Low-frequency two-degree-of-freedom horizontal vibration isolation mechanism

Abstract

The invention relates to a low-frequency two-degree-of-freedom horizontal vibration isolation mechanism which comprises three parts, namely an upper support plate, a rigid ball and a lower support plate, wherein the upper support plate is provided with an upper support plate arc; the lower support plate is provided with a lower support plate arc; the rigid ball is positioned between the upper support plate arc and the lower support plate arc; the upper support plate arc is in point contact with the rigid ball; and the lower support plate arc is in the point contact with the rigid ball. When the lower support plate generates displacement in a horizontal direction by being subjected to external force from a substrate, the rigid ball can take pure rolling relative to the lower support plate arc so that the upper support plate arc takes the pure rolling relative to the rigid ball, the integral mechanism can generate displacement relative to an original balance position, and the integral mechanism can be reset to the original balance position under the action of the gravity of the mechanism and loads. The low-frequency two-degree-of-freedom horizontal vibration isolation mechanism disclosed by the invention has the characteristics of simple and compact structure, high space utilization ratio, irrelevance of inherent frequency and the loads, and the like.

Description

technical field [0001] The invention relates to a low-frequency vibration isolation mechanism, which is mainly used for ultra-low frequency vibration isolation of small and medium-sized instruments and equipment in the fields of optics, acoustics, semiconductor manufacturing, precision measurement and ultra-precision. Background technique [0002] Semiconductor manufacturing devices, precision instruments, three-dimensional or six-dimensional testing equipment and other related fields must be installed on a platform that can isolate small substrate disturbances in order to achieve better results. Typically, equipment associated with precision instruments is mounted on air spring vibration isolation platforms. In order to improve the vibration isolation performance of the vibration isolation system, the natural frequency must be reduced. In order to reduce the natural frequency of the air spring, the space ratio of the upper and lower chambers of the air spring must be small...

AI Technical Summary

Problems solved by technology

However, laminated rubber has certain drawbacks, when the load mass changes, the natural frequency also changes; moreover, the load placement may exhibit instability due to the reduced load placement area due to shear deformation

[0003] At present, horizontal vibration isolation mechanisms include three-wire pendulum, inverted pendulum and spring combination, and positive and inverted pendulum combination. Difference

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