All-solid-state ultraviolet laser for ozone detection and simultaneous generation of 310 nm and 355 nm high-energy laser

Abstract

The invention discloses an all-solid-state ultraviolet laser capable of simultaneously generating 310 nm and 355 nm high-energy laser, and belongs to the technical field of lasers. Comprising a fundamental frequency laser, a frequency doubling module of the fundamental frequency laser, a sum frequency module in an optical parametric oscillation cavity and a sum frequency module, output energy of a 1064nm pulse laser is fully utilized, nonlinear crystal frequency conversion technologies such as frequency doubling, optical parametric oscillation and sum frequency are adopted, and 310nm and 355nm ultraviolet pulse laser output is achieved. The device has the advantages of multiple wavelengths, high energy, high beam quality, compact structure and the like, the ultraviolet band is located in an ozone absorption band, and the device is particularly suitable for detection of ozone concentration of troposphere and stratosphere atmosphere by a satellite-borne laser radar.

Description

Technical Field

[0001] The invention belongs to the technical field of lasers, and mainly relates to a method for developing an all-solid-state ultraviolet laser capable of simultaneously generating 310nm and 355nm high-energy lasers. Background Art

[0002] Ozone is a light blue gas with a special odor. It was discovered by German scientist CF Schonbein in the 1840s. It has active chemical properties and can participate in a variety of atmospheric photochemical reactions. Atmospheric ozone usually exists in the stratosphere and troposphere. About 90% of ozone is distributed in the stratosphere at an altitude of 10-50km, and 10% is distributed in the troposphere below 10km. Ozone plays an important role in human health, plant growth, climate regulation, and maintaining the radiation balance of the earth. As a trace gas in the atmosphere, ozone can absorb most of the short-wave ultraviolet rays in the sun's rays, protecting the creatures on the earth from damage by ultraviolet radiation. It plays an important role in the regional and global atmosphere and climate system.

[0003] Differential absorption lidar (DIAL) is an effective active remote sensing method for detecting the vertical distribution of atmospheric ozone. Its advantages are mainly high spatial resolution and temporal resolution, real-time vertical observation and continuous long-term observation. Based on what kind of emission light source technology, obtaining lasers of different wavelengths to detect different or the same polluted gases is one of the core issues in the research of differential absorption lidar technology. In order to detect stratospheric ozone, it is important to develop ultraviolet band light sources in combination with ozone absorption spectra. The present invention designs and develops an all-solid-state ultraviolet laser that simultaneously generates 310nm and 355nm high-energy lasers in response to the needs of lidar ozone detection.

[0004] There are mainly the following light source technologies for the development of ultraviolet differential absorption lidar emission light sources. XeCl excimer lasers emit 308nm lasers, but excimer lasers are inefficient, expensive, and contain toxic gases. Titanium sapphire lasers are tunable lasers with a wide tuning range. They can be tuned in the range of 700-1050nm. Combined with nonlinear frequency conversion technology, the band can be extended to the ultraviolet. Raman lasers use stimulated Raman scattering technology to convert the wavelength of lasers, which can extend the wavelength of lasers. These include gas Raman technology, liquid Raman technology, and solid Raman technology. Gas and liquid Raman technologies have the disadvantages of large equipment size, low conversion efficiency, and poor beam quality. Therefore, solid Raman technology has great development potential in wavelength conversion. Patent CN219715757U introduces a method of frequency up-conversion based on stimulated Raman scattering, and then realizing 280nm and 295nm ultraviolet dual-wavelength laser output through frequency doubling technology. However, stimulated Raman scattering is an inelastic scattering. During the scattering process, part of the energy will be stored in the Raman crystal in the form of heat, and the absorption of pump light by the Raman crystal will also generate heat. The generation of this heat will cause the self-focusing effect and thermally induced birefringence effect of the Raman crystal, and ultimately cause the power of the output Raman laser to be unstable and inefficient. Optical parametric oscillation technology is a mature nonlinear frequency conversion technology. Combined with frequency doubling and sum frequency technology, it can flexibly extend the laser wavelength to the ultraviolet to meet various detection needs. Patent CN 111725695A introduces a method of pumping an optical parametric oscillator based on a Nd:YAG Q-switched laser with a wavelength of 1064nm as a pump source, and generating a 355nm laser based on frequency doubling and tripling technology, and achieving a 289nm / 299nm laser output by summing the 355nm with the output signal light of the optical parametric oscillator. However, due to the excessive nonlinear frequency conversion involved in the process, the overall conversion efficiency is not high, and the laser wavelengths generated are at 289nm and 299nm, which cannot solve the problem of large ozone absorption cross-sections. Patent CN 116565681A introduces a method of generating 193nm vacuum ultraviolet laser output, which uses a 355nm laser pumped by tripling the fundamental frequency light of a 1064nm pulse to obtain a 472nm signal light, and then summing the frequency-doubled light obtained by frequency doubling with the fundamental frequency light of 1064nm to obtain a vacuum ultraviolet output. This method is used to generate vacuum ultraviolet light output between 100-200nm and is not suitable for ozone detection.

