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364results about How to "Small hysteresis" patented technology

Semiconductor wafer grinding force on-line measurement device and force-controlling grinding method

The invention belongs to the ultraprecision machining field of the hard and brittle semiconductor crystalline materials and relates to a grinding force on-line measurement device used in the grinding process of the semiconductor wafer and a force-controlling grinding method. The invention discloses a semiconductor wafer grinding force on-line measurement device which is used as the feedback element of a grinding force adaptive control system. The grinding force measurement device adopts the piezoelectric measuring principle and contains a sensor part and a data processing unit, wherein the sensor part is used for the on-line measurement of the radial force Fr, the tangential force Ft and the axial force Fz; and the data processing unit is used to collect and analyze the grinding force data and perform feedback control to the feed speed and feed amount of the grinding wheel, thus the aim of on-line measurement can be achieved. The invention has the following advantages: the grinding force on-line measurement device has simple structure, and the modifications to the original equipment are less; the grinding force on-line measurement links are fewer, the response speed is fast, and the precision is high; and the grinding efficiency of the semiconductor wafer can be increased and the thickness of the damaged layer is reduced.
Owner:宁波知行半导体有限公司

Accurate cycloid pin gear epicyclic transmission apparatus

InactiveCN101280824AEliminate or reduce hysteresisSmall hysteresisToothed gearingsEngineeringCycloid
The invention discloses a precision cycloidal-pin wheel planetary transmission device which comprises a machine base, a power input shaft, an eccentric bushing provided with two off centers, a cycloidal wheel I, a cycloidal wheel II, a dowel pin for cycloidal wheels, a power output shaft, a wheel spider I, a wheel spider II and two sets of pin gears that are respectively arranged on the wheel spider I and the wheel spider II; one end of the dowel pin for cycloidal wheels is fixedly arranged on a flange of the power output shaft and the other end is inserted into an isotonic pin hole of the cycloidal wheel I and the cycloidal wheel II to form a pin type output mechanism; the direction of a tooth outline on which the cycloidal wheel I and a pin gear I are meshed and the direction of a tooth outline on which the cycloidal wheel II and a pin gear II are meshed are reverse. The precision cycloidal-pin wheel planetary transmission device of the invention can eliminate or reduce tooth clearance during the transmission process, thereby improving transmission efficiency, reducing vibration and noise and prolonging service life; the relative position of the two wheel spiders in a circumferential direction is adjustable, so that meshed gap and return difference can be controlled effectively and more options are available when shaping the tooth outline of the teeth of the cycloidal wheels.
Owner:CHONGQING UNIV

Simulation and optimization system of flue gas desulfurization process of thermal power plant

The invention discloses a simulation and optimization system of a flue gas desulfurization process of a thermal power plant. The simulation and optimization system is composed of a server and a client. A limestone-gypsum wet fuel gas desulfurization model is firstly established to realize simulation of the desulfurization process; and a multi-objective normalized optimization method is used for optimizing and simulating artificially set work conditions so as to sieve an optimal operating condition under each work condition and package the optimal operating condition as an optimized operation database. The server monitors a real-time data document of a DCS (Distributed Control System) sent by an SIS (Supervisory Information System) database, finds matched records in the optimized operation database via a way of database retrieval and then sends the real-time data and relevant advices to the client for a user to check. The server and the client realize connection and user management through an LAN (Local Area Network). The simulation and optimization system, disclosed by the invention, has the advantages of providing an optimization control platform for the desulfurization system of the thermal power plant, providing optimized operation advices and early warnings for operators without directly operating the DCS system and thereby improving normal running rate, desulfurization efficiency and SO2 discharge concentration attainment rate of the desulfurization system.
Owner:FUJIAN PROVINCIAL ACADEMY OF ENVIRONMENTAL SCI

