141 results about "Hall element" patented technology

A waterproof oral irrigator including an oral irrigator housing which is provided with a sliding recess on an outer wall thereof; a push switch slidably fitted with the sliding recess and provided with a magnetic element; and a control circuit board arranged inside the oral irrigator housing and being provided with a plurality of Hall elements. A plurality of Hall elements are sequentially disposed at intervals along a sliding direction of a push switch. When the push switch slides along the sliding recess, the magnetic element can be driven to move to positions sensed by the plurality of Hall elements in sequence. Since the outer wall of the oral irrigator housing is provided with the sliding recess, and the sliding recess is not communicated with the interior of the oral irrigator, so that the waterproof performance of the oral irrigator can be greatly improved.

The invention relates to the field of magnetic suspension motor driving control, and discloses a high-reliability motor commutation method based on same-frequency displacement conversion of a magnetic suspension rotor, and the method comprises the following steps: collecting a multi-channel rotor displacement signal of a magnetic suspension bearing system; carrying out same-frequency positive-sequence component extraction and phase locking calculation to obtain a rotor space angle position estimation value; multiple paths of redundant rotor angular position signals are constructed, and main rotor space angular position signals are generated; executing initial alignment and error correction of a motor rotor angle, and locking an angle compensation value in a closed loop mode based on the waveform change rate of the direct current bus current at the pre-estimated commutation moment; synthesizing the motor commutation angle, and generating a pulse width modulation signal to drive the motor to operate. A magnetic suspension rotor displacement signal is processed through a second-order generalized integrator cascade instantaneous symmetric component method, so that the effect of high signal-to-noise ratio rotor position detection is realized by directly utilizing an existing magnetic bearing displacement sensor under the condition that a Hall element or a photoelectric encoder does not need to be additionally arranged.

The invention relates to the technical field of Hall sensors, and provides a Hall element with a triple isolation structure and a preparation method thereof.The Hall element comprises two pairs of Hall contact areas participating in electrical connection and oxide isolation structures located on the two sides of the Hall contact areas and having a certain gap distance. The oxide buried layer completely isolates the Hall plate area in the vertical direction, the Hall plate is completely isolated from the outside through the isolation structure and the oxide buried layer, external direct current interference is reduced to the maximum extent, meanwhile, the thickness and the current path of the Hall plate are controlled, and the effect of reducing noise interference while the sensitivity is improved is achieved. A three-circle surrounding structure is formed by utilizing a P well in contact with the side face of a Hall plate, a PBL in contact with the vertical bottom of an oxide buried layer and connected with the P well on the side face of the Hall plate, an NBL tightly attached to the lower surface of the PBL, an N well connected with the NBL and surrounding the Hall plate and the P well, and a P well connected with a substrate and surrounding the outermost layer, and Hall voltage changes caused by substrate noise and EMI electromagnetic interference are prevented.

The utility model provides a speed sensor which comprises a PCB and a sensor circuit arranged on the PCB, the sensor circuit comprises a power-assisted control unit MCU, a Hall element U1 and a Hall element U2, the Hall element U1 is connected with the input end IN1 of the power-assisted control unit MCU, the Hall element U2 is connected with the input end IN2 of the power-assisted control unit MCU, the Hall element U1 is connected with the input end IN1 of the power-assisted control unit MCU, and the Hall element U2 is connected with the input end IN2 of the power-assisted control unit MCU. The output end OUT of the power-assisted control unit MCU outputs a control signal Signal, the Hall element U1 and the Hall element U2 are arranged in tandem in the rotating direction of the rotating shaft, and the triggering magnetic field intensity of high and low level conversion output by the Hall element U1 and the Hall element U2 is + / -5Gs. The two Hall elements are arranged in tandem, so that the rotating direction of the middle shaft can be judged while the speed is detected, and a wrong power-assisted signal is prevented from being output.