[0005] At present, there is no report of a solid gain medium that can directly radiate and generate ultraviolet lasers. Therefore, the current means of generating ultraviolet lasers is mainly through nonlinear harmonic conversion technology. In the development of ultraviolet light sources using nonlinear harmonic conversion technology, there is no report on the development of laser light sources at 310nm. In response to satellite-borne needs, the present invention uses optical parametric oscillation technology and combines frequency doubling and frequency summing technology to perform frequency conversion on the 1064nm fundamental frequency light, and finally achieves 310nm and 355nm high-power pulsed laser output, solving the need for laser radar ozone detection for emitting light sources. Summary of the invention

[0006] In view of the shortcomings of the prior art, the present invention proposes to design an all-solid-state ultraviolet laser that simultaneously generates 310nm and 355nm high-energy lasers, providing a high-energy, high-beam-quality ultraviolet light source for lidar ozone detection.

[0007] The technical solution of the present invention is:

[0008] A fully solid-state ultraviolet laser that simultaneously generates 310nm and 355nm high-energy lasers. The present invention also provides a method for constructing the above laser structure, which is characterized in that it includes three parts: a fundamental frequency laser and a frequency doubling module, an optical parametric oscillator intracavity frequency doubling module, and a frequency doubling module: a 1064nm single-frequency pulse laser is amplified and frequency-doubled to generate a 532nm pulse laser, a 532nm pulse laser is used to pump an optical parametric oscillator (OPO) to generate a 743nm signal light, and an intracavity frequency doubling four-crystal non-planar image rotating ring cavity design is adopted for the OPO cavity. , the birefringence walk-off of the light beam in the crystal is expanded from one dimension to two lateral directions by image rotation, and the spatial coherence of the light beam is increased after multiple cycles of oscillation in the cavity. At the same time, four crystals are used to perform parameter conversion and sum frequency conversion on the four axes of the optical parametric oscillator, shortening the cavity length while lowering the threshold, improving the beam quality and conversion efficiency of the OPO output 310nm sum frequency light, and the remaining 532nm pulse laser pump light and the remaining 1064nm pulse laser generate 355nm pulse laser through the sum frequency module. The specific structure is as follows:

[0009] The 1064nm single-frequency pulse seed laser is amplified by the laser amplification module to form a 1064nm fundamental frequency laser. After the polarization state of the 1064nm fundamental frequency laser is adjusted by the first half-wave plate, the frequency is converted by the frequency doubling crystal. A part of the 1064nm fundamental frequency laser is converted into a 532nm doubled frequency laser, which is reflected by the first reflector into the first beam splitter. The remaining 1064 fundamental frequency laser in the frequency doubling process is reflected and output by the first beam splitter. The 532nm doubled frequency laser transmits the first beam splitter into the second half-wave plate. After the polarization state is adjusted by the second half-wave plate, it is reflected by the second reflector into the sum frequency module in the optical parametric oscillator cavity.

