61 results about "Surface discharge" patented technology

The invention relates to the technical field of bushing detection, and discloses a bushing insulation state detection method based on multi-parameter real-time monitoring. The method comprises the following steps: acquiring multi-dimensional monitoring data such as a partial discharge pulse sequence, dielectric loss angle tangent value fluctuation data and surface leakage current density distribution in a bushing operation environment in real time; carrying out insulation defect feature extraction on the data set, and generating an insulation defect distribution map containing a creeping discharge track, an internal air gap position mark and a carbonization channel density index; high-risk and potential defect areas are divided by adopting a dynamic threshold segmentation algorithm, boundary coordinates are determined, and an insulation state evaluation vector containing parameters such as a surface discharge intensity index and the like is constructed according to the boundary coordinates; and inputting the vector into a pre-trained insulation aging prediction model, and outputting a bushing residual insulation life estimated value and a defect development priority sequence. According to the method, all-around accurate monitoring and pre-judgment of the insulation state of the sleeve are achieved, and scientific support is provided for operation and maintenance decision making of the sleeve.

The invention relates to the technical field of ozone control, in particular to a creeping discharge ozone control optimization method, which comprises the following steps: acquiring temperature, humidity, voltage and ozone concentration data based on a discharge device, performing proportion conversion and optimization, extracting trend characteristic factors, screening nodes according to relevance, and sequencing to obtain a creeping discharge ozone control model; the combined effect of electricity, temperature and humidity on ozone change is analyzed, the regulation and control unit is identified, and load distribution configuration is optimized. According to the invention, normalization processing is carried out on temperature, humidity, electrical and ozone concentration data collected in a region, a data linkage mechanism with temperature and humidity change as a core is constructed, node response performance is dynamically sequenced, and periodic data change is fused, so that a set of control flow for cooperatively adjusting temperature, humidity and electrical parameters is formed; real-time adjustment of partitioned loads and dynamic optimization of energy distribution are realized, agile response and multi-region difference matching capability of ozone generation regulation are brought, and the stability under ozone yield fluctuation is improved.

The invention provides a GIS equipment partial discharge type classification method based on partial discharge time domain signals, and belongs to the field of partial discharge detection and classification. The problem that the method for judging the partial discharge type through the partial discharge mode spectrogram fails due to the fact that an externally applied voltage signal cannot be obtained in the field detection process is solved. The method comprises the following steps: respectively acquiring time-domain data sets of partial discharge light of a sample in the occurrence process of three partial discharge phenomena of corona discharge, surface discharge and suspension discharge through an experimental platform, and preprocessing the time-domain data sets; adopting a dual-threshold peak searching method to perform dual-threshold peak searching on data in the time domain data sets of the three types of preprocessed partial discharge light to obtain corresponding partial discharge peak data sets, and processing the partial discharge peak data sets into corresponding partial discharge light signal amplitude difference spectrograms; partial discharge type classification is realized through the partial discharge optical signal amplitude difference spectrogram; the method is applied to partial discharge detection of the GIS equipment.

The invention relates to the technical field of high-voltage direct-current cables, in particular to a load circulation system of a high-voltage direct-current cable system and an operation method, and the system comprises a temperature circulation module which comprises a PID temperature control unit and a conductor heating unit, and the conductor heating unit is electrically connected with the PID temperature control unit; the multi-polarity voltage loading unit is provided with a high-voltage source, and the high-voltage source can output voltage from the negative polarity to the positive polarity; and the distributed electric field sensor is embedded at the interface of the cable accessory stress cone and the insulation, and the distributed electric field sensor is in contact with the surface of the cable accessory stress cone. The method has the beneficial effects that the tangential electric field distribution at the cable accessory stress cone and the insulation interface is monitored in real time through the distributed electric field sensor, and the maximum electric field intensity is reduced in combination with the low ripple design of the multi-polarity voltage loading unit and the design of the interface conductivity matching layer, so that the electric field distortion and the surface discharge risk are effectively inhibited, and the reliability of the cable accessory is improved. And the operation stability of the high-voltage direct-current cable system under complex working conditions is improved.

