The invention relates to a surface deformation inversion method based on a time sequence InSAR technology. The surface deformation inversion method comprises the following steps of geocoding and imageregistration, differential interference pair generation, PS point selection, space-time unwrapping and error separation. Specifically, on the basis of an image registration mode, coarse registrationand fine registration are adopted, and the registration precision requirement in a TOPS imaging mode is guaranteed; for an atmospheric delay error, the layered atmosphere and the floating atmosphere are respectively processed by using different algorithms, so that influence of the atmospheric error is weakened to the greatest extent, and the deformation inversion precision is improved; and if GNSSdata is provided, atmospheric delay can be corrected by utilizing the observation data, and meanwhile, joint adjustment is carried out by taking the observation data as a constraint condition in an InSAR observation equation, so that the precision and reliability of a deformation result are ensured, and all-weather, large-area, continuous and high-spatial-resolution surface deformation monitoringis realized.