The invention belongs to the technical field of electronic
ceramic substrate materials, and particularly relates to a preparation method of a
microcrystalline glass composite
silicon nitride ceramic substrate, which is prepared from the following raw materials: 1-5% of alpha-phase
silicon nitride powder, 86-95% of beta-phase
silicon nitride powder, 0.2-3% of
metal silicon
powder, 2.5-8% of glass powder and 1.3-8% of
metal oxide. The preparation method comprises the following steps: S1, mixing and
grinding raw materials to obtain
ceramic slurry; s2, adding Arabic gum into the ceramic
slurry as a binder, and carrying out
spray granulation;
granulation powder is obtained; s3, carrying out
dry pressing molding and cold isostatic pressing treatment on the
granulation powder to prepare a ceramic plate blank; and S4,
sintering and crystallizing the ceramic plate blank. According to the invention, the
glass ceramic powder is introduced as a
sintering aid and a second phase, and the
sintering temperature of the
silicon nitride is obviously reduced from the conventional temperature of more than 1800 DEG C to 1500 DEG C by utilizing the
liquid phase effect of the
glass ceramic powder in the sintering process, so that two
modes of air pressure sintering and normal pressure sintering can be used, and the
energy consumption and the requirements on equipment are reduced.