The invention provides a metal particle morphological characteristic on-line diagnosis system, method and device and a medium, and relates to the field of power systems, and the system is characterized in that a core photosensitive element of an optical sensing module is a silicon photomultiplier tube array; the direct current power supply module comprises a direct current-direct current conversion circuit and is connected with the optical sensing module; the power supply phase measurement module comprises a voltage dividing capacitor and a voltage transformer, and the voltage dividing capacitor is connected with the voltage transformer; the input end of the data acquisition module is connected with the optical sensing module and the voltage transformer; the edge computing device comprises a data processing module and a particle morphological feature recognition module, the input end of the data processing module is connected with the output end of the data acquisition module, and the output end of the data processing module is connected with the input end of the particle morphological feature recognition module. The particle morphological feature recognition module is used for outputting morphological feature parameters of the metal particles causing creeping discharge.

This invention discloses a high-voltage resistivity testing device for samples. The small sample to be tested consists of an insulating cardboard with a pre-cut opening in the middle, a small sample of a pre-sized size, and polyimide tape. The small sample is attached to the opening of the insulating cardboard with the polyimide tape, allowing for volume resistivity measurement even on small samples. The insulating cardboard increases the creepage distance and reduces leakage current. The spring ensures full contact between the protective electrode and the measuring electrode and the small sample. The current flowing through the sample is exactly the current flowing on the electrode in contact with the small sample. The full contact between the protective electrode and the insulating cardboard effectively conducts surface current. This invention solves the technical problem of traditional solid insulating material resistivity testing methods, which are prone to creepage and even surface discharge under high voltage, high field strength, and small sample size conditions, affecting the accuracy of the test.

The application belongs to the technical field of transformer partial discharge identification, and discloses a transformer partial discharge intelligent identification method based on deep learning, which constructs an electroacoustic thermal three-mode acquisition architecture, captures 1ns level discharge pulses through a high-frequency current sensor, avoids sound field superposition interference by reasonably arranging an ultrasonic sensor on the oil tank wall, focuses on the easy discharge area to collect thermal signals through an infrared thermal imager, and synchronously obtains working condition parameters such as load rate and oil temperature; subsequently, the effective signal segments are retained through a multi-modal signal cross-correlation matrix, and the interference signals with large deviations are removed, then different networks are used to extract electroacoustic thermal characteristics, the coupling characteristics are calculated by combining the physical constraint layer weight and the cross-field interaction layer, and the key characteristics are retained; the feature overlap of air gap and surface discharge is effectively reduced, the influence of high-frequency interference and signal distortion is reduced, the partial discharge identification precision is improved, the samples are expanded and the fault and normal sample ratio is reasonable through time stretching and additive noise processing.

The invention provides a high-voltage power grid surface discharge automatic monitoring system based on a solar-blind ultraviolet high-speed ICMOS and a PMT, and the system comprises a to-be-monitored high-voltage power grid region, the solar-blind ultraviolet PMT, a monitoring system central control system, the solar-blind ultraviolet ICMOS, a solar-blind ultraviolet band-pass optical filter, a visible light camera, a networking image transmission system, and a real-time monitoring terminal. According to the system, a solar-blind ultraviolet high-speed ICMOS imaging device is adopted, a solar-blind ultraviolet photomultiplier (PMT) is used as a triggering condition, and real-time unmanned all-weather surface discharge monitoring of a specific power grid area is achieved through an acquisition system and a network transmission assembly. The system works in a 200-280nm solar blind ultraviolet region, and has the advantages of visual discharge process and position, wide monitoring range, strong anti-interference capability and the like.

