217 results about "Acoustic resonance" patented technology

The invention discloses an automatic processing device and method for PCB lamination, and the method comprises the steps: depositing an erodable film on a lamination material layer and arranging a cavity concentric with a through hole array before the lamination of a PCB, and collecting acoustic resonance frequency data to obtain a reference matrix; dynamic dot frequency tracking processing is carried out on the multi-point acoustic time sequence signals in the pressing heating stage, and a through hole instantaneous acoustic track library is obtained; performing coupling judgment on time-temperature-pressure ternary working condition data according to the trajectory library to obtain a blockage risk matrix; carrying out time delay and gradient adjustment on a pressing temperature and pressure curve based on the risk matrix; and carrying out three-dimensional inversion processing on the whole board broadband acoustic spectrum collected before cooling, calculating through hole filling rate distribution and judging the quality of the board. According to the scheme, the resin filling state of the micro through hole can be monitored in real time in the PCB pressing process, an acoustic detection channel is constructed through the erodable film and the cavity structure, early warning and active intervention of the blocking risk are achieved, and the pressing quality is ensured.

The invention discloses a frequency mixing sound demodulator based on a curled structure and a use method thereof in the acoustics field, the demodulator is used for separating frequency mixing sound mixed by a plurality of sound waves with preset frequencies according to respective frequencies, and the demodulator comprises an air waveguide for transmitting the sound waves, and blocking structures arranged on two sides of the air waveguide for blocking the sound waves from penetrating, and a plurality of curled structures that capture corresponding preset frequency sound waves; curled structures are arranged in the barrier structure on at least one side of the air waveguide at intervals, one end of each curled structure is open, and the other side is closed; a plurality of cross beams for blocking penetration of sound waves are arranged in each curled structure, and an internal channel of each curled structure is divided into different lengths to serve as different acoustic resonant cavities so as to capture the sound waves with different frequencies; the closed end of each curled structure is a detection end of each preset frequency sound wave. The invention solves the problem that the existing method is difficult to instantly separate the frequency mixing sound signal and carry out information transmission.

The invention discloses a spiral resonance photoacoustic cell and an operation method, the spiral resonance photoacoustic cell comprises a gas chamber straight tube, a spiral tube, an optical fiber collimator and an optical fiber F-P sonic sensor, the two ends of the gas chamber straight tube are open, the two ends of the spiral tube are communicated with the gas chamber straight tube, an acoustic resonance point is formed at the center of the spiral tube, and the optical fiber F-P sonic sensor is arranged in the central area of the spiral tube; and the optical fiber collimator is arranged at one end of the air chamber straight pipe. The spiral pipe is wound outside the air chamber straight pipe, the spiral pipe is communicated with the air chamber straight pipe, the structural design of the spiral pipe enables the spiral pipe to form acoustic resonance at a specific frequency, and the optical fiber F-P sonic sensor obtains a photoacoustic signal; compared with a conventional resonance photoacoustic cell, the physical volume of the resonance photoacoustic cell is greatly compressed, and the system integration level is effectively improved. More importantly, under the condition that a compact appearance similar to that of a non-resonant photoacoustic cell is kept, the device amplifies the photoacoustic signal intensity by several times through an acoustic resonance effect, and the detection sensitivity and the signal-to-noise ratio of the system are remarkably improved.

The invention discloses an unmanned intelligent production line and method for an automobile fan, and the method comprises the steps: carrying out the low-speed rotation starting processing of a rotating blade entering a constant-pressure flow channel, obtaining the temperature rise time sequence data of a shearing heat layer in axial distribution through segmented pressurization and three-stage rotation speed increment, and building a reference temperature rise curve; carrying out differential processing on the wall surface temperature rise data in the blade speed increasing process, extracting a temperature rise curvature over-limit region and generating abnormal annulus coordinate data; determining a submillimeter wave oblique projection direction according to the abnormal coordinates, and performing refraction phase analysis processing on the echo signal to obtain a warping fingerprint parameter set including a refraction peak value, echo trailing, a slope change rate and a phase oscillation period; and activating acoustic sampling of a corresponding area, obtaining gas-acoustic resonance standing wave data, and performing cross validation with the warping fingerprint parameters to obtain a quantitative detection judgment result of the geometric defect of the blade. According to the scheme, high-precision online detection of the fan blade microdefects can be realized in an all-black factory environment.

