760 results about "Vibrating membrane" patented technology

The invention relates to a lighting device comprising a light source (31) which is mounted on a heat sink (32) having an outer contour (34). Furthermore, it comprises a cooling device (35) for dynamically cooling the light source via cooling of the heat sink by means of a fluid flowing alongside the contour of the heat sink, the cooling device having one or a plurality of cooling openings (36, 43). The cooling device is a vibrating membrane cooling system for generating a sequence of fluid pulses (39). The cooling openings are arranged alongside the heat sink. The light source comprises optical means (33) for collimating and directing light originating from the light source during operation, while the contour of the heat sink has a shape similar to that of the optical means.

The invention discloses an MEMS (micro electro mechanical system) microphone structure, which comprises a semiconductor substrate, a first dielectric layer, a lower electrode vibrating membrane and an upper electrode structure, wherein the semiconductor substrate is provided with a cavity, the first dielectric layer is provided with a through hole communicated with the cavity, the lower electrode vibrating membrane is positioned above the through hole, in addition, at least one part of the lower electrode vibrating membrane is in contact with the upper surface of the first dielectric layer, the lower electrode vibrating membrane is led out from a lower electrode connecting part, the upper electrode structure is provided with an insulating layer and comprises an annular support structure, a backboard and an upper electrode connecting part, the backboard is provided with a plurality of through holes, at least one part of the annular support structure downwards extends to the lower electrode vibrating membrane, the rest parts of the annular support structure downwards extend to the substrate, the backboard is hung above the lower electrode vibrating membrane through the annular support structure, in addition, an air gap is formed between the backboard and the lower electrode vibrating membrane, and an upper electrode is embedded in the insulating layer of the backboard and is led out from the upper electrode connecting part. The MEMS microphone structure has the advantage that the damage or the falling of the upper electrode and the vibrating membrane in the release process can be avoided.

The invention discloses an optical fiber extrinsic Fabry-Perot interference ultrasonic sensing and detection device, comprising a 1550nm light source, a 1550nm optical circulator, an optical fiber Fabry-Perot ultrasonic sensor, a photoelectric transition module, a signal amplification module, an oscillograph, a piezoelectric transducer and a signal generator. The basic structure of the optical fiber Fabry-Perot ultrasonic sensor is composed of a single mode optical fiber, a quartz vibrating membrane, an outer ceramic bushing, an inner ceramic bushing and a metal base. The light emitted by the 1550nm light source reaches the optical fiber Fabry-Perot ultrasonic sensor through the optical circulator, when ultrasonic wave acts on the ultrasonic sensor, as the light reflected by the optical fiber Fabry-Perot ultrasonic sensor is modulated by the ultrasonic signal, the reflected light reaches the photoelectric conversion module by the circulator and then is converted into an electric signal, and the ultrasonic signal can be observed by the oscillograph after amplification. The invention has simple structure, easy manufacture, low cost and high sensitivity, strong practicability, easy encapsulation and is convenient for mass production, and can be applied to related fields of industrial detection, power system safety and the like.

A capacitance type microphone with a stress release membrane prepared at a low temperature and a preparation method thereof. The capacitance type microphone includes a substrate having at least a resonant cavity; a septum, arranged on the top of the resonant cavity and connected with the substrate for implementing a mechanical vibration when being excitated by an acoustic pressure wave; a back board, arranged on the top of the septum and having a plurality of perforations; an air gap is provided the back board and the septum; a capacitor is composed of the septum, the air gap and the back board. The method includes steps: forming the resonant cavity on the substrate; forming the septum on the top of the resonant cavity, wherein the septum is connected with the substrate; setting the back board on the top of the septum, wherein the back board has a plurality of perforations; forming the air gap between the back board and the septum. The invention is a MEMS capacitance type microphone processed by a completely low-temperature technique. It is capable of being used as a post IC circuit processing technique being compatible thereof. The structure of the vibration diaphragm of the capacitance type microphone is a stress-releasing structure, and is capable of reducing a parasitic capacitance. Comparing with the traditional initial stress release membrane, the invention improves the sensitivity of the microphone more effectively.