The present invention provides a device and method for visually detecting the surface discharge ionization region, relating to the field of high-voltage discharge ionization measurement technology. The device includes a closed cavity, a ground electrode, a high-voltage electrode, a heating tape, an infrared camera, a computer, a detection impedance, an amplifier, and an oscilloscope. The heating tape is wrapped around the ground electrode and is used to heat the insulator through the ground electrode. The high-voltage electrode is used to apply voltage to the insulator and stimulate defect discharge on the insulator to ionize the insulating gas and form a gas ionization region. An observation window is provided on the side wall of the closed cavity. The infrared camera is disposed outside the closed cavity and facing the observation window. The infrared camera is used to photograph the gas ionization region and display the captured temperature distribution image on the computer. The detection impedance is used to measure the amount of local discharge and display it on the oscilloscope after amplification. The device and method can visualize the surface discharge ionization region of defective insulators and achieve online dynamic observation.

The present application relates to power equipment insulation detection technology, and particularly relates to a partial discharge ultrasonic and ultra-high frequency integrated sensor performance test method, which is used for testing the following discharge insulation defects, respectively: corona discharge defects; air gap discharge defects; surface discharge defects; free particle discharge defects; and suspended discharge defects; the test method comprises: testing the breakdown voltage under different discharge insulation defects; a partial discharge ultra-high frequency signal sensing performance test method, a partial discharge ultrasonic signal sensing performance test method, and a partial discharge ultrasonic signal and ultra-high frequency signal simultaneous sensing performance test method. By using the method, the sensing performance of the partial discharge ultrasonic and ultra-high frequency integrated sensor on the partial discharge signal of the power equipment can be conveniently and quickly tested in the laboratory and the power field.

The invention provides a method for testing the vacuum surface dielectric resistance of a chip multilayer ceramic dielectric capacitor, and the method is characterized in that the method comprises the steps: preparing a sample; the vacuum test system comprises a thermal vacuum test platform (29), a programmable power supply (1), a power distribution device (4), a power distribution power supply (8), a matrix switch (11), a discharge device (18) and an oscilloscope (21), and the power distribution device (4) comprises a change-over switch (30), a power distribution tube (31) and a slide rheostat (35); preparing a vacuum environment; a thermal vacuum test using a distribution tube; a thermal vacuum test only using the programmable power supply (1); testing the next group of vacuum environment; releasing a vacuum environment; and ending the test. According to the invention, products with low vacuum surface discharge thresholds can be identified in advance, users are warned of selection risks, and optimal design of manufacturers can be promoted, so that the inherent reliability of the products is improved, and the application requirements of thermal vacuum environments in the aerospace field are further met.

The invention discloses a method for improving the insulating capacity of a vacuum CuCr contact and the prepared CuCr contact, and belongs to the field of manufacturing of environment-friendly vacuum switch equipment. The method comprises the following steps: carrying out electron beam remelting treatment on the surface of the CuCr contact to form a remelting layer; the remelted layer is subjected to milligram energy treatment to refine grains and reduce surface roughness. According to the method, a process of combining electron beam remelting and milligram energy treatment is adopted, and the surface of the CuCr contact is subjected to composite modification to form a fine grain layer and realize mirror surface smoothness, so that the surface discharge tendency is remarkably reduced, the insulating strength is improved, and the aging time is greatly shortened.

The application provides a GIS device partial discharge type classification method based on a partial discharge time domain signal, and belongs to the partial discharge detection classification field; solves the problem that a partial discharge type judgment method based on a partial discharge mode spectrum is invalid due to the failure to obtain an externally applied voltage signal in a field detection process; the method comprises the following steps: collecting and preprocessing time domain data sets of partial discharge light of a sample in the occurrence processes of three partial discharge phenomena of corona discharge, surface discharge and floating discharge through an experimental platform; performing double-threshold peak searching on the data in the three preprocessed time domain data sets of partial discharge light respectively by using a double-threshold peak searching method, obtaining corresponding partial discharge peak value data sets, and processing the partial discharge peak value data sets into corresponding partial discharge light signal amplitude difference spectrum diagrams respectively; and realizing partial discharge type classification through the partial discharge light signal amplitude difference spectrum diagrams; and the application applies the GIS device partial discharge detection.