The present invention provides an acoustic resonator device (1) having a resonator (R) comprising: a first electrode (2), a second electrode (3) arranged at a distance from the first electrode (2) in a first direction (z), wherein the first electrode (2) and the second electrode (3) extend along planes (E) arranged perpendicular to the first direction (z); and a layer stack (S) arranged between the first electrode (2) and the second electrode (3), which layer stack comprises a first piezoelectric layer (4) and a second piezoelectric layer (5), wherein the first piezoelectric layer (4) and a second piezoelectric layer (5) comprise a piezoelectric material, and an acoustic high-impedance layer (6) arranged between the first piezoelectric layer and the second piezoelectric layer;wherein an acoustic thickness (DR) of the resonator in the first direction (z) is n times half an acoustic wave (W) of a predetermined frequency, where n is a natural number greater than one. The invention also provides a corresponding filter component (10).

The invention discloses a gas-solid-sound coupled gas compressor acoustic resonance monitoring method and system, a medium and equipment, and the method comprises the steps: determining the installation number and angle of strain gauges based on a blade modal analysis result, or determining the installation number and position of blade end timing sensors according to the number of rotor and stator blades, and determining the installation position of a pressure probe; carrying out a compressor surge test, and synchronously collecting a sound field signal, a vibration signal and a pulsating pressure signal; frequency domain information of the sound field signal, the vibration signal and the pulsating pressure signal is obtained through spectral analysis; carrying out correlation analysis on the sound and vibration signals, and judging whether abnormal asynchronous peak values appear in the sound pressure and vibration signals or not; carrying out acoustic mode decomposition at the abnormal asynchronous peak frequency of the sound field signal, and judging whether the circumferential mode order is coupled with the vibration pitch diameter and the pressure mode or not; the method comprises the following steps: performing continuous broadband acoustic mode decomposition on an acoustic pressure signal to obtain a spectrogram, monitoring whether the spectrogram is matched with an acoustic resonance characteristic or not, and judging whether the compressor has an acoustic resonance fault or not.

The embodiment of the invention provides a piezoelectric antenna, a preparation method thereof and an electronic device. The piezoelectric antenna comprises a piezoelectric layer and an electrode layer, the electrode layer is arranged on a first surface of the piezoelectric layer and comprises a first terminal, a resonance electrode, at least one feed loop and at least one second terminal which are arranged in sequence, the first terminal is configured to receive an input alternating voltage and feed the alternating voltage into the resonance electrode, and the second terminal is configured to receive the input alternating voltage and feed the input alternating voltage into the resonance electrode. The resonant electrode is configured to excite the piezoelectric layer to generate acoustic resonance under the action of alternating voltage, the at least one feed loop is connected with the resonant electrode and comprises a suspended grounding terminal, and the at least one second terminal is arranged at a preset distance from the grounding terminal of the at least one feed loop and is configured to be grounded; and a grounding capacitor is formed between the grounding terminal and at least one feed loop grounding terminal. The piezoelectric layer and the electrode layer are integrally configured to generate electromagnetic waves based on acoustic resonance. The piezoelectric antenna effectively improves the radiation performance of an electrically small antenna excited by acoustic waves.

Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate having a surface. A back surface of a single-crystal piezoelectric plate is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. An interdigital transducer (IDT) is formed on a front surface of the piezoelectric plate with interleaved IDT fingers of the IDT disposed on the diaphragm. Back-side fingers are formed the back surface of the diaphragm.

The invention relates to the technical field of semiconductor packaging, and discloses a bonding wire welding method based on bare chip interconnection, and the method comprises the steps: collecting and fusing acoustic response and optical reflection signals of a bonding interface in real time through a multi-mode in-situ sensing mechanism integrating acoustic resonance and surface plasmon resonance; dynamically calculating the thickness, the mechanical coupling deformation and the energy dissipation state of the intermetallic compound layer; and the ultrasonic power and the bonding force are subjected to closed-loop adjustment in combination with a model prediction control algorithm, so that the welding process is evolved along a preset optimal physical path all the time. The system comprises a multi-mode sensing welding head, a synchronous data acquisition module, a state resolving module and a self-adaptive control module. The transparent and intelligent welding process is realized, and the bonding consistency, reliability and yield of high-density interconnection are remarkably improved.