A flat speaker unit is provided herein. The flat speaker unit includes a first porous electrode, a second porous electrode, and a vibrating membrane with an electret layer disposed there between. In one embodiment, a plurality of supporting members may be configured between the vibrating membrane and the first porous electrode, or between the vibrating membrane and the second porous electrode. In one embodiment, a flat speaker device is provided with at least two flat speaker unit stacked together. By electrically connecting two ends of a signal source respectively to the first and second porous electrodes, or, in another embodiment, electrically connecting one end of the signal source to both of the first and second porous electrodes and connecting another end of the signal source to the vibrating membrane, a sound with low THD is generated accordingly from the flat speaker unit.

The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element.

The electromechanical transducer includes a plurality of elements including at least one cell that includes a first electrode and a second electrode opposed to the first electrode with a gap sandwiched therebetween and a direct-current voltage applying unit configured to be provided for each element and to separately apply a direct-current voltage to the first electrodes in each element. The first electrodes and the second electrodes are electrically separated for every element.

The invention provides a piezoelectric ultrasonic transducer and a manufacturing method thereof. The piezoelectric ultrasonic transducer comprises a base, a vibrating membrane, a first electrode, a piezoelectric membrane and a second electrode, wherein the center of the base is provided with a cavity; the vibrating membrane is fixed to the base; the first electrode, the piezoelectric membrane and the second electrode are sequentially deposited on the vibrating membrane along a direction from the base to the vibrating membrane; the piezoelectric ultrasonic transducer is characterized in that the vibrating membrane comprises a first vibrating membrane and a second vibrating membrane, wherein the first vibrating membrane is positioned at the center; the second vibrating membrane is positioned at the outer side of the first vibrating membrane; the first vibrating membrane and the second vibrating membrane are arranged in a spaced manner and are connected with each other through an elastic structure layer; and the piezoelectric ultrasonic transducer is also provided with a through hole at a position corresponding to the elastic structure layer, wherein the through hole penetrates through the second electrode, the piezoelectric membrane and the first electrode. The piezoelectric ultrasonic transducer provided by the invention can improve output of sound pressure.

Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.

The invention provides a generator capable of collecting acoustic energy, which combines a Helmholtz acoustic resonance cavity and a triboelectric nanometer generating component. The triboelectric nanometer generating component with thin membrane structures is arranged on the outer wall or at the opening position of the Helmholtz acoustic resonance cavity. Sound passes through the acoustic resonance cavity to allow an electrode layer and a frictional layer of the triboelectric nanometer generating component to mutually contact and separate and to generate electric energy on two electrode layers. The generator does not need to be provided with a vibrating membrane, and can reduce unnecessary acoustic energy loss, and efficiently convert sound energy into electric energy; the generate can be used as a sound sensor which does not need a power supply, and is a self-driven passive sound sensor.

The invention relates to an absolute pressure transducer chip which comprises an absolute pressure transducer integrated on a complementary metal-oxide-semiconductor transistor (CMOS) chip. The absolute pressure transducer comprises a pressure sensitive unit, the pressure sensitive unit comprises a field-effect tube and a vibrating membrane, the field-effect tube comprises a floating gate, the vibrating membrane is provided with polycrystalline silicon or metal materials serving as grids in inserting mode and is used for inducing absolute pressure change, the floating gate is embedded in a dielectric layer of the CMOS chip, and a cavity is formed on the vibrating membrane and sealed. In the absolute pressure transducer chip, a sacrificial layer and the electric conductive vibrating membrane are manufactured on a metal electric conductive layer of an integrated circuit formed by aid of the CMOS standard manufacture process, and finally a pressure transducer micro-unit is manufactured, the existing CMOS process is not changed, and the absolute pressure transducer chip is good in compatibility. In addition, the invention further relates to a production method of the absolute pressure transducer chip.