Closed cooling system of gas cooled polysilicon ingot furnace

The invention relates to the manufacture technical field of polysilicon ingot furnaces, and aims to provide a closed cooling system of a gas cooled polysilicon ingot furnace. The system comprises a heat exchange platform positioned on a supporting column and used for placing a crucible, wherein a cooling gas channel is arranged in the heat exchange platform; a gas inlet and a gas outlet at two ends of the cooling gas channel are respectively connected with a cooling gas inlet pipeline and a cooling gas outlet pipeline; and the heat exchange platform, the cooling gas inlet pipeline, the cooling gas outlet pipeline, a cooling gas power pump group and a cooler form a closed circulation loop of the cooling gas. Compared with the cooling method of radiation cooling and water cooling, the system related by the invention has strong gas cooling control capacity and high industrial controllability; the gas is fed into the heat exchange platform evenly, so that the whole temperature of the heatexchange platform is even, which is in favor of even nucleation of a silicon melt at the bottom of the crucible; and the reducing speed of the temperature at the bottom of the crucible can be precisely controlled during the crystal growth.
Owner:ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL +1

Flexible capacitive pressure sensor and preparation method thereof

The invention relates to the technical field of capacitive pressure sensors, in particular to a flexible capacitive pressure sensor and a preparation method thereof. The sensor comprises a top electrode, a bottom electrode, composite material dielectric layers and a wire, wherein the top electrode and the bottom electrode are each composed of a substrate of which the surface is provided with a conductive polymer layer; the wire extending to the outsides of the conductive polymer layers is embedded in the conductive polymer layers; the composite material dielectric layers are arranged on the surfaces of the conductive polymer layers on the top electrode and the bottom electrode; the flexible capacitive pressure sensor is formed by combining the surfaces, provided with composite material dielectric layers, of the top electrode and the bottom electrode in a face-to-face mode. The prepared high-performance flexible capacitive pressure sensor is high in sensitivity, small in hysteresis andgood in repeatability, the preparation cost is low, the method is simple, large-scale production can be achieved, and the sensor can be widely applied to the fields of a human-computer interaction system, a detection sensor system, medical health detection equipment and the like.
Owner:三三智能科技(日照)有限公司

Design and manufacture technology of sensor chip for detecting magnetic field and acceleration

The invention discloses a design and manufacture technology of a sensing unit of a sensor and one or more types of sensor chips consisting of the sensing unit, in particular to one or more types of sensor chips capable of detecting the magnetic field parallel and vertical to the surface of the chip and the acceleration of an object. The invention has the advantages that the process is simple and easy, the sensitivity is high, and batched production is easily realized; the sensing unit of the sensor comprises a wafer substrate, a seed layer, a soft magnetic material layer, a conducting layer and a N-layer structure; the conducting layer is wrapped by the soft magnetic material layer; the N-layer structure is formed by combination of the soft magnetic material layer and the conducting layer; and simultaneously a bent structure is formed by N long lines in the plane (the sensing unit is a single-strip-shaped structure when N is equal to 1). The sensing unit of the sensor realizes single-axis, double-axis and three-axis magnetic field detection by different packaging forms. Simultaneously, due to the combination of the sensing unit of the sensor and a cantilever structure with magnetic mass blocks, the single-axis, double-axis and three-axis acceleration detection can be realized.
Owner:陈磊

Rotational joint module of modularized reconfigurable robot

The invention discloses a rotational joint module of a modularized reconfigurable robot. On the basis of planetary reduction, one level of harmonic reduction is added on motor output, a reduction ratio is improved, an output torque is added, and the transmission precision of the module is improved. An upper end cover and a lower end cover serve as installation joints, the flange-type design with locating seam allowances and pin holes is adopted, and the module is accurately and conveniently connected and located. All electric wires are arranged in a cage-type support, the upper end cover and the lower end cover and are isolated and protected by an outer cover, thereby avoiding the problem that the electric wires are coiled when a robot moves. Mechanical limit and electric limit are arranged in the module. On the basis of adopting an incremental coded disc, a rotating potentiometer is added to measure the assistant position of module movement, absolute position information is recorded under the condition of accidental power failure, and the system can continuously work after being electrified. The rotational joint module has the advantages of reasonable and simple structure, high precision and inner routing, is convenient to install and position and is safe and reliable to use.
Owner:SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI

LaFeSi based magnetic refrigeration composite material and preparation method and application thereof