The invention, which belongs to the microwave communication field, discloses a multi-physics-field coupling high-Q-value magnetoacoustic resonator comprising a YIG film, a GGG film substrate, a grounding electrode and a microstrip line. The YIG film generates ferromagnetic resonance under the action of an external magnetic field, the magnetoelastic effect of a YIG material is coupled with a standing wave thickness acoustic mode in a YIG-GGG heterostructure, and the mode combines the broadband adjustable characteristic of a magnetic resonance mode and the high-quality factor (Q value) characteristic of an acoustic resonance mode, so that the magnetoacoustic resonator simultaneously meets the broadband adjustable characteristic and the high-Q value characteristic; in the process, the YIG film plays a role of a transducer, the mode of the heterogeneous film and the microstrip line is adopted, an air gap of a magnetic circuit can be reduced, the size of a bias magnetic circuit is greatly reduced, and therefore the resonator is miniaturized.

The invention discloses an acoustic resonance assisted nano-SiO2 coated flaky carbonyl iron powder as well as a preparation method and application thereof, the flaky carbonyl iron powder is taken as a main raw material, an acoustic resonance assisted modification technology is adopted, a compact and uniform SiO2 coating layer is constructed on the surface of the flaky carbonyl iron powder, and an FCIP coated SiO2 composite material with a core-shell structure is prepared. According to the coating treatment, the oxidation resistance and corrosion resistance of the carbonyl iron powder are remarkably improved, electromagnetic parameters of the carbonyl iron powder are regulated and controlled, and particularly the wave absorbing performance of the material in a low-frequency wave band is enhanced. An electromagnetic parameter test and reflection loss calculation show that the obtained composite material has better impedance matching characteristics and lower reflection loss value. In practical application, a coated sample shows higher thermal stability and lower surface corrosion rate, and the service life of the material in a complex service environment is effectively prolonged. The method is simple and convenient in process, low in cost and suitable for being applied to functional material systems such as electric conduction, wave absorption and electromagnetic interference prevention on a large scale.

The invention provides a self-wave-locking method and system based on laser photoacoustic spectrometry gas detection, and relates to the technical field of optical gas sensing, by fusing multi-physical field sensing data such as photoacoustic signals, sound field distribution, thermal deformation and the like, a first state vector representing the actual performance of a current system is calculated in real time, and a second state vector representing the actual performance of the current system is calculated in real time; a multi-objective optimization function is used for simultaneously optimizing a signal-to-noise ratio, linearity and energy consumption control to serve as a criterion, a cooperative control instruction is generated in a rolling mode, excitation light modulation parameters and cavity acoustic mode parameters are accurately adjusted, double dynamic tracking and locking of laser modulation frequency and cavity acoustic resonance frequency are achieved, and when external conditions change, the frequency of the cavity acoustic resonance frequency can be dynamically tracked and locked. According to the method, the detection sensitivity and the signal stability which are close to theoretical limits are automatically and continuously kept all the time, the calculated system nonlinearity index is used as an internal criterion, a concentration inversion mode is intelligently switched to carry out gas concentration value calculation, and seamless, continuous and wide dynamic range measurement from ppb level to percentage level is realized.

The invention relates to the technical field of nondestructive testing of composite materials, discloses a composite material defect detection method based on acoustic resonance imaging, and provides a novel composite material defect detection method which effectively improves the defect detection capability of the composite materials, especially the detection of tiny defects. The resonant frequency can be dynamically adjusted through inductance switching, multi-frequency scanning and full-depth scanning are achieved, high, medium and low detection modes are adopted for layered detection, typical defects of air holes, debonding, layering and the like of the composite material can be distinguished at a time, and then high-stability and high-precision scanning detection is achieved and noise interference is overcome in combination with the probe frame. And a full-depth acoustic impedance distribution diagram is generated in combination with a back projection algorithm, so that the processing accuracy of a detection result is improved, the visualization degree of the detection result is improved, and detection personnel can quickly obtain detection information and analyze the detection information.

