According to the
trench gate silicon carbide MOSFET device and the preparation method thereof, a source
electrode step trench and a P-type shielding layer are introduced to form a follow current nMOS together with a CSL region, a P-type base region and an N-type
ohmic contact region, and form a self-bias pMOS together with the CSL region, the P-type base region and a P-type
ohmic contact region. During reverse conduction, the source trench freewheeling nMOS is conducted, bipolar conduction of the body
diode is inhibited, and the long-term working reliability of the device is improved; in a short-circuit state, the pMOS is started, the P-type shielding layer is grounded, the
depletion region is rapidly expanded, pinch-off is formed with the
depletion region of the P-type shielding region at the bottom of the
trench gate, a current path is limited,
saturation current is reduced, and the short-circuit capability of the device is improved; and in a blocking state, the pMOS is opened, and the P-type shielding layer is grounded, so that the
electric field intensity of the
oxide layer is effectively reduced. According to the invention, the forward conduction capability and low switching loss of the device are ensured, the
short circuit and third quadrant capability of the device is improved, and the transient robustness of the device is obviously improved.