworking or overhauling is reduced, and the cost is effectively controlled.

The application discloses a kind of plasma jet array devices for large size epoxy surface modification, including frame, tank, gas cylinder for loading inert gas, aperture network, high voltage power supply and metal insert;Tank and metal insert are fixed on frame, tank is flat tank and its slot is formed with jet airway for placing and fixing epoxy insulation, the bottom and side of tank are provided with jet spout arranged in array, jet spout is connected by gas inlet pipe, gas inlet pipe is arranged in the inside of side plate and bottom plate of tank;Aperture network is connected on jet spout and connects high voltage power supply, tank is grounded by wire;Metal insert is inserted above epoxy insulation, metal insert is grounded by wire.The application also discloses the use method applied to the above device.Adopting the application, the surface of large size epoxy insulation can be quickly and uniformly modified, and the charge release capacity is improved.

The invention belongs to the technical field of combustion equipment, and relates to a plasma ignition system and a using method thereof. The system comprises a plasma generator, a combustor, a power supply system, a carrier working medium system and a cooling water system, an anode and a cathode of the plasma generator are coaxially arranged to form an electric arc cavity and a surrounding cooling water cavity, and the anode is provided with a compressed air inlet and a plasma jet outlet; the plasma combustor is sequentially and coaxially sleeved with a first-stage center cylinder, a second-stage combustion cylinder and an outer wall cylinder from inside to outside, the first-stage center cylinder communicates with the jet flow outlet, and the outer wall cylinder is provided with a pulverized coal inlet; the power supply system supplies power to the generator through the isolation transformer and the rectifier cabinet. The carrier working medium system supplies air to the compressed air inlet; the cooling water system enables demineralized water to circulate in the cooling water cavity. Efficient and stable ignition and low-nitrogen combustion of pulverized coal are achieved, the ignition reliability is remarkably improved, the system service life is remarkably prolonged, and the operation automation level is remarkably improved.

The present application relates to a kind of catalyst synergistic plasma to regulate the method of active substance content in plasma activated water, belong to plasma activated water preparation technical field.The present application uses catalyst synergistic plasma to prepare the device of activated water, catalyst is filled in the discharge region of dielectric barrier discharge plasma jet device, the working gas flow of inlet pipe is adjusted by mass flowmeter, low-temperature plasma power is powered to high-voltage electrode, working gas starts discharge to generate plasma in discharge region, while, under the coupling catalysis of catalyst, the content of active substance in plasma is improved, the water body in plasma active substance activated water storage container is activated, and plasma activated water is formed;The content of active substance in plasma activated water is regulated by changing catalyst type and the component of working gas in gas cylinder.The present application improves the content of active substance in plasma working gas by catalyst coupling plasma, and the content of active substance in plasma activated water is improved.

This invention discloses a portable low-temperature plasma device based on a Laval nozzle structure and its application, belonging to the field of plasma technology application technology. Specifically, it includes (1) the construction of the device; and (2) the use of the device for fungal eradication treatment and transdermal drug delivery enhancement treatment. The beneficial effects achieved by this invention are as follows: This invention is the first to apply the Laval nozzle structure to a portable low-temperature plasma device. The results show that the device can effectively improve the plasma jet performance and active particle content, significantly improve the treatment effect of fungal infections of the skin and nails and the transdermal drug penetration efficiency, while solving the problems of large size, reliance on external power supply, and complex operation of traditional plasma devices. Therefore, using this invention for the treatment of fungal infections of the skin and nails and for enhanced transdermal drug delivery has advantages such as ease of operation, high safety, non-invasiveness, and high efficiency, and thus has potential application prospects in the field of skin disease treatment and transdermal drug delivery.

