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661results about How to "Raise the natural frequency" patented technology

Semiconductor wafer grinding force on-line measurement device and force-controlling grinding method

The invention belongs to the ultraprecision machining field of the hard and brittle semiconductor crystalline materials and relates to a grinding force on-line measurement device used in the grinding process of the semiconductor wafer and a force-controlling grinding method. The invention discloses a semiconductor wafer grinding force on-line measurement device which is used as the feedback element of a grinding force adaptive control system. The grinding force measurement device adopts the piezoelectric measuring principle and contains a sensor part and a data processing unit, wherein the sensor part is used for the on-line measurement of the radial force Fr, the tangential force Ft and the axial force Fz; and the data processing unit is used to collect and analyze the grinding force data and perform feedback control to the feed speed and feed amount of the grinding wheel, thus the aim of on-line measurement can be achieved. The invention has the following advantages: the grinding force on-line measurement device has simple structure, and the modifications to the original equipment are less; the grinding force on-line measurement links are fewer, the response speed is fast, and the precision is high; and the grinding efficiency of the semiconductor wafer can be increased and the thickness of the damaged layer is reduced.
Owner:宁波知行半导体有限公司

Optimum design method of non-bearing frame structure of light vehicle

The invention provides an optimum design method of a non-bearing frame structure of a light vehicle. The optimum design method comprises the steps of establishing a three-dimensional geometrical model of the original frame structure of the light vehicle by use of SolidWorks software and outputting the model in the IGES (Initial Graphics Exchange Specification) data file format, thereby obtaining the IGES model of the frame structure, next, reading the IGES model of the frame structure in Hypermesh software, performing geometrical processing and dividing finite element meshes by use of the Hypermesh software, and performing topological optimization on the cross beam structure of the frame by use of the structure optimization function of the Hypermesh software without changing the structural forms of the longitudinal beam and the attached seats of the frame, thereby realizing the optimum design of the arrangement position and the structural form of the cross beam structure. The optimum design method of the non-bearing frame structure of the light vehicle is capable of improving the bending rigidity and torsional rigidity of the frame of the light vehicle and the inherent frequency of the frame structure without increasing the weight of the frame structure, thereby ensuring that the frame has relatively high overall rigidity and improving the reliability, security, operation stability and vibration property of the vehicle.
Owner:ACADEMY OF ARMORED FORCES ENG PLA

Method for testing and analyzing frictional noise and test device for method

The invention discloses a method for testing and analyzing frictional noise and a test device for the method. The method comprises that: a lower fixture clamping a lower friction part is fixed onto a reciprocating device; an upper fixture clamping an upper friction part penetrates through a horizontal support to contact with the bottom of a strain force sensor; a three-dimensional acceleration sensor is mounted on the upper fixture; two ends of the horizontal support are fixed onto support bases by piezoelectric force sensors; and the strain force sensor is fixed to the bottom of a two-dimensional moving table. A sensing end of an acoustic sensor is close to a contact interface of the upper friction part and the lower friction part, and the two-dimensional moving table is controlled so that the upper friction part and the lower friction part are controlled to do reciprocating friction motion, and the three sensors accurately, synchronously and dynamically acquire the frictional noise,vibration acceleration and frictional force and analyze the frictional noise, the vibration acceleration and the frictional force in real time. Therefore, mutual relation and influencing law of the frictional noise, the interface and characteristics of a system are accurately analyzed, a mechanism of production of the frictional noise is disclosed, and a more accurate and reliable test basis is provided for realizing noise-reduction design for mechanical equipment, improving performance of the mechanical equipment and prolonging the service life of the mechanical equipment.
Owner:SOUTHWEST JIAOTONG UNIV

Beam and groove combined stepped island film micropressure sensor chip and manufacturing method thereof

The invention relates to a beam and groove combined stepped island film micropressure sensor chip and a manufacturing method thereof. The chip comprises a thin film in the middle of a substrate, four shallow grooves are formed along the edges of the upper portion of the thin film, four embossment beams are arranged between the ends of the adjacent shallow grooves and connected with the substrate, and the upper surfaces of the embossment beams, the upper surface of the thin film and the bottom faces of the shallow grooves form a beam and groove combined stepped thin film structure; four piezoresistor strips are arranged on the four embossment beams and connected through metal leads into semi-open-loop Wheatstone bridges, and the output ends of the bridges are connected with bonding pads; four bumps are evenly distributed along the edges of the lower portion of the thin film and connected with the substrate; four mass blocks are spaced from the bumps, and the bumps are connected to the thin film. The manufacturing method includes the steps that the piezoresistor strips are made of SOI silicon wafers in an oxidized mode at high temperature, and an Ohmic contact region is obtained to manufacture the metal leads and the bonding pads; then the four embossment beams and the shallow grooves are manufactured, and the back face of the substrate and anti-overload glass are bonded. The beam and groove combined stepped island film micropressure sensor chip has the advantages of being high in sensitivity and linearity and the like.
Owner:XI AN JIAOTONG UNIV