[0010] The optical parametric oscillator module includes a first parametric cavity mirror, a first parametric crystal, a second parametric cavity mirror, a third half-wave plate, a first sum frequency crystal, a third parametric cavity mirror, a second parametric crystal, a fourth parametric cavity mirror, a second sum frequency crystal, a fourth half-wave plate, a second beam splitter, a third reflector, a fifth half-wave plate, and a first beam combiner. The first parametric crystal is arranged between the first parametric cavity mirror and the second parametric cavity mirror, the third half-wave plate and the first sum frequency crystal are arranged between the second parametric cavity mirror and the third parametric cavity mirror, the second parametric crystal is arranged between the third parametric cavity mirror and the fourth parametric cavity mirror, and the second sum frequency crystal and the fourth half-wave plate are arranged between the fourth parametric cavity mirror and the first parametric cavity mirror.

[0011] The parametric pump light is transmitted through the first parametric cavity mirror into the optical parametric oscillator, and is converted by the first parametric crystal to generate 743nm signal light and 1873.3nm idler light. The second parametric cavity mirror transmits the 1873.3nm idler light, reflects the 743nm signal light and the 532nm pump light, adjusts the polarization state through the third half-wave plate, enters the first sum frequency crystal for sum frequency generation of 310nm sum frequency light, and the remaining 532nm pump light is reflected by the third parametric cavity mirror into the second parametric crystal for further conversion to generate 743nm signal light and 1873.3nm The idler light, 1873.3nm idler light is transmitted and output through the third parametric cavity mirror, the 532nm pump light and the 743nm signal light are reflected into the second sum frequency crystal for further conversion to generate 310nm sum frequency light, which is transmitted and output through the first parametric cavity mirror after the polarization state is adjusted by the fourth half-wave plate, the 310nm sum frequency light is transmitted and output through the second beam splitter, the remaining 532nm pump light is reflected by the third reflector and then enters the fifth half-wave plate for polarization state adjustment, which is reflected by the first beam combiner and combined with the 1064nm baseband laser to enter the sum frequency module.

[0012] The sum frequency module receives the remaining 1064nm fundamental frequency laser and the remaining parametric pump light and inputs them into the third sum frequency crystal and the fourth sum frequency crystal for frequency conversion. A portion of the light is converted into a 355nm ultraviolet pulse laser and outputted through the third beam splitter. The remaining 1064nm fundamental frequency laser and the 532nm pump light are outputted through the third beam splitter through reflection.

[0013] Furthermore, the laser amplification module includes an 808nm LD pump source and several amplifying crystals. The 1064nm single-frequency pulse seed laser is double-pass amplified by an end-face LD-pumped Nd:YVO4 crystal, double-pass amplified by a side LD-pumped Nd:YAG crystal, and finally power-amplified by a double-sided LD-pumped Nd:YAG crystal to form a 1064nm fundamental frequency laser.

[0014] Furthermore, the first half-wave plate is a 1064nm half-wave plate; the third half-wave plate is a dual-wavelength half-wave plate of 532nm and 743nm; the fourth half-wave plate is a 743nm half-wave plate; the second half-wave plate and the fifth half-wave plate are 532nm half-wave plates.

[0015] Furthermore, the first parametric cavity mirror is coated with a 532nm anti-reflection film, a 310nm anti-reflection film and a 743nm high-reflection film; the second parametric cavity mirror is coated with a 532nm high-reflection film, a 743nm high-reflection film and a 1873.3nm anti-reflection film; the third parametric cavity mirror is coated with a 532nm high-reflection film, a 743nm high-reflection film and a 310nm high-reflection film; the fourth parametric cavity mirror is coated with a 532nm high-reflection film, a 743nm high-reflection film, a 310nm high-reflection film and a 1873.3nm anti-reflection film; the coating angles of the parametric cavity mirrors are all 32.8°.

[0016] Furthermore, the first beam splitter is coated with a 45° 1064nm high reflection film and a 532nm anti-reflection film; the second beam splitter is coated with a 45° 532nm high reflection film and a 310nm anti-reflection film; the third beam splitter is coated with a 45° 532nm high reflection film, a 1064nm high reflection film and a 355nm anti-reflection film.