The application provides a composite sensor and a detection method for pipeline nondestructive testing, relates to the technical field of pipeline nondestructive testing, and comprises a magnetic base of a cylindrical structure; the magnetic base comprises a circular ring part and a center part; an electromagnetic ultrasonic coil; the electromagnetic ultrasonic coil comprises a first coil and a second coil which are interlaced and wound; a plurality of Hall elements are uniformly arranged in the circumferential direction with the center part as the center; and a controller is configured to generate a first control signal based on a magnetic flux leakage signal, to form a target excitation circuit based on the electromagnetic ultrasonic coil, to make the target excitation circuit form electromagnetic ultrasonic waves for detecting a pipeline to be detected, to obtain an ultrasonic echo based on the target excitation circuit, and to generate a detection result according to the magnetic flux leakage signal and the ultrasonic echo. The application realizes omnidirectional magnetic flux leakage detection through the annular magnet structure matched with the circumferentially arranged Hall elements; and through the specific combination of the coil connection mode and the timing control logic, various electromagnetic ultrasonic detection modes can be considered.

A semiconductor package includes a semiconductor chip having Hall elements built therein, and external terminals arranged on one surface side of the semiconductor chip. A first Hall element and a second Hall element are arranged to be point-symmetrical with respect to a center point of the semiconductor package in a plan view. The first Hall element is at least partially covered by a first external terminal among first external terminals in a plan view, and the second Hall element is at least partially covered by a second external terminal among second external terminals in a plan view. A first region covered by the first external terminal of the first Hall element in a plan view and a second region covered by the second external terminal of the second Hall element in a plan view are point-symmetrical with respect to the center point of the semiconductor package in a plan view.

The invention relates to the technical field of electronic throttle valves, in particular to a method and system for recognizing the opening position of a valve plate through a Hall sensor, and the method comprises the steps: obtaining a control signal on a brushless motor, and controlling the Hall sensor to collect a magnetic field signal to obtain a magnetic signal sequence after the control signal is collected; extracting a magnetic pole inversion point according to the magnetic signal sequence, and determining a motor rotation angle according to the magnetic pole inversion point; and the valve plate opening is generated according to the motor rotation angle. In order to solve the problem that in the prior art, two rotating speed sensors need to be arranged in an electronic throttle valve, the cost is high, in the scheme, the rotating speed sensors are replaced with Hall sensors, the layout positions of the Hall sensors on a substrate are adjusted, and the Hall sensors are arranged close to a Hall element at the front end of a worm; therefore, the opening angle of the valve plate can be accurately measured after the sensor is simplified, and the product cost is reduced.

This invention provides a protective box based on a Hall current sensor, relating to the field of Hall current sensors. The protective box assembly includes a housing, a cover plate, a back plate, and heat dissipation fins. The cover plate is located on the front of the housing, the back plate is fixed to the back of the housing, and the heat dissipation fins are fixed to both sides of the housing. A magnetic core, a Hall element, an integrated circuit, and a compensation coil are installed inside the housing. This invention provides protection for the components by using a housing and cover plate. Unlike resin encapsulation, this physical structure protection prevents aging and cracking due to environmental changes. The housing and cover plate provide stable physical protection for the internal magnetic core, Hall element, integrated circuit, and compensation coil. The heat dissipation fins on both sides of the housing help dissipate heat generated by the components inside the protective box, reducing the risk of damage to the protective structure and sensor components due to excessive temperature.

The invention provides a Hall current sensor magnetic core structure with a high signal-to-noise ratio. The Hall current sensor magnetic core structure comprises a magnetism gathering ring, a framework, an operational amplifier, a rivet, a Hall element, a PCB and a grounding copper column. The eight magnetic sheets are staggered and laminated left and right in the trapezoid groove of the framework for one-time forming, the wiring groove of the framework optimizes wiring of the secondary coils, extra electromagnetic signals caused by mutual coupling between the secondary coils are avoided, and accurate alignment of the framework and the PCB is achieved. The direct connection mode of precise rivet framework integration and copper column PCB spot welding replaces all heavy external shielding and unreliable mechanical contact, the contradiction of high signal-to-noise ratio, high reliability and miniaturization is fundamentally solved, the anti-interference capacity is built in the magnetic core body and achieved through extremely simple and reliable physical connection, and an external additional structure is not needed.

A sensor, comprising: a first signal path including a plurality of magnetoresistance (MR) elements, the first signal path being configured to generate a first signal based, at least in part, on an output of the MR elements, the output of the MR elements being generated, at least in part, in response to an external magnetic field that is incident on the sensor and a first feedback magnetic field; a second signal path including one or more Hall elements, the second signal path being configured to generate a second signal based, at least in part, on an output of the Hall elements; a first feedback coil that is configured to generate the first feedback magnetic field, the first feedback coil being driven with a first drive current, the first drive current being generated, at least in part, based on the first signal.

