972 results about "Ozone concentration" patented technology

A method for fabricating a silicon oxide and silicon glass layers at low temperature using soft power-optimized Plasma-Activated CVD with a TEOS-ozone-oxygen reaction gas mixture (TEOS O3/O2 PACVD) is described. It combines advantages of both low temperature Plasma-Enhanced Chemical Vapor Deposition (PECVD) and TEOS-ozone Sub-Atmospheric Chemical Vapor Deposition (SACVD) and yields a coating of silicon oxide with stable and high deposition rate, no surface sensitivity, good film properties, conformal step coverage and good gap-fill. Key features of the invention's O3/O2 PACVD process are: a plasma is maintain throughout the entire deposition step in a parallel plate type reactor chamber, the precise RF plasma density, ozone concentration in oxygen and the deposition temperature. These features provide the reaction conditions for the proper O3/O2 reaction mechanism that deposits a conformal silicon oxide layer. The process has significant implication for semiconductor device manufacturing involving the deposition of a dielectric over a conducting non-planar surface.

An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.

A photochemical sensing system enables the measurement of nitrogen oxides (nitrogen dioxide and nitric oxide) by photolyzing nitrogen dioxide to form oxygen atoms which combine with oxygen molecules to form ozone. Ozone reacts with nitric oxide to for nitrogen dioxide-decreasing ozone. Changes in ozone concentration are measured as a surrogate for the nitrogen dioxide and nitric oxide. Any species which photolyzes to yield oxygen atoms may be measured by this technique. Additional specificity for nitrogen oxides is conferred by allowing the nitric oxide to react with the ozone to recreate the nitrogen dioxide. By periodically photolyzing the nitrogen dioxide (to form ozone), and then allowing the resulting nitric oxide to react with the ozone (thereby reducing ozone), a pulsed signal is obtained whose amplitude is proportional to the total amount of nitrogen dioxide and nitric oxide present. Medical applications include measuring nitric oxide concentrations in expired air samples.

The present invention pertains to methods utilizing ozone treatment for abating allergens, pathogens, odors, and volatile organic compounds. The methods can be employed to abate pollutants, bacteria, viruses, mold, dander, funguses, dust mites, animal and smoke odors, and the like. The methods employ specific combinations of ozone concentration, hydrogen peroxide concentration, temperature, and humidity delivered over a specified period of time to achieve satisfactory abatement of the allergen, pathogen, odor, or volatile organic compound.

The invention discloses a fresh-keeping method for fruits and vegetables, which comprises the following steps that: (1) selecting fruits and vegetables and encasing in boxes; (2) prestorage: disinfecting the prestorage room and placing in fruit boxes full of fruits and vegetables; when the prestorage begins, turning on an ultrasonic humidifiens and an ozone generator to control the relative humidity of the prestorage room less than 80 percent, the ozone concentration of the prestorage room between 5 and 20mg/m<3>; (3) storing in the storeroom: disinfecting the storeroom and placing in the prestored fruit boxes and at the same time turning on the ultrasonic humidifiens and the ozone generator to control the relative humidity of the storeroom between 80 percent and 98 percent, the ozone concentration of the storeroom between 5 and 20mg/m<3>. The invention combines ultrasonic humidifying with ozone sterilization to carry out humidification and sterilization and antisepsis to the fruits and vegetables, etc., stored in the storeroom; moreover, synchronically preventing fresh fruits and vegetables from wilting and decay, which greatly reduces the decay rate of raw material and keeps the raw material in good state, thus acquiring a longer preservation period.

By effectively inhibiting ozone escape from ozonized water, a livestock sterilizing method which does not have the possibility of having an adverse effect on man and livestock is provided. Sterilizing of livestock is performed by including an ozonized water producing step of producing ozonized water with a particle size R of a contained ozone bubble satisfying 0<R<50 nm and an ozone concentration of 3 ppm to 20 ppm by a gas-liquid mixing method, and a step of sterilizing livestock by using the ozonized water produced in the ozonized water producing step. Since the particle size R is 0<R<50 nm, the ozone bubbles hardly receive buoyancy of the ozonized water. Therefore, the ozone bubbles do not rise to the water level, but stay in the ozonized water. As a result, ozone escape is effectively inhibited.