[0017] Furthermore, the frequency doubling crystal is a type I phase-matched LBO crystal, the first parameter crystal and the second parameter crystal are type I phase-matched BBO crystals, the first sum frequency crystal and the second sum frequency crystal are type I phase-matched LBO crystals, and the third sum frequency crystal and the fourth sum frequency crystal are type I phase-matched LBO crystals; the first parameter crystal and the second parameter crystal are synchronously placed according to the polarization state direction of the rotating intra-cavity pump light, the first sum frequency crystal and the second sum frequency crystal are placed in the cavity for walk-off compensation according to the polarization state direction of the 532nm pump light and the 743nm signal light, and the third sum frequency crystal and the fourth sum frequency crystal are placed for walk-off compensation according to the polarization state direction of the remaining 532nm pump light and the 1064nm fundamental frequency light.

[0018] The present invention has the following advantages:

[0019] 1. A set of lasers can simultaneously output two different pulse lasers of 310nm and 355nm, meeting the light source requirements of lidar atmospheric ozone detection.

[0020] 2. An intra-cavity sum-frequency four-crystal non-planar image rotating annular cavity was designed. Four crystals were placed on the long axis and the short axis respectively, which greatly shortened the cavity length, made the overall structure compact, reduced losses, and improved the conversion efficiency of the OPO.

[0021] 3. The placement of the parametric crystal utilizes the walk-off effect and non-planar image rotation cavity to improve the signal light beam quality, and the sum frequency crystal is placed for walk-off compensation to improve the conversion efficiency.

[0022] 4. Utilize the high power density of the intracavity signal light to perform intracavity frequency summing technology to obtain high-efficiency 310nm pulsed laser output.

[0023] 5. The remaining 1064nm pulse laser after frequency doubling of the 1064nm fundamental frequency light and the remaining 532nm pump light of the OPO are used to achieve 355nm pulse laser output through frequency summing technology, avoiding energy waste and improving energy utilization efficiency.

[0024] 6. The overall laser design has a simple and compact structure, high conversion efficiency, high output pulse energy, and is suitable for practical applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 The present invention is a schematic structural diagram of an all-solid-state ultraviolet laser that simultaneously generates 310nm and 355nm high-energy lasers.

[0026] Figure 2 This is a diagram of the structure of the non-planar image rotating annular cavity with four crystals and frequency inside the cavity. DETAILED DESCRIPTION

[0027] The following is combined with Figure 1 , Attachment Figure 2 , a complete description of the specific technical solutions in the embodiments of the present invention is given. The technical solutions and parameters described in the embodiments of the present invention are only part of the present invention. All other embodiments based on the embodiments of the present invention are within the protection scope of the present invention without making creative improvements and inventions.

[0028] Figure 1 Schematic diagram of the structure of a solid-state ultraviolet laser that generates 310nm and 355nm high-energy lasers simultaneously. Figure 1 As shown, the present invention is an all-solid-state ultraviolet laser that simultaneously generates 310nm and 355nm high-energy lasers, including a fundamental frequency laser and its frequency doubling module 1, an optical parametric oscillator intracavity sum frequency module 2, and a sum frequency module 3.

[0029] The fundamental frequency laser and its frequency doubling module 1 are used to generate 1064nm pulse laser to be incident on the sum frequency module 3, and at the same time generate 532nm pulse laser to be incident on the sum frequency module 2 in the optical parametric oscillator cavity. The sum frequency module 2 in the optical parametric oscillator cavity is used to receive the 532nm pulse laser and generate 743nm pulse laser through parameter conversion, and generate 310nm pulse laser through intracavity sum frequency. The sum frequency module 3 is used to receive the 1064nm pulse laser and the 532nm pulse laser and generate 355nm pulse laser through sum frequency.

[0030] In this example, the 1064nm seed laser 1-1 in the base frequency laser and its frequency doubling module 1 is used to generate a 1064nm single-frequency pulse seed laser, which is amplified by the laser amplification module 1-2 to form a 1064nm base frequency laser with a pulse width of 10ns. The polarization state of the 1064nm base frequency laser is adjusted by the first half-wave plate 1-3, and the frequency is converted by the frequency doubling crystal 1-4. A part of the 1064nm base frequency laser is converted into a 532nm frequency doubling laser, which is reflected by the first reflector 1-5 and enters the first beam splitter 1-6. The remaining 1064 base frequency laser is reflected and output by the first beam splitter 1-6. The 532nm frequency doubling laser is transmitted through the first beam splitter 1-6 and enters the second half-wave plate 1-7. After the polarization state is adjusted by the second half-wave plate 1-7, it is reflected by the second reflector 1-8 and enters the optical parametric oscillator cavity and the frequency module 2.