The invention discloses a contact arcing generator, a water plasma igniter and an ignition method, and belongs to the technical field of aircraft igniters. A contact arcing generator comprises a generating device and a sliding mechanism, the generating device comprises a cathode and an anode which are coaxially arranged, the anode is located outside the cathode, and the sliding mechanism is located outside the anode and drives the cathode to slide in the anode; the cathode comprises a body part and an arcing end, the arcing end is located at the top end of the body part, the sliding mechanism drives the arcing end to make contact with or be separated from the anode through the body part, an arcing cavity is formed between the anode and the top end of the cathode, a conveying structure for conveying water to the arcing cavity is arranged on the cathode, a spraying hole is formed in the anode, and the spraying hole communicates with the arcing cavity. Water vapor in the arcing cavity is sprayed out through the spraying holes to form water plasma jet flow. By the adoption of the contact arcing generator, the water plasma igniter and the ignition method, the problem that an existing plasma igniter is unstable in arcing can be solved.

The application belongs to the field of jet exciter, and particularly relates to a multi-mode exciter and a use method, which comprises an exciter body, an electrode group, a power supply and a vibrating diaphragm; the exciter body is provided with a mounting cavity, the vibrating diaphragm is arranged in the mounting cavity and divides the mounting cavity into two mutually isolated jet cavities, and each jet cavity is provided with a jet hole; each jet cavity is provided with a group of electrode groups, the electrode group comprises a moving electrode and a fixed electrode, the moving electrode is arranged on the vibrating diaphragm, and the fixed electrode is arranged on the inner wall of the exciter body; the power supply comprises a control power supply and a discharge power supply. The multi-mode exciter provided by the application combines the vibrating diaphragm jet and the two-electrode plasma jet, can greatly improve the jet strength, provide multiple jet modes and provide a vector control function, meet the requirements in a larger range, and improve the adaptability of the exciter.

A method for processing a substrate includes loading the substrate on a substrate holder coupled to a scanning tool and disposed in a processing chamber, the substrate including an etch mask disposed over an underlying layer. The method further includes orienting, using the scanning tool, the substrate holder relative to a plasma torch at a tilt angle, the plasma torch being disposed in the processing chamber and including a plasma nozzle, the tilt angle being an angle between the plasma torch and a normal direction of the substrate holder. And the method further includes generating, using the plasma torch, a plasma jet over an area of the substrate holder, and scanning, while maintaining a distance between an end of the plasma nozzle and a surface of the substrate, the substrate relative to the plasma jet to form features on the underlying layer at the tilt angle.

The application relates to the technical field of plasma, in particular to a processing device for coaxial pulse trapezoidal magnetic field regulated plasma jet, which comprises a gas-liquid control module, a plasma generation module, a pulse trapezoidal magnetic field generation module, a power excitation module, a synchronous controller and a plasma processing module; the pulse trapezoidal magnetic field generation module is connected with the plasma generation module and is used for generating a coaxial pulse trapezoidal magnetic field with adjustable parameters; the radial component of the coaxial pulse trapezoidal magnetic field is perpendicular to the movement direction of charged particles in the plasma jet, the plasma jet is provided with a radial expansion or contraction Lorentz force, and the processing area of the plasma jet is adjusted. The device provided by the application generates a stable, dispersed, gas-temperature-near-room-temperature and adjustable-action-area plasma jet, realizes efficient, accurate and low-energy-consumption processing of a target object, and achieves good processing effect.

This invention proposes a metal matrix composite material processing apparatus and method based on plasma etching, belonging to the field of composite material processing. It determines the material properties, target processing method, and final service performance requirements of the metal matrix composite workpiece. The workpiece consists of a metal matrix and reinforcing particles dispersed within the metal matrix. The area to be processed on the workpiece is exposed to a plasma jet, and plasma etching is used. The reinforcing particles react and transform into volatile gases, which are then removed from the metal matrix, forming a softening pretreatment layer on the workpiece surface. Ultrasonic vibration cutting is then used to remove the softening pretreatment layer. This invention removes the reinforcing particles from the metal matrix through plasma etching, locally transforming the originally heterogeneous and difficult-to-process composite material into a relatively homogeneous metal layer for cutting. This achieves homogeneous transformation of the processed object, eliminating the core mechanisms of particle pull-out, breakage, and interface cracking in traditional processing.

