The invention discloses a writing method of a ferroelectric
field effect transistor array, and belongs to the technical field of micro-nano
electronics. According to the method, a self-compensation write-in method is provided for a multi-stage storage ferroelectric
field effect transistor array of a 1T structure, a
pulse sequence of a self-compensation waveform is adopted for write-in and corresponds to different storage states in multi-stage storage, positive pulse write-in is adopted when the
pulse sequence is higher than an
intermediate storage state, and negative pulse write-in is adopted when the
pulse sequence is lower than the
intermediate storage state. The method comprises the following steps of: writing a FeFET
memory cell, performing read
verification on a written state of the FeFET
memory cell, starting an error correction program for correction when a write error is found so as to reach a target state, and starting a durability
recovery program to recover the performance of the FeFET memory device if the error correction program fails; the method simultaneously solves the reliability problems of large fluctuation between devices and between cycles, limited durability and serious write-in
crosstalk, has the advantages of simple process, low hardware overhead and the like, is compatible with the current advanced node
CMOS technology, and is easy to implement.