Compound polymer resistor type film humidity-sensitive element and its making process

A composite polymer and humidity sensor technology, which is applied in the field of composite polymer resistive thin film humidity sensors, can solve the problems of low high humidity sensitivity, unsatisfactory stability and reliability, poor resistance to high humidity environment, etc. Achieve the effects of good response linearity, high stability, high humidity resistance, and rapid response

Inactive Publication Date: 2002-12-11
上海华实纳米材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, it also has the disadvantages of low high humidity sensitivity, poor resistance to high humidity environment, and unsatisfactory stability and reliability.

Method used

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  • Compound polymer resistor type film humidity-sensitive element and its making process
  • Compound polymer resistor type film humidity-sensitive element and its making process
  • Compound polymer resistor type film humidity-sensitive element and its making process

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0017] The preparation method of the humidity-sensitive film is to use a dipping machine to immerse the ceramic interdigitated gold electrode in the moisture-sensitive liquid for 1-3 minutes, pull it at a speed of 2-6 mm / s, take it out, dry it naturally at room temperature for 20-60 minutes, and place it for 90 minutes. Heat treatment at ~110°C for 20-40 minutes.

[0018] The moisture-sensitive liquid is (1) polymer polyelectrolyte—sodium polystyrene sulfonate, with a molecular weight of 70,000 to 400,000; (2) additive—sodium carboxymethyl cellulose; the weight ratio of the two is 1:0.5 to 2, It is configured as an aqueous solution with a concentration of 0.2% to 4% by weight.

[0019] The preparation method of the protective film is to use a dipping machine to immerse the ceramic interdigitated gold electrode with a sensitive film in a celluloid acetone solution with a concentration of 1% to 4% by weight for 1 to 3 minutes, and to increase the temperature at a speed of 2 to 6...

Embodiment

[0022] 1) Electrode cleaning

[0023] Soak and clean the ceramic interdigitated gold electrode in absolute ethanol and acetone, and dry it for later use;

[0024] 2) Dip coating of humidity sensitive film and post-treatment

[0025] Dip coating machine is used to immerse ceramic interdigitated gold electrode into polystyrene sodium sulfonate and additive sodium carboxymethyl cellulose aqueous solution (the two are configured to be 0.2%~4% by weight with a weight ratio of 1:0.5~2. % aqueous solution), after 1 to 3 minutes, pull it at a speed of 2 to 6mm / sec, take it out, dry it naturally at room temperature for 20 to 60 minutes, then place it in an oven, and heat treat it at 90 to 110°C for 20 to 40 minutes;

[0026] 3) Dip coating protective film and post-treatment

[0027] Use a dipping machine to immerse the ceramic interdigitated gold electrode with a sensitive film in a celluloid acetone solution (1% to 4% by weight), and pull it at a speed of 2 to 6 mm / s after 1 to 3 mi...

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Abstract

The compound polymer resistor film humidity-sensitive element is produced on ceramic substrate and through vaporization coating 5-8 pairs of gold finger electrodes, soaking in humidity-sensitive liquid to form humidity-sensitive film, soaking in acetone solution of celluloid to form protective film, heat treatment, and electrical ageing at high temperature and high humidity environment. The said process can produce humidity-sensitive element with wide humidity measuring range, linear response, high sensitivity, fast response, high humidity environment tolerance, good repeatability, high long-tern stability and excellent humidity response characteristic, and can be used in precise measurement and control of environment humidity.

Description

technical field [0001] The invention relates to a compound polymer resistive thin film humidity sensitive element and a manufacturing method thereof. Background technique [0002] Polymer humidity sensor is a new type of humidity sensor widely used at present. With the advantages of fast response, high sensitivity and strong anti-environmental pollution ability, it has gradually replaced the inorganic ceramic humidity sensor and occupied a dominant position. Among them, the polymer resistive humidity sensor has become a research hotspot because of its good response characteristics, wide range of humidity measurement, easy manufacture, easy integration, miniaturized mass production, and low price. However, it also has the disadvantages of low sensitivity to high humidity, poor ability to withstand high humidity environments, and unsatisfactory stability and reliability. Contents of the invention [0003] The object of the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/04G01N27/12G01N27/30G01N27/333
Inventor 杨慕杰李扬黄德欢
Owner 上海华实纳米材料有限公司
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