Lower cavity assembly and laminating device applying same

Abstract

The lower cavity assembly comprises a base, a lower cavity body, an air pressure execution part and an air pressure adjusting part, the lower cavity body is connected with the base, the output end of the air pressure execution part is connected with the lower cavity body, and the air pressure adjusting part is connected with the air pressure execution part to adjust the output force of the air pressure execution part. Therefore, the buffering force during the movement of the lower cavity is controlled. The base provides a fixed mounting platform for the air pressure executing part. The air pressure executing piece replaces a traditional spring to generate constant and adjustable output force. The air pressure adjusting piece independently and accurately controls the output force. Furthermore, the lower cavity always obtains continuous and stable buffering supporting force in the cavity closing process. By means of the design, the buffering force does not change along with the compression amount, and the nonlinear fluctuation problem of a traditional spring system is avoided. The technical problems of sealing ring damage and alignment deviation caused by buffering force fluctuation are thoroughly solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of workpiece bonding, and in particular to a lower cavity assembly and a bonding device using the same. BACKGROUND

[0002] In a vacuum bonding device, the lower cavity needs to be connected to the upper cavity through a buffer mechanism. The existing technology generally uses a spring buffer structure. However, the spring force and the compression amount of the spring have a nonlinear relationship, which results in uncontrollable cavity buffering force. When the spring compression amount changes with the bonding height, the buffering force fluctuates accordingly. Excessive impact force can damage the sealing ring and the cavity structure, and insufficient buffering force can cause alignment deviation. Especially in high-precision bonding scenarios, this uncontrollable buffering force has become a key bottleneck affecting the stability of the device. Therefore, there is an urgent need for a solution that can accurately control the buffering force of the lower cavity. SUMMARY

[0003] Embodiments of the present application provide a lower cavity assembly and a bonding device using the same, to solve the technical problem of uncontrollable buffering force in traditional bonding devices due to the use of a spring buffer structure in the lower cavity.

[0004] To solve the above problems, according to one aspect of the present application, an embodiment of the present application provides a lower cavity assembly, which comprises a base, a lower cavity, a gas pressure actuator, and a gas pressure adjusting member. The lower cavity is connected to the base. The output end of the gas pressure actuator is connected to the lower cavity. The gas pressure adjusting member is connected to the gas pressure actuator to adjust the output force of the gas pressure actuator, thereby controlling the buffering force when the lower cavity moves.

[0005] In some embodiments, the gas pressure actuator comprises a gas cylinder, and the piston of the gas cylinder drives the movement of the lower cavity through the change of the gas pressure. The gas pressure adjusting member comprises a pressure regulating valve, which can adjust the input pressure of the gas to control the output force of the gas cylinder.

[0006] In some embodiments, the lower cavity assembly further comprises a cavity guiding unit, which comprises a guide rod and a super straight linear bearing. The super straight linear bearing is installed on the base. One end of the guide rod passes through the super straight linear bearing, and the other end of the guide rod is connected to the lower cavity.

[0007] In some embodiments, the lower cavity assembly further comprises a lower cavity jig, a back pressure driving unit, and a jig guiding unit. The lower cavity jig is arranged in the lower cavity. The back pressure driving unit is installed on the base. The back pressure driving unit is connected to the lower cavity jig through the jig guiding unit.

[0008] In some embodiments, the jig guiding unit comprises a UVW platform, a guide column and a top plate, the UVW platform is arranged in the lower cavity, the guide column passes through the bottom of the lower cavity, and the upper end thereof is connected with the UVW platform, the lower end thereof is connected with the top plate, and the top plate is connected with the output end of the back pressure driving unit; the jig guiding unit further comprises a linear guide rail, which is vertically arranged on the base and connected with the top plate.

[0009] In some embodiments, the jig guiding unit further comprises a sealing module, which is sleeved on the outer periphery of the guide column and used to maintain the vacuum sealing of the lower cavity when the guide column moves up and down.

[0010] In some embodiments, the sealing module comprises a sealing bracket, a first sealing ring, a second sealing ring and a sealing support plate, the sealing bracket is sleeved on the outer periphery of the guide column and axially slidable relative to the guide column, the first sealing ring is arranged between the sealing bracket and the lower cavity, the sealing support plate is fixed to the bottom of the lower cavity and provided with a side wall extending upward, the side wall and the lower cavity jointly form a containing groove, the sealing bracket is accommodated in the containing groove to limit the radial deviation thereof, and the second sealing ring is arranged between the inner hole of the sealing bracket and the guide column.

[0011] In some embodiments, the first sealing ring is arranged on the upper surface of the sealing bracket and used to form the axial sealing between the sealing bracket and the bottom of the lower cavity under the axial pressure; the second sealing ring is arranged on the inner hole wall of the sealing bracket and used to form the radial sealing between the inner hole of the sealing bracket and the guide column under the radial pressure; and the side wall of the sealing support plate surrounds the lower portion and the outer periphery of the sealing bracket to limit the radial deviation thereof and convert the atmospheric pressure into the axial compression force on the first sealing ring and the radial compression force on the second sealing ring.

[0012] According to another aspect of the present application, embodiments of the present application provide a fitting device, which comprises the above-mentioned lower cavity assembly.

[0013] In some embodiments, the fitting device further comprises an upper cavity assembly arranged above the lower cavity assembly, when the upper cavity assembly is pressed downward, the downward pressing force thereof is greater than the output force of the gas pressure actuator, so as to make the lower cavity descend and compress the gas pressure actuator.

[0014] In some embodiments, the upper cavity assembly comprises an upper cavity driving module, an upper cavity, a cross beam and an upper cavity jig, the output end of the upper cavity driving module is connected with the upper cavity through the cross beam and used to drive the upper cavity to move up and down, and the upper cavity jig is arranged in the upper cavity.

[0015] In some embodiments, the fitting device further comprises a cavity sealing ring arranged at the closed end surface of the lower cavity or the upper cavity, for sealing the vacuum cavity synthesized by the lower cavity and the upper cavity.

