The present invention belongs to the field of micro-electromechanical systems (MEMS), and specifically relates to a differential resonant MEMS
accelerometer with
adjustable stiffness, comprising: a sensitive
mass block; a folded beam, one end of the folded beam is connected to the sensitive
mass block, and the other end of the folded beam is connected to an
anchor point; a straight
beam resonator, one end of the straight
beam resonator is connected to the sensitive
mass block, and the other end of the straight
beam resonator is connected to the
anchor point, and the straight beam
resonator is symmetrically placed about the center of the sensitive mass block to form a differential structure; a driving
electrode and a sensing
electrode are distributed on the same side of the straight beam
resonator, and a control
electrode is distributed on both sides of the straight beam
resonator, and the driving electrode, the sensing electrode and the control electrode are of the same size, and the driving electrode, the sensing electrode and the control electrode are at the same distance from the straight beam resonator. The flexural stiffness of the straight beam resonator can be adjusted, the sensitivity and
signal-to-
noise ratio of the
accelerometer are improved, and a mechanical frequency locking phenomenon is generated, and the early warning effect of acceleration is achieved by switching between two mechanical locking frequencies.