49results about "Electrostatic motors" patented technology

The present disclosure, in some embodiments, relates to a MEMS (Microelectromechanical systems) structure. The MEMS structure includes a first comb structure having a first plurality of comb fingers extending outward from a first branch. A second comb structure has a second plurality of comb fingers extending outward from a second branch. The first plurality of comb fingers are laterally interleaved between the second plurality of comb fingers. The first plurality of comb fingers respectively include a weighted core material and one or more peripheral materials. The weighted core material has a larger density than the one or more peripheral materials.

The invention relates to the technical field of micro aircrafts, in particular to an atmospheric potential energy self-sustaining aircraft. Comprising a stator component provided with a positive electrode and a negative electrode which are distributed crosswise in the circumferential direction; a rotor member having a conductive sheet; the conducting strip can obtain charges from the positive electrode or the negative electrode of the stator part, so that the rotor part is driven to rotate; the rotor wing assembly is connected to the rotor component; the positive charge collecting part is electrically connected with the positive electrode and used for collecting positive charges in the atmosphere and supplying the positive charges to the positive electrode; and the grounding part is electrically connected with the negative electrode and is used for grounding the negative electrode. By arranging the positive charge collecting component and the grounding component, the aircraft can directly obtain electric energy from an atmospheric electric field, and the natural potential difference between the high altitude and the ground is used for driving the rotor component to rotate, so that continuous power is provided for the aircraft. The mode does not depend on a traditional storage battery or a solar cell, the problems that an existing micro aircraft is short in endurance time and limited by light conditions are solved, and cross-day and cross-night continuous flight can be achieved.

A micro-electromechanical system (MEMS) structure is useful as an actuator for moving an image sensor for optical image stabilization. The MEMS actuator includes one or more micromechanical arm arrays. Each arm array includes a first array of spaced-apart fingers formed from a piezoelectric material, and a second array of spaced-apart fingers formed from an electrically conductive material. The distal ends of the first array of fingers and the distal ends of the second array of fingers are interposed between each other. Micro-springs connect the interposed distal ends of each set of adjacent fingers together. A metal cap is present above the distal ends of the first array of fingers and the distal ends of the second array of fingers. Micro-springs connect the metal cap to the distal end of each finger of the first array of fingers. This structure has increased stability and strength.

An illustrative electrostatic machine includes a shaft that is configured to rotate about an axis, a rotor electrode, and a stator electrode. The rotor electrode and the stator electrode are separated by a gap and form a capacitor. The rotor electrode is fixed to the shaft. The electrostatic machine can also include a housing that is configured to enclose the rotor electrode, the stator electrode, and at least a portion of the shaft. The stator electrode is fixed to the housing. A dielectric fluid fills a void defined by the housing, the rotor electrode, and the stator electrode.

An optical device includes: a base; a movable portion which includes an optical function portion; an elastic support portion which supports the movable portion so that the movable portion is movable along a first direction; a first comb electrode which is provided to the base; and a second comb electrode which includes a plurality of second comb fingers provided to at least one of the movable portion and the elastic support portion. The elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever connected to the torsion bar. The second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar. The first comb finger and the second comb finger which are adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction.

To provide an electrode pair having a saw-tooth configuration and an artificial muscle including the same.SOLUTION: An electrode pair includes a first electrode and a second electrode. The first electrode and the second electrode each have an outer surface, an inner surface, a first end, a second end, and a lead extending outwardly from the first end. The lead has a first width at the first end. The second end of at least one of the first electrode and the second electrode has a recess that is formed in the second end and that has a first terminal and a second terminal. A second width extends between the first terminal and the second terminal of the recess. The recess is defined by a saw-tooth pattern. When the first electrode is positioned on the second electrode, At least one recess in the first electrode is adjacent to the lead of the other electrode.SELECTED DRAWING: Figure 1

To provide an artificial muscle stack that comprises a plurality of artificial muscle layers.SOLUTION: Each artificial muscle layer includes one or more artificial muscles having a housing with an electrode region and an expandable fluid region, a dielectric fluid housed in the housing, and an electrode pair having first and second electrodes positioned in the electrode region. The first and second electrodes each include two or more tab portions and two or more bridge portions. The two or more bridge portions interconnect adjacent tab portions. At least one of the first and second electrodes includes a central opening positioned between the tab portions and encircling the expandable fluid region. The artificial muscle layers are arranged such that the expandable fluid region of the artificial muscles of each artificial muscle layer overlaps at least one tab portion of one or more artificial muscles of an adjacent artificial muscle layer.SELECTED DRAWING: Figure 1

A microelectromechanical (MEMS) device is provided. The MEMS device comprises a substrate and a movable structure flexurally connected to the substrate, capable of moving in relation to the substrate, wherein the movable structure further comprising two or more segments having at least one mechanical connection between said segments to provide structural integrity of the moving structure; and wherein the at least one mechanical connection electrically isolates at least two segments.