The invention relates to a device for improving the through-flow arc control of a high-voltage large-capacity gas gap switch, and the device comprises a test cavity which is used for providing a controllable gas insulation environment and serves as a carrier of a high-voltage large-current discharge test; the trigger discharge loop is used for generating a high-voltage pulse to drive the trigger cavity to generate plasma jet and induce the main gap to be broken down and conducted at a preset moment; and the large current generation loop is used for storing energy and generating a high-energy fault current simulating an actual working condition after the main gap is conducted. A main gap can form a stable and controllable initial discharge channel under high-voltage and large-gap conditions, active constraint is carried out on an arc movement track in a high-energy fault current flowing stage, and long-term residence of an arc root in a local area of an electrode is avoided, so that the ablation degree of the electrode is remarkably reduced, the through-flow life is prolonged, and meanwhile, the service life of the electrode is prolonged. A transverse magnetic field generated by the spiral groove structure enables an electric arc to rotate along the surface of the electrode, the stability of an arc column is effectively improved, and the reliability under the condition of large current flow is improved.

The application relates to the technical field of medical devices, and discloses a plasma jet device which comprises an outer tube, a first insulating inner tube and a plasma generator, the outer tube extends along a first direction; one end of the first insulating inner tube extends along the first direction and is arranged in the outer tube, and the other end of the first insulating inner tube is exposed outside the outer tube; the first insulating inner tube is provided with a first medium channel extending along the first direction, the first medium channel is provided with an inlet and an outlet at two ends respectively, the outlet is located in the outer tube, and the inlet is located outside the outer tube; the plasma generator is located in the outer tube, and the plasma generator is arranged closer to the outlet relative to the inlet; the plasma generator comprises a first electrode and a second electrode, the first electrode and the second electrode are connected to the first insulating inner tube and are arranged at intervals along the first direction; the polarities of the first electrode and the second electrode are opposite, so that the plasma jet device can be used for treating deep tissues of a human body.

The application discloses a plasma gas heating furnace, and relates to the technical field of heating furnaces.The heating furnace is of an inner-outer sleeve structure, and comprises a furnace body inner sleeve, which is a plasma gas passage and is provided with a gas outlet; a furnace body outer sleeve, which is a working gas passage and is sleeved on the outer side of the furnace body inner sleeve and is in communication with the furnace body inner sleeve; and an arc plasma torch, which is arranged at the end of the furnace body inner sleeve far from the gas outlet; and an air inlet assembly, which is arranged in communication with the furnace body outer sleeve and is used for feeding working gas into the furnace body outer sleeve. The arc plasma torch is used for spraying high-temperature plasma jet into the furnace body, and the working gas fed from the air inlet assembly is mixed with the high-temperature plasma jet to form target gas, so that high-temperature inert gas heated by electric energy is used to replace high-temperature flue gas generated by combustion of fossil fuel, a heat source is provided for an industrial furnace, and nearly zero carbon dioxide emission is realized in the whole heating process.

The present invention relates to a method for producing a large amount of hydrogen and high-quality solid carbon by controlling carbon characteristics and efficiently decomposing methane into hydrogen and solid carbon by means of plasma, by supplying methane bidirectionally, specifically in mutually opposing directions, rather than in a single direction under the same energy density. The present invention provides a method for producing hydrogen and solid carbon by means of plasma, comprising the steps of: a) supplying a plasma-forming gas to a triple torch-type plasma jet device to generate a plasma jet; b) supplying methane gas to the plasma jet and thermally decomposing the methane gas to produce hydrogen and solid carbon; and c) filtering the solid carbon.

The application relates to a plasma direct deinking method, belonging to the paper deinking technical field.The plasma direct deinking method is characterized in that: a plasma spray gun with a special electrode structure is designed and manufactured, ionized working gas is used as a working medium, a plasma jet is generated to directly process the surface of paper materials, and different carrier gases are used according to different inks.The application uses ionized gas instead of chemical deinking agents, adopts a direct surface processing method, and under the bombardment of plasma particles, the combination of ink components with paper fibers is lost, and the pigments and other particles in the components are stripped from the surface of the paper, so that the ink on the surface of the paper is directly removed.The application can obtain a plasma direct deinking method.

