Three-degree-of-freedom ultralow frequency vibration absorber

Abstract

The invention provides a three-degree-of-freedom ultralow frequency vibration absorber which has a compact structure and belongs to the field of accurate vibration attenuation. The vibration absorber respectively utilizes the principle that the positive and negative rigidities are connected in parallel in three degrees of freedom to realize ultralow frequency vibration attenuation, greatly reduces the rigidity of the system on the premise of ensuring the bearing capacity of the system, and realizes the ultralow inherent frequency. The three-degree-of-freedom ultralow frequency vibration absorber adopts the manner that the magnetic positive rigidity and the magnetic negative rigidity are connected in parallel in the z direction and the manner that a flat spring and the magnetic negative rigidity are connected in parallel in the x direction and y direction, so that the integral structure is more compact, the ultralow inherent frequency is provided, excellent vibration attenuation effect is provided for medium-high frequency vibration interference, the low frequency vibration and the ultralow frequency vibration are effectively restrained, and the three-degree-of-freedom ultralow frequency vibration absorber is applicable to the accurate processing equipment and measuring equipment sensitive to vibrations.

Description

technical field [0001] The invention belongs to the field of precision damping, and in particular relates to a three-degree-of-freedom ultra-low frequency damper. The three-degree-of-freedom ultra-low frequency shock absorber involved in the present invention has an extremely low natural frequency, can not only isolate medium and high frequency vibrations, but can also effectively isolate low-frequency and ultra-low-frequency vibrations, and is suitable for precision processing and measuring equipment sensitive to low-frequency vibrations . Background technique [0002] With the continuous development of a series of precision processing and measurement technologies represented by lithography machines, scanning probe microscopes (SPM), scanning tunneling microscopes (STM), and atomic force microscopes (AFM), their processing and measurement accuracy is also increasing. close to the physical limit. At this time, vibration has become the main factor hindering the improvement ...

AI Technical Summary

Problems solved by technology

The traditional vibration damping system generally adopts cylindrical coil spring or rubber structure, but its natural frequency is difficult to be lower than 2Hz, and it cannot effectively isolate ultra-low frequency vibration

The air spring structure can achieve greater bearing capacity and lower frequency vibration suppression, but to achieve ultra-low frequency vibration suppression, the method of increasing the chamber volume must be adopted, which increases the difficulty of manufacture and use

In actual use, it is generally difficult for air springs to achieve ultra-low frequency vibration reduction below 1Hz

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