Mini-piezoelectric wind energy collector with flexible support
A flexible support and collector technology, applied in the direction of piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, microstructure devices composed of deformable elements, etc., can solve difficult applications Object utilization, power consumption and other issues, to achieve the effect of facilitating batch processing, reducing critical wind speed, and expanding the scope of application
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[0032] The present invention will be further described below in combination with examples and experimental results.
[0033] Through the above process, the second structure of the miniature piezoelectric wind energy harvester with flexible support proposed in the present invention is completed.
[0034] See Picture 12 , The miniature piezoelectric wind energy harvester with flexible support includes a micro support 11, a piezoelectric composite beam 10, a flexible support 12 and a base 13. The piezoelectric composite beam 10 is fixed on the micro support 11, and the micro support 11 is fixed by the flexible support 12. On the base 13.
[0035] The following describes the manufacturing method of the above collector, the typical process is as follows:
[0036] 1. Select a double-sided polished monocrystalline silicon wafer as the substrate 1, and use oxidation or chemical vapor deposition to simultaneously grow SiO2 layer 2 and Si3N4 layer 3 on the front and back of substrate 1, such a...
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