A bowl-shaped cover (1) with a hole at the bottom replaces the cover with a sound hole of the conventional earphone, thus creating a constant space. The earphone sound vibrates the cover (1) by beating the inside of the cover (1) and then the vibration is transmitted to a rubber drumhead (vibrating membrane) (2) which is attached onto the cover (1). The rubber drumhead (vibrating membrane) (2) of the earphone works as a soft earmuff and makes wearing feel soft and comfortable. The present invention relates to the earphone that converts sound into vibration and also isolates sound.

The invention relates to a soft support bridge type silicon micro-piezoelectric ultrasonic transducer chip which comprises a silicon substrate with a square conical hole which is small at the top andbig at the bottom in the center; a silicon layer and a first oxidation layer are sequentially covered on the front surface of the silicon substrate, and a second oxidation layer is covered on the backsurface; the corresponding silicon layer and the first oxidation layer above the square hole of the front surface of the silicon substrate constitute a square vibration membrane, one pair of oppositesides of the square vibration membrane respectively etch a vertical narrow slot, and the vertical projection of each narrow slot is positioned on the inner side of the hole edge above the front surface of the silicon substrate; a lower electrode, a piezoelectric membrane and an upper electrode are sequentially deposited on the square vibration membrane; a polyimide membrane is deposited on various parts on the front surface of the silicon substrate; and the square vibration membrane which is etched with the vertical narrow slots and the polyimide membrane commonly constitute a soft support anti-sound leakage bridge type vibration membrane. The anti-sound leakage bridge type structure is used on the vibration membrane of the transducer; in order to avoid sound leakage through the narrow slots, the soft polyimide membrane is deposited on the narrow slots, which has little effect on vibration of the vibration membrane and can still keep high sensitivity.

A micro-silicon microphone of capacity type is prepared using back electrode plate with conduction function as one electrode of capacity and using vibration membrane with conduction function as another electrode of capacity, using multiple insulation support to support vibration membrane, firm-jointing said supports with vibration membrane and back electrode plate and arranging narrow groove on said vibration membrane for making vibration membrane be not sensitive on residual stress.

An atomizing member that includes a piezoelectric vibrator and a vibrating membrane. The piezoelectric vibrator includes a cylindrical piezoelectric body, a first electrode disposed on an inner circumferential surface of the piezoelectric body, and a second electrode disposed on an outer circumferential surface of the piezoelectric body. The piezoelectric vibrator performs cylindrical breathing vibration. The vibrating membrane is disposed on an opening at a first side in an axial direction of the piezoelectric body so as to cover the opening. The vibrating membrane has a through hole in its central portion.

The present invention relates to a method and apparatus for speckle noise reduction in laser scanning projection display. In particular, a MEMS device with a vibrating membrane through which light rays are refracted with temporally varying angles is provided for reducing the effect of speckling.

An implantable cardiovascular blood pump system is provided, suitable for use as a left ventricular assist device (LVAD) system, having an implantable cardiovascular pump, an extracorporeal battery and a controller coupled to the implantable pump, and a programmer selectively periodically coupled to the controller to configure and adjust operating parameters of the implantable cardiovascular pump. The implantable cardiovascular blood pump includes a coaxial inflow cannula and outflow cannula in fluid communication with one another and with a pumping mechanism. The pumping mechanism may be a vibrating membrane pump which may include a flexible membrane coupled to an electromagnetic actuator assembly that causes wavelike undulations to propagate along the flexible membrane to propel blood through the implantable cardiovascular pump. The implantable cardiovascular pump may be programmed to operate at frequencies and duty cycles that mimic physiologic flow rates and pulsatility while avoiding thrombus formation, hemolysis and/or platelet activation.