A bandpass filter is provided that includes series acoustic resonators and shunt acoustic resonators. The shunt acoustic resonators include a first transversely-excited film bulk acoustic resonators (XBAR) that includes a diaphragm comprising a portion of a piezoelectric layer that is over a cavity of the first XBAR and a first interdigital transducer (IDT) on a surface of the piezoelectric layer. The first XBAR is connected between (i) a node directly between a first series acoustic resonator of the plurality of series acoustic resonators and the input port, and (ii) a ground of the bandpass filter. The series and shunt acoustic resonators include one or more solidly-mounted XBARs that includes a portion of a second piezoelectric layer that is solidly mounted over a substrate with a Bragg reflector disposed therebetween.

The invention discloses a noise and vibration energy acquisition system and a dynamic monitoring method thereof, and belongs to the technical field of energy conversion, the noise and vibration energy acquisition system comprises a sound input unit, a monitoring shell, an energy conversion unit, a vibration sensing unit and a storage control unit; an acoustic resonance cavity is arranged in the monitoring shell, and a vibration sensing unit, an energy conversion unit and a sound input unit are arranged in the acoustic resonance cavity from bottom to top; the vibration sensing unit and the energy conversion unit are electrically connected with the storage control unit respectively; the vibration sensing unit is used for acquiring an external vibration signal and generating an alternating current signal, the energy conversion unit is used for acquiring an external noise signal and generating an alternating current signal, and the storage control unit is used for respectively acquiring the alternating current signals generated by the vibration sensing unit and the energy conversion unit; the generated electric energy is supplied to an external load and the intensity of external vibration and noise is obtained. Synchronous acquisition of noise and vibration energy can be realized, and real-time dynamic monitoring of external noise and vibration intensity can be realized.

A system and a method for non-destructive characterizations of objects using Laser Acoustic Resonance Spectroscopy (LARS)-based diagnostic techniques are provided. The system includes using a laser doppler vibrometer to measure vibrational responses of objects. The method includes measuring vibrational frequency responses of a first object and a second object, performing a spectra analysis of the vibrational frequency responses, determining a frequency shift based on the spectra analysis, and indicating a difference between the first object and the second object or a presence of a defect in the second object if the determined frequency shift exceeds a predefined threshold value. The difference between the first object and the second object may indicate the presence of a void, a crack, or a plurality of pores in the second object, or can be used for validating or authenticating the second object as a defective or counterfeit item, in various embodiments.

The invention provides an automatic power generation dispatching control method and device of a thermal power generating unit, and relates to the technical field of intelligent power grids, and the method comprises the steps: collecting multi-source observation data of an electric side and a hearth combustion side, and extracting a hearth negative pressure fluctuation amplitude, a flame centroid jitter amplitude and a sound pressure fluctuation amplitude to construct a sound-combustion coupling stability index; establishing a coal consumption cost function and an emission cost function in combination with historical unit operation data; dividing an acoustic-fuel coupling stability domain according to an acoustic-fuel coupling stability index, monitoring a rising trend, and taking an acoustic-fuel coupling risk as a scheduling constraint triggering condition; a scheduling optimization model is reconstructed in a risk dominant scene, active power output, a coal mill combination and air distribution parameters are used as decision variables, an optimal track is solved with physical limits, power grid side constraints and a stability domain as limiting conditions, and finally the optimal track is issued to a coordination control layer. According to the method, the output curve can be actively deviated in the acoustic-fuel coupling instability risk rising stage to avoid acoustic resonance, and therefore the dynamic dispatching capacity of the unit is guaranteed.