[0016] Compared with the prior art, the lower cavity assembly has at least the following beneficial effects:

[0017] The lower cavity assembly provided by the application comprises a base, a lower cavity, a pneumatic actuator and a pneumatic adjusting device, the lower cavity is connected with the base, the output end of the pneumatic actuator is connected with the lower cavity, and the pneumatic adjusting device is connected with the pneumatic actuator to adjust the output force of the pneumatic actuator, thereby controlling the buffer force when the lower cavity moves.

[0018] The base provides a fixed mounting platform for the pneumatic actuator. The pneumatic actuator replaces the traditional spring to generate a constant adjustable output force. The pneumatic adjusting device independently and accurately controls the size of the output force. Furthermore, the lower cavity always obtains a continuous and stable buffer support force during the cavity synthesis. This design makes the buffer force not change with the compression amount, avoiding the nonlinear fluctuation problem of the traditional spring system. The technical problems of seal ring damage and alignment deviation caused by buffer force fluctuation are completely solved.

[0019] The fitting device provided by the application is designed based on the above-mentioned lower cavity assembly, and the beneficial effects thereof are described above, which will not be repeated here.

[0020] The above description is only a summary of the technical solutions of the application. In order to more clearly understand the technical means of the application, and to implement the content of the description, the following will describe the preferred embodiments of the application in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0022] Figure 1 The structure schematic diagram of the lower cavity assembly provided by the embodiment of the application is shown;

[0023] Figure 2 The cross-sectional view of the lower cavity assembly provided by the embodiment of the application is shown;

[0024] Figure 3 The cross-sectional view of the jig guide unit of the lower cavity assembly provided by the embodiment of the application is shown;

[0025] Figure 4 A structural schematic diagram of a middle sealing module of a lower cavity assembly provided by an embodiment of the present application is shown;

[0026] Figure 5 A top view of a middle sealing module of a lower cavity assembly provided by an embodiment of the present application is shown;

[0027] Figure 6 A front view of a middle sealing module of a lower cavity assembly provided by an embodiment of the present application is shown;

[0028] Figure 7 A structural schematic diagram of a fitting device provided by an embodiment of the present application is shown;

[0029] Reference signs:

[0030] 1, lower cavity assembly; 11, base; 12, lower cavity body; 13, air pressure actuator; 14, air pressure adjusting member; 15, cavity guiding unit; 151, guide rod; 152, super straight linear bearing; 16, lower cavity jig; 17, back pressure driving unit; 18, jig guiding unit; 181, UVW platform; 182, guide column; 183, top plate; 184, linear guide rail; 185, sealing module; 1851, sealing support; 1852, first sealing ring; 1853, second sealing ring; 1854, sealing support plate; 2, upper cavity assembly; 21, upper cavity driving module; 22, upper cavity body; 23, cross beam; 24, upper cavity jig; 3, cavity sealing ring. DETAILED DESCRIPTION

[0031] In order to further clarify the technical means and effects of the present application for achieving the predetermined object, the following describes the specific embodiments, structures, features and effects of the present application in detail with reference to the drawings and preferred embodiments. In the following description, different "an embodiment" or "embodiments" do not necessarily refer to the same embodiment. In addition, the specific features, structures or characteristics in one or more embodiments can be combined in any suitable form.

[0032] In the description of the present application, it should be clear that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily describe a specific order or sequence; the terms "vertical", "horizontal", "longitudinal", "front", "back", "left", "right", "up", "down", "horizontal" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application, and do not mean that the device or element referred to must have a specific orientation or position, and therefore cannot be understood as a limitation on the present application.

[0033] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "linking" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0034] In order to better understand the above technical solutions, the above technical solutions will be described in detail below in combination with the drawings in the specification and specific embodiments.

[0035] Embodiment 1

[0036] The present embodiment provides a lower cavity assembly, as shown in the figure, which comprises a base 11, a lower cavity body 12, a pneumatic actuator 13 and a pneumatic adjusting device 14, the lower cavity body 12 is connected with the base 11, the output end of the pneumatic actuator 13 is connected with the lower cavity body 12, and the pneumatic adjusting device 14 is connected with the pneumatic actuator 13 to adjust the output force of the pneumatic actuator 13, thereby controlling the buffer force when the lower cavity body 12 moves. Figures 1-6 In the present embodiment, the base 11 is mounted on the equipment base frame as a fixed base. The pneumatic actuator 13 is vertically fixed on the upper surface of the base 11. The lower cavity body 12 is movably connected with the output end of the pneumatic actuator 13 by rigid connection. The pneumatic adjusting device 14 is fixedly mounted on the side surface of the base 11. The pneumatic adjusting device 14 is in communication with the internal air path of the pneumatic actuator 13 through the pneumatic pipeline, forming a closed-loop adjusting system. The output end of the pneumatic actuator 13 directly supports the lower cavity body 12. More specifically, the base 11 bears the mounting and supporting function of the entire assembly. The lower cavity body 12 serves as the lower structure of the vacuum cavity. The pneumatic actuator 13 provides the buffer function of the lower cavity body 12 through adjustable output force. The pneumatic adjusting device 14 is specially responsible for accurately adjusting the output force characteristics of the pneumatic actuator 13. The base 11, the lower cavity body 12, the pneumatic actuator 13 and the pneumatic adjusting device 14 together constitute the core executive mechanism of the adjustable buffer.

[0037] In specific work, the base 11 remains stationary. The pneumatic actuator 13 initially pushes the lower cavity body 12 to maintain a set height. When the upper cavity body presses the lower cavity body 12 downward during the cavity combination process, the pneumatic actuator 13 generates a preset buffer resistance. At the same time, the pneumatic adjusting device 14 adjusts the pneumatic parameters of the pneumatic actuator 13 in real time. More specifically, the controllable buffer reaction force is always provided by the pneumatic actuator 13 during the process of the smooth downward movement of the lower cavity body 12 under pressure.

[0038]

[0039] ​In view of the uncontrollable spring buffering force in the background art, the base 11 provides a fixed mounting platform for the pneumatic actuator 13. The pneumatic actuator 13 replaces the traditional spring to generate a constant adjustable output force. The pneumatic adjusting member 14 independently and accurately controls the output force. Furthermore, the lower cavity 12 always obtains a continuous and stable buffering support force during the cavity combining process. This design makes the buffering force not change with the compression amount, avoiding the nonlinear fluctuation problem of the traditional spring system. The technical problems of sealing ring damage and alignment deviation caused by the fluctuation of the buffering force are completely solved.

