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475 results about "Spring system" patented technology

In engineering and physics, a spring system or spring network is a model of physics described as a graph with a position at each vertex and a spring of given stiffness and length along each edge. This generalizes Hooke's law to higher dimensions. This simple model can be used to solve the pose of static systems from crystal lattice to springs. A spring system can be thought of as the simplest case of the finite element method for solving problems in statics. Assuming linear springs and small deformation (or restricting to one-dimensional motion) a spring system can be cast as a (possibly overdetermined) system of linear equations or equivalently as an energy minimization problem.

Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device

A supporting device for supporting in a lithographic projection apparatus a supported part relative to a supporting part, is presented. The supporting device includes a first part that engages the supporting part of the lithographic projection apparatus; a second part that engages the supported part of the lithographic projection apparatus; a supporting spring system disposed between the first part and the second part; and a position control system configured to control a position of the supported part. The position control system comprises at least one reference object that is movable relative to the supporting part; a reference support device that supports the reference object relative to the first part, wherein the reference object and the reference support device form a reference mass-spring system; at least one position sensor that detects at least one attribute of the position of the second part relative to at least one of the reference objects, the position sensor including a sensor output for outputting a position signal representing at least one of the attributes; and an actuator, communicatively coupled to the position sensor, that is configured to adjust the position of the second part relative to the first part, in response to the position signal.
Owner:ASML NETHERLANDS BV

Nonlinear rail type collaborative tuning damper

The invention relates to a nonlinear rail type collaborative tuning damper which comprises an external cavity unit, a spring system, a viscous liquid, an internal cavity unit, a cushioning material and a particle group. Two groove rails which are arranged in the length direction of the cavity are arranged at the bottom of the damper external cavity unit, the internal cavity unit can slide back and forth along the groove rails and is connected with the inner wall of the external cavity through the spring system, the portion between the external cavity unit and the internal cavity unit is filled with the viscous liquid, the inner wall and bottom of the internal cavity are covered with the cushioning material, and the particle group is composed of circular particles with different sizes. Shaking of the viscous liquid enables the internal cavity to move back and forth to consume energy, and friction and collision of the liquid and the container wall provides the damping effect; the structure self-vibration frequency is tuned by the spring system, and the energy is consumed by means of the collision and friction between the particles or between the particles and the cavity wall. According to the nonlinear rail type collaborative tuning damper, the advantages of various dampers are combined, the vibration damping frequency band is wide, the effect is good, and the nonlinear rail type collaborative tuning damper has wide applicability in the field of civil engineering structure vibration control.
Owner:TONGJI UNIV
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