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43results about "Impedence" patented technology

Substrate processing apparatus, detection method, method of manufacturing semiconductor device, and recording medium

A technique includes: a process chamber configured to process a substrate; a transferor configured to transfer the substrate; a component relating to at least one of the process chamber or the transferor; a memory storing a plurality of operation events; a plurality of areas in each of which at least one of the process chamber, the transferor, or the component is provided; a detector provided in at least one of the plurality of areas and configured to be capable of detecting an operating sound of the component; and a controller is configured to be capable of controlling the component and the detector to select one area of the plurality of areas, which corresponds to each of the plurality of operation events, and to acquire detection data from the detector provided in the selected one area.
Owner:KOKUSAI DENKI KK

Calibration method for acoustic sensor

A method in which an acoustic sensor disposed in a polishing apparatus can be accurately calibrated is disclosed. In this method, polishing sounds of a substrate are acquired using an acoustic sensor; and then at least two distinctive sounds, having distinctive frequencies respectively, are selected from the acquired polishing sounds. Further, the at least two distinctive sounds are output from a sound source coupled to any of a polishing table, the acoustic sensor, and a substrate holder to cause the at least two distinctive sounds to be input to the acoustic sensor. Next, output values of the acoustic sensor are calibrated, such that the output values of the acoustic sensor relative to the at least two distinctive sounds come within an allowable range.
Owner:EBARA CORP

Porous matrices for acoustic impedance matching and improved touch sensing and fingerprint imaging

ActiveCN115346247Breduce reflectionIncreased acoustic impedanceImpedence networksImpedenceEpoxyAcoustics
This disclosure relates to porous matrices for acoustic impedance matching and improved touch sensing and fingerprint imaging. The invention discloses the use of acoustic impedance matching to improve the accuracy of ultrasonic touch sensing and fingerprint imaging. Acoustic impedance mismatch between the ultrasonic transducer array and the sensing plate can be reduced to maximize energy transfer and minimize parasitic reflections. Reduction of acoustic impedance mismatch can be achieved using: (i) a composite epoxy resin having a higher acoustic impedance than epoxy resin alone; (ii) one or more matching layers having an acoustic impedance approximately equal to the geometric mean of the acoustic impedance of the sensing plate and the acoustic impedance of the transducer array; (iii) holes or perforations in the sensing plate; or (iv) a geometry formed in the sensing plate. Furthermore, an absorbent layer can be used to suppress parasitic reflections.
Owner:APPLE INC

Apparatus, monitoring system and related methods for monitoring the assembly of components

An apparatus for monitoring the assembly of parts, comprising a structure-borne sound sensor (3) designed to detect structure-borne sound and generate a sensor signal that can be processed in signal acquisition electronics (6), the structure-borne sound sensor (3) being attached to a finger cap (2) that can be inserted onto a finger of a user performing the assembly, or that can be inserted onto or attached to a gloved finger. Further described are a monitoring system (9) and a method for monitoring the assembly of parts.
Owner:INDTACT

Blade fault diagnosis method, device, system and storage medium

The application discloses a kind of blade fault diagnosis method, device, system and storage medium, the method comprises: obtaining the blade rotation audio that audio acquisition equipment is collected in the operation process of wind turbine generator unit;Based on wind noise filtering algorithm, blade rotation audio is preprocessed, and the blade rotation audio after filtering wind noise is obtained;The blade rotation audio after filtering wind noise is segmented, and the audio segment corresponding to each blade is obtained;According to each audio segment, diagnose whether the blade corresponding to each audio segment exists fault.The method provided in the embodiment of the application can diagnose whether the corresponding blade occurs fault according to the audio segment of different blades respectively, and the accuracy of diagnostic result is improved.
Owner:BEIJING GOLDWIND SCI & CREATION WINDPOWER EQUIP CO LTD

System and method for detecting structural damage of water turbine generator support