[0040] In specific embodiments, the pneumatic actuator 13 includes a pneumatic cylinder, and a piston of the pneumatic cylinder drives the movement of the lower cavity 12 through the change of gas pressure.

[0041] The pneumatic actuator 13 includes a pneumatic cylinder, and a piston rod of the pneumatic cylinder is directly connected to the lower cavity 12. More specifically, when the compressed gas is input into the pneumatic cylinder through the pneumatic adjusting member 14, the piston generates an axial thrust under the action of the gas pressure. The thrust is directly transmitted to the lower cavity 12 through the piston rod, forming a precisely controllable movement driving force. The core effect of this structure is that the output force is completely controlled by the gas pressure through the linear relationship between the gas pressure and the piston area. Furthermore, in combination with the pneumatic adjusting member 14, the output force can be continuously and steplessly adjusted from zero to the maximum value, thereby completely eliminating the nonlinear defect that the spring force changes with the deformation variable in the traditional spring system, ensuring the stability and controllability of the buffering force.

[0042] Without departing from the inventive concept, the pneumatic actuator 13 can also be designed as a hydraulic cylinder or a linear motor. The hydraulic cylinder realizes driving through the change of liquid pressure, and the linear motor directly drives through electromagnetic force. However, the current optimal implementation manner is still the cylinder structure, because it can exert the advantages of fast response speed, stable output, and accurate control in combination with the pneumatic adjusting member 14.

[0043] In specific embodiments, the pneumatic adjusting member 14 includes a pressure regulating valve, which can adjust the input pressure of the gas and control the output force of the pneumatic cylinder.

[0044] The air pressure adjusting member 14 comprises a pressure regulating valve which directly regulates the output force by changing the air source pressure of the input cylinder. More specifically, the pressure regulating valve is fixedly installed at the outer side of the base 11 and is in communication with the air inlet of the cylinder through an air pipe; when the external air source is input, the pressure regulating valve adjusts the air pressure value by manual or automatic means, which directly affects the piston driving air pressure inside the cylinder, thereby linearly controlling the output force of the cylinder. The core effect of this design is that it realizes continuous adjustment and accurate setting of the output force of the cylinder, avoiding the nonlinear fluctuation problem of the buffer force with displacement change in the traditional spring system; further, since the output force is completely dependent on the air pressure value control, the stability and response accuracy of the buffer force during the co-cavity process are ensured, thereby effectively preventing the damage and alignment deviation of the sealing ring, solving the technical bottleneck in the background technology.

[0045] Without departing from the inventive concept, the air pressure adjusting member can also be a pressure proportional valve or a servo pneumatic controller, which can also accurately control the output force characteristics of the cylinder by adjusting the input pressure; but the pressure regulating valve is the preferred implementation mode because of its simple structure, low cost and intuitive operation.

[0046] In specific embodiments, as shown in Figure 1 The lower cavity assembly further comprises a cavity guiding unit 15, which comprises a guide rod 151 and a super linear bearing 152 installed on the base 11, one end of the guide rod 151 penetrating through the super linear bearing 152, and the other end of the guide rod 151 being connected with the lower cavity 12.

[0047] The base 11 is horizontally fixed to the equipment base. The super linear bearing 152 is symmetrically embedded and installed in the preset hole position of the base 11. The lower end of the guide rod 151 is vertically inserted into the inner ring of the super linear bearing 152, and the upper end is rigidly connected to the bottom surface of the lower cavity 12 through threads or flange structure. More specifically, the guide rod 151 and the super linear bearing 152 form a precise sliding pair, so that the lower cavity 12 can only move in the vertical direction relative to the base 11. Further, the base 11 provides a mounting reference for the super linear bearing 152, while limiting the freedom of movement of the guide rod 151.

[0048] The core role of the guide rod 151 is to constrain the motion trajectory of the lower cavity 12, ensuring that it only moves vertically during the co-cavity process. The super linear bearing 152 converts the sliding friction of the guide rod 151 into rolling friction through low-friction rolling bodies. Specifically, the super linear bearing 152 supports the guide rod 151 and absorbs the radial eccentric load, so that the lower cavity 12 can still maintain accurate guidance when subjected to non-vertical external force. The two work together to eliminate the motion jamming problem caused by uneven stress of the air pressure executing member 13.

[0049] In operation, the base 11 is fixed, and the guide rod 151 moves up and down synchronously with the lower cavity 12. The rolling elements of the super linear bearing 152 continuously reduce the frictional resistance between the guide rod 151 and the base 11. Specifically, when the cylinder pushes the lower cavity 12 to move upward, the guide rod 151 smoothly slides upward inside the super linear bearing 152; when the upper cavity pushes the lower cavity 12 to move downward, the guide rod 151 smoothly slides downward inside the super linear bearing 152. The key effects of this cooperation are: first, the movement trajectory of the lower cavity 12 is always perpendicular to the plane of the cavity, avoiding the single-sided wear of the sealing ring caused by deflection; second, the movement resistance is significantly reduced, ensuring that the output force of the cylinder is completely converted into buffering effectiveness; third, the system stiffness is improved, solving the problem of offset of the lamination alignment.

[0050] In specific embodiments, as shown in Figure 2 The lower cavity assembly further includes a lower cavity jig 16, a back pressure driving unit 17, and a jig guide unit 18. The lower cavity jig 16 is arranged in the lower cavity 12, the back pressure driving unit 17 is installed on the base 11, and the back pressure driving unit 17 is connected to the lower cavity jig 16 through the jig guide unit 18.