[0031] The first half-wave plate 1-3 is a 1064nm half-wave plate, and a 1064nm anti-reflection film is coated on the surface; the frequency doubling crystal 1-4 is an LBO crystal, and the crystal adopts type I critical phase matching, and the cutting angle is θ=90.0°, The crystal end faces are coated with 1064nm and 532nm anti-reflection films; the first reflectors 1-5 are coated with 45° high-reflection films of 532nm and 1064nm wavelengths; the first beam splitters 1-6 are coated with 45° anti-reflection films of 532nm wavelength and 45° high-reflection films of 1064nm wavelength; the second half-wave plates 1-7 are 532nm half-wave plates, and the surfaces are coated with 532nm anti-reflection films; the second reflectors 1-8 are coated with 45° high-reflection films of 532nm wavelength; the laser amplification module includes an 808nm LD pump source and a plurality of amplifying crystals, the 1064nm single-frequency pulse seed laser is double-pass amplified by an end-face LD-pumped Nd:YVO4 crystal, double-pass amplified by a side LD-pumped Nd:YAG crystal, and finally power amplified by a double-sided LD-pumped Nd:YAG crystal to form a 1064nm fundamental frequency laser.

[0032] In this example, the optical parametric oscillator intracavity sum frequency module 2 includes a first parametric cavity mirror 2-1, a first parametric crystal 2-2, a second parametric cavity mirror 2-3, a third half-wave plate 2-4, a first sum frequency crystal 2-5, a third parametric cavity mirror 2-6, a second parametric crystal 2-7, a fourth parametric cavity mirror 2-8, a second sum frequency crystal 2-9, a fourth half-wave plate 2-10, a second beam splitter 2-11, a third reflector 2-12, a fifth half-wave plate 2-13, and a first beam combiner 2-14. The first parametric crystal 2-2 is arranged between the first parametric cavity mirror 2-1 and the second parametric cavity mirror 2-3, the third half-wave plate 2-4 and the first sum frequency crystal 2-5 are arranged between the second parametric cavity mirror 2-3 and the third parametric cavity mirror 2-6, the second parametric crystal 2-7 is arranged between the third parametric cavity mirror 2-6 and the fourth parametric cavity mirror 2-8, and the second sum frequency crystal 2-9 and the fourth half-wave plate 2-10 are arranged between the fourth parametric cavity mirror 2-8 and the first parametric cavity mirror 2-1.

[0033] The optical parametric oscillator of this embodiment is an intracavity sum frequency four-crystal non-planar image rotation ring cavity structure, and its three-dimensional structure is as follows: Figure 2 shown.

[0034] In this example, the parametric pump light is transmitted through the first parametric cavity mirror 2-1 into the optical parametric oscillator, and is converted by the first parametric crystal 2-2 to generate signal light and idler light. The second parametric cavity mirror 2-3 transmits the idler light, and the reflected signal light and pump light are adjusted in polarization state through the third half-wave plate 2-4 and enter the first sum frequency crystal 2-5. The pump light and the signal light are sum-frequency-generated sum frequency light. The remaining parametric pump light passes through the third parametric cavity mirror 2-6 and enters the second parametric crystal 2-7 to continue to convert and generate signal light and idler light. The light is transmitted through the third parametric cavity mirror 2-8, and the sum-frequency light, pump light and signal light are reflected into the second sum-frequency crystal 2-9 for further conversion to generate sum-frequency light. After the polarization state is adjusted by the fourth half-wave plate 2-10, the sum-frequency light is transmitted and output through the first parametric cavity mirror 2-1. The sum-frequency light is transmitted and output through the second beam splitter 2-11. The pump light is reflected by the third reflector 2-12 and then enters the fifth half-wave plate 2-13 for polarization state adjustment. After being reflected by the first beam combiner 2-14, it is combined with the baseband laser and output into the sum-frequency module 3.

