Air spring superlow frequency vibration isolating method and apparatus based on differential electromagnetic actuator

An electromagnetic actuator and air spring technology, applied in the direction of non-rotational vibration suppression, etc., can solve the problems of difficulty in implementation, difficult to use, affecting control accuracy, etc., achieving good low-frequency vibration isolation effect, reducing natural frequency, and strong bearing capacity Effect

Inactive Publication Date: 2007-11-07
HARBIN INST OF TECH
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Problems solved by technology

This scheme uses a single electromagnet, so only approximate processing can be used, and real linearization cannot be achieved, which directly affects its control accuracy
In addition, its control method is complex in principle and difficult to implement, so it is difficult to use it in engineering practice.

Method used

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  • Air spring superlow frequency vibration isolating method and apparatus based on differential electromagnetic actuator
  • Air spring superlow frequency vibration isolating method and apparatus based on differential electromagnetic actuator
  • Air spring superlow frequency vibration isolating method and apparatus based on differential electromagnetic actuator

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Embodiment Construction

[0037] The system structure and working principle of an air spring ultra-low frequency vibration isolation method and device based on a differential electromagnetic actuator of the present invention are described in detail in conjunction with the embodiment and accompanying drawings as follows:

[0038] An embodiment of the air spring vibration isolation device based on the differential electromagnetic actuator of the present invention, the schematic diagram of the system principle is shown in Figure 1, including: 1 air supply system, 2 height control unit, 3 air spring system, 4 base body, 5 Differential electromagnetic actuator, 6 speed sensors, 7 force sensors, 8 displacement sensors, 9 power amplifiers, 10 analog / digital converters (A / D), 11 digital / analog converters (D / A), 12 controllers . The air supply end of the air supply system 1 is connected to the input end of the height control system 2, the output end of the height control system 2 is connected to the air intake ...

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Abstract

The air spring ultra low frequency vibration separation method and device based on the differential electromagnetic actuator includes the air feed system, the high controlling system, a group of the air spring, the basal body, the electromagnetic actuator which not only provides the negative rigidity but the controlled damping force for the system, the speed sensor, the force sensor, the displacement sensor, the power amplifier, the model/number convertor, the number/model convertor and the controller. The invention provides the negative rigidity and the controlled initiative damping force by the reciprocity of the differential electromagnetic and the gag bit fixed on the basal body and the ground separately which is used in the field of high need for the cross-portrait ultra low frequency vibration separation capability.

Description

technical field [0001] The invention belongs to the field of ultra-low frequency vibration isolation, in particular to an air spring ultra-low frequency vibration isolation method and a device used in the method. Background technique [0002] The air spring vibration isolation foundation is widely used in the field of vibration isolation due to its good low-frequency vibration isolation effect, strong bearing capacity, and long service life. With the continuous improvement of ultra-precision machining and measurement, micro-nano technology and VLSI manufacturing precision, higher requirements are put forward for the ultra-low frequency vibration isolation performance and bearing capacity of the vibration isolation foundation. However, the current air spring vibration isolation foundation has limited its further application in the field of ultra-low frequency vibration isolation to a large extent because of its unsatisfactory ultra-low frequency vibration isolation performanc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F15/02
Inventor 谭久彬刘彦王雷姚绍明杨文国鲁云峰曹刚
Owner HARBIN INST OF TECH
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