The method for preparing
ohmic contact on intrinsic
diamond surface by using iron
catalysis solves the problems of large
energy loss of
semiconductor device at
metal-
semiconductor contact and the like.The method for preparing
ohmic contact comprises the following steps: uniformly gluing treatment on the cleaned
diamond, then photoetching treatment, then magnetron
sputtering deposition of Fe layer on the photoetched
diamond surface, then cleaning and degumming, then placing the diamond with Fe plated on the surface into a
quartz tube for sealing, then filling the
quartz tube with protective gas, then transferring to a
tube furnace, and then annealing treatment at 800-950 DEG C, so as to prepare
ohmic contact on the intrinsic diamond surface.The minimum contact resistivity is obtained by controlling the annealing temperature and time, the
conductivity is greatly improved, the contact binding performance is good and the device can work stably for a long time, the lead difficulty is reduced due to the existence of Fe, the mechanically stable contact is easily formed on the surface, the temperature of surface graphitization is reduced, and the preparation process is simplified.