The present invention provides a customized full-surface discharge underfloor air distribution system which supplies, by means of the pressure differential between a floor space (10) and an indoor space (20), air from the floor space (10) toward the indoor space (20) through a plurality of supply holes (110) of a floor panel (100) provided between the floor space (10) and the indoor space (20) and a plurality of discharge holes (201) of a floor finishing material (200) provided on the floor panel (100), and which is for providing various pressure differentials and airflow rates according to the size and heat load of the indoor space (20), wherein the discharge hole (201) of the floor finishing material (200) is smaller than the supply hole (110) of the floor panel (100), the plurality of discharge holes are gathered together to form a discharge hole group (210), the floor panel (100) and the floor finishing material (200) are provided such that respective discharge hole groups (210) are positioned above respective supply holes (110), the floor panel (100) is one from among a low-airflow-rate floor panel (100a), a middle-airflow-rate floor panel (100b) and a high-airflow-rate floor panel (100c) that have different numbers of supply holes (110), the floor finishing material (200) is one from among a low-airflow-rate floor finishing material (200a) and a high-airflow-rate floor finishing material (200b) that have different arrangement structures of the discharge holes of the discharge hole groups (210), the discharge hole group (210) of the low-airflow-rate floor finishing material (200a) is a linear discharge hole group (210a) structured to have three or more discharge holes (201) arranged in a line, and the discharge hole group (210) of the high-airflow-rate floor finishing material (200b) is a polygonal discharge hole group (210b) structured to have three or more discharge holes (201) arranged in a polygonal shape, and thus the present invention can provide various pressure differentials and airflow rates according to the size and heat load of the indoor space, can adjust the airflow rate to be constant so as to be efficient, easily responds to changes in heat load, and can solve the problem of indoor air quality deterioration caused by an adhesive.

The invention relates to the technical field of voltage measurement, in particular to a sleeve flange position external insulation discharge measurement and analysis method. The method comprises the following steps: firstly, constructing an external insulation discharge measuring device at the position of a sleeve flange, secondly, reconstructing and calculating the voltage of the sleeve through the current of a sleeve end screen measured by a coil in combination with a measurement result of a penicillin bridge, and then, establishing an electric field numerical model according to an electromagnetic field theory when the sleeve end screen is partially discharged or the flange is discharged along a surface, and calculating the charge induced voltage; finally, the corona discharge condition can be analyzed according to the charge induced voltage, and the problem that the safety risk exists when the equipment voltage is directly connected or measured in a close range through a CVT method and the like is solved.

The utility model relates to the technical field of electric spark machining, and provides an electrode which comprises a base and an electrode block, the electrode block comprises a connecting portion detachably connected with the base and a working portion used for discharging, the working portion comprises an inner concave side face and a working plane making contact with a workpiece, and the electrode block and the base are arranged in a separated mode. The working part which is prone to loss can be replaced independently, the base can be used repeatedly, consumption of electrode materials is reduced, the side face perpendicular to the working plane is turned to be in an inward concave shape, the distance between the side face of the working part and the side wall of a workpiece cavity hole is increased, discharging of the side face of the working part is avoided, and the phenomenon of electric spark erosion is reduced. And the machining precision is improved.

This invention provides a non-contact device and method for assessing the surface characteristics of insulating materials, comprising: a housing, an equalizing element, and a ground electrode; the housing contains insulating oil to simulate the internal operating environment of power equipment; the equalizing element and the ground electrode are immersed in the insulating oil and are arranged vertically opposite each other, forming a surface discharge region between them; the equalizing element has a cavity containing a high-voltage lead, the lower end of which has a hanging part for suspending the insulating sample to be tested, such that the main body of the insulating sample is located on the central axis between the equalizing element and the ground electrode, and the lower end of the insulating sample is in contact with the ground electrode. This invention enables the surface discharge to develop stably along the surface of the insulating sample, effectively suppressing preferential breakdown of oil gaps, thereby simulating low surface field strength conditions under high voltage conditions, accurately and reliably reflecting the surface discharge characteristics of the insulating sample, and significantly improving the authenticity and repeatability of the test results.