This invention discloses a water-based plasma jet cleaning method and apparatus. The method involves collecting multi-modal contamination detection data from the workpiece surface, analyzing the physicochemical properties of the contamination to generate a contamination characteristic spectrum, matching a pre-stored material specification library to generate a discharge safety margin coefficient, and then performing plasma discharge treatment on deionized water under its constraint to generate a plasma-activated water flow, establishing a water-based plasma composite cleaning domain. Multi-path collaborative cleaning flow is generated through decoupling and regulating the jet intensity and water-air ratio. The cleaning effect is monitored to identify residual deviation characteristics, extracting the schedulable margin in lightly contaminated areas to trigger a compensation mechanism, generating cleaning compensation parameters, and constructing an enhanced cleaning configuration. Based on the enhanced cleaning configuration, the cleanliness convergence curve is monitored, and the optimal cleaning termination time is determined by identifying the decreasing convergence slope. Adaptive passivation processing is then performed based on the cleanliness convergence curve, achieving closed-loop adaptive control throughout the entire process, including contamination perception, safety margin configuration, process compensation, and convergence termination.

This invention belongs to the field of plasma flow control technology for aircraft, specifically relating to an air-breathing plasma jet generator suitable for active flow control of aircraft. It is installed within an internal cavity of the aircraft, connected to an air intake and a nozzle. The air-breathing plasma jet generator generates orthogonal electric and magnetic fields. The electric field includes components in the direction of airflow and perpendicular to airflow. The magnetic field is used to confine electrons to gyroscopic motion and to ionize them through collisions with gas molecules. Furthermore, the magnetic field causes the ion current perpendicular to the airflow direction to generate an Ampere force in the direction of airflow under the influence of the magnetic field. This invention effectively solves the problem of exciter failure during high-speed flight by embedding the exciter entirely inside the aircraft and combining an innovative design of integrated excitation using magnetic fields, thermal energy, and acoustic waves, significantly improving the speed applicability range of plasma flow control technology.

The invention provides a shale reservoir body cracking and carbon sequestration method and system. Relates to the technical field of unconventional oil and gas exploitation and green shale gas yield increase. The method comprises the steps that a horizontal well of a target shale reservoir is divided into a plurality of packing section clusters, and in-situ methane in rock pores in the target packing section clusters is displaced and recycled by injecting a supercritical carbon dioxide carrier into the target packing section clusters; a gaseous reactant with a preset proportion is injected into the target packing section cluster, and the gaseous reactant and the supercritical carbon dioxide carrier form mixed fluid; the mixed fluid is triggered to be burnt and exploded through plasma jet, rock mineral lattices in the target packing section cluster are destroyed at the same time, and rock in-situ cracking is achieved through the cooperation of burning explosion fracturing and electric pulse fracturing; and after cracking is finished, by maintaining the supercritical carbon dioxide environment in the target packing section cluster, carbon dioxide generated in the cracking process is induced to be subjected to a mineralization reaction with a rock fracture surface formed by cracking, and the carbon dioxide is sealed in rock minerals.

The invention discloses relatively closed textile fabric plasma treatment equipment which comprises a machine body, a separation cover and a temperature control mechanism, the separation cover is arranged above the working face of the machine body, the separation cover and a driving assembly are installed, the separation cover is arranged on the outer ring of a plasma spray head assembly in a sleeving mode, and the temperature control mechanism is arranged on the separation cover. An air curtain cavity with a downward opening is formed in the outer wall of the separation cover in a surrounding manner; the temperature control mechanism comprises a temperature guide plate arranged in the air curtain cavity, a temperature control chamber installed on the separation cover, a front end temperature measurement plate and a rear end temperature measurement plate, wherein the front end temperature measurement plate and the rear end temperature measurement plate are installed on the working face of the machine body. Air exhausted by the air curtain cavity in the separation cover forms an air curtain, the air curtain generated by the air curtain cavity further blocks external airflow, the plasma spray head assembly works in a relatively closed space, friction between the edge of the closed space and fabric is reduced, and low-temperature dry air generated by the air curtain acts on the fabric, so that the fabric is prevented from being damaged. Therefore, the fabric is not easy to be damaged by the plasma.