The invention discloses an electrostatic rolling driver based on a dielectric liquid amplification effect, relates to the technical field of electrostatic driving, and solves the problems of complex structure and control strategy, high cost and weak climbing capability of a climbing robot. The device comprises a conductive surface, a conductive circular ring and dielectric liquid, the conductive circular ring is arranged on the conductive surface, and the conductive circular ring and the conductive surface are insulated through a dielectric structure; dielectric liquid is arranged on one radial side of the conductive ring; voltage is applied to the conductive circular ring and the conductive surface; electrostatic forces on the two sides of the conductive ring are asymmetrically distributed through the dielectric liquid, and electrostatic force components in the tangential direction and the normal direction of the conductive surface provide electrostatic driving force and adhesive force for the conductive ring respectively. According to the invention, a parallel electric adhesion effect and an electrostatic driving effect are integrated into an adhesion-driving integrated structure, so that the conductive circular ring can flexibly move on a horizontal surface and a bent surface.

To provide artificial muscles comprising an electrode pair, and a method for actuating the artificial muscles.SOLUTION: Artificial muscles are provided including: a housing having an electrode region and an expandable fluid region; an electrode pair comprising a first electrode and a second electrode that are positioned in the electrode region of the housing; a dielectric fluid housed in the housing; and a stiffening member positioned between the housing and at least one of the first electrode and the second electrode. The stiffening member increases a stiffness of the housing in a direction toward the expandable fluid region from an opposite edge of the electrode region. The electrode pair is actuatable between a non-actuated state and an actuated state such that the actuation from the non-actuated state to the actuated state directs the dielectric fluid into the expandable fluid region.SELECTED DRAWING: Figure 1

Methods, apparatuses and methods of manufacture are described for a MEMS electrostatic blade actuator with different configurations to allow for improvements to performance. The MEMS electrostatic blade actuator with different configurations can be used in a MEMS mirror to reduce mass or reduce operating voltage.

A soft haptic device and a local control method are disclosed. The soft haptic device includes a soft actuator. The soft actuator includes an electroactive polymer film, a patterned electrode, and a dielectric liquid injected between the electroactive polymer film and the patterned electrode. The soft actuator generates a reconfigurable shape such that a form of an output shape and a number of outputtable shapes are changed depending on the number of electrodes constituting the patterned electrode, a shape of the electrodes, and an arrangement of the electrodes.

MEMS devices having micro spring structures are provided. An example MEMS device includes a first micromechanical arm array including multiple first micromechanical arms spaced from each other in a first horizontal direction and a second micromechanical arm array including multiple second micromechanical arms spaced from each other in the first horizontal direction. The first and the second micromechanical arm arrays are interposed in the first horizontal direction. The MEMS device further includes a metal connection structure connected to each first micromechanical arm, and a vertical micro spring structure disposed between the metal connection structure and one of the second micromechanical arms. The vertical micro spring structure includes a first layer having a first coefficient of thermal expansion (CTE) and a second layer having a second CTE different from the first CTE. The second layer is bonded to the first layer.

The present invention relates to an artificial muscle actuator including an electrode having an insulating double layer. The artificial muscle actuator includes a housing, a dielectric fluid housed within the housing, and an electrode pair positioned in the housing. The electrode pair includes a first electrode and a second electrode. The first electrode and the second electrode each include a metal film. The first electrode includes an insulating double layer disposed on the metal film of the first electrode in an orientation facing the second electrode. Further, the insulating double layer includes an acrylic and / or acrylate-based polymer layer disposed on the metal film and a biaxially oriented polypropylene (BOPP) layer disposed on the acrylic and / or acrylate-based polymer layer.

Provided are a MEMS controller and a MEMS device, including: at least one control unit including: two adjacent anchor structures with a first gap therebetween; and cantilever beam structures respectively corresponding to the two anchor structure, a first end of each cantilever beam structure being located at a top surface of the anchor structure corresponding thereto, and second ends of two adjacent cantilever beam structures directly facing each other and forming a second gap therebetween; and an encapsulation structure including a bottom plate, a side plate and a top plate connected in sequence, the bottom plate directly facing the top plate. The bottom plate is located at the bottom surface of the anchor structure and provided with a first flow channel port. The top plate is spaced from the top surfaces of the two cantilever beam structures and provided with a second flow channel port.

