The invention provides a flexible resistance-type MEMS (micro-electro-mechanical systems) temperature sensor array and a preparation method thereof. The sensor array comprises a fixed substrate, a flexible substrate film, a temperature sensitive film, sensor electrodes, a flexible covering layer and electrical conductors. A preparation method for the sensor array comprises the following steps of forming a metal sacrificial layer on the upper surface of a fixed substrate material in a sputtering or thermal evaporation manner, performing spin coating on the sacrificial layer with PI (polyimide), preparing the temperature sensitive film, preparing sensor electrode arrays, preparing the covering layer PI film, imaging the covering layer PI film, peeling off flexible sensors and welding the electrical conductors. The sensor array provided by the invention has biocompatibility, stronger mechanical property, high-temperature resistance, high temperature impact resistance and higher ultrasonic propagation speed. Sizes and shapes of the sensitive film and sensor electrode points can be controlled by exposure, and the temperature field distribution of a skin surface can be measured in real time. The preparation method for the sensor array is simple and reliable and low in cost, and can be realized by adopting a micromachining process.