The invention relates to a device for generating multiple plasma jets (1) comprising at least one gas inlet (2), a first electrode (3) and a second electrode (4), wherein the first electrode (3) and the second electrode (4) each have a grid structure with grid bars (5) and recesses (6) arranged between the grid bars (5A, 5B) and the first electrode (3) and the second electrode (4) are arranged parallel to each other, a cavity (7) is arranged between the first electrode (3) and the second electrode (4), and the electrodes (3, 4) are arranged such that a plasma generation point (P) is arranged in the cavity (7) between a grid bar (5A) of the first electrode (3) and a grid bar (5B) of the second electrode (4).The first electrode (3) has a first plate-shaped dielectric layer (8) on the side facing the cavity (7), and the second electrode (4) has a second dielectric layer (9) between the grid bars (5B) of the second electrode, and a plasma jet (1) can be generated at a plasma generation point (P) in each case. In this way, a possibility is provided to generate a large number of uniform streamers and to control the quality of the generation.

Plasma Jet Device The invention relates to a cold plasma jet device (1) comprising: - at least one gas supply inlet (2); - at least one tube (4) fluidically connected to the gas supply inlet and comprising at least one plasma outlet (5), the gas supply inlet and the plasma outlet defining a direction of gas and plasma flow; - at least one high-voltage electrode (6) outside the tube configured to generate an electric field in the tube; and - at least one electrically conductive element (7) having a floating electrical potential and extending axially inside the tube at least partially between the high-voltage electrode and the plasma outlet. Figure for the abstract: Fig. 3

A method treats a reflective optical element for the VUV wavelength range, wherein the optical element has an aluminium surface. Treating the reflective optical element comprises irradiating the reflective optical element with a hydrogen plasma jet for removing an aluminium oxide layer formed on the aluminium surface. A reflective optical element for use in the VUV wavelength range treated by the method can be included in an optical arrangement.

The invention belongs to the technical field of aluminum-based composite material preparation, and particularly discloses a method for preparing an aluminum-based composite material through plasma-assisted smelting. The method comprises the following steps: heating and melting pure aluminum or aluminum alloy to obtain a melt; argon is conveyed into a reaction cavity of the plasma torch, voltage is applied to ionize the argon into plasma, and a plasma jet is formed and enters a temperature control device; the reinforcement particles are input into a temperature control device in a gas-solid two-phase flow mode to make contact with and be mixed with the plasma jet flow, and a plasma / argon / reinforcement particle three-phase mixed jet flow is formed; the temperature of the three-phase mixed jet flow is regulated and controlled, and the three-phase mixed jet flow is introduced into the melt through a guide pipe to act on the melt; and the melt is subjected to slagging-off treatment and then is poured into a blank, and the aluminum-based composite material is obtained. According to the method, argon plasma and reinforcement particle gas-solid two-phase flow are utilized to form three-phase mixed jet flow to act on the aluminum alloy melt, and the aluminum-based composite material which is clean, uniform in dispersion, good in interface bonding and remarkably improved in performance is prepared.

The invention discloses a method for regulating and controlling plasma jet properties by adding auxiliary pulse voltage, and relates to the technical field of low-temperature plasmas. According to the method, an auxiliary electrode is arranged outside a discharge tube of the plasma jet device, auxiliary pulse voltage containing multi-dimensional adjustable parameters such as amplitude, pulse width and delay time is applied, and space-time distribution of potential outside the tube is actively changed; and local refined cooperative regulation and control on the velocity, the intensity, the radial size and the jet length of the plasma bullet and the spectral intensity of the active particles are realized. The technical problems that an existing regulation and control method is low in refinement degree, poor in parameter collaboration and narrow in regulation and control range are solved, the method has the advantages of being small in non-invasive interference, flexible in regulation and control, wide in application range and the like, and the application requirements of multiple fields such as material surface modification and biomedical disinfection can be met.

