The invention discloses a Tb, Mn and Ni ternary co-doped low leakage current BiFeO3 film and a preparation method thereof. The preparation method of the Tb, Mn and Ni ternary co-doped low leakage current BiFeO3 film comprises the following steps: dissolving bismuth nitrate, ferric nitrate, terbium nitrate, manganese acetate and nickel acetate in a molar ratio of (0.91-0.97): (0.96-x): (0.08-0.14): 0.04:x in mixed liquor formed by mixing ethylene glycol methyl ether and acetic anhydride, then uniformly stirring to obtain BiFeO3 precursor liquor, wherein x is equal to 0.01-0.02; coating the BiFeO3 precursor liquor on an FTO (Fluorine-doped Tin Oxide)/glass substrate in a rotary manner to prepare a wet film, roasting the wet film to obtain a dry film, then, annealing for 8 minutes-13 minutes at 550 DEG C to obtain a crystalline-state BiFeO3 film; after the crystalline-state BiFeO3 film is cooled, repeating the annealing, so that the crystalline-state BiFeO3 film reaches needed thickness to obtain the Tb, Mn and Ni ternary co-doped low leakage current BiFeO3 film. The preparation method disclosed by the invention is simple in device requirement, suitable for preparing the film on a large surface and the surface with an irregular shape; moreover, chemical components are precise and controllable, electrical performance of the film can be improved, leakage current density of the BiFeO3 under 350 kV/cm test electric fields is kept below 10<-5>A/cm<2>, and dielectric constant under test frequency of 100 kHz is 240-270.