A method for detecting structural damage of a water turbine generator support, comprising: determining a knocking point and a response point on a water turbine generator support; arranging an acceleration sensor (7) at the response point; hammering the knocking point by means of an impact force bar (5); acquiring a signal detected by the acceleration sensor (7) and a signal detected by a force sensor (6) in the impact force bar (5); performing fitting on the basis of the signal detected by the acceleration sensor (7) and the signal detected by the force sensor (5), so as to obtain the inherent frequency, damping ratio and vibration mode of the support; and on the basis of the inherent frequency, damping ratio and vibration mode of the support, determining whether structural damage occurs to the water turbine generator support. Further provided is a system for detecting structural damage of a water turbine generator support.
Owner:XIAN THERMAL POWER RES INST CO LTD

Noise calculation device and sound collection system

An objective of the present invention is to provide a noise calculation device and a sound collection system capable of distinguishing between a target sound and a noise included in ambient sound. A noise calculation device 20 of the present invention calculates a noise sound pressure level of the noise included in the ambient sound of an analysis target 40, which includes the target sound emitted by the analysis target 40. The noise calculation device 20 identifies the reference sound pressure level of the target sound corresponding to a distance from the analysis target 40 to the microphone 209 using a physical model that defines a relationship between the distance and the reference sound pressure level of the target sound. The noise calculation device 20 calculates an estimated sound pressure level of the noise included in the ambient sound based on a detected sound pressure level of the ambient sound detected by the microphone 209 and the reference sound pressure level of the target sound identified using the physical model.
Owner:HITACHI CONSTRUCTION MACHINERY CO LTD

Rail body defect detection system using deep learning

PendingDE102025145607A1ImpedenceTelevision systemsTrackwayEngineering
A rail body defect detection system according to one embodiment of the present disclosure can comprise a camera unit, a sensor unit, and a detection unit. The camera unit can comprise multiple cameras arranged in the lower part of a train to capture an image of the rail body. The sensor unit can comprise a position sensor that provides position information of the rail body. Based on the rail body image and the position information, the detection unit can determine whether the rail body is defective and provide a detection result. In the rail body defect detection system according to the present disclosure, the detection unit determines, on the basis of data obtained by mixing rail body images taken by a plurality of cameras contained in the camera unit and position information of the rail body depicted by the corresponding cameras, whether a defect exists in the rail body, thereby quickly and accurately identifying a location with a high risk of accident on the rail body.
Owner:STRANSPORT CO LTD

A method of reducing and controlling the acoustic impedance of an isotropic material

ActiveCN117490832BAnalysing fluids using sonic/ultrasonic/infrasonic wavesImpedenceBi-isotropic materialSound wave
The application provides a method for reducing and controlling the sound wave impedance of isotropic material, belongs to the technical field of material sound wave impedance, and solves the problem of difficulty in detecting gas characteristics.The technical scheme comprises the following steps: step one, selecting isotropic material;step two, obtaining the motion equation of the isotropic material;step three, using a plane wave to solve a differential equation, and obtaining the sound wave impedance Z of the material according to a sound wave impedance definition formula;step four, rotating a vector Omega = {0, eta omega, 0} to represent rotating the material along an x2 axis, and rotating a vector Omega = {0, 0, eta omega} to represent rotating the material along an x3 axis;step five, changing the sound wave impedance of the material under the condition of rotating the axis.The beneficial effects of the application are as follows: the application can introduce the Coriolis force caused by rotation into the motion equation of the isotropic material, find the relationship between the sound wave impedance and rotation, and use rotation to reduce and control the sound wave impedance.
Owner:NANTONG UNIV

Substrate processing apparatus, detection method, method of manufacturing semiconductor device, and recording medium

PendingJP2026023209AVibration measurement in fluidImpedence
To provide a technique for easily detecting a component state.SOLUTION: A processing chamber configured to process a substrate, a transfer unit configured to transfer the substrate, a component related to at least one of the processing chamber and the transfer unit, a storage unit configured to store a plurality of operation events, a detection unit configured to detect an operation sound of the component, and a control unit configured to acquire data of the operation sound detected by the detection unit, wherein a plurality of areas in which at least one of the processing chamber, the transfer unit, and the component is installed is set, and the detection unit is provided in at least one of the plurality of areas; The control unit is configured to be able to select at least one area from among the plurality of areas in which the operating sound is to be detected, in correspondence with each of the plurality of operation events, and acquire detection data from the detection unit in the selected at least one area.SELECTED DRAWING: Figure 1
Owner:KOKUSAI DENKI KK

