The invention belongs to the technical field of nano
plasma switches, and relates to a nano
plasma switch with a vertical
electrode structure, which comprises a substrate layer, a first conductive layer, a
dielectric layer and a second conductive layer which are sequentially stacked from bottom to top, the
dielectric layer is provided with a cavity vertically penetrating through the
dielectric layer along the overlapping direction, the second conductive layer covers one end, far away from the first conductive layer, of the cavity, and the second conductive layer and the first conductive layer are arranged at an interval; and applying excitation
voltage on the first conductive layer and the second conductive layer to form a
potential difference between the first conductive layer and the second conductive layer, thereby forming the nano
plasma switch with a vertical
electrode structure by taking the first conductive layer and the second conductive layer as electrodes and the cavity as an
electrode gap. According to the invention, the
field electron emission area can be effectively increased, the switch conduction difficulty is reduced, the time required for switching the switch from a
cut-off state to a complete conduction state is short, and the response speed is high.