The invention provides a high-frequency 
acoustic wave resonator and a preparation method thereof. The high-frequency 
acoustic wave resonator comprises a high-acoustic-velocity support substrate, an insulating 
dielectric layer which is located on the upper surface of the high-sound-velocity supporting substrate, a piezoelectric film which is located on the upper surface of the insulating dielectriclayer, and an interdigital 
electrode which is located on the upper surface of the piezoelectric film. By arranging the high-sound-velocity supporting substrate below the piezoelectric film, the soundvelocity of target elastic 
waves excited and propagated in the piezoelectric film can be increased, propagation of the target elastic 
waves can be effectively restrained, and the resonant frequency of the high-
frequency sound wave 
resonator is improved; the insulating 
dielectric layer is arranged between the piezoelectric film and the high-sound-velocity supporting substrate, the leakage of 
electric field energy in the piezoelectric film can be effectively reduced, and the 
electromechanical coupling coefficient of the high-
frequency sound wave resonator can be enhanced; by selecting the appropriate insulating 
dielectric layer, temperature compensation can be carried out on the high-frequency 
acoustic wave resonator, temperature drift of the high-frequency acoustic wave resonator is reduced, and temperature stability of the high-frequency acoustic wave resonator is improved.