[0051] The lower cavity jig 16 is arranged in the internal cavity of the lower cavity 12 and directly contacts and positions the workpiece. The back pressure driving unit 17 is vertically installed on the top surface of the base 11 and is fixed by bolts or flanges. The jig guide unit 18 serves as a connecting structure, with its lower end rigidly connected to the output end of the back pressure driving unit 17 and its upper end connected to the bottom surface of the lower cavity jig 16 through a pin shaft or a buckle. This connection allows the lower cavity jig 16 to move relatively independently within the lower cavity 12 while ensuring the stability of the movement direction. The output force of the back pressure driving unit 17 is accurately transmitted to the lower cavity jig 16 through the transmission mechanism of the jig guide unit 18, forming a closed-loop control. More specifically, the lower cavity jig 16 functions to carry and fix the laminated workpiece, providing a stable lamination platform and a uniform stress surface. The back pressure driving unit 17 functions to generate controllable thrust or tension, driving the lower cavity jig 16 to move in the vertical direction and applying back pressure or rebound force. The jig guide unit 18 functions to constrain the movement trajectory of the lower cavity jig 16, ensuring its linear movement along a single axis and absorbing lateral forces to eliminate offset. The cooperation of the three improves the precision of workpiece alignment and the buffering effect, solving the stability problem in vacuum lamination.

[0052] In operation, the back pressure driving unit 17 outputs driving force according to the set parameters, which is accurately transmitted to the lower cavity jig 16 through the jig guiding unit 18, and pushes the lower cavity jig 16 to move up and down in the lower cavity 12. After the workpiece is placed on the lower cavity jig 16, the back pressure driving unit 17 adjusts the output force to make the lower cavity jig 16 exert a reverse pressure during the cavity closing process. At the same time, the jig guiding unit 18 reduces the friction force and vibration to ensure smooth and vertical movement. The cooperation significantly improves the uniformity of the workpiece fitting force and the position accuracy, avoids the workpiece from deviating due to uneven stress, and enhances the overall system response speed. Furthermore, through the precise guidance of the jig guiding unit 18, the bottleneck problem of unstable fitting quality in the background art is solved.

[0053] In specific embodiments, as shown in Figure 2 and Figure 3 The jig guiding unit 18 includes a UVW platform 181, guide columns 182, and a top plate 183. The UVW platform 181 is arranged in the lower cavity 12, the guide columns 182 pass through the bottom of the lower cavity 12, and the upper end is connected with the UVW platform 181, and the lower end is connected with the top plate 183. The top plate 183 is connected with the output end of the back pressure driving unit 17. The UVW platform 181 is built-in with a three-axis fine adjustment mechanism to dynamically correct the plane deflection during the lifting of the guide column 182.

[0054] The UVW platform 181 is arranged inside the lower cavity 12 and is fixed to the bottom surface of the lower cavity 12 by bolts. The two guide columns 182 pass through the guide holes on both sides of the lower cavity 12 in parallel, and the upper end is connected with the bottom edge of the UVW platform 181, and the lower end is vertically locked to the two ends of the top plate 183. The output rods of the two back pressure cylinders are rigidly connected below the top plate 183, and the back pressure cylinders are symmetrically installed on the base 11. More specifically, the output rods of the two back pressure cylinders synchronously push the top plate 183, so that the double guide columns 182 drive the UVW platform 181 to translate in the vertical direction, forming a symmetric mechanical transmission. More specifically, the core function of the UVW platform 181 is to dynamically compensate the plane parallelism error through the three-axis independent fine adjustment mechanism; the double guide columns 182 form a rigid guiding frame, which not only transmits the back pressure, but more importantly, suppresses the platform deflection caused by asymmetric load; the top plate 183 serves as an integrated carrier of the output force of the double cylinders, and converts the dispersed driving force into overall lifting motion.

[0055] When two back pressure cylinders receive synchronous air pressure instructions, their piston rods push the top plate 183 to vertically rise, and the double guide columns 182 then pull the UVW platform 181 to stably lift the workpiece. If the workpiece is placed obliquely, the automatic leveling mechanism of the UVW platform 181 can correct the angle of deviation at the micron level, and the double guide columns 182 eliminate the torsional moment through lateral constraint. The breakthrough effect produced by this design is: first, the double-cylinder double-guide-column "four-point synchronous driving-guiding" system makes the position accuracy of large-size workpieces stable within microns; second, the symmetrical layout of the guide columns 182 improves the anti-lateral impact ability of the lower cavity jig, and completely solves the problem of vibration drift in vacuum lamination; third, the UVW platform 181 realizes rapid response leveling under the rigid support of the double guide columns, which improves the yield of curved surface lamination.

[0056] In specific embodiments, as shown in Figure 2 The jig guiding unit 18 further includes linear guides 184, which are vertically installed on the base 11 and connected with the top plate 183.

[0057] Two linear guides 184 are vertically installed on the preset fixed interfaces of the base 11, specifically by being vertically locked to the base 11 through bolts; the sliding blocks of the two linear guides 184 are respectively rigidly connected to the bottom surface of the top plate 183 at the symmetrical positions of the two ends, forming additional linear guiding structures of the top plate 183. More specifically, this installation mode makes the two linear guides 184 work cooperatively with the guide columns 182, and the core effect is to greatly enhance the motion stiffness and vertical stability of the top plate 183, effectively eliminate lateral deviation and vibration interference during lifting, and at the same time improve the guiding accuracy of the overall system, ensuring more uniform and reliable force transmission during workpiece lamination.

[0058] In specific embodiments, as shown in Figure 3 The jig guiding unit 18 further includes a sealing module 185, which is sleeved on the outer periphery of the guide column 182, for maintaining the vacuum sealing of the lower cavity 12 during the upward and downward movement of the guide column 182.

[0059] The newly added sealing module 185 of the fixture guide unit 18 adopts a flexible sealing material ring structure, which is precisely fitted around the outer periphery of the shaft section of the guide post 182 that penetrates the lower cavity 12, and tightly fits with the guide hole wall of the lower cavity 12 to form a dynamic contact interface. The sealing module 185 continuously compensates for the radial clearance change during the lifting and lowering process of the guide post 182 through its elastic deformation characteristics, while applying a constant clamping force to the contact surface. More specifically, when the guide post 182 is driven by the back pressure drive unit 17 to perform vertical reciprocating motion, the sealing module 185 maintains a dynamic sealing state under axial reciprocating friction conditions. Its core effects are: first, effectively blocking external dust, water vapor and particulate pollutants from entering the vacuum sealing environment of the lower cavity 12 through the guide hole gap, preventing contamination of precision workpieces or optical films; second, preventing gas leakage along the moving interface of the guide post 182 during the vacuuming process of the lower cavity 12, significantly improving the sealing reliability and pressure stability of the vacuum system; third, reducing the hard friction between the guide post 182 and the guide hole, reducing the generation of metal debris and extending the service life of the guide mechanism. Furthermore, this design achieves full-domain dynamic sealing while ensuring high-precision motion guidance, solving the technical defect of large vacuum fluctuations in existing equipment under frequent lifting conditions.