[0035] The first parameter crystal 2-2 and the second parameter crystal 2-7 are BBO crystals, the crystals use type I critical phase matching, and the cutting angle is θ=21.6°. The end face of the first parameter crystal 2-2 is coated with anti-reflection films of 532nm, 743nm, and 1873.3nm, and the end face of the second parameter crystal 2-7 is coated with anti-reflection films of 310nm, 532nm, 743nm, and 1873.3nm; the first sum frequency crystal 2-5 and the second sum frequency crystal 2-9 are LBO crystals, and the crystals adopt type I critical phase matching, and the cutting angle is θ=90°, The end faces of the first sum frequency crystal 2-5 and the second sum frequency crystal 2-9 are coated with 532nm, 743nm, and 310nm anti-reflection films; the first parameter crystal 2-2 and the second parameter crystal 2-7 are synchronously placed according to the polarization state direction of the pump light in the rotating cavity, and the first sum frequency crystal 2-5 and the second sum frequency crystal 2-9 are placed in the cavity according to the polarization state direction of the 532nm pump light and the 743nm signal light for walk-off compensation.

[0036] The first parametric cavity mirror 2-1 is coated with a 32.8° anti-reflection film of a wavelength of 310nm, a 32.8° anti-reflection film of a wavelength of 532nm and a 32.8° high-reflection film of a wavelength of 743nm; the second parametric cavity mirror 2-3 is coated with a 32.8° high-reflection film of a wavelength of 532nm, a 32.8° high-reflection film of a wavelength of 743nm and a 32.8° anti-reflection film of a wavelength of 1873.3nm; the third parametric cavity mirror 2-6 is coated with a 32.8° high-reflection film of wavelengths of 310nm, 532nm and 743nm; the fourth parametric cavity mirror 2-8 is coated with a 32.8° high-reflection film of wavelengths of 310nm, 532nm and 743nm and a 32.8° anti-reflection film of a wavelength of 1873.3nm.

[0037] The third half-wave plate 2-4 is a 532nm and 743nm dual-wavelength half-wave plate, and its surface is coated with 532nm and 743nm anti-reflection films; the fourth half-wave plate 2-10 is a 743nm half-wave plate, and its surface is coated with 743nm anti-reflection film; the second beam splitter 2-11 is coated with a 45° high-reflection film of 532nm wavelength and a 45° anti-reflection film of 1873.3nm wavelength; the third reflector 2-12 is coated with a 45° high-reflection film of 532nm wavelength; the fifth half-wave plate 2-13 is a 532nm half-wave plate, and its surface is coated with a 532nm anti-reflection film; the first beam combiner 2-14 is coated with a 45° anti-reflection film of 1064nm wavelength and a 45° high-reflection film of 532nm wavelength.

[0038] In this example, the sum frequency module 3 receives the remaining 1064nm fundamental frequency laser and the remaining parametric pump light and inputs them into the third sum frequency crystal 3-1 and the fourth sum frequency crystal 3-2 for frequency conversion. A portion of the light is converted into a 355nm ultraviolet pulse laser and outputted through the third beam splitter 3-3. The remaining 1064nm fundamental frequency laser and the 532nm parametric pump light are outputted through the third beam splitter 3-3.

[0039] The third sum frequency crystal 3-1 and the fourth sum frequency crystal 3-2 are LBO crystals, and the crystals adopt type I critical phase matching, and the cutting angle is θ=90°. The crystal end faces are coated with 355nm, 532nm, and 1064nm anti-reflection films, and the third and fourth frequency crystals 3-1 and 3-2 are placed for walk-off compensation; the surface of the third beam splitter 3-3 is coated with 45° high-reflection films for 1064nm and 532nm wavelengths and 45° anti-reflection films for 355nm wavelength.

[0040] The embodiments described above are only preferred specific implementation methods of the present invention, and the protection scope of the present invention is not limited thereto. Any simple change or equivalent replacement of the technical solution that can be obviously obtained by any technician familiar with the field within the technical scope disclosed in the present invention, or various other corresponding changes and deformations made according to the technical concept of the present invention all belong to the protection scope of the present invention.