The invention discloses a variable frequency and jet flow oscillator which is used for controlling the high-frequency switching of jet flow in different pipelines. The upper end face of a single-film double-cavity vibration exciter is in parallel fit with the lower surface of an oscillation jet flow component, and the upper surface of the oscillation jet flow component is in parallel fit with thelower surface of a cover plate; the upper surface of the cover plate is provided with an inlet passage; an oscillation jet flow component cusp is arranged between a first outlet passage and a second outlet passage on the oscillation jet flow component; a vibrating membrane vertical to the upper end face in the single-film double-cavity vibration exciter; the single-film double-cavity vibration exciter is divided into a first cavity and a second cavity through the vibrating membrane; the first cavity is provided with a first cavity inlet; the second cavity is provided with a second cavity outlet; and the first cavity outlet, and the second cavity outlet are connected with a first control port and a second control port of the oscillation jet flow component respectively. The working frequency of the jet flow oscillator is actively controlled by changing the excitation frequency of the oscillator and the adjusted working frequency is stable and reliable.

The invention relates to a surface acoustic wave (SAW) electric current sensor which comprises a piezoelectric substrate, a first line of reflectors, a second line of reflectors and a thin film layer. The piezoelectric substrate serves as a vibrating membrane, the first line of reflectors comprise the first interdigital reflector serving as a reference and the second interdigital reflector used for measuring electric currents, the second line of reflectors serve as electronic tags, and the first line of reflectors and the second line of reflectors are coated with the thin film layer. First electromagnetic wave signals sent by a reading module are received through a wireless antenna, the first electromagnetic wave signals are converted into SAWs spread along the surface of the piezoelectric substrate through an EWC/SPUDT, the SAWs are converted into second electromagnetic wave signals through the EWC/SPUDT after being reflected by the first line of reflectors and the second line of reflectors, the second electromagnetic wave signals are transmitted back to the reading unit through the wireless antenna, through a signal processing method, the current detection is carried out by obtaining the signal transformation of the time-domain response of the SAW electric current transducer.

A reliable flat speaker unit and a speaker device with the same are provided herein. A conductive electrode of a vibrating membrane of the speaker unit is disposed on both utmost sides of the speaker unit to isolate the speaker unit from environmental moisture, which can significantly improve the reliance of the speaker device. A barrier layer can optionally be disposed on the external side of the conductive electrode to further isolating the speaker unit from moisture, which can improve the reliance and the lifetime of the speaker device. In an embodiment, at least a getter is disposed inside the flat speaker unit to absorb moisture therein. The speaker unit at least includes a electret vibrating membrane with a conductive electrode, a plurality of supporting members, and a electrode structure with a plurality of holes.

A flat speaker comprising a vibrating plate including a spiral voice coil, a lead portion extracted from the vice coil and reinforced by the reinforcing member, and an electric supply line; an edge portion supporting the vibrating plate; and a yoke, supporting the edge portion, on which the permanent magnet arranged to face the voice coil. The flat speaker 1 of the invention includes a vibrating membrane 2 of an insulating base film 3 with a spiral or meandering voice coil 4 formed on one or both faces thereof, a permanent magnet 5 arranged on corresponding location facing the voice coil 4; and a yoke 6 on which the permanent magnet 5 is arranged. The vibrating membrane 2 is avoided from hitting the permanent magnet by providing a perforated sheet on the back face of the yoke to control acoustic resistance.

The invention discloses a differential MEMS (Micro-electromechanical Systems) capacitive microphone and a preparation method for the microphone, wherein the capacitive microphone comprises a substrate, a back cavity, an upper electrode plate, a lower electrode plate, a middle electrode plate and a vibrating membrane. An edge of the vibrating membrane is fixedly connected onto the substrate, at least one open pore is arranged on the vibrating membrane, and the back cavity is arranged below the vibrating membrane; the middle electrode plate is arranged between the upper electrode plate and the lower electrode plate, a first capacitor is formed by the upper electrode plate and the middle electrode plate, and a second capacitor is formed by the lower electrode plate and the middle electrode plate; the middle electrode plate is fixedly connected onto the vibrating membrane and used for changing the position of the middle electrode plate when the vibrating membrane is vibrated along with a sound, so that capacitance values of the first capacitor and the second capacitor can be changed; and a differential capacitor pair is formed by the first capacitor and the second capacitor, and is used for an electric connection in a differential mode and can carry out gathering and processing for an electrical signal.