The invention discloses a defect detection device and method for
nitride ceramic substrates, and relates to the technical field of detection devices.The defect detection device comprises a
workbench, three substrate placement assemblies are arranged on the upper end face of the
workbench, a transfer plate is arranged on the
workbench, a mounting plate is movably arranged on the workbench, and an air cylinder is fixed to one side of the mounting plate; a first connecting plate is fixed to the
tail end of the telescopic end of the air cylinder, a first feeding adsorption
assembly and a first discharging adsorption
assembly are symmetrically arranged on the lower end face of the first connecting plate, two detection assemblies are arranged on the workbench, a multi-axis mechanical arm is further arranged on the workbench, and a steering motor is fixed to the
tail end of the multi-axis mechanical arm. A carrying electric push rod is fixedly arranged at the working end of the steering motor, a second connecting plate is fixed to the
tail end of the telescopic end of the carrying electric push rod, and a second feeding adsorption
assembly and a second discharging adsorption assembly are symmetrically arranged on the lower end face of the second connecting plate. When the device is used, feeding and discharging of the
ceramic substrate body are facilitated, and therefore the detection efficiency of the detection method is high.