The invention discloses a medical air purifying sterilizer and an operation mode thereof and belongs to the technical field of air exchange devices. The medical air purifying sterilizer comprises a shell, an outdoor new air inlet, a new air inwards-leading fan, a full-heat exchanger core, an indoor direction-changeable vent, an indoor dirt air inlet, a dirt air outwards-leading fan and an outdoor dirt air outlet and further comprises a humidifier, an air purifying and sterilizing system, a centrifugal fan and an indoor sterilizing and purifying outlet. The shell is a cabinet type shell, and the whole cabinet type shell is of an air-pipe-free vertical cabinet floor stand structure. The air purifying and sterilizing system comprises a low-efficiency filter, a medium-efficiency filter, a high-voltage electrostatic dust collector, an activated carbon absorber and a photocatalyst catalyzing and sterilizing sterilizer. A new air inwards-introduced and energy recovery channel, a dirt air discharging and energy recovery channel, an air purifying and sterilizing channel and a new air inwards-leading, energy recovery and air purifying and sterilizing channel can be formed. The medical air purifying sterilizer has the advantages that bacteria, viruses, formaldehyde, benzene and ozone concentration do not exceed standards, pollution of PM2.5 particles do not exist, the sterilizing cost is low, and energy can be recovered.

A method of sterilizing a closed environment is provided in which an disinfection apparatus is placed into the closed environment; it then generates ozone to a predetermined ozone concentration, following which the humidity of the closed environment is rapidly increased. A catalytic converter then reduces the ozone concentration to safe levels. When the ozone concentration is reduced to a predetermined safe level, the disinfection apparatus signals.

The present invention provides an apparatus 1 for the treatment of air comprising a low power corona discharge ozone generator 5,6 inside a chamber 9 having an inlet 2 and an outlet 7, and at least one air flow impeller 3 for inducing a flow of air through the chamber 9. The ozone generator 5,6 is formed and arranged for generating a restricted concentration of ozone, within an inactivating zone 10 contained within the chamber 9, through which the air flow is passed. The restricted concentration is sufficient to inactivate airborne pollutant material entrained in the air flow, yet decays sufficiently outside the inactivating zone so that the concentration of ozone in the cleaned air expelled from the apparatus 1 is at a physiologically acceptable level without the use of an ozone decomposition catalyzer.

A system delivers water with at least a threshold concentration of ozone to an exit point. Ozone is injected into water flowing into a tank. The ozone concentration in the tank is monitored by a first sensor. Once the water in the tank has at least the threshold concentration of ozone, the water may be pumped to an exit point. A second sensor in proximity to the exit point monitors the ozone concentration of the treated water in proximity to the exit point. If the water in proximity to the exit point has at least the threshold concentration of ozone, the system allows a portion of the treated water to exit the system to a point of use. The second sensor in proximity to the exit point assures the treated water that is actually delivered to the exit point has at least the threshold value of ozone concentration.

A discharge cell for use in an ozone generator is provided which can suppress a time-related reduction in ozone concentration without adding a catalytic gas such as nitrogen gas to oxygen gas as a raw material gas. The discharge cell includes a pair of electrodes disposed in an opposed spaced relation with a discharge space therebetween, and a dielectric layer of a three-layer structure consisting of three ceramic dielectric layers successively stacked on at least one of the electrodes, wherein a first dielectric layer of the dielectric layer contacting the one electrode contains no titanium dioxide, wherein a second dielectric layer of the dielectric layer exposed to the discharge space contains titanium dioxide in a metal element ratio of not lower than 10 wt %.

A method of sterilizing a closed environment is provided in which a disinfection apparatus is placed into the closed environment; it then generates ozone to a predetermined ozone concentration, following which the humidity of the closed environment is rapidly increased. A catalytic converter then reduces the ozone concentration to safe levels. When the ozone concentration is reduced to a predetermined safe level, the disinfection apparatus signals.

A method of sanitizing a passenger cabin includes excluding people from the passenger cabin and substantially sealing the passenger cabin such that air inside the passenger cabin is prevented from exiting the passenger cabin. An ozone enriched atmosphere is created inside the passenger cabin by generating ozone and directing the ozone into the passenger cabin to increase an ozone concentration of the atmosphere inside the passenger cabin to at least a minimum concentration. The ozone enriched atmosphere is circulated through the passenger cabin and air circulation system thereof for a sanitation period calculated to be sufficient for sanitation. The ozone concentration of the atmosphere inside the passenger cabin is then reduced to a level safe for human occupation.

A method and apparatus for disinfecting the interior of pipelines and conduits, particularly water mains. Ozone is utilized as the disinfectant vehicle to neutralize microbial contamination of the conduit. An ozone generation system includes a venturi injector for introducing ozone into pressurized water to provide a treating solution that is introduced into and that flows along a predetermined length of the conduit to be treated. The ozone concentration is regulated to maintain an ozone residual at the conduit outlet of about 0.2 mg/L to about 0.3 mg/L for a time sufficient to assure the desired level of disinfection of the conduit interior. Carbon dioxide can be added to improve the ozone residual stability and the effectiveness of disinfection. The apparatus is transportable and can be carried by a transportation vehicle, such as a truck or trailer, for on-site disinfection of pipelines at varying sites.

