Six-degree-of-freedom micro vibration abatement platform and control method thereof

Abstract

The invention discloses a six-degree-of-freedom micro vibration abatement platform. The six-degree-of-freedom micro vibration abatement platform comprises a foundation platform, a load platform, six sets of totally identical single-degree-of-freedom active / passive composite vibration insulating devices, and a controller; and the upper and lower two ends of each set of single-degree-of-freedom active / passive composite vibration insulating devices are respectively connected with the foundation platform and the load platform. A control method comprises logic shaft signal calculation, logic shaft control signal calculation, physical shaft real-time control signal calculation and transfer steps. The six-degree-of-freedom micro vibration abatement platform is simple in structure and adjustable in rigidity, can inhibit and isolate six-degree-of-freedom micro vibration in translation and rotation directions of axles X, Y and Z, can be suitable for different places, can effectively attenuate micro vibration on different frequency bands, provides reliable guarantee to precise machining and measuring equipment under micro vibration environments, solves the problems of complex structure and complex control mode in a traditional active / passive composite vibration insulating mechanism, and realizes multi-degree-of-freedom vibration inhibition.

Description

technical field [0001] The invention belongs to the field of micro-vibration isolation and suppression, and more specifically relates to a six-degree-of-freedom micro-vibration suppression platform and a control method thereof. Background technique [0002] There are micro-vibrations in some complex working environments, and these micro-vibrations are the key factors affecting the processing or working accuracy of equipment. The traditional passive vibration isolator is composed of mass-spring-damping elements. Due to the inherent contradiction between the transmission rate of low-frequency vibration and the attenuation rate of high-frequency vibration, it cannot meet the vibration isolation requirements of precision machining; compared with passive vibration isolation mechanisms, Active vibration isolation has greatly improved the performance of the system, but it requires a sensor-actuator pair and a corresponding active control system, which requires the active vibration ...

AI Technical Summary

Problems solved by technology

[0009] The invention provides a six-degree-of-freedom micro-vibration suppression platform, and at the same time provides its control method, which solves the problems of complex structure and cumbersome control methods existing in the existing active-passive composite vibration isolation mechanism

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