Resonator-Boosted Micromachined Ultrasonic Transducers

PendingUS20260151795A1ImpedenceUsing electrical meansNetwork connectionPMUT
A resonator-boosted ultrasonic transducer device is provided for communication of ultrasonic signals. The device employs a micromachined ultrasonic transducer (MUT), such as a piezoelectric MUT (pMUT) or capacitive MUT (cMUT), and a matching network in electrical communication with the MUT. The matching network employs a microelectromechanical (MEMS) resonator having a working frequency selected to increase a voltage difference across electrodes of the MUT. The matching network is connected in series between the MUT and input source circuitry for transmission of outgoing ultrasonic signals. The matching network is connected between the MUT and load impedance circuitry to increase voltage from the MUT during reception of incoming ultrasonic signals. The matching network can be selected to configure the frequency of bandwidth of the device as desired for a particular application.
Owner:NORTHEASTERN UNIV (US)

Automotive body vibration characteristics testing method and device

An automotive body vibration characteristic testing method obtains vibration characteristics of an automotive body by inputting vibration to the automotive body, and includes: an excitation step of setting a plurality of vibration input parts in the automotive body supported by an air cushion, and inputting vibration to each of the plurality of set vibration input parts to excite the automotive body; and an oscillation measurement step of measuring data on vibration characteristics of the automotive body excited in the excitation step. In the excitation step, an input wave of vibration input to one of the vibration input parts in the automotive body is delayed from an input wave of vibration input to other vibration input parts.
Owner:JFE STEEL CORP

Substrate processing apparatus, detection method, method of manufacturing semiconductor device, and recording medium

PendingEP4696996A1Vibration measurement in fluidImpedence
A technique includes: a process chamber configured to process a substrate; a transferor configured to transfer the substrate; a component relating to at least one of the process chamber or the transferor; a memory storing a plurality of operation events; a plurality of areas in each of which at least one of the process chamber, the transferor, or the component is provided; a detector provided in at least one of the plurality of areas and configured to be capable of detecting an operating sound of the component; and a controller is configured to be capable of controlling the component and the detector to select one area of the plurality of areas, which corresponds to each of the plurality of operation events, and to acquire detection data from the detector provided in the selected one area.
Owner:KOKUSAI DENKI KK

Sensor and method for monitoring the evolution of the viscoelastic properties of a material.

A sensor for measuring the viscoelastic properties of a material comprises a rigid support (10) and a membrane (11) fixed to the support (10), the material being intended to come into contact with an outer face (111) of the membrane (11). The sensor further comprises an active assembly (12) having at least one piezoelectric element bonded to an inner face of the membrane (11), the active assembly (12) being configured to generate the oscillation of the membrane (11) according to a resonance mode greater than or equal to the second resonance mode of the membrane (11). Method for measuring the viscoelastic properties of a material and method for monitoring milk coagulation using such a sensor. Figure for the abstract: Fig. 2
Owner:UNIVERSITE DE FRANCHE COMTE +4

Acoustic impedance matching layer for improved touch sensing and fingerprint imaging

This disclosure relates to an acoustic impedance matching layer for improved touch sensing and fingerprint imaging. The invention discloses the use of acoustic impedance matching to improve the accuracy of ultrasonic touch sensing and fingerprint imaging. Acoustic impedance mismatch between the ultrasonic transducer array and the sensing plate can be reduced to maximize energy transfer and minimize parasitic reflections. Reduction of acoustic impedance mismatch can be achieved using: (i) a composite epoxy resin having a higher acoustic impedance than epoxy resin alone; (ii) one or more matching layers having an acoustic impedance approximately equal to the geometric mean of the acoustic impedance of the sensing plate and the acoustic impedance of the transducer array; (iii) holes or perforations in the sensing plate; or (iv) geometries formed in the sensing plate. Furthermore, an absorbent layer can be used to suppress parasitic reflections.
Owner:APPLE INC