The invention relates to a strain insulator string for a 1000kV extra-high voltage transformer substation suitable for a high altitude, and belongs to the technical field of insulator strings. Comprising an insulator assembly. The high-voltage side connecting fitting assembly is arranged at the lower end of the insulator assembly and is used for connecting a high-voltage wire; the grading ring is arranged at the joint of the lower end of the insulator assembly and the high-voltage side connecting fitting assembly, the grading ring is of a double-ring structure formed by coaxially arranging a large ring and a small ring, and the grading ring is located below the insulator assembly; and the shielding ring assembly is arranged below the grading ring and is connected to the high-voltage side connection fitting assembly, and the shielding ring assembly comprises two shielding rings which are symmetrically arranged on the two sides of the high-voltage side connection fitting assembly. The air gap discharge performance and the creeping discharge performance near the connection point are improved, the influence that the corona inception voltage is reduced due to elevation rise is counteracted, and therefore corona and noise are avoided.

The invention discloses a multi-mode intelligent plasma activated water device and method, and belongs to the technical field of plasma activated water preparation. The equipment comprises an air supply unit, a plasma generation unit, a gas-liquid mass transfer unit and an intelligent control unit, the plasma generation unit comprises a plurality of surface dielectric barrier discharge plates which are arranged in parallel; and the intelligent control unit is configured to be switched to operate in two working states of a low-power ozone mode and a high-power nitrogen oxide mode. In the low-power ozone mode, the discharge plates alternately supply power and automatically switch when detecting that the temperature reaches a preset threshold value; and in a high-power nitrogen oxide mode, the discharge plate synchronously and continuously works. The multi-purpose machine is achieved through mode switching, overheating is effectively prevented and the service life is prolonged through alternate power supply in a low-power mode, efficient treatment is achieved in a high-power mode, the differentiated requirements of different scenes for activated water components are met, and the multi-purpose machine has the advantages of being flexible in operation, high in stability and high in intelligent degree.

According to the insulation protection device of the antenna feed tube current inductor, the upper small corrugated section, the middle smooth section and the lower large corrugated section are arranged on the insulation sleeve, the smooth surface of the upper corrugated section and the smooth surface of the lower large corrugated section are changed into the surfaces of the wave structures, the surface flashover length of the insulation sleeve is increased, and when the discharge distances are the same, the flashover length of the insulation sleeve is increased; the surface flashover voltage is lower than the breakdown voltage of a pure air gap, air breakdown does not occur firstly between the inner walls of the wave surfaces, surface flashover occurs on the inner edges of the wave surfaces, and the surface flashover voltage of the insulation sleeve can be remarkably increased by increasing the surface discharge length of the surface of the insulation sleeve; and the lower large corrugated section can also overcome the electric field distortion and point discharge danger caused by the electric field intensity generated after the electric part at the bottom of the base is electrified. And the middle smooth section and the current inductor are arranged at intervals, so that the voltage monitoring performance is improved, the surface of the insulating sleeve is convenient to clean, and the problem of pollution discharge caused by long-time use is solved.

The invention relates to the technical field of high voltage and insulation, and discloses a ceramic composite silicone rubber composition, an insulator, a material and a preparation method thereof. The composition contains high-temperature vulcanized silicone rubber, calcined kaolin, modified glass powder, melamine polyphosphate, platinum-containing kaolin, a vulcanizing agent and a structure control agent. The ceramic composite silicone rubber material and the ceramic composite combined insulator provided by the invention have excellent ceramic performance, low water content and anti-creepage tracking capability, can operate in areas with serious creepage discharge such as re-icing, dirt and the like, and improve the operation safety and reliability of a power transmission line.