The present invention is provided with an acoustic MEMS element (100) and an acoustic path (P). The acoustic path (P) is connected to the acoustic MEMS element (100). Ultrasonic waves generated through vibration of the acoustic MEMS element (100) can acoustically resonate in the acoustic path (P). This ultrasonic transducer has, through a combination between sympathetic vibration of the acoustic MEMS element (100) and acoustic resonance in the acoustic path (P), sound pressure-frequency characteristics in which a plurality of sound pressure peaks appear. When f0 represents the sympathetic vibration frequency of the acoustic MEMS element (100) and f1 represents the acoustic resonance frequency in the acoustic path (P), the relationship -20≤(f1-f0) / f0×100≤80 is satisfied.

The invention provides a photoacoustic gas measurement method and a photoacoustic gas measurement system based on a series sensibilization technology, and relates to the technical field of optical gas sensing. The first-stage light absorption enhancement structure is used for carrying out maximum photoacoustic conversion on target gas to generate an initial photoacoustic pressure signal, the second-stage acoustic resonance structure is introduced to carry out resonance amplification on sound waves with specific frequency, a tandem cascade sensibilization framework of light absorption enhancement and acoustic resonance amplification is constructed, and through mutual verification analysis, the sensitivity of the target gas is improved. Calculating coherence outside preset noise analysis frequency band data, identifying and inhibiting common-mode noise interference caused by environment vibration and the like, generating feedback control parameters while calculating final gas concentration, adaptively adjusting intensity modulation frequency and wavelength modulation depth, and realizing high-precision and high-precision measurement. The measurement reliability, the dynamic range and the adaptive capacity of the system under complex working conditions are improved, and multiplier-level breakthrough of the sensitivity of the system and collaborative optimization of the performance are achieved.

The invention provides a multi-resonance enhanced photoacoustic spectrometry multi-component waste gas detection method, and relates to the technical field of photoacoustic spectrometry gas detection, a plurality of laser beams with different frequencies are divided into a reference light path and a detection light path, photoacoustic signals generated by the two light paths are respectively collected, adaptive wavelet decomposition is carried out on the photoacoustic signals, and a multi-resonance enhanced photoacoustic spectrometry multi-component waste gas detection result is obtained. Performing real-time calibration compensation on the detection light path signal based on the reference light path signal to obtain a calibration resonance characteristic value of the target component; the method comprises the following steps: arranging a multistage acoustic resonant cavity array in a waste gas sample cell, adjusting the phase difference between each stage of resonant cavity, forming a directional acoustic wave enhancement field, obtaining an enhanced calibration resonance characteristic value, and carrying out combinatorial optimization on the characteristic values of a target component under excitation of different frequencies by adopting a self-adaptive weighted fusion algorithm to obtain a concentration value of the target component. According to the invention, the energy and the signal-to-noise ratio of the photoacoustic signal are obviously improved, and high-sensitivity and high-precision detection of multi-component gas is realized.

The application relates to the technical field of gear production, and particularly provides a press-fitting verification system and method for gear production, which comprises a dynamic stress field capturing subsystem, a micro deformation field reconstruction subsystem and an integrated resonance verification subsystem. The method comprises the following steps: forming a piezoelectric nanowire network through a nanometer piezoelectric material deposition process, capturing a dynamic stress field in a press-fitting process, and outputting a stress field space-time sequence; receiving the stress field space-time sequence, reconstructing a micro deformation field of the gear through space-time deconvolution processing, realizing space-time deconvolution processing based on wave propagation principle, and outputting a deformation field distribution diagram; receiving the deformation field distribution diagram, synthesizing theoretical resonance characteristics through a structure resonance model, matching the structure resonance model with measured resonance characteristics through a discretized structure dynamics method, obtaining the measured resonance characteristics through an acoustic resonance scanner, and outputting a press-fitting quality verification value. The application improves the controllability of a gear press-fitting process and the reliability of a product.

