The invention discloses a micromechanical
silicon-based clamped beam-based
phase detector and a detection method. The
phase detector comprises a
silicon substrate (1), a source (2), a drain (3), a first clamped beam-anchoring area (61), a second clamped beam-anchoring area (62), a grid (5) and a clamped beam (7), wherein the source (2) and the drain (3) are grown on the surface of the
silicon substrate (1) and used for outputting
saturation current, the source (2) is arranged opposite from the drain (3), and the clamped beam (7) is arranged upon the grid (5) and is opposite to the grid (5). The detection method includes the following steps: when a direct-current offset is loaded on a first pull-down
electrode (81) and a second pull-down
electrode (82) and the clamped beam (7) is pulled down and is in contact with the grid (5), two
microwave signals which have the same frequency and certain
phase difference are simultaneously loaded on the grid (5); the
saturation current of the drain (3) is processed, so that high-frequency signals are filtered, and therefore the current
signal of
phase difference information is obtained. The structure of the
phase detector is simple, and measurement is easy.