A method of sterilizing a closed environment is provided in which an ozone generator is placed into the closed environment; it then generates ozone to a predetermined ozone concentration and increases the humidity of the closed environment. The ozone concentration is maintained at the predetermined ozone concentration for a predetermined period of time, and after the period of time has expired, the ozone is depleted. When the ozone concentration is reduced to a predetermined safe level, the ozone generator signals.

An instrument for determining ozone concentration in a gaseous fluid includes a chamber, at least one filter adapted to remove particulates from gaseous fluid entering the chamber, and at least one filter adapted to remove ozone from gaseous fluid entering the chamber. At least one element is arranged to draw gaseous fluid into the chamber. An ultra-violet source located at one end of the chamber and configured to generate a substantially collimated beam of radiation having a wave length in the range 240 to 290 nm, and an ultra-violet sensor is arranged at the other end of the chamber and configured to receive the ultra-violet light emitted by the said ultra-violet source.

The invention discloses a room-temperature efficient ozone decomposition catalyst and a preparation method thereof. The catalyst is prepared by the following steps of: preparing manganese nitrate, cerous nitrate and silver nitrate into a solution according to a mol ratio of 1: (0.3-0.5): (0.01-0.1); taking potassium carbonate and/or potassium bicarbonate as a precipitant, taking potassium chlorate as an oxidant, and precipitating to prepare active components; and then, adding N,N-diethyl ethylamine and crystallizing in a reaction kettle at a temperature in a range of 180-220 DEG C; after the crystallization, carrying out filter pressing to obtain sediments with the water content of 70-80 wt%; and then, adding a binding agent and a pore-forming agent and uniformly agitating; conveying the mixture into a banded extruder to be extruded and molded into cylindrical grains; drying the cylindrical grains at a temperature in a range of 80-100 DEG C and adding the dried cylindrical grains intoa muffle furnace to be roasted at a temperature in a range of 450-550 DEG C. The ozone decomposition catalyst provided by the invention has the advantages of capabilities of completely purifying thousands of ppm of ozone at the room temperature and resisting the violent fluctuation of the ozone concentration, good water vapor resistance and long service life.

A method of etching a semiconductor wafer is provided. The method comprises the steps of: jetting a mixed gas including hydrogen fluoride and ozone onto a surface of a semiconductor wafer; monitoring the surface of the semiconductor wafer; analyzing the surface of the semiconductor wafer; and adjusting at least one of the hydrogen fluoride concentration and the ozone concentration in the mixed gas based on a result of the analysis.

The invention discloses an air-conditioner air purification system and a control method of the air-conditioner air purification system. The air-conditioner air purification system comprises an air purification module and is provided with an anion concentration detection module and an ozone concentration detection module. A detection signal is output to a single-chip microcomputer control unit by the air-conditioner air purification system and a voltage regulating signal is output by the single-chip microcomputer control unit to a voltage regulating module connected with the air purification module. According to the air-conditioner air purification system and the control method of the air-conditioner air purification system, the anion concentration detection module and the ozone concentration detection module are arranged so that corresponding concentration in a room can be detected in real time and compared with a set target value, the voltage regulating module can be controlled by a controller according to a comparison result, a supply voltage of the air purification module can be regulated, closed-loop control can be achieved, accurate control over the anion concentration and the ozone concentration in the room can be achieved, and therefore the anion concentration and the ozone concentration in the room are respectively controlled to be at a high comfort level beneficial for physical and psychological health of people in a closed-loop mode, and the purposes that air in the room is purified and dust is effectively removed are achieved.

A hand sanitizer having first and second compartments in which the first compartment includes an access permitting user's hands and forearms to be inserted and an ozone generator for sanitizing the hands. The second compartment houses an ultraviolet source for converting ozone present in said second compartment into molecular oxygen and includes also an access permitting user's hands and forearms to be inserted. The ozone concentration in the first compartment is maintained at a predetermined level.

A method of making an aqueous ozone solution for an industrial cleaning system is described. The method includes providing a reaction vessel for entraining ozone gas in an aqueous solution. The reaction vessel includes a conical-shaped surface having a two or more edges or ridges. The conical-shaped surface defines an interior, and two or more edges or ridges are in contact with the interior. The reaction vessel is in fluidic communication with a supply of water. The reaction vessel is in fluidic communication with a supply of a first aqueous ozone solution. The first aqueous ozone solution is directed to the conical-shaped surface. Water is directed to the conical-shaped surface, and the water and the first aqueous ozone solution are mixed to form a second aqueous ozone solution.

Compositions for aqueous ozone solutions are also described. The aqueous ozone solution contains approximately 1 part by volume water mixed with approximately 4 parts by volume to approximately 9 parts by volume of a first aqueous ozone solution to form a second aqueous ozone solution that has an oxidation reaction potential of up to approximately 2.6. The second aqueous ozone solution has an ozone concentration of up to approximately 20 ppm.