The application relates to a high-melting-point metal wire ultrasonic resonance assisted direct deposition additive device and method, which comprises a wire feeding system, a control system, an ultrasonic resonance system, an electromagnetic induction heating device, a three-axis moving device, a preheating substrate device and a shear strain transmission device; for high-melting-point metal wires, the wire feeding system drives the metal wires to be conveyed downwards along a high-temperature wire feeding pipe, the electromagnetic induction heating device at the lower end of the high-temperature wire feeding pipe softens the metal wires, the metal wires pass through the shear strain transmission device together with the wire feeding pipe, a hollow connecting rod loaded with piezoelectric ceramics transmits ultrasonic vibration to the metal wires, the metal wires are extruded through a shear strain deposition head, and the ultrasonic resonance assisted direct deposition process of the metal wires is completed; the control system can adjust the amplitude, frequency, electromagnetic induction heating temperature, wire feeding speed, substrate preheating temperature and shear strain device working frequency of the ultrasonic vibration according to actual conditions. The device aims to realize direct deposition of high-melting-point metal wires through electromagnetic induction heating, high-frequency ultrasonic vibration can greatly reduce the rheological stress of the material, generate a large number of dislocations, promote atomic diffusion and realize metallurgical bonding of adjacent metal units.

The application relates to the field of wireless communication technology and provides an acoustic filter and a preparation method thereof.The preparation method comprises the following steps: S1, providing a substrate, forming an acoustic layer on the surface of the substrate, and forming an effective acoustic structure by using the acoustic layer; wherein the effective acoustic structure comprises an acoustic resonance structure, an input end part, an output end part and a ring-shaped grounding end; S2, forming a separation layer on the side of the effective acoustic structure away from the substrate, so that the separation layer completely covers the acoustic structure, and etching an electrical connection window through the separation layer; S3, forming a connecting layer on the side of the separation layer away from the effective acoustic structure, so that the connecting layer completely covers the separation layer, and the connecting layer is connected with the ring-shaped grounding end of the acoustic layer after penetrating through the electrical connection window, thereby obtaining the acoustic filter; wherein the thickness of the connecting layer is the same as the thickness of the acoustic layer.The acoustic filter has low manufacturing cost and is miniaturized as a whole.

According to the vibration excitation and permeation enhancement method and system for the geothermal in-situ power generation system, the multi-layer piezoelectric vibrator array is implanted into the drill hole of the geothermal reservoir and packaged in the closed container filled with the supercritical working medium, and the phased array technology is used for applying the accurate sweep frequency signal to excite thermo-acoustic resonance; a controllable microcosmic fracture network is generated in the rock mass to enhance the permeability of the rock mass; meanwhile, the system directly utilizes the piezoelectric effect to convert rock mass vibration mechanical energy into electric energy, and monitors and adjusts the crack expansion state in real time by means of the resonance wave self-sensing function. Therefore, the integrated effect of efficient, low-cost and low-environmental-risk geothermal permeation enhancement and in-situ power generation can be achieved without traditional fracturing fluid and large pumping heat exchange equipment, the geothermal exploitation process is simplified fundamentally, and the energy conversion and resource recovery efficiency is improved.

An acoustic resonator package includes: a substrate; an acoustic resonator disposed on the substrate; a cap disposed on the substrate and the acoustic resonator; and a bonding portion bonding the substrate and the cap to each other. The cap includes a central portion accommodating the acoustic resonator, and an outer portion disposed outside of the central portion and having a bonding surface. The outer portion includes protrusions in contact with the bonding portion, and at least one trench disposed between the protrusions. The acoustic resonator package further includes a first protective layer and a second protective layer, the first protective layer and the second protective layer being disposed on a region of the bonding surface formed on each of the protrusions.

The invention discloses a temperature compensation type film bulk acoustic resonator and a preparation method thereof. The temperature compensation type film bulk acoustic resonator comprises a substrate structure, a resonance cavity structure, a temperature compensation layer, a seed layer, an acoustic composite film and an acoustic composite film structure. The resonant cavity structure sets a release boundary based on a release or addition process step of the substrate cavity; the substrate adopts a wafer with an oxide layer, and the oxide layer serves as a temperature compensation layer of the resonator; the seed layer is located above the temperature compensation layer and below the sound wave composite film structure; the sound wave composite film comprises a piezoelectric film, a bottom conductive film and a top conductive film. Due to the temperature compensation layer on the lower portion of the seed layer, the film bulk acoustic resonator has better temperature stability, and the cost of an extra temperature compensation preparation technology can be reduced. According to the designed preparation process, only an acoustic resonance area at the lower part of the electrode is reserved, the boundary of the resonator is in contact with air, and the prepared film bulk acoustic wave resonator has better performance.

