Three degree of freedom micro-vibration suppression platform and control method thereof

Abstract

The invention provides a three degree of freedom micro-vibration suppression platform and a control method thereof, belongs to vibration isolation and suppression devices, and solves problems of complicated structure and complex control method of a prior active-passive composite vibration isolation structure. The platform provided by the invention includes a base platform, a load platform, three sets of single degree of freedom active-passive composite vibration isolation assemblies which are totally identical and a controller. The upper end and the lower end of each single degree of freedom active-passive composite vibration isolation assembly are connected with the load platform and the base platform. The control method provided by the invention includes calculating logic axis translation signals, calculating logic axis control signals, calculating physical axis real time control signals and transmission steps. The platform provided by the invention is simple in structure, adjustable in rigidity, is capable of suppressing and isolating three degree of freedom microvibration in rotation directions of an X axis and a Y axis and a translation direction of a Z axis and is suitable for different occasions. Microvibration of different frequency bands can be dampened effectively and reliable guarantee can be provided for precision machining and measurement equipment in a microvibration environment.

Description

technical field [0001] The invention belongs to a micro-vibration isolation and suppression device, in particular to a three-degree-of-freedom micro-vibration suppression platform and a control method thereof. Background technique [0002] In some occasions, the working environment is complex, creating a corresponding micro-vibration environment, and these micro-vibrations are key factors affecting equipment processing or working accuracy. The passive vibration isolator is composed of mass-spring-damping elements. Due to the inherent contradiction between the transmission rate of low-frequency vibration and the attenuation rate of high-frequency vibration, it cannot meet the vibration isolation requirements of precise micro-vibration; compared with passive vibration isolation mechanisms, Active vibration isolation has greatly improved the performance of the system, but it requires a sensor-actuator pair and a corresponding active control system, which requires active vibrati...

AI Technical Summary

Problems solved by technology

[0011] The invention provides a three-degree-of-freedom micro-vibration suppression platform, and at the same time provides its control method, which solves the problems of complex structure and cumbersome control methods existing in the existing active-passive composite vibration isolation mechanism

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