A line coupling impedance test support device

The present application relates to pipeline coupling impedance test technical field, especially a kind of pipeline coupling impedance test support device.It includes two symmetrically arranged halves, the opposite end surface of two halves is attached, two clamps are symmetrically arranged on the inner ring of two halves, the opposite end surface of two clamps is attached and is detachably connected into an entity by connecting piece;The front and rear two axial end surfaces of the half are detachably connected spring sheet one end by connecting piece, and the front and rear two axial end surfaces of the clamp of the inner ring of half are detachably connected the other end of spring sheet by connecting piece.The clamp of the present application can constrain the radial displacement of the measured sample, at the same time, spring sheet can provide smaller axial stiffness, during the coupling impedance test process, axial excitation can cause sufficient axial response for measurement.
Owner:CHINA SHIP SCIENTIFIC RESEARCH CENTER

A method for evaluating noise reduction performance of a wheel hub resonant cavity, an electronic device, and a medium

The application relates to a wheel hub resonant cavity noise reduction performance evaluation method, electronic equipment and a medium, and belongs to the wheel hub production technical field, wherein the method comprises the following steps: equivalent propagation of an acoustic wave in a tire cavity to a plane wave, calculating acoustic impedance of each resonant cavity according to obtained geometric parameters of the resonant cavity; calculating total acoustic impedance after parallel connection of the resonant cavities based on the acoustic impedance; equivalent of a main cavity to a straight pipe with equal cross-sectional area and length equal to the circumference of the main cavity, calculating a transmission loss curve of the acoustic wave varying with frequency when the acoustic wave propagates a cycle distance in the straight pipe based on the total acoustic impedance and obtained geometric parameters of the main cavity, and evaluating the wheel hub resonant cavity noise reduction performance based on the transmission loss curve. The application can calculate the transmission loss curve of the acoustic wave varying with frequency in the tire cavity by inputting characteristic dimensions of the tire cavity, and further accurately predict the noise reduction effect of the resonant cavity after actual installation.
Owner:KUNSHAN LIUFENG MACHINERY IND CO LTD

A mirror multi-modal direct extraction method for measuring acoustic lining acoustic impedance

ActiveCN116399443BIncrease extraction frequencyincrease horizontal spacingGas-turbine engine testingSustainable transportationLine arrayMirror image
The application discloses a mirror image multimodal direct extraction method for measuring acoustic liner acoustic impedance, and relates to the technical field of acoustic liner acoustic impedance measurement. The method is that a broken line array microphone is arranged on the opposite wall of an acoustic liner to simultaneously collect axial and lateral sound field information of a sound field, a multimodal Prony algorithm is used to realize full-modal decomposition of a three-dimensional multimodal sound field, a trust region method is introduced to solve an equation set, and finally, the acoustic liner acoustic impedance is analytically extracted. In this way, the lateral spacing of the array can be significantly improved, more sound field information can be obtained, the lateral modes can be better distinguished, the precision of the acoustic impedance extraction is significantly improved, the 3 kHz upper limit of the NASA method can be broken, the acoustic impedance extraction frequency under the three-dimensional multimodal aerodynamic sound field is greatly improved, and the extraction problem under nearly 10 kHz is solved.
Owner:BEIHANG UNIV

Amorphous alloy transformer core loosening detection method and system

PendingCN122130207ACurrent/voltage measurementImpedenceLinear lossImpedance spectrum
This invention relates to the field of transformer measurement and testing, specifically to a method and system for detecting core loosening in amorphous alloy transformers. First, vibration, current, and temperature data are simultaneously acquired, and wavelet packet decomposition is used to extract the vibration energy characteristics of fine frequency bands. Then, a magnetostrictive model is constructed by combining the load current and its rate of change to obtain the equivalent excitation potential energy, and the nonlinear effects of load and temperature are decoupled by calculating the structural response impedance spectrum. Based on this, the trapezoidal integral method is used to calculate the hysteresis loop area of ​​impedance changing with temperature, quantifying the thermo-mechanical nonlinear loss of the core, and finally obtaining normalized detection indicators for graded early warning. This invention can effectively eliminate interference from varying operating conditions, accurately capture the loosening characteristics of the core caused by thermal accumulation effects, and significantly improve the robustness and accuracy of monitoring.
Owner:ZHONGYA ELECTRICAL EQUIP MANCHENG COUNTY