The present application relates to power battery state detection technical field, propose a kind of non-disassembly type power battery pack along surface discharge SOH detection device and method, specifically, the device of the present application includes with high-voltage power supply connection discharge plane, conductive bottom plate, battery pack fixing device, audio acquisition device and SOH analysis unit, discharge plane is oppositely arranged with conductive bottom plate, can cover multiple monomer end area, after high voltage is applied, along surface discharge is generated in the exposed end of battery pack and the surface of insulating member, and discharge sound signal is picked up by audio acquisition device.The present application does not need to disassemble battery pack, adjust discharge spacing to preset value, apply high-voltage excitation and collect sound, after pre-processing and time-frequency feature extraction, input SOH identification model, output SOH value, interval or grade.The present application does not need complete charge-discharge or disassemble by section, utilize plane electrode to realize large-area consistency excitation, collect fast, suitable for batch detection before echelon utilization, and can be detected in partition to locate abnormal monomer.

The application discloses a kind of plasma sterilization and deodorization device and control method thereof, it is related to low-temperature plasma application technical field.A kind of plasma sterilization and deodorization device, comprising: fan guide flow circulation module, fan guide flow circulation module has interface module, discharge module, decomposition module in turn sealed series along gas flow direction, discharge module includes insulating layer, the outer surface of insulating layer is provided with the discharge electrode layer formed by the winding of conductive wire, and the inside is attached with the rod-shaped conductive electrode.Installing is discharged when discharge module, insulating layer is attached with conductive electrode, so that discharge form is medium resistance discharge surface discharge, replaces traditional needle discharge form, avoids needle-shaped electrode condensate aggregation short-circuit problem, by adjusting the winding length of conductive wire cooperates voltage regulation, from source control the ozone amount generated by discharge, realize the controllable generation of low concentration of ozone, after further reducing ozone concentration after the catalyst decomposition of decomposition module, improve safety.

The present application relates to the technical field of ozone control, in particular to a surface discharge ozone control optimization method, comprising the following steps: collecting temperature and humidity, voltage and ozone concentration data based on a discharge device, performing proportional transformation and optimization, extracting trend characteristic factors, screening nodes and sorting according to relevance, analyzing the combined effect of electricity and temperature and humidity on ozone change, identifying a regulation and control unit, and optimizing load distribution configuration. In the present application, the temperature and humidity, electrical and ozone concentration data collected in the region are normalized, a data linkage mechanism with temperature and humidity change as the core is constructed, node response performance is dynamically sorted, periodic data changes are fused, a control process for coordinated adjustment of temperature and humidity and electrical parameters is formed, real-time adjustment of partition load and dynamic optimization of energy distribution are realized, agile response of ozone generation regulation and control and multi-region difference matching capability are brought, and the stability under ozone yield fluctuation is improved.

The application discloses a sintering aid-free silicon carbide ceramic room-temperature ultrafast field-induced sintering method and device. The method comprises the following steps: (1) placing a ceramic green body in a sealed vacuum box, and arranging electrodes at both ends of the ceramic green body and connecting the electrodes to an alternating current power supply; in the sealed vacuum box, the bottom of the ceramic green body is padded with an alumina plate, and an alumina plate is arranged above the ceramic green body; the alumina plates above and below are parallel and are supported by alumina blocks arranged at both sides of the ceramic green body; (2) adjusting the atmosphere in the sealed vacuum box to an inert atmosphere with a pressure of less than 1 atm; (3) turning on the power supply, increasing the voltage to a value at which surface discharge of the ceramic green body occurs, so that the electrical conductivity of the ceramic green body changes and an electric current channel is generated, continuously increasing the voltage to a predetermined value of the current density, then turning off the power supply, and obtaining the silicon carbide ceramic.

