Micromechanical silicon-based clamped beam-based phase detector and detection method

Abstract

The invention discloses a micromechanical silicon-based clamped beam-based phase detector and a detection method. The phase detector comprises a silicon substrate (1), a source (2), a drain (3), a first clamped beam-anchoring area (61), a second clamped beam-anchoring area (62), a grid (5) and a clamped beam (7), wherein the source (2) and the drain (3) are grown on the surface of the silicon substrate (1) and used for outputting saturation current, the source (2) is arranged opposite from the drain (3), and the clamped beam (7) is arranged upon the grid (5) and is opposite to the grid (5). The detection method includes the following steps: when a direct-current offset is loaded on a first pull-down electrode (81) and a second pull-down electrode (82) and the clamped beam (7) is pulled down and is in contact with the grid (5), two microwave signals which have the same frequency and certain phase difference are simultaneously loaded on the grid (5); the saturation current of the drain (3) is processed, so that high-frequency signals are filtered, and therefore the current signal of phase difference information is obtained. The structure of the phase detector is simple, and measurement is easy.

Description

technical field [0001] The invention proposes a phase detector based on micromechanical silicon-based solid-supported beams, which belongs to the technical field of microelectromechanical systems (MEMS). Background technique [0002] Microwave signal phase detection systems are widely used in phase modulators, phase shift keying (PSK), microwave positioning, testing of antenna phase patterns, and near-field diagnosis. The design of the microwave signal phase detection system is aimed at detecting the phase difference between the same frequency signals. The existing phase detection methods are as follows: use diode detection, use multiplier structure and use vector algorithm to realize phase detection, the above The disadvantage of the methods is that they all require a relatively complex structure. With the development of microelectronics technology, modern personal communication systems and radar systems require microwave phase detectors with simple structure, small size a...

AI Technical Summary

Problems solved by technology

The design of the microwave signal phase detection system is aimed at detecting the phase difference between the same frequency signals. The existing phase detection methods are as follow...

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