Ultra-high speed cutting three-dimensional dynamic force test platform

The invention discloses a three-dimensional dynamic force test platform for ultra-high-speed cutting, which includes a structure to be cut, four resistance strain gauge groups, an integrally formed upper surface platform, an elastic cylinder, eight elastic thick slices, four elastic thin slices, a support The base; the elastic cylinder is located on the supporting base; 8 elastic slabs are in pairs, 4 elastic sheets correspond to 4 groups of elastic slabs one by one, and the two ends of the elastic sheets are respectively connected to two elastic slabs in each group. One end of the sheet constitutes 4 elastic groups, and the 4 elastic groups are respectively located around the elastic cylinder, and the other ends of the two elastic slabs in each elastic group are respectively connected to the support base and the upper surface platform; the upper surface platform is located on The upper part of the elastic cylinder and the elastic group is connected with the elastic cylinder; the structure to be cut is arranged on the upper surface platform; the resistance strain gauge group is respectively fixed at the middle position of the four elastic sheets. This kind of test platform can meet the requirements of ultra-high speed cutting force signal measurement, and realize the accurate measurement of three-dimensional dynamic force.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Permanent magnet low frequency single-degree-of-freedom vibration isolation mechanism based on negative stiffness theory

The invention discloses an annular permanent magnet low frequency vibration isolation mechanism based on a negative stiffness theory. The mechanism comprises an upper rubber sheet, an inner annular permanent magnet fixing mandrel, an upper rubber sheet upper pressing ring, an upper rubber sheet outer pressing ring, an outer annular permanent magnet, a lower rubber sheet, a lower rubber sheet inner pressing sheet, a lower rubber sheet outer pressing ring, an outer annular permanent magnet fixing sleeve and an inner annular permanent magnet, wherein the inner annular permanent magnet is magnetized axially; the outer annular permanent magnet is radially magnetized; a positive stiffness system consists of the inner annular permanent magnet and the outer annular permanent magnet; a negative stiffness system consists of the upper rubber sheet and the lower rubber sheet; and the positive stiffness system and the negative stiffness system are used in parallel to form the low frequency vibration isolation mechanism. Three or four single-degree-of-freedom vibration isolation mechanisms are used in parallel to realize three-degree-of-freedom low frequency vibration isolation. When the vibration isolation mechanism has the largest magnetic force, the stiffness of the vibration isolation mechanism approximates to zero. Without an outside air source, the vibration isolation mechanism has a prospect of being used in vacuum, has the characteristics of simple structure and low cost, is easy to process, and can be applied to the fields of optics, acoustics, biologics, semiconductor manufacturing, precise measurement and the like.
Owner:TSINGHUA UNIV +1

Small-size speed change control moment gyroscope

InactiveCN104075700AIncrease moment of inertia/mass ratioFirmly connectedRotary gyroscopesGyroscopeLow speed
The invention discloses a small-size speed change control moment gyroscope, and belongs to the technical field of control moment gyroscopes. The small-size speed change control moment gyroscope comprises a high-speed component, a connection bracket and a low-speed component, wherein the high-speed component supplies constant angular momentum in a control moment gyroscope mode and outputs fine moment required by whole satellite attitude control in a flywheel mode; the connection bracket is connected with the high-speed component and the low-speed component and guarantees the orthogonal perpendicularity between the angular momentum direction and the axial direction of a framework; the low-speed component supports the high-speed component and the connection bracket and supplies a mounting interface for a whole satellite; in the control moment gyroscope mode, large moment which is required by fastmoving of the whole satellite and is also orthogonal to the angular momentum direction and the axial direction of the framework is generated; in the flywheel mode, the fine moment output by the high-speed component is transmitted to the whole satellite for the attitude control. The speed change control moment gyroscope disclosed by the invention realizes the high-precision framework locking, the minimization, the light weight and the high rigidity, and is suitable for the application to small quick satellites.
Owner:BEIJING INST OF CONTROL ENG