The utility model discloses a triangular sensor structure of a computerized flat knitting machine, which is characterized in that a triangular motor shaft of the computerized flat knitting machine is fixedly provided with a sensing wheel, the sensing wheel is at least provided with a first Hall magnetic steel, and the first Hall magnetic steel is correspondingly sensed with a first Hall element; an output pin of the first Hall element is respectively connected with the Hall chip and the first light emitting diode; the triangular motor shaft drives the induction wheel provided with the first Hall magnetic steel to rotate synchronously, the distance between the first Hall magnetic steel and the first Hall element changes along with the rotation state, and the first Hall element is selectively conducted based on the change. An output pin signal of the first Hall element is switched between a high level and a low level, so that a Hall chip connected with an upper computer realizes triangular zero detection, and a first light emitting diode realizes triangular state feedback; the LED lamp is low in cost, reliable in performance, good in heat dissipation performance and convenient to install.

A sensor device includes at least one integrated magnetic sensor structure having: a semiconductor substrate; a magnetic flux concentrator IMC disposed on top of the semiconductor substrate, the IMC having a predefined shape with an elongated portion extending in a first direction parallel to the substrate; a horizontal Hall element situated under a centre of the IMC; a processing circuit connected to said horizontal Hall element, and configured to provide a signal or a value indicative of at least one magnetic field gradient or a signal or value derived therefrom.

The application discloses a non-contact drive chain elongation detection method and system based on a Hall proximity switch, relates to the technical field of chain drive state detection, and derives a phase alarm threshold value by acquiring basic parameters of a Hall proximity switch group and a standard pitch of a chain, deploys a Hall component at a directly opposite detection position of a metal drive part of the chain, and relies on a running square wave signal to solve a phase difference in real time and compare the phase difference with the threshold value; due to the non-contact detection characteristics of the Hall element based on electromagnetic induction, the periodic movement of the metal part can be stably perceived in harsh environments such as oil stains, dust and moisture, the defects of laser light path contamination or contact type measurement abrasion are avoided, meanwhile, the phase difference algorithm can accurately quantify the chain elongation, real-time and low-loss online detection is realized, and therefore the technical problem that the elongation of the drive chain is difficult to be detected in real time, accurately and with low loss in a severe industrial scene is effectively solved.

The application relates to the technical field of encoders, in particular to a rotary magnetic ring encoder and a method for detecting the absolute angle of the magnetic ring encoder. The rotary magnetic ring encoder comprises a second plurality of pairs of pole magnets, a first plurality of pairs of pole magnets, a single pair of pole magnet conductor assembly and a first group of Hall elements, a second group of Hall elements and a third group of Hall elements; the single pair of pole magnet conductor assembly has a first tooth-shaped part and a second tooth-shaped part, the first group of Hall elements and the second group of Hall elements are arranged adjacent to the first plurality of pairs of pole magnets and the second plurality of pairs of pole magnets respectively, the third group of Hall elements is arranged between the first tooth-shaped part and the second tooth-shaped part, and the three groups of Hall elements output corresponding detection signals according to the magnetic pole signals of the corresponding magnets. The rotary angle of the outermost ring magnet is calibrated by acquiring a mechanical angle with certain precision, so that the measurement precision is greatly improved, and the application is especially suitable for meeting the actual needs of angle detection of large-diameter shaft parts.

A method of manufacturing a Hall element 18 includes: forming a perovskite-type magnetic material layer 14 on a substrate 12 having a perovskite structure and composed of a compound having a lattice constant of 3.90-3.97 Å in pseudocubic notation; forming an insulator layer 16 containing SrTiO3 on the perovskite-type magnetic material layer 14; and forming a Hall element 18 containing InSb, GaAs, InAs or a solid solution thereof on the insulator layer 16.

The application relates to the field of semiconductor integrated circuit design and manufacturing, in particular to a Hall resistance network and a forming method thereof. The Hall resistance network at least comprises a first Hall element and a Hall compensation network, the first Hall element and the Hall compensation network are connected in series, the Hall compensation network is used for compensating temperature drift of the first Hall element in a constant voltage driving mode, and the Hall compensation network at least comprises a second Hall element. The direction of a resistance temperature coefficient of the second Hall element is opposite to the direction of a resistance temperature coefficient of the first Hall element, and the resistance values of the first Hall element and the second Hall element are not equal. The Hall resistance network has the advantages of low cost and simple manufacturing, can realize low temperature drift in the constant voltage driving mode without increasing additional circuit design, and can be applied to the field of high-precision sensing with low temperature drift.