Claims

1. An all-solid-state ultraviolet laser that simultaneously generates 310nm and 355nm high-energy lasers, characterized in that: The invention comprises three parts: a fundamental frequency laser and its frequency doubling module (1), an optical parametric oscillator intra-cavity frequency doubling module (2), and a frequency doubling module (3). A 1064nm single-frequency pulse laser is amplified and frequency-doubled to generate a 532nm pulse laser. The 532nm pulse laser is used to pump an optical parametric oscillator (OPO). The OPO output signal light and the 532nm pulse laser are frequency-doped in the cavity to generate a 310nm pulse laser. The remaining 532nm pulse laser pump light and the remaining 1064nm pulse laser are frequency-doped to generate a 355nm pulse laser through the frequency doubling module (3). The fundamental frequency laser and its frequency doubling module (1) comprise a 1064nm seed laser (1-1), a laser amplification module (1-2), a first half-wave plate (1-3), a frequency doubling crystal (1-4), a first reflector (1-5), a first beam splitter (1-6), a second half-wave plate (1-7), and a second reflector (1-8). The 1064nm single-frequency pulse seed laser generated by the 1064nm seed laser (1-1) is amplified by the laser amplification module (1-2) to form a 1064nm fundamental frequency laser. The 1064nm fundamental frequency laser is amplified by the first half-wave plate (1-3), a frequency doubling crystal (1-4), a first reflector (1-5), a first beam splitter (1-6), a second half-wave plate (1-7), and a second reflector (1-8). The plate (1-3) adjusts the polarization state, performs frequency conversion via the frequency doubling crystal (1-4), converts a portion of the 1064nm fundamental frequency laser into a 532nm frequency doubling laser, reflects via the first reflector (1-5) into the first beam splitter (1-6), and the remaining 1064nm fundamental frequency laser is reflected and output via the first beam splitter (1-6), and the 532nm frequency doubling laser is transmitted via the first beam splitter (1-6) into the second half-wave plate (1-7), and after the polarization state is adjusted by the second half-wave plate (1-7), it is reflected and output by the second reflector (1-8) to form parametric pump light; The optical parametric oscillator module (2) comprises a first parametric cavity mirror (2-1), a first parametric crystal (2-2), a second parametric cavity mirror (2-3), a third half-wave plate (2-4), a first sum frequency crystal (2-5), a third parametric cavity mirror (2-6), a second parametric crystal (2-7), a fourth parametric cavity mirror (2-8), a second sum frequency crystal (2-9), a fourth half-wave plate (2-10), a second beam splitter (2-11), a third reflector (2-12), a fifth half-wave plate (2-13), and a first beam combiner (2-14). The first parametric crystal (2-2) is arranged between the first parametric cavity mirror (2-1) and the second parametric cavity mirror (2-3). The third half-wave plate (2-4 ) and the first sum frequency crystal (2-5) are arranged between the second parametric cavity mirror (2-3) and the third parametric cavity mirror (2-6), the second parametric crystal (2-7) is arranged between the third parametric cavity mirror (2-6) and the fourth parametric cavity mirror (2-8), the second sum frequency crystal (2-9) and the fourth half-wave plate (2-10) are arranged between the fourth parametric cavity mirror (2-8) and the first parametric cavity mirror (2-1), the first parametric crystal (2-2) and the second parametric crystal (2-7) are synchronously placed according to the rotating cavity for the polarization state direction of the pump light, and the first sum frequency crystal (2-5) and the second sum frequency crystal (2-9) are placed according to the polarization state direction of the pump light and the signal light for walk-off compensation; The parametric pump light is transmitted through the first parametric cavity mirror (2-1) into the optical parametric oscillator, and is converted through the first parametric crystal (2-2) to generate signal light and idler light. The second parametric cavity mirror (2-3) transmits the idler light, and the reflected signal light and pump light are adjusted in polarization state through the third half-wave plate (2-4) to enter the first sum frequency crystal (2-5), and the pump light and the signal light are sum-frequency-generated sum frequency light. The remaining parametric pump light passes through the third parametric cavity mirror (2-6) into the second parametric crystal (2-7) to continue to convert and generate signal light and idler light. The idler light transmits the third parametric cavity mirror (2-8) to enter the first sum frequency crystal (2-9). The pump light and the signal light are reflected into the second sum frequency crystal (2-9) to continue to convert and generate sum frequency light, and the polarization state is adjusted by the fourth half-wave plate (2-10) and then transmitted and outputted from the first parametric cavity mirror (2-1), and the sum frequency light is transmitted and outputted from the second beam splitter (2-11), and the pump light is reflected by the third reflector (2-12) and then enters the fifth half-wave plate (2-13) for polarization state adjustment, and then is reflected by the first beam combiner (2-14) and then combined with the base frequency laser reflected by the first beam splitter (1-6) and outputted into the sum frequency module (3); The sum frequency module (3) comprises a third sum frequency crystal (3-1), a fourth sum frequency crystal (3-2) and a third beam splitter (3-3). The remaining 1064nm fundamental frequency laser and the remaining parametric pump light outputted by the first beam combiner (2-14) are incident on the third sum frequency crystal (3-1) and the fourth sum frequency crystal (3-2) for frequency conversion. A part of them is converted into 355nm ultraviolet pulse laser and transmitted and outputted through the third beam splitter (3-3). The remaining 1064nm fundamental frequency laser and 532nm parametric pump light are reflected and outputted through the third beam splitter (3-3). The third sum frequency crystal (3-1) and the fourth sum frequency crystal (3-2) are placed for walk-off compensation according to the polarization state directions of the fundamental frequency light and the remaining pump light.