[0060] In a specific embodiment, such as Figures 3-6 As shown, the sealing module 185 includes a sealing bracket 1851, a first sealing ring 1852, a second sealing ring 1853, and a sealing support plate 1854. The sealing bracket 1851 is sleeved on the outer periphery of the guide post 182 and can slide axially relative to the guide post 182. The first sealing ring 1852 is disposed between the sealing bracket 1851 and the lower cavity 12. The sealing support plate 1854 is fixed to the bottom of the lower cavity 12 and has an upwardly extending sidewall. The sidewall and the lower cavity 12 together form a receiving groove. The sealing bracket 1851 is accommodated in the receiving groove to limit its radial displacement. The second sealing ring 1853 is disposed between the inner hole of the sealing bracket 1851 and the guide post 182.

[0061] The sealing support plate 1854 is fixedly installed at the bottom of the lower cavity 12. The sealing support 1851 is arranged between the sealing support plate 1854 and the bottom of the lower cavity 12, more specifically, in the space formed by the sealing support plate 1854 and the bottom of the lower cavity 12. It is particularly important that the sealing support plate 1854 is not only a bottom plate, but also extends upward on both sides to form a wrapping structure to wrap the sealing support 1851 therein. This makes the sealing support 1851 only move within the wrapping structure formed by the sealing support plate 1854 and the space defined by the bottom of the lower cavity 12. The guide column 182 passes through the sealing support plate 1854, the sealing support 1851 and the lower cavity 12. The sealing support 1851 is sleeved on the outer periphery of the guide column 182 and can axially slide relative to the guide column 182 under the wrapping constraint of the sealing support plate 1854. The first sealing ring 1852 is arranged on the upper surface of the sealing support 1851 between the sealing support 1851 and the bottom of the lower cavity 12 to seal the gap therebetween. The second sealing ring 1853 is arranged between the inner hole wall of the sealing support 1851 and the outer peripheral surface of the guide column 182 to seal the radial gap therebetween.

[0062] The sealing support 1851 bears the first sealing ring 1852 and the second sealing ring 1853 and combines them into a dynamic sealing unit body; at the same time, it serves as a connecting piece to combine the sliding and sealing behaviors of the guide column 182. The main function of the first sealing ring 1852 is to seal the gap between the upper surface of the sealing support 1851 and the bottom of the lower cavity 12 to prevent the gas in the vacuum cavity from leaking in the axial direction. The main function of the second sealing ring 1853 is to seal the annular radial gap between the inner hole wall of the sealing support 1851 and the outer peripheral surface of the guide column 182 passing therethrough to prevent the gas from leaking in the radial direction. The sealing support plate 1854 serves as a mechanical mounting point and is fixedly installed at the bottom of the lower cavity 12 to wrap and strictly limit the movement space of the sealing support 1851 from below and both sides, so that the sealing support 1851 can only slide up and down within a limited range without deviation or escape; finally, it forms a boundary of the sealing cavity together with the lower cavity 12, and the first sealing ring 1852 plays a sealing role at this boundary.

[0063] In specific embodiments, as shown in FIG. 8, the first sealing ring 1852 is installed on the upper surface of the sealing support 1851 to form an axial seal between the sealing support 1851 and the bottom of the lower cavity 12 under axial pressure; the second sealing ring 1853 is installed on the inner hole wall of the sealing support 1851 to form a radial seal between the inner hole of the sealing support 1851 and the guide column 182 under radial pressure; and the side wall of the sealing support plate 1854 surrounds the lower part and the outer periphery of the sealing support 1851 to limit the radial deviation thereof and convert the atmospheric pressure into axial compression force on the first sealing ring 1852 and radial compression force on the second sealing ring 1853. Figure 3 In specific embodiments, as shown in FIG. 8, the first sealing ring 1852 is installed on the upper surface of the sealing support 1851 to form an axial seal between the sealing support 1851 and the bottom of the lower cavity 12 under axial pressure; the second sealing ring 1853 is installed on the inner hole wall of the sealing support 1851 to form a radial seal between the inner hole of the sealing support 1851 and the guide column 182 under radial pressure; and the side wall of the sealing support plate 1854 surrounds the lower part and the outer periphery of the sealing support 1851 to limit the radial deviation thereof and convert the atmospheric pressure into axial compression force on the first sealing ring 1852 and radial compression force on the second sealing ring 1853.

[0064] The first sealing ring 1852 is fixed on the upper surface of the sealing support 1851, and is axially compressed when the external atmospheric pressure acts on the sealing support 1851, thereby forming an axial seal between the sealing support 1851 and the bottom of the lower cavity 12. The second sealing ring 1853 is installed on the inner hole wall surface of the sealing support 1851 and is radially deformed under pressure, thereby realizing radial sealing between the inner hole of the sealing support 1851 and the guide column 182. The unique design of the sealing support plate 1854 completely wraps the sealing support 1851 from below and the outer periphery through its upwardly extending side wall, and this wrapping structure has a dual function: one is to mechanically limit the radial deviation of the sealing support 1851, ensuring its vertical movement trajectory; the other is to convert the external atmospheric pressure into effective mechanical transmission, by constraining the displacement space of the sealing support 1851, the atmospheric pressure is directionally converted into axial extrusion force (acting upward) on the first sealing ring 1852 and radial extrusion force (acting inward) on the second sealing ring 1853. This pressure conversion mechanism is the core of the dynamic sealing of the sealing module.

