The invention relates to the technical field of flow detection, in particular to a flow detection
system based on a
silicon diaphragm and a piezoresistor. The
system comprises a fluctuation change unit, a
linear coefficient unit, a calculation compensation unit and a flow deformation unit. The
linear coefficient unit calculates the sensitivity of the piezoresistive sensor according to the compensated resistance change and judges the response speed performance of the piezoresistive sensor, when the response speed performance of the piezoresistive sensor is high, the resistance average value is calculated according to the resistance value of the
silicon diaphragm, and the resistance residual error square is calculated according to the resistance average value; the
total resistance square is calculated according to the predicted value, the resistance
linear coefficient is calculated by using the resistance residual square and the
total resistance square, and calculation is performed according to the compensated data, so that errors caused by temperature fluctuation can be effectively reduced, and the measurement accuracy is further improved; meanwhile, the resistance linear coefficient is calculated under the condition that the response speed performance of the piezoresistive sensor is high, the
linearity of the resistance can be accurately quantified, and therefore the
measurement precision is improved.