The invention provides an implementation method of a novel low-
distortion digital modulation direct drive power
amplifier device, and relates to the field of
plasma generation
radio frequency power supplies, the method realizes acquisition of modulation waveform signals through a
delta-sigma
oversampling technology, and realizes further improvement of the sampling rate of the modulation waveform signals through a PDM pulse distribution unit interpolation filter. The
exciter can generate multi-phase PDM modulation waveform pulses and carrier wave driving pulses, and directly drives the power
amplifier module to complete carrier wave generation and waveform modulation. Multi-phase PDM modulation can achieve a better modulation waveform THD (
Total Harmonic Distortion) index, it is ensured that a modulation waveform
signal is basically subjected to
distortion-free
recovery, but in order to reduce the complexity of a
system and give consideration to the modulation waveform
total harmonic distortion index, the multi-phase PDM modulation is generally controlled within 12 phases. In addition, a modulation waveform
signal is divided into a plurality of equal-amplitude PDM
square wave signals by a multi-phase PDM modulation and superposition technology, so that the power
amplifier works in an on-off state, and the efficiency of the power amplifier is improved.