2. The all-solid-state ultraviolet laser that simultaneously generates 310nm and 355nm high-energy lasers according to claim 1, characterized in that: The first half-wave plate (1-3) is a 1064nm half-wave plate; the third half-wave plate (2-4) is a dual-wavelength half-wave plate of 532nm and 743nm; the fourth half-wave plate (2-10) is a 743nm half-wave plate, and the second half-wave plate (1-7) and the fifth half-wave plate (2-13) are 532nm half-wave plates.

3. The all-solid-state ultraviolet laser that simultaneously generates 310nm and 355nm high-energy lasers according to claim 1, characterized in that: The first parametric cavity mirror (2-1) is coated with a 532nm anti-reflection film, a 310nm anti-reflection film and a 743nm high-reflection film; the second parametric cavity mirror (2-3) is coated with a 532nm high-reflection film, a 743nm high-reflection film and a 1873.3nm anti-reflection film; the third parametric cavity mirror (2-6) is coated with a 532nm high-reflection film, a 743nm high-reflection film and a 310nm high-reflection film; the fourth parametric cavity mirror (2-8) is coated with a 532nm high-reflection film, a 743nm high-reflection film, a 310nm high-reflection film and a 1873.3nm anti-reflection film; the coating angles of the parametric cavity mirrors are all 32.8°.

4. The all-solid-state ultraviolet laser that simultaneously generates 310nm and 355nm high-energy lasers according to claim 1, characterized in that: The first beam splitter (1-6) is coated with a 45° 1064nm high reflection film and a 532nm anti-reflection film; the second beam splitter (2-11) is coated with a 45° 532nm high reflection film and a 310nm anti-reflection film; the third beam splitter (3-2) is coated with a 45° 532nm high reflection film, a 1064nm high reflection film and a 355nm anti-reflection film.

5. The all-solid-state ultraviolet laser that simultaneously generates 310nm and 355nm high-energy lasers according to claim 1, characterized in that: The frequency doubling crystal (1-4) is a type I phase-matched LBO crystal; the first parameter crystal (2-2) and the second parameter crystal (2-7) are type I phase-matched BBO crystals; the first sum frequency crystal (2-5) and the second sum frequency crystal (2-9) are type I phase-matched LBO crystals; the third sum frequency crystal (3-1) and the fourth sum frequency crystal (3-2) are type I phase-matched LBO crystals.

6. The all-solid-state ultraviolet laser that simultaneously generates 310nm and 355nm high-energy lasers according to claim 1, characterized in that: The laser amplification module (1-2) comprises an 808nm LD pump source and a plurality of amplifying crystals. The 1064nm single-frequency pulse seed laser is double-pass amplified by an end-face LD-pumped Nd:YVO4 crystal, double-pass amplified by a side LD-pumped Nd:YAG crystal, and finally power-amplified by a double-face LD-pumped Nd:YAG crystal to form a 1064nm fundamental frequency laser.

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