The utility model discloses a brush motor with a built-in Hall element, comprising a motor assembly which comprises a housing and a rotating shaft, the housing is internally provided with an installation cavity, and the rotating shaft is partially located in the installation cavity; the support comprises an end face, the rotating shaft penetrates through the support, and the support is fixed to the inner wall of the shell; the Hall assembly comprises a Hall magnetic ring, Hall sensors and a circuit board, the circuit board is arranged on the end face, the Hall magnetic ring is arranged on the rotating shaft located on the end face side in a sleeving mode, the Hall sensors are arranged on the circuit board, and the Hall sensors are located on the side face of the Hall magnetic ring and arranged at intervals. The beneficial effects of the utility model are that the built-in design enables the Hall element to be integrated in the motor, thereby eliminating the external installation requirement, and enabling the overall structure to be more compact.

Provided is a Hall element. The Hall element includes a substrate, a Hall-sensing layer disposed on the substrate, electrodes, a blocking layer, and a conductor pad. The electrodes are connected to the Hall-sensing layer. The blocking layer is disposed on a side of the Hall-sensing layer facing away from the substrate and covers the Hall-sensing layer. The conductor pad is disposed on a side of the blocking layer facing away from Hall-sensing layer and configured to be grounded or connected to a predetermined voltage. Applying a potential to the blocking layer covering the Hall sensing layer through the conductor pad not only creates a depletion layer of a sufficient width to limit the current flow direction, thereby producing an effective isolation effect, but also reduces the thickness of the Hall-sensing layer to increase the value of an induced Hall voltage, thereby enhancing the sensitivity of the Hall element.

The utility model provides a high-bandwidth Hall current sensor chip and a circuit structure thereof. The circuit structure comprises a first Hall element and a second Hall element which are used for sensing a detection current and generating a differential voltage signal; the three-stage low-frequency amplification chopping module is used for carrying out high-precision amplification and ripple and offset elimination on the differential signals and comprises a high-bandwidth fully-differential amplifier input stage and a high-bandwidth fully-differential amplifier output stage, and the high-bandwidth fully-differential amplifier input stage comprises two operational amplifiers; the comparator is used for comparing the amplified signal output by the three-stage low-frequency amplifying and chopping module with a reference signal to generate a final output signal; and the programmer is used for adjusting the output sensitivity and / or the static output voltage. According to the high-bandwidth current sensor, a dual-channel signal transmission structure and a three-stage low-frequency amplification chopping module are adopted, high bandwidth can be achieved, the ever-increasing frequency requirement is met, the compromise between residual offset and residual ripple amplitude is solved, and quick response of the high-bandwidth current sensor can be achieved.

The utility model provides an assembled Hall current sensor, which relates to the field of Hall current sensors and comprises a shell, a back plate is mounted on the back of the shell, a magnetic core, a Hall element and an integrated circuit are mounted in an inner cavity of the shell, and the shell and the back plate are used for providing a protection space for the magnetic core, the Hall element and the integrated circuit. A compensating coil is wound on the surface of the magnetic core; according to the utility model, the housing and the back plate are combined and are rapidly connected through the fixing assembly, so that the sensor is more convenient to maintain, the housing and the back plate provide a good protection space for internal elements, the influence of environmental factors on the sensor is prevented, the housing and the back plate are easy to separate due to the modular design, and the reliability of the sensor is improved. Maintenance personnel can quickly replace the magnetic core, the Hall element or the integrated circuit without damaging the sensor structure, the elastic clamping block ensures firm fixation, meanwhile, repeated disassembly is allowed, and the maintenance problem of a traditional packaging structure is effectively solved.

The invention discloses a motor speed measurement method and a motor speed measurement device. The motor speed measurement device comprises at least two groups of magnetic field induction assemblies; the magnetic field induction assembly comprises at least one Hall element group; the Hall element group comprises a first Hall element which is installed in the forward direction and a second Hall element which is installed in the reverse direction. The first Hall element is used for outputting a first measurement waveform; the second Hall element is used for outputting a second measurement waveform; the differential amplification modules are arranged in one-to-one correspondence with the magnetic field induction assemblies; the differential amplification module is used for outputting a first differential amplification signal according to the first measurement waveform and the second measurement waveform; the shaping module is used for shaping the first differential amplification signal into a pulse square wave signal; and the control module is electrically connected with the shaping module and is used for acquiring the rotating speed and the rotating direction of the motor according to the at least two pulse square wave signals. According to the technical scheme provided by the invention, a simpler and more accurate speed measurement mode is provided.

