The invention belongs to the technical field of treatment of special gas packaging gas cylinders, and particularly relates to a treatment method and application of a
mixed gas packaging
gas cylinder, and the treatment method comprises the following steps: S1, filling a packaging
gas cylinder with monosilane
mixed gas, maintaining the pressure, and then carrying out vacuum-pumping treatment; s2, filling the dry
compressed air, maintaining the pressure, then vacuumizing, and repeatedly filling the dry
compressed air, maintaining the pressure and vacuumizing for 2-3 times; and S3,
nitrogen is refilled, then vacuumizing treatment is carried out, and
nitrogen filling and vacuumizing are repeatedly carried out 5-8 times. S4, target
mixed gas with the pressure of 50 psig-150 psig and the concentration of 50-100 times is filled and stored for 24-168 h, then the target mixed gas in a mixed gas packaging
gas cylinder is analyzed, if the target mixed gas is smaller than or equal to three times of the index before filling, it is judged that treatment is qualified, and otherwise the steps S1-S3 are repeated. The interior of the gas cylinder is pretreated, a
silicon-based
isolation layer is formed on the inner wall of the gas cylinder, and the
corrosion resistance of the interior of the gas cylinder is improved.