[0065] The sealing support 1851, the first sealing ring 1852, the second sealing ring 1853 and the sealing support plate 1854 work together to form a dynamic linear motion sealing module. When the guide column 182 needs to move up and down, the sealing support 1851, which is sleeved on the guide column 182 and is wrapped and constrained by the sealing support plate 1854, also moves axially relative to the guide column 182 or remains relatively stationary. When the vacuum cavity is pumped to a negative pressure, the external atmospheric pressure becomes a driving force source, which presses the sealing support 1851 downward. Since the lower part and the periphery of the sealing support 1851 are firmly wrapped and constrained by the sealing support plate 1854, the sealing support 1851 cannot move downward by a large distance or deviate. Therefore, the force of the atmospheric pressure is effectively concentrated and transmitted in the upward direction, and the sealing support 1851 is pressed tightly to the bottom of the lower cavity 12 above it and the guide column 182 around it. This forces the first sealing ring 1852 mounted thereon to be axially extruded and tightly fit on the bottom of the lower cavity 12, thereby closing the gap between the top of the support and the cavity. At the same time, the second sealing ring 1853 is also extruded in the circumferential direction, so that the inner ring thereof tightly fits on the outer wall surface of the guide column 182, closing the annular gap between the inner hole of the support and the guide column. In this way, the path of air entering the vacuum cavity through these gaps is reliably blocked. Their cooperation achieves a dynamically linear motion sealing with simple and reliable structure: the guide column 182 can freely move up and down in the vacuum environment, and the air tightness of the cavity will not be destroyed due to movement, effectively replacing the traditional metal bellows sealing mode. More specifically, the unique wrapping and constraining structure of the sealing support plate 1854 is the core guarantee for stable operation of the module, which limits the adverse movement of the sealing support 1851 and effectively converts the negative pressure into the contact pressure required by the sealing ring.

[0066] Embodiment 2

[0067] The present embodiment provides a fitting device, as shown in Figure 7 The fitting device comprises the lower cavity assembly 1 described in Embodiment 1.

[0068] The fitting device of the present embodiment comprises the lower cavity assembly 1 described in Embodiment 1, which comprises the air pressure actuator 13 and the air pressure adjusting member 14, which can adjust and control the buffer force when the lower cavity 12 moves; this makes the buffer force controllable when the upper and lower cavities receive force, avoiding hard impact to protect the cavity structure and the sealing member, while improving the stability of the equipment in the fitting process.

[0069] In specific embodiments, as shown in Figure 7 The fitting device further comprises an upper cavity assembly 2 arranged above the lower cavity assembly 1, and when the upper cavity assembly 2 is pressed downward, the downward pressure is greater than the output force of the air pressure actuator 13, so that the lower cavity 12 is lowered and the air pressure actuator 13 is compressed.

[0070] The fitting device comprises a cooperative structure of the upper cavity assembly 2 and the lower cavity assembly 1, wherein the upper cavity assembly 2 is located above the lower cavity assembly 1, and when the upper cavity assembly 2 is pressed downward, the downward pressure generated thereby needs to be greater than the initial output force of the gas pressure actuator 13, and this mechanical relationship directly drives the lower cavity body 12 to move downward and synchronously compresses the gas pressure actuator 13. More specifically, in the fitting process, when the upper cavity assembly 2 is pressed downward, the downward pressure first overcomes the supporting force of the gas pressure actuator 13, forcing the lower cavity body 12 to move downward together with the guide column 182. In this process, the gas pressure actuator 13 is continuously compressed, and the internal gas pressure is increased, causing the output resistance to be synchronously increased, until the resistance and the downward pressure of the upper cavity assembly 2 reach a dynamic balance, at which time the lower cavity body 12 stops descending. This interaction produces multiple key effects: first, contact buffering is achieved, when the equipment or substrate between the upper cavity assembly 2 and the lower cavity body 12 is in contact, the compression stroke of the gas pressure actuator 13 directly absorbs the impact energy, avoiding damage caused by hard collision; second, adaptive pressure regulation is provided, the output force of the gas pressure actuator 13 is dynamically increased with the compression degree, forming a reverse support matching the downward pressure of the upper cavity assembly 2, ensuring uniform distribution of pressure in the cavity closing stage, and avoiding stress concentration or workpiece deviation caused by traditional rigid structures; further, precise vacuum operation is supported, when the upper cavity assembly 2 and the lower cavity body 12 are closed and need to be vacuumized, the balanced state maintains a stable stress environment for the sealing module 185, especially makes the sealing support 1851 keep a vertical sliding track on the guide column 182, ensures that the first sealing ring 1852 and the second sealing ring 1853 are uniformly pressed, and prevents the risk of leakage caused by deflection.

[0071] In specific embodiments, as shown in Figure 7 The upper cavity assembly 2 comprises an upper cavity driving module 21, an upper cavity body 22, a crossbeam 23 and an upper cavity jig 24, the output end of the upper cavity driving module 21 is connected with the upper cavity body 22 through the crossbeam 23, for driving the upper cavity body 22 to move up and down, and the upper cavity jig 24 is located in the upper cavity body 22.

[0072] The output end of the upper cavity driving module 21 is connected with the crossbeam 23, the crossbeam 23 extends horizontally and is fixed to the top surface of the upper cavity body 22. More specifically, the crossbeam 23 synchronously distributes the vertical driving force of the upper cavity driving module 21 to the entire top plane of the upper cavity body 22 as a force transmission skeleton; the upper cavity jig 24 is installed at the bottom of the inner cavity of the upper cavity body 22, and its working surface faces the direction of the lower cavity body 12. The upper cavity driving module 21 drives the overall lifting movement of the upper cavity assembly 2 as a driving force source, while providing downward pressure control. The upper cavity body 22 serves as a vacuum sealing and pressure bearing body, and the internal cavity thereof forms the boundary of the upper vacuum chamber, and constitutes a complete sealed space after being closed with the lower cavity body 12. More importantly, the upper cavity jig 24 directly bears the workpiece to be fitted, and the surface thereof is provided with a precise positioning structure to ensure accurate alignment of the workpiece and the jig of the lower cavity body 12.