Apparatus and method for measuring acoustics in vacuum chamber

An acoustic measuring apparatus installed in a vacuum chamber to determine a state of a sound wave generation source in the vacuum chamber is provided. The acoustic measuring apparatus includes: a sound wave collecting apparatus in a vacuum chamber and configured to collect sound generated from a sound wave generation source in the vacuum chamber; and a feed-through configured to convert sound wave information of sound collected by the sound wave collecting apparatus into an electrical signal and to transmit the sound wave information outside the vacuum chamber.
Owner:SAMSUNG DISPLAY CO LTD

Aero-engine acoustic liner impedance measurement method based on artificial intelligence

The invention discloses an aero-engine acoustic liner impedance measurement method based on artificial intelligence, and the method comprises the steps: obtaining data information which comprises incoming flow data and corresponding microphone data; inputting the data information into a trained acoustic liner material impedance value inference model, wherein the acoustic liner material impedance value inference model comprises a data expansion layer, a data merging layer and a feature extraction layer; the data expansion layer is used for carrying out dimension expansion on incoming stream data and microphone data; the data merging layer is used for fusing the incoming flow data after dimension expansion and the microphone data to obtain remodeled data information; and the feature extraction layer is used for performing feature extraction on the remodeled data information, and obtaining resistance and reactance parts of the acoustic lining material impedance based on a feature extraction result. The method can effectively solve the problems that an existing acoustic liner impedance inference method is high in calculation cost, low in efficiency and low in accuracy.
Owner:NINGBO DIGITAL TWIN (EASTERN UNIV OF TECH) RES INST

Acoustic diagnostic device and acoustic diagnostic method

PendingEP4700345A1Vibration measurement in fluidImpedence
An acoustic diagnosis device according to the present invention includes: an operational sound collecting unit that collects operational sound of the equipment; an in-operational-segment operational sound extracting unit that extracts operational sound for each of predetermined operational segments of the equipment from the operational sound collected by the operational sound collecting unit; a sound pressure level acquiring unit that acquires a sound pressure level for each of predetermined frequency bands for each of the operational segments with respect to operational sound for each of the operational segments extracted by the in-operational-segment operational sound extracting unit; a degree-of-deviation calculating unit that calculates a degree of deviation of the sound pressure level for each of the operational segments and each of the frequency bands acquired by the sound pressure level acquiring unit from a sound pressure level of the same equipment, a same operational segment, and a same frequency band during normal operation; and an abnormal part specifying unit that specifies an abnormal part of the equipment on a basis of the degree of deviation calculated by the degree-of-deviation calculating unit.
Owner:JFE STEEL CORP

An environmentally friendly muffler flow resistance analysis method and system

The present application relates to the technical field of muffler flow resistance analysis, and particularly relates to an environmental protection muffler flow resistance analysis method and system, which uses fluid dynamics calculation software and acoustic software to perform numerical simulation on the muffling process of a resistive muffler to determine a noise reduction amount simulation range, a flow velocity difference simulation range, a gas pressure difference simulation range and a muffling frequency simulation range; average inlet sound pressure level and average outlet sound pressure level of the resistive muffler are obtained to determine an actual noise reduction amount; a flow resistance characterization state of the resistive muffler is determined according to the actual noise reduction amount; whether to perform flow resistance state diagnosis is determined according to the flow resistance characterization state; the environmental protection muffler flow resistance analysis method provided by the present application can comprehensively and accurately evaluate the flow resistance state of the resistive muffler by combining numerical simulation with actual measurement, improve the accuracy of the evaluation of the muffling effect, and provide a reliable basis for the optimized design and maintenance of the muffler.
Owner:川投(资阳)燃气发电有限公司

Acoustic holography and acoustic array mutual radiation impedance measurement method based on equivalent source method