The embodiment of the invention provides a preparation method of graphene composite powder. The preparation method comprises the following steps: adding a mixed material of powder and a solid carbon source into a reaction cavity; vacuumizing the interior of the reaction cavity, and then filling inert gas to normal pressure; treating the mixed material in the reaction cavity by adopting an acoustic resonance process, and setting sound wave frequency, acceleration, treatment time and material temperature; and collecting products, and cleaning and separating powder. A mixed material in a reaction cavity is treated by adopting an acoustic resonance process, direct contact friction between a grinding material and powder is avoided through acoustic resonance mixing, the risk that impurities are introduced due to mechanical abrasion is reduced, and the problems that the cost is high and the compounding efficiency is low when graphene powder is prepared through a conventional vapor deposition method are solved; the acoustic streaming effect generated by resonance can permeate into the powder aggregate, the aggregate structure is effectively disassembled and is not influenced by different material densities, powder particles with different particle sizes and different components are promoted to be uniformly dispersed and interacted, and the shape of the original powder is not changed.

The ejection force of each droplet should be approximately the same, while increasing the ejection speed of subsequent droplets. [Solution] The liquid discharge head is equipped with a drive circuit that generates a drive signal to drive an actuator and includes multiple discharge waveforms that discharge multiple droplets from the nozzle, all of which have the same waveform width. The discharge waveform of the drive signal includes an expanding potential difference that expands the volume of the pressure chamber, a contracting potential difference that reduces the volume of the pressure chamber, and at least one intermediate potential difference between the expanding and contracting potential differences. The drive circuit cancels out vibrations at an acoustic resonance frequency in a frequency range higher than the main acoustic resonance frequency of the liquid in the pressure chamber caused by the change in potential difference by at least one more change in potential difference performed after the change in potential difference. The interval between the multiple discharge waveforms is matched to the period that strengthens the residual vibration of the liquid in the pressure chamber caused by the previously generated discharge waveform and the vibration of the liquid in the pressure chamber caused by the subsequently generated discharge waveform, thereby increasing the discharge speed of subsequent droplets.

The invention discloses a continuous three-mass resonance mixing method, a device and a mixing system, which apply resonance mechanical energy to materials, enable the materials to perform mixing motion under the action of the resonance mechanical energy, simultaneously form ellipse-like mixed material flows macroscopically and microcosmically, realize shearing, diffusion and convection actions among the materials and improve the mixing effect of the materials. And the materials are uniformly mixed on the macroscopic and microcosmic mixing levels. According to the invention, uniform mixing can be realized on macroscopic and microscopic mixing levels, the mixing efficiency is high, and the uniformity is good; the continuous three-mass resonance mixing device is low in structure and investment cost, the vibration mechanism is matched with the concave plates and the convex plates which are alternately arranged in the mixing cavity, energy gradient generated in the mechanical vibration process can be provided to form sound waves, then the sound resonance effect is formed, efficient mixing of materials is achieved, and the continuous three-mass resonance mixing device has good popularization prospects.

The present invention relates to the technical field of photoresist coating for wafer-level packaging, specifically a resonant cavity structure and coating method for fine atomization, comprising a resonant cavity, a spherical resonant cavity disposed within the resonant cavity, the diameter of the spherical resonant cavity being an integral multiple of half the wavelength of ultrasonic excitation, an opening for ultrasonic excitation input disposed at the top of the resonant cavity, and an acoustic resonance cavity disposed at the bottom of the resonant cavity; a liquid supply needle is inserted into the acoustic resonance cavity from the resonant cavity. This structure and method can improve the uniformity of photoresist spraying and the quality of the film layer. By utilizing precise acoustic field control, no microchannel is required to provide fluid flow, thus avoiding the potential problem of nozzle blockage. By focusing the acoustic wave in the resonant cavity, the droplets will break up in a very short time, resulting in a small atomized particle size and high concentration, thereby achieving uniform and controllable photoresist film thickness. The film layer has high uniformity and few film defects, is not restricted by the wafer surface morphology, and can achieve conformal coating of complex three-dimensional microstructures.