Improved wind load pressure sensor

The invention discloses an improved wind load pressure sensor, comprising a sensor shell, an oil charge sensitive body and a signal conditioning circuit, wherein, the oil charge sensitive body is composed of a sensitivity body shell in the form of a groove, a silicon integrated sensitive chip and an elastic separation film fixed on the opening of the groove, the ring circumambience of the back pressure face of the silicon integrated sensitive chip is fixed at the bottom of the groove through a fixed supporting ring in a sealing manner, the back pressure face of the silicon integrated sensitive chip is communicated with ambient pressure through a back pressure airway tube, the pressure surface of the silicon integrated sensitive chip is provided with a Wheatstone bridge on which a strain resistor is led to the signal conditioning circuit through an internal lead and a lead column and then is output, the non-pressure surface of the silicon integrated sensitive chip is provided with a temperature sensor, a heating resistor and a constant temperature control circuit controlling the heating resistor according to the temperature sensor, and silicon oil is filled among the elastic separation film, a groove internal ring surface and the pressure surface of the silicon integrated sensitive chip. The invention can control the temperature of the oil charge sensitive body, and eliminate the problem that an oil charge micro-pressure sensor is in fault due to the influence of ambient temperature, thereby realizing high-accuracy survey of wind loads.
Owner:KUNSHAN SHUANGQIAO SENSOR MEASUREMENT CONTROLLING

Radially-adjustable heavy-duty cutting layer milling cutter

The invention discloses a radially-adjustable heavy-duty cutting layer milling cutter applicable to the field of heavy-type milling processing, and aims to solve the problems that during heavy-duty milling water chamber end enclosing, surfaces of workblanks are uneven, multi-defective and poor in machinability; cutting blades are prone to being damaged by impacts during rough machining or hogging machining; during milling, cutting depth changes frequently, which results in that not all cutter teeth are involved in cutting, utilization rate of the milling cutter is low, the cutting layer milling cutter of a fixed radial stepped structure is short in service life, machining efficiency is influenced and the like. Cutter teeth of the cutting layer milling cutter are designed in a stepped distribution, by means of increasing cutting depth, metal removal rate is increased, and machining efficiency is improved; by the aid of a radial adjusting mechanism, the cutting blades in an upper layer are enabled to move radially, a proper overhang amount can be selected, and strength of the cutting blades is enhanced. A radially-adjustable cutter pad is positioned by a pad block, auxiliary time including cutter amounting time, cutter adjusting time and the like is saved; up-warp chip holding grooves are formed in a cutter body in design, the depths of the positions, close to the cutting blades, of the chip holding grooves are far larger than that of the positions, distant from the cutting blades, of the chip holding grooves, up-warp slopes are formed in the chip holding grooves, and when cutting chips flow in the chip holding grooves, the chips can be separated from the cutter body quickly, friction between the chips and the cutter body is reduced, and service life of the cutter body is prolonged.
Owner:HARBIN UNIV OF SCI & TECH

Pretensioned prestressing composite girder and method for producing the same

Provided is a pre-tensioned prestressed composite beam, which is an I-shaped beam composed of H-shaped steel and concrete, the web plate of the H-shaped steel is provided with trapezoidal holes (14) at intervals, the upper flange and the lower flange of the H-shaped steel are welded with shearing nails, the outer periphery of the lower flange is enclosed with concrete to form a steel-concrete lower flange (4), and the inside of the steel-concrete lower flange is embedded with prestressed steel twisted wire by pretensioning method. The manufacturing method of the composite beam is that: a steel plate is cut into two tooth-shaped plates along tooth-shaped line to be respectively as the trapezoidal hole plates of the H-shaped steel flange, the trapezoidal hole plates are welded with steel plates to form the web plate, the web plate is welded with the upper flange and the lower flange to form the H-shaped steel (1) having trapezoidal holes, the H-shaped steel is put on a base surface with the lower flange downward, the two sides of the lower flange are provided with side molds, a stirrup (7) is arranged and steel twisted wires (3) are longitudinally fastened between the two side molds, the steel twisted wire is tensioned to tensioning state, the concrete for enclosing the H-shaped lower flange is poured and tamped between the two side molds, the steel-concrete lower flange (4) is formed after demolding, and the steel twisted wire at tensioning state is loosened after the concrete reached to predetermined strength and is cut off at predetermined position. The invention is suitable for beams of buildings.
Owner:杨峰
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