The invention provides a micro-nano vibration
laser interference dynamics measurement optimization method based on polarization enhancement, which is based on a polarization
control system and comprises a
laser generator, a reflector, a half slide, a polarization
beam splitting cubic mirror, an objective lens, a micro-nano electromechanical
resonator, a convex lens, a photoelectric
detector, a
spectrum analyzer, a network analyzer, a
blue laser generator and a long-wave pass filter. Wherein a first quarter-wave slide is arranged between the
laser generator and the reflector, a second quarter-wave slide is arranged between the reflector and the half-wave slide, and a third quarter-wave slide is arranged between the polarization
beam splitting cubic mirror and the objective lens. According to the
optical path enhancement technology based on polarization optimization, the input laser energy is utilized to the maximum extent, and the
transmission loss of the laser in the
optical path is reduced. The weak response
signal of the micro-nano electromechanical
resonator in a non-driving thermal vibration state is successfully and substantially amplified and purified, and a better measurement method is provided for deeply researching the dynamic characteristics of the micro-nano electromechanical
resonator.