PendingCN121328169AImpedenceDesign optimisation/simulationEquivalent source methodSound sources
The invention relates to the technical field of underwater acoustic sensor parameter testing, in particular to an acoustic holography acoustic array mutual radiation impedance measuring method based on an equivalent source method, which comprises the following steps of: (1) establishing an equivalent source acoustic model for a tested transmitting array object; (2) arranging an equivalent source in the target sound source, and solving the source intensity of the equivalent source by matching the measurement sound pressure of the holographic surface so as to realize space sound field transformation; and (3) reconstructing the near-field radiation sound field information of the transmitting transducer array by using an equivalent source method to realize accurate evaluation of the transducer array element mutual radiation impedance, and improving the accuracy of sound array element mutual radiation impedance characteristic measurement.
Owner:THE 715TH RES INST OF CHINA SHIPBUILDING IND CORP

Acoustic impedance matching layer for improved touch sensing and fingerprint imaging

ActiveEP4089514B1Impedence networksImpedence
Improving the accuracy of ultrasonic touch sensing and fingerprint imaging using acoustic impedance matching is disclosed. Acoustic impedance mismatches between an ultrasonic transducer array and a sensing plate can be reduced to maximize energy transfer and minimize parasitic reflections. A reduction in acoustic impedance mismatches can be accomplished using (i) a composite epoxy having a higher acoustic impedance than epoxy alone, (ii) one or more matching layers having an acoustic impedance that is approximately the geometric mean of the acoustic impedance of the sensing plate and the acoustic impedance of the transducer array, (iii) pores or perforations in the sensing plate, or (iv) geometric structures formed in the sensing plate. In addition, parasitic reflections can be suppressed using an absorbent layer.
Owner:APPLE INC

Porous matrix for acoustic impedance matching and improved touch sensing and fingerprint imaging

PendingEP4726679A2Impedence networksImpedence
Improving the accuracy of ultrasonic touch sensing and fingerprint imaging using acoustic impedance matching is disclosed. Acoustic impedance mismatches between an ultrasonic transducer array and a sensing plate can be reduced to maximize energy transfer and minimize parasitic reflections. A reduction in acoustic impedance mismatches can be accomplished using (i) a composite epoxy having a higher acoustic impedance than epoxy alone, (ii) one or more matching layers having an acoustic impedance that is approximately the geometric mean of the acoustic impedance of the sensing plate and the acoustic impedance of the transducer array, (iii) pores or perforations in the sensing plate, or (iv) geometric structures formed in the sensing plate. In addition, parasitic reflections can be suppressed using an absorbent layer.
Owner:APPLE INC

An internally pressurized flexible straight tube structure mechanical impedance testing device and method

This invention discloses a mechanical impedance testing device and method for an internally pressurized elastic straight tube structure, comprising a fixing mechanism, a first elastic straight tube, a second elastic straight tube, a docking cover plate, and an output mechanism. The fixing mechanism includes a left support frame and a right support frame. The first and second elastic straight tubes have identical structures and are horizontally and symmetrically arranged between the left and right support frames. The two sides of the docking cover plate are respectively connected to the input ends of the first and second elastic straight tubes, and a through hole is opened in the middle of the docking cover plate to connect the internal chambers of the first and second elastic straight tubes. The output mechanism is located between the output end of the second elastic straight tube and the right support frame, and includes an upper adapter plate, a three-dimensional force plate, and a lower adapter plate arranged sequentially. This device and method not only avoid the stiffness influence of the introduced decoupling airbag but also avoid the influence of fluid pressure transmission inside the elastic tube, thus improving the accuracy of the test results.
Owner:WUHAN UNIV OF TECH

Monitoring device including microphone array, and noise control system using same

PCT designated stageWO2026116747A1ImpedenceTraffic control supervisionNoise controlSound sources
Disclosed is a monitoring device. More specifically, the present invention relates to a monitoring device including a microphone array for detecting, in consideration of surrounding situations, sources of noise exceeding a threshold that may occur on outdoor roads, factories, and the like, and a noise control system using same. According to an embodiment of the present invention, a conventional CCTV camera, which is installed on a road to monitor vehicles in motion, is provided with a weather observation means and an outdoor noise measurement means, and there is an effect of detecting, by means of same, a sound source that generates noise greater than or equal to a threshold by determining surrounding conditions such as weather.
Owner:SM INSTR INC +2