[0073] The upper cavity driving module 21 drives the upper cavity 22 to move vertically downward through the cross beam 23, and drives the upper cavity jig 24 inside to move synchronously. When the upper cavity 22 contacts the lower cavity 12, the upper cavity driving module 21 continuously applies a downward pressure exceeding the initial output force of the air pressure executive element 13, forcing the lower cavity 12 to move downward and compress the air pressure executive element 13. During this process, the rigid structure of the cross beam 23 ensures that the upper cavity 22 does not deform and overturn, so that the upper cavity jig 24 and the jig of the lower cavity 12 always remain in a parallel alignment state. Furthermore, this design achieves three effects: first, the cross beam 23 offsets the risk of span deformation of the upper cavity 22, avoiding vacuum leakage; second, the overall synchronous lifting eliminates the poor fit caused by the misalignment of the jig; third, the controllable downward pressure of the upper cavity driving module 21 forms a flexible buffer closed loop with the air pressure executive element 13, protecting the precision workpiece from impact damage.

[0074] In addition, it needs to be emphasized that: there is no need to make a buffer structure in the upper cavity assembly 2, which simplifies the structure and reduces the weight of the upper cavity lifting load. More specifically, the air pressure executive element 13 of the lower cavity assembly 1 has already assumed the core function of buffering, so that the upper cavity assembly 2 is naturally exempted from the need for a buffer structure. The specific operating mechanism is as follows: when the upper cavity assembly 2 is driven to move downward as a whole by the upper cavity driving module 21, the downward pressure of the upper cavity assembly 2 must be greater than the initial output force of the air pressure executive element 13, forcing the lower cavity 12 to move downward and compress the air pressure executive element 13. During this process, the internal air pressure of the air pressure executive element 13 rises to generate a continuously increasing counteracting resistance, which real-time offsets the downward pressure of the upper cavity assembly 2, forming a dynamic damping buffer effect. At this time, if the upper cavity assembly 2 itself adds an independent buffer structure, not only will it cause redundant design, but also will directly increase the mechanical load weight of the upper cavity 22 and the cross beam 23. More importantly, the driving force of the upper cavity driving module 21 needs to overcome this additional load, resulting in increased energy consumption, delayed dynamic response, and increased stress deformation risk of the cross beam 23, which in turn affects the positioning accuracy of the upper cavity jig 24 and the lower cavity 12.

[0075] Therefore, after the air pressure executive element 13 of the lower cavity assembly 1 uniformly realizes the buffering function, the upper cavity assembly 2 can completely remove the buffer unit that is necessary in the traditional double-cavity lamination equipment, bringing three technical optimizations: first, the structure is simplified, and there is no need to arrange the installation space and connecting members of the buffer mechanism inside the upper cavity 22, reducing the processing complexity; second, the weight is reduced, eliminating the self-weight of the buffer structure and the associated structural reinforcement, significantly reducing the overall movement load weight of the upper cavity 22, the cross beam 23, and the upper cavity jig 24, so that the power required by the upper cavity driving module 21 can be reduced synchronously; and third, the reliability is further improved, avoiding the problems of lamination accuracy decline caused by part wear, sealing failure, or synchronization disorder of the upper cavity buffer structure, especially ensuring the parallel closed state of the upper cavity 22 and the lower cavity 12 during the vacuum sealing stage, and eliminating the local pressure leakage of the sealing ring caused by uneven weight load.

[0076] In addition, the upper cavity driving module 21 includes two symmetrically arranged Z-axis lifting units that synchronously distribute driving force through the cross beam 23.

[0077] In specific embodiments, the lamination device further comprises a cavity sealing ring 3 arranged on the closed end surface of the lower cavity 12 or the upper cavity 22, for sealing the vacuum cavity synthesized by the lower cavity 12 and the upper cavity 22.

[0078] The cavity sealing ring 3 is arranged on the closed end surface, i.e., the contact surface of the lower cavity 12 or the upper cavity 22. When the upper and lower cavities are aligned and closed, the cavity sealing ring 3 is compressed between the two, forming a continuous sealing ring. The core purpose is to ensure that the vacuum cavity synthesized by the lower cavity 12 and the upper cavity 22 maintains absolute airtightness during operation, preventing external air from seeping in and affecting the vacuum environment. More specifically, this arrangement allows the cavity sealing ring 3 to directly withstand mechanical pressure during the closing process and fill small fitting gaps through uniform deformation during the vacuum pumping stage, providing a reliable boundary seal. First, the key role of the cavity sealing ring 3 is to achieve rapid and efficient sealing of the vacuum cavity. When the upper cavity driving module 21 drives the upper cavity 22 to press down and close with the lower cavity 12, the sealing ring immediately takes effect, isolating the external environment and ensuring that the cavity interior can reach and maintain the required high vacuum degree in a very short time, providing an undisturbed working space for the lamination of workpieces; This directly avoids the problem of vacuum leakage caused by sealing failure in traditional equipment, avoiding poor lamination such as air bubble generation or offset defects.

[0079] The specific working process of the lamination device provided in this embodiment is as follows:

[0080] The working process of the lamination device begins in the standby state of the lower cavity assembly 1: At this time, the air pressure actuator 13 supports the lower cavity 12 to maintain a fixed height under a preset air pressure, and the internal air pressure adjusting member 14 locks the buffer parameter to the initial value, while in the sealing module 185 at the bottom of the lower cavity 12, the sealing support 1851 forms a normally closed seal with the guide column 182 through the first sealing ring 1852, and the second sealing ring 1853 is in a non-working state due to the absence of negative pressure; More specifically, the lower cavity 12 and the upper cavity assembly 2 are in a separated position, the upper cavity driving module 21 maintains the upper cavity 22 at the upper limit position through the cross beam 23, and the upper cavity jig 24 loaded with the workpiece to be laminated.

[0081] Down closing stage: the upper cavity driving module 21 is started, the driving cross beam 23 drives the upper cavity 22 to vertically move down, and the upper cavity jig 24 is synchronized to approach the lower cavity 12. When the upper cavity 22 approaches the lower cavity 12, the down pressure applied by the upper cavity driving module 21 exceeds the initial output force of the gas pressure executor 13, so that the lower cavity 12 slides downward along the guide column 182, and the gas pressure executor 13 is synchronously compressed. In this process, the internal gas pressure of the gas pressure executor 13 rises, causing the output resistance to continuously increase, forming a dynamic buffering effect, until the down pressure and the resistance are balanced, so that the lower cavity 12 stops descending; at the same time, the cavity sealing ring 3 of the upper cavity 22 is in closed contact with the top surface of the lower cavity 12 to form a main sealing surface, and the lower cavity 12 moves downward to drive the sealing support 1851 to synchronously slide, so that the first sealing ring 1852 keeps the continuous sealing of the guide column 182.

