Frequency detector based on micro-mechanical gallium arsenide-based clamped beam and detection method

Abstract

The invention discloses a frequency detector based on a micro-mechanical gallium arsenide-based clamped beam and a detection method. The frequency detector comprises a power divider (PD), a 90-DEG phase shifter (PS), a low-pass filter (F) and a gallium arsenide metal-oxide-semiconductor field effect transistor, wherein the power divider is used for receiving a microwave signal to be detected, dividing the microwave signal to be detected into two branch signals with the same amplitude and phase, namely a first path of microwave signal and a second path of microwave signal, and respectively outputting the two paths of microwave signal to the gallium arsenide metal-oxide-semiconductor field effect transistor and the 90-DEG phase shifter. The method comprises the following steps of: when direct current offset is loaded to a first pull-down electrode (81) and a second pull-down electrode (82), and a cantilever beam (6) is pulled down and contacted with a gate (4), simultaneously loading the two paths of microwave signals to the gate (4); and through a capacitor and a filter, detecting the size of the saturation current of a source (2) and a drain (3), so frequency measurement is realized. The invention has the advantage of simple structure.

Description

technical field [0001] The invention proposes a frequency detector and a preparation method based on a micromechanical gallium arsenide-based solid support beam, belonging to the technical field of micro-electromechanical systems (MEMS). Background technique [0002] Microwave frequency is a very important parameter of microwave. Microwave signal frequency detection system is widely used in radar, wireless communication and other aspects. The existing microwave frequency detection technology is mainly based on the principles of heterodyne method, counting method and resonance method. They have the advantages of high precision and wide frequency band. However, their biggest disadvantage is the need for more sophisticated measuring instruments. With the development of science and technology, the modern personal communication system requires the microwave frequency detector to have simple structure, small volume and low DC power consumption. In recent years, with the rapid de...

AI Technical Summary

Problems solved by technology

The existing microwave frequency detection technology is mainly based on the principles of heterodyne method, counting method and resonance method. They have the advantages of high precision and wide frequency band. However, their biggest disadvantage is the need for more sophisticated measuring instruments.

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