The present invention relates to an actuator. The actuator has a flexible electrode and a base electrode, the flexible electrode has flexibility, an opposite surface of the base electrode facing the flexible electrode is covered by an insulating layer, and the actuator is configured such that, when a voltage is applied between the flexible electrode and the base electrode, the flexible electrode deforms to approach the opposite surface. The actuator comprises a constraining member constraining the flexible electrode on the base electrode. The flexible electrode has a deformed portion that deforms when the voltage is applied between the flexible electrode and the base electrode. The deformed portion deforms in a direction approaching the opposite surface with the constraining member acting as a support point.

A MEMS electrostatic actuator that provides 5 degrees of freedom (5-DOF) motion is disclosed. The actuator comprises of an inner, a middle, and an outer MEMS structures that are nested with respect to each other. Each of the structures comprise of a plurality of rotors and stators. The rotors further comprise a plurality of moving capacitive electrodes which engage with a plurality of fixed capacitive electrodes in the stators to provide a variety of translational and rotational motions.

Aspects of this disclosure relates to configuration, operation, and manufacture of an electrostatic motor. The electrostatic motor includes at least one rotor and at least one stator, where at least one of which is flexible and at least one of which, usually the stator, includes a set of electrodes. Voltages applied to the electrodes produces electrostatic attraction between associated regions of the rotor and stator. The electrostatic attraction causes contact between the rotor and stator in at least two regions, causing a gap to be formed between the rotor and stator, known as a "bubble". By causing a proper sequence of voltages to be applied to the electrodes, the bubble to rotates relative to the rotor and / or the stator, where a full rotation of the bubble causes a partial rotation of the rotor relative to the stator. The bubble rotates around the stator without limit.

The embodiment of the invention relates to a dielectric elastomer actuator. The dielectric elastomer actuator may include a dielectric elastomer layer, the dielectric elastomer layer including a dielectric elastomer. The dielectric elastomer may include a zwitterionic segment and a soft segment attached to the zwitterionic segment. The dielectric elastomer actuator may also include a first electrode and a second electrode. The dielectric elastomer actuator may also include one or more structural members. The dielectric elastomer actuator may be arranged such that in response to a potential difference applied between the first and second electrodes, a force is applied on the dielectric elastomer layer due to Maxwell stress, thereby moving the one or more structures.

This disclosure relates to an electrode pair with a serrated configuration and an artificial muscle including the serrated configuration. An electrode pair including a first electrode and a second electrode is provided. Each of the first and second electrodes has an outer surface, an inner surface, a first end, a second end, and a lead extending outwardly from the first end. The lead has a first width at the first end. At the second end of at least one of the first and second electrodes, a recess formed therein has a first endpoint and a second endpoint. The second width extends between the first and second endpoints of the recess. The recess is defined by a serrated pattern. When the first electrode is placed on the second electrode, the recess of at least one of the first electrodes is adjacent to the lead of the other electrode.

A light emitter module (100, 210, 400, 500, 600, 700), comprising: an emitter component comprising a heater structure (110) arranged on a membrane structure (120), wherein the membrane structure (120) is arranged over a first cavity (130), the first cavity (130) being arranged between the membrane structure (120) and at least a section of a support substrate (140) of the emitter component, wherein the heater structure (110) is configured to emit light when a predefined current flows through the heater structure (110); a lid substrate (150) with a recess (160), wherein the lid substrate (150) is attached to the emitter component such that the recess (160) forms a second cavity (170) between the membrane structure (120) and the lid substrate (150), and wherein the pressure in the second cavity (170) is less than 100 mbar; and an optical filter structure (410) arranged vertically between the first cavity (130) and the support substrate (140) or between the second cavity (170) and the cover substrate (150), the second cavity (170) extends laterally outside the first cavity (130) closer to the supporting substrate (140) than the membrane structure (120).

An electro-hydraulic actuator includes a deformable shell defining an enclosed internal cavity and containing a liquid dielectric, first and second electrodes on first and second sides, respectively, of the enclosed internal cavity. An electrostatic force between the first and second electrodes upon application of a voltage to one of the electrodes draws the electrodes towards each other to displace the liquid dielectric within the enclosed internal cavity. The shell includes active and inactive areas such that the electrostatic forces between the first and second electrodes displaces the liquid dielectric within the enclosed internal cavity from the active area of the shell to the inactive area of the shell. The first and second electrodes, the deformable shell, and the liquid dielectric cooperate to form a self-healing capacitor, and the liquid dielectric is configured for automatically filling breaches in the liquid dielectric resulting from dielectric breakdown.

A method of calibrating a resonator having a resonant member that can