The invention relates to the technical field of additive manufacturing, and discloses a 3D printing nozzle and system and a low-temperature plasma jet 3D printing device.The 3D printing nozzle comprises a nozzle body and a plasma generation module; an aerosol inlet and a plasma gas source inlet are formed in the spray head main body; an aerosol channel and a plasma gas source channel are arranged in the spray head main body; the plasma generation module comprises an inner electrode and an outer electrode and forms a plasma excitation area, and gas introduced from the plasma gas source inlet is excited into plasma jet flow by the plasma generation module in the plasma excitation area; and after passing through the aerosol channel, the aerosol is coupled with the plasma jet flow and is sprayed out. The 3D printing nozzle has the advantages that the 3D printing nozzle can realize 3D printing of materials such as an organic conductive polymer, a metal salt solution and nano-particle slurry on a flexible substrate, particularly on a substrate which is not resistant to high temperature, and is high in printing precision, high in integration level and compact in structure.

The invention discloses thermal barrier coating powder with a micro-explosion effect and an efficient evaporation agglomeration structure and a preparation method of the thermal barrier coating powder, and belongs to the technical field of thermal spraying materials. The thermal barrier coating powder is powder with an agglomeration structure and is formed by uniformly mixing and agglomerating hollow polymer microspheres and nano ceramic particles through an organic binder; the hollow polymer microspheres comprise one or more of polymethyl methacrylate, polyethylene, polystyrene, polylactic acid, polyacrylic acid, polyvinyl butyral, polyisobutene, polycarbonate and polyethylene glycol terephthalate; the nano ceramic particles comprise one of yttrium oxide stabilized zirconium oxide, rare earth zirconate, multi-element rare earth doped zirconate, rare earth tantalate and oxide. The method is used for solving the technical problem that in an existing PS-PVD process, part of powder is only melted in plasma jet and is not fully gasified, so that a lamellar structure where melted particles are accumulated is formed in a coating, and an ideal vapor deposition columnar crystal structure is not formed.

This application relates to the field of additive manufacturing technology, disclosing a 3D printing nozzle, system, and low-temperature plasma jet 3D printing device. The 3D printing nozzle includes: a nozzle body and a plasma generating module; the nozzle body has an aerosol inlet and a plasma gas source inlet; the nozzle body has an aerosol channel and a plasma gas source channel; the plasma generating module includes an inner electrode and an outer electrode, forming a plasma excitation region; gas introduced from the plasma gas source inlet is excited into a plasma jet by the plasma generating module in the plasma excitation region; the aerosol, after passing through the aerosol channel, couples with the plasma jet and is ejected. The advantages of this application are that the 3D printing nozzle can realize the 3D printing of materials such as organic conductive polymers, metal salt solutions, and nanoparticle slurries on flexible substrates, especially those not resistant to high temperatures, with high printing accuracy, high integration, and a compact structure.

This invention proposes a room-temperature and ambient-pressure microwave low-temperature plasma jet excitation device, relating to the field of plasma. It includes a resonant cavity comprising a coaxial outer cavity and an inner cavity. A copper core tube is fixedly mounted in the upper half of the inner cavity, with its top end extending beyond the top opening of the inner cavity. A gas guide hole is also provided at the bottom of the inner cavity. A gas guide port and a microwave feed port are provided on the side of the outer cavity, and an air inlet channel is also provided at the bottom of the outer cavity. This invention, by employing a double-layered open coaxial resonant cavity structure and setting specific parameter ratios, enables the efficient and stable excitation of a stable and controllable low-temperature plasma jet with extremely low power under ambient temperature and pressure conditions. It also reveals the working mechanism, solving the problems of traditional technologies such as dependence on low gas pressure, high excitation power, poor jet stability, and low microwave absorption efficiency, and broadening the application scenarios of low-temperature plasma technology.