[0082] Vacuum operation stage: after the upper and lower cavities are closed, the cavity sealing ring 3 is completely compressed to constitute the boundary of the vacuum cavity, and the vacuum system is started to extract the gas in the cavity. As the vacuum degree rises, the second sealing ring 1853 in the sealing module 185 deforms to adhere to the surface of the guide column 182 under the action of external atmospheric pressure, forming a reinforced dynamic sealing barrier; more specifically, the upper cavity driving module 21 maintains constant pressure to ensure that the cavity sealing ring 3 is uniformly stressed, and the continuous compression of the gas pressure executor 13 ensures the stability of the position of the lower cavity 12, avoiding the misalignment of the cavity due to the fluctuation of the negative pressure. The workpiece is precisely bonded without air bubbles in the vacuum environment, and the gas pressure adjusting piece 14 adjusts the compression characteristics of the gas pressure executor 13 in real time to match the change of the negative pressure.

[0083] Reset stage: after the bonding is completed, the upper cavity driving module 21 lifts the cross beam 23 to make the upper cavity 22 rise, and the cavity sealing ring 3 is decompressed. At this time, the internal gas pressure of the gas pressure executor 13 pushes the lower cavity 12 to slide upward along the guide column 182 to reset; when the cavities are separated to the upper limit, the second sealing ring 1853 is separated from the guide column 182 to reset the non-pressure state, and the device returns to the initial standby posture. In the whole process, the upper cavity assembly 2 is free of the buffering structure to realize lightweight, the energy consumption of the upper cavity driving module 21 is significantly reduced, and the unified buffering mechanism of the gas pressure executor 13 avoids the damage to the sealing ring caused by mechanical collision.

[0084] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, and any person skilled in the art can easily think of various equivalent modifications or replacements within the technical range disclosed by the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A lower cavity assembly, characterized in that, The lower cavity assembly includes a base, a lower cavity body, a pneumatic actuator, and a pneumatic regulator. The lower cavity body is connected to the base, the output end of the pneumatic actuator is connected to the lower cavity body, and the pneumatic regulator is connected to the pneumatic actuator to adjust the output force of the pneumatic actuator, thereby controlling the buffer force when the lower cavity body moves.

2. The lower cavity assembly according to claim 1, characterized in that, The pneumatic actuator includes a cylinder, the piston of which drives the movement of the lower cavity through changes in gas pressure; the pneumatic regulator includes a pressure regulating valve, which can regulate the input pressure of the gas and thus control the output force of the cylinder.

3. The lower cavity assembly according to claim 1, characterized in that, The lower cavity assembly also includes a cavity guide unit, which includes a guide rod and a super linear bearing. The super linear bearing is mounted on the base, one end of the guide rod passes through the super linear bearing, and the other end of the guide rod is connected to the lower cavity.

4. The lower cavity assembly according to claim 1, characterized in that, The lower cavity assembly also includes a lower cavity fixture, a back pressure drive unit, and a fixture guide unit. The lower cavity fixture is disposed in the lower cavity, the back pressure drive unit is mounted on the base, and the back pressure drive unit is connected to the lower cavity fixture through the fixture guide unit.

5. The lower cavity assembly according to claim 4, characterized in that, The fixture guiding unit includes a UVW platform, a guide post, and a top plate. The UVW platform is disposed in the lower cavity. The guide post passes through the bottom of the lower cavity, with its upper end connected to the UVW platform and its lower end connected to the top plate. The top plate is connected to the output end of the back pressure drive unit. And / or the fixture guiding unit also includes a linear guide rail, which is vertically mounted on the base and connected to the top plate.

6. The lower cavity assembly according to claim 4 or 5, characterized in that, The fixture guide unit also includes a sealing module, which is sleeved on the outer periphery of the guide post and is used to maintain the vacuum seal of the lower cavity when the guide post moves up and down.

7. The lower cavity assembly according to claim 6, characterized in that, The sealing module includes a sealing bracket, a first sealing ring, a second sealing ring, and a sealing support plate. The sealing bracket is sleeved on the outer periphery of the guide post and can slide axially relative to the guide post. The first sealing ring is disposed between the sealing bracket and the lower cavity. The sealing support plate is fixed to the bottom of the lower cavity and has an upwardly extending sidewall. The sidewall and the lower cavity together form a receiving groove. The sealing bracket is accommodated in the receiving groove to limit its radial displacement. The second sealing ring is disposed between the inner hole of the sealing bracket and the guide post.

8. The lower cavity assembly according to claim 7, characterized in that, The first sealing ring is installed on the upper surface of the sealing bracket to form an axial seal between the sealing bracket and the bottom of the lower cavity under axial pressure; the second sealing ring is installed on the inner wall of the sealing bracket to form a radial seal between the inner hole of the sealing bracket and the guide post under radial pressure; the side wall of the sealing support plate surrounds the lower part and the outer periphery of the sealing bracket to limit its radial displacement and convert atmospheric pressure into an axial compressive force on the first sealing ring and a radial compressive force on the second sealing ring.

9. A bonding device, characterized in that, The bonding device includes the lower cavity assembly as described in any one of claims 1-8.

10. The bonding device according to claim 9, characterized in that, The bonding device also includes an upper cavity assembly, which is disposed above the lower cavity assembly. When the upper cavity assembly is pressed down, its downward pressure is greater than the output force of the pneumatic actuator, causing the lower cavity to descend and compress the pneumatic actuator.

11. The bonding device according to claim 10, characterized in that, The upper cavity assembly includes an upper cavity drive module, an upper cavity body, a crossbeam, and an upper cavity fixture. The output end of the upper cavity drive module is connected to the upper cavity body through the crossbeam and is used to drive the upper cavity body to move up and down. The upper cavity fixture is located inside the upper cavity body.

12. The bonding device according to claim 11, characterized in that, The bonding device also includes a cavity sealing ring, which is disposed on the closed end face of the lower cavity or the upper cavity and is used to seal the vacuum cavity formed by the lower cavity and the upper cavity.

Images