The invention provides a digital signal processing method and device of a Hall element and a medium, and belongs to the field of Hall element signal processing.The method comprises the steps that an original discrete voltage signal sequence generated by the Hall element is obtained through an analog-to-digital converter, and a time sequence feature vector is obtained based on the sequence; constructing a target neural network model, and inputting the time sequence feature vector into the model to output an instantaneous discriminant value with a time sequence feature and a confidence score; obtaining an initial digital output signal based on the instantaneous discriminant value, and enabling the initial digital output signal to correspond to the confidence score according to a time window time sequence; and finally, outputting a digital switch signal by adopting multiple strategies according to the confidence score of the target time window. According to the digital signal processing method and device of the Hall element, the problem that instantaneous noise and real magnetic field change cannot be distinguished through traditional single threshold judgment is avoided, meanwhile, the response speed and reliability of signal processing are balanced, and the anti-interference capacity and decision stability of digital signal processing of the Hall element are improved.

This utility model discloses a through-hole Hall current sensor, including a housing, a through-hole fuse, a magnetic ring, a Hall element, a circuit board, pins, contacts, and a socket. The magnetic ring, Hall element, and circuit board are fixed inside the housing. The magnetic ring has an air gap, and the Hall element is located in the air gap. The lower end of the Hall element is connected to the circuit board, and the pins are connected to the circuit board and extend out of the housing. The through-hole fuse passes through the housing and the internal magnetic ring, and both ends of the through-hole fuse are contacts. The socket includes a base plate, a slot, and a pin slot. The contacts are inserted into the slot and are in complete contact with the slot, and the pins are inserted into the pin slot and are in complete contact with the pin slot. In the actual operation and maintenance application of photovoltaic power plants, if a current sensor failure occurs, it can be directly hot-swapped, which greatly improves the operation and maintenance efficiency and reduces the operation and maintenance cost.

The application discloses a treatment head and a therapeutic instrument. The treatment head comprises a first shell, a second shell, a diaphragm structure, a magnet and a Hall element. The second shell comprises a treatment surface. The diaphragm structure is installed on the treatment surface and is used for being attached to the skin. The magnet is installed on one of the diaphragm structure and the first shell. The Hall element is installed on the other one of the diaphragm structure and the first shell, and the Hall element is spaced apart from the magnet. In the process of movement of the magnet, the magnetic flux changes, for example, the magnetic flux increases when the magnet approaches the Hall element, and the magnetic flux decreases when the magnet moves away. The Hall element is not affected by objective factors such as brightness. This makes the treatment head more accurately detect the movement of the magnet relative to itself, such as detecting whether the magnet has a circumferential deflection or a height change, so as to accurately perceive whether the treatment head slides on the skin, ensure the stable work of the therapeutic instrument, and improve the treatment experience of the user.

The utility model relates to a mechanical direct-current circuit breaker with a built-in Hall sensor, a copper bar is arranged in the circuit breaker, the mechanical direct-current circuit breaker also comprises a Hall sensor assembly, the Hall sensor assembly is arranged in the circuit breaker, and the copper bar passes through the Hall sensor assembly; the Hall sensor assembly comprises a Hall sensor base, a Hall sensor upper cover, a Hall coil, a magnet, a Hall element, a circuit board, a Hall element lead and a Hall sensor output lead, one end of the Hall element lead penetrates through the Hall sensor base to be connected with the circuit board, and the other end of the Hall element lead is connected with the Hall element; the output wiring installation groove is located outside the circuit breaker shell, one end of the Hall sensor output lead penetrates through the Hall sensor base to be connected with the circuit board, and the other end of the Hall sensor output lead is connected with the output wiring installation groove. According to the utility model, through the structure that the Hall sensor assembly is assembled in the circuit breaker in a modularized manner, the protection capability of the circuit breaker to a circuit is comprehensively improved, and the installation and maintenance convenience of the circuit breaker is improved.