The invention discloses a lubricating material electric corrosion test and quantitative analyzer and an analysis method thereof, and relates to the technical field of electric corrosion experiments.The device comprises a needle point electrode, a lubricating oil pool, a displacement driving mechanism and a circuit module, and the needle point of the needle point electrode vertically faces a metal sample. The geometric characteristic that the curvature radius of the tip of the needle tip electrode is extremely small is utilized, the discharge phenomenon is highly localized in a micro area below the needle tip, accurate positioning of the discharge position is achieved, and the problem of random distribution of discharge points on the surface of a ball electrode is solved; the high-precision displacement driving mechanism is used for precisely regulating and maintaining the micron-order gap between the needle point electrode and the metal sample, and the circuit module is combined to apply the pulse voltage with precise and controllable parameters, so that the consistency of the discharge energy and the action range of each time is jointly ensured; therefore, a single electric corrosion pit with determined position and highly repeated geometrical morphology can be prepared on the surface of the metal sample, and the core problems of strong discharge randomness and low morphology repeatability are effectively solved.

This invention relates to the field of ultra-high voltage (UHV) power transmission equipment technology, specifically to an UHV dry-type terminal structure and its design method. The structure includes a conductor connection area, a composite sleeve area, a tailpipe stress relief area, and a lattice coordination area. The conductor connection area includes an upper component and a conductor connecting rod. The composite sleeve area includes a composite sleeve assembly. The tailpipe stress relief area includes a tailpipe and supporting insulators arranged around the tailpipe. The upper component, composite sleeve assembly, and tailpipe are connected sequentially from top to bottom. The conductor connecting rod passes through the upper component, composite sleeve assembly, and tailpipe sequentially along the axial direction. The lattice coordination area includes a lattice component for enhanced heat dissipation, which is fitted around the bottom periphery of the composite sleeve assembly and / or the tailpipe. This invention enhances heat dissipation by adding a lattice component to the bottom of the composite sleeve assembly and / or the tailpipe. This not only makes the heat dissipation path more efficient and greatly increases the heat dissipation area, thereby improving heat dissipation efficiency and allowing heat to dissipate rapidly, but also effectively eliminates the problem of uneven electric field caused by differences in shell curvature, reducing the risk of electro-erosion and surface discharge, and ensuring electrical safety during long-term equipment operation.

An electrostatic chuck assembly is provided that, while equipped with a gas passage plug, is less prone to surface discharge at the interface between the gas passage plug and the ceramic plate. This electrostatic chuck assembly comprises a ceramic plate having an upper surface on which a wafer is placed and a lower surface opposite the upper surface, and incorporating internal electrodes which are ESC electrodes and / or RF electrodes; a cooling plate attached to the lower surface of the ceramic plate; a plug placement hole penetrating the ceramic plate from the lower surface to the upper surface; a gas passage plug press-fitted into the plug placement hole and configured to allow gas to pass through its interior; and a gas introduction passage provided in the cooling plate and communicating with the plug placement hole. At least one side surface of the gas passage plug and the plug placement hole is made of a low SEEC material having a secondary electron emission coefficient (SEEC) of 5.0 or less.

This invention provides an interlayer insulation-reinforced magnetic ring and its manufacturing method. The magnetic ring includes a magnetic core wound from an amorphous or nanocrystalline material. The amorphous or nanocrystalline material is composed of multiple layers of tape, with the edges of adjacent layers staggered axially, thus forming serrated or stepped grooves on the end face of the wound magnetic core. The grooves are filled with insulating adhesive. One or both sides of the tape are coated with a micron-level insulating layer to separate adjacent layers. This invention replaces the traditional PI film by coating the tape surface with an insulating layer, eliminating the thickness occupation of the PI film, improving the duty cycle of the magnetic ring, and achieving high winding efficiency and low manufacturing cost. Furthermore, the serrated or stepped grooves formed on the end face of the magnetic core increase the creepage distance, blocking and disrupting the surface discharge path, effectively suppressing the end face discharge phenomenon. Combined with the insulating adhesive filling, mechanical protection is formed, preventing end face damage.