The invention discloses an epitaxial structure of a strain compensation type VCSEL (
Vertical Cavity Surface Emitting Laser) based on AsH3 flow regulation and control and a preparation method thereof. The epitaxial structure comprises a substrate, and a buffer layer, an N-type DBR (
Distributed Bragg Reflector) layer, an
active layer, a P-type oxidation limiting layer, a P-type DBR layer and a surface highly-doped GaAs layer are sequentially arranged on the substrate; the N-type DBR layer comprises an N-type high-Al component layer, an Al component
transition layer and a low-Al component layer, the P-type DBR layer comprises a P-type high-Al component layer, an Al component
transition layer and a low-Al component layer, the
active layer comprises a
quantum well layer and a
quantum barrier layer, the
quantum well layer and the quantum
barrier layer periodically grow to form the
active layer, the
quantum well layer is a
quantum well layer with compressive strain, and the quantum
barrier layer is a
quantum well layer with compressive strain. The quantum barrier layer is a
tensile strain layer for realizing strain compensation, and the quantum well layer and the quantum barrier layer are alternately arranged to form a periodic structure; the As / P proportion can be accurately controlled to achieve dynamic strain compensation, the As component of the barrier layer is progressively increased to form gradient
tensile strain, well layer compression strain is offset, atom mutual
diffusion is restrained, P atoms are restrained from diffusing to the well layer,
threshold current is reduced,
slope efficiency is improved, and characteristic temperature is improved.