The invention discloses a non-equal-
diameter cavity
membrane structure back cavity emission type piezoelectric miniature ultrasonic
transducer and a manufacturing method, and belongs to the field of miniature ultrasonic transducers, the non-equal-
diameter cavity
membrane structure back cavity emission type piezoelectric miniature ultrasonic
transducer comprises a substrate, the substrate is provided with a back cavity and a vibrating diaphragm with a single end shielding the back cavity, an
air cavity is arranged between the substrate and the vibrating diaphragm, and the
air cavity is communicated with the back cavity; the radial profile of the
air cavity is larger than that of the back cavity, and the back cavity is within the
axial projection range of the air cavity. According to the invention, better comprehensive balance can be obtained between sensitivity and
sound pressure, the edge displacement of a high-order mode is suppressed, the vibration boundary stability is improved, the
sound energy coupling efficiency of a main mode is improved, the unimodal characteristic and the
signal purity of a transmitted waveform are improved, the effective sound
radiation area of a back cavity and the rigidity of the
air spring can be flexibly adjusted, and the reliability is high. And the far-field
sound pressure can be improved, the
ultrasonic radiation capability of the
transducer can be enhanced, the realizable working bandwidth can be expanded, the process tolerance can be improved, and the device is insensitive to the deviation of the back
etching diameter, so that the consistency and reliability of the device are improved.