The invention discloses a LaFeSi based magnetic refrigeration composite material and a preparation method and application thereof. The LaFeSi based magnetic refrigeration composite material comprises functional body components such as LaFeSi based alloy particles and matrix components such as low-melting-point metal or alloy, and the LaFeSi based alloy particles are bonded and coated by the matrix components to form a bulk material; and the LaFeSi based alloy particles are of a NaZn13 type structure. According to the LaFeSi based magnetic refrigeration composite material and the preparation method and application thereof, composite hot pressing is conducted between the cheap and easily-obtained low-melting-point metal or alloy and the LaFeSi based alloy particles, the appropriate low-melting-point components are selected, the pressing pressure, the hot pressing temperature, the pressure maintaining time and the like are adjusted, and thus the high-thermal-conductivity LaFeSi based magnetic refrigeration composite material can be obtained; the magnetic entropy change of the LaFeSi based magnetic refrigeration composite material is less reduced compared with that before hot pressing, the magnetic hysteresis loss is low, and thermal hysteresis is avoided; and in addition, the process is simple and easy to operate, the process conditions are relatively mild, energy consumption is little, the cost is low, the repeatability is good, and the preparation method can be widely used in preparation of magnetic refrigeration materials.
Owner:NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI

Wind cup type fiber Bragg grating wind speed and direction sensor

The invention relates to a wind cup type fiber Bragg grating wind speed and direction sensor, which belongs to the technical field of photoelectron measurement. Three wind cups are arranged in a way of forming included angles of 120 degrees together with one another; the central axis of a 1# wind cup is vertical to a true north direction; grooves are formed in the lateral edges of the three wind cups to the centers of the wind cups, and are connected with the free ends of three equal-strength cantilever beams respectively in the centers of the wind cups; the three equal-strength cantilever beams are fixedly arranged on the upper half part of a boss in a helical rising way; every two gratings are symmetrically stuck to the central axes of the front face and the back face of each equal-strength cantilever beam respectively after being coupled; six fiber Bragg gratings are coupled in a boss base through input and output fibers; and the input and output fibers are connected to a fiber grating signal demodulator. A fiber grating information material has the special physical properties of small size, electromagnetic interference resistance, long service life and the like, so that real-time online monitoring of the wind speed and wind direction of a wind load alarm control unit is realized, and high interference resistance and high accuracy are realized.
Owner:KUNMING UNIV OF SCI & TECH +1

Double-axis positioning transmission mechanism

The invention discloses a double-axis positioning transmission mechanism, and mainly solves the problems that the existing double-axis positioning transmission mechanism is complicated in structure, low in transmission efficiency, poor in rigidity and short in service life. The double-axis positioning transmission mechanism is characterized by comprising a vertical rotating box and a horizontal rotating box which are arranged on a fixed frame, wherein motors on the vertical rotating box and the horizontal rotating box respectively drive a vertical transmission mechanism and a horizontal transmission mechanism through first transmission mechanisms; the vertical transmission mechanism and the horizontal transmission mechanism drive output pieces to respectively drive the corresponding rotating box to rotate; output surfaces which are connected with a load are arranged on the vertical rotating box and the horizontal rotating box. The double-axis positioning transmission mechanism is compact in structure, simple, practicable, large in the output shaft and rigidity, capable of realizing outputting at the two ends, light in the whole weight, suitable for industrialized large-batch production, high in transmission ratio and transmission efficiency, low in return difference, high in bearing capability and shock resistance, and long in service life.
Owner:ZHEJIANG HENGFENGTAI REDUCER MFG

Novel proportion electromagnet

The invention provides a novel proportion electromagnet and belongs to the technical field of electromagnets. The electromagnet solves the problem that the existing proportion electromagnet is unreasonable in design and cannot ensure concentricity of two bearings arranged at two ends of a push rod. The novel proportion electromagnet comprises a casing with a first inner cavity and a second inner cavity. A magnetic core pipe, a coil assembly and a first sealing ring are arranged in the first inner cavity, an output through hole and a containing cavity are formed in the magnetic core pipe, an armature assembly formed by an armature and a push rod is installed in the containing cavity, a first bearing is sleeved at one end of the push rod, a self-lubricating bearing coaxial with the push rod is sleeved at the other end, a bearing seat for installing the self-lubricating bearing is connected onto one end of the containing cavity close to the second inner cavity in a sealing mode, and the push rod sequentially penetrates the first bearing, the armature and the self-lubricating bearing and partially stretches into the second inner cavity. The proportion electromagnet has the advantages of being reasonable in design, reducing matched size between parts and being capable of ensuring the concentricity of the two bearings arranged at two ends of the push rod.
Owner:NINGBO HOYEA MACHINERY MFG
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