A variable aperture module, an imaging lens module, and an electronic device are disclosed. The variable aperture module includes a blade assembly, a fixed part, a rotating part, a drive unit, and a position detection unit. The blades of the blade assembly form a light-transmitting aperture. The rotating part rotates relative to the fixed part, causing each blade to rotate relative to the fixed part, thus changing the size of the light-transmitting aperture. A first drive coil of the drive unit generates a driving force with a first magnetic element. The position detection unit includes a first sensing magnet, a second sensing magnet, a first Hall element, and a second Hall element. The first Hall element senses the magnetic field of the first sensing magnet. The second Hall element senses the magnetic field of the second sensing magnet. When either the first or second Hall element senses a magnetic field, the position detection unit outputs a position signal, thereby improving sensing accuracy.

Embodiments of the present invention relate to the technical field of semiconductors, and disclose a Hall element, a Hall sensor, and an electronic device. The Hall element comprises a substrate, a Hall sensing layer, electrodes, a barrier layer, and a conductor pad. The Hall sensing layer is disposed on the substrate. There are a plurality of electrodes, and the plurality of electrodes are connected to the Hall sensing layer. The barrier layer is disposed on the side of the Hall sensing layer away from the substrate, and the barrier layer covers the Hall sensing layer. The conductor pad is disposed on the side of the barrier layer away from the Hall sensing layer, and the conductor pad is used to be grounded or connected to a preset voltage. By applying a potential to the barrier layer covering the Hall sensing layer by means of the conductive pad, not only can a depletion layer having a sufficient width be generated to limit the current flow direction, thereby generating an effective isolation effect, but also the thickness of the Hall sensing layer can be reduced to increase an induced Hall voltage value, thereby enhancing the sensitivity of Hall element sensing.

The utility model discloses a curved surface pressure sensor based on a magnetic field, and aims to solve the problem that when an existing flexible pressure sensor based on the magnetic field is matched with a complex curved surface, wiring of a PCB is complex, or the consistency of readings of different Hall elements is low, and consequently the accuracy of a measurement result is reduced. The device comprises a flexible magnet layer, a hard shell layer and a flexible printed circuit board, the hard shell layer is a curved surface, and the inner wall of the hard shell layer is uniformly provided with mounting grooves for placing the stiffening plates; the flexible printed circuit board is provided with a plurality of reinforcing plates which are arranged at intervals, and the plurality of Hall elements are arranged on the plurality of reinforcing plates in a one-to-one correspondence manner; the flexible printed circuit board is connected with the hard printed circuit board through a connector; the problem of adaptation to a complex curved surface is solved, the consistency of the interlayer spacing of the Hall sensor and the flexible magnet is kept, the measurement result of the sensor is more accurate and stable, and the sensor has the capacity of covering the shape of a complex product in a large range.

The invention discloses an adjustable Hall angle mechanism and a brushless motor, the adjustable Hall angle mechanism comprises a Hall assembly and a sensing assembly, the Hall assembly comprises a Hall ring and a Hall plate, the Hall plate is installed on the Hall ring, and an adjusting part is installed on the side wall of the Hall ring; preferably, the adjusting part is an adjusting screw, and specifically, the adjusting screw is a Kimi screw. The sensing assembly comprises a PCB connecting plate, a sensing base and a rear end cover, the PCB connecting plate is connected with the Hall plate, the sensing base is rotatably installed on the rear end cover, an avoiding hole is formed in the outer side wall of the rear end cover, and when Hall angle adjustment needs to be carried out, the sensing assembly can penetrate through the avoiding hole to rotate and adjust the tightness degree of a component, so that the Hall angle can be adjusted. And the angle of the Hall plate is further adjusted. By adjusting the distance from the Hall plate to the induction plate, coaxial position induction of the A, B and C three-phase Hall elements and the rotor magnetic ring can be adjusted, and the three-phase Hall error is reduced.

The present invention relates to a vertical Hall element, a sensing device and a method of forming a vertical Hall element, providing a vertical Hall element comprising a substrate, an epitaxial layer disposed above the substrate, a first terminal comprising a doped region and a deep trench isolation (DTI) structure, and a second terminal comprising a first contact. The doped region is disposed in the substrate, the DTI structure passes through the epitaxial layer and is coupled with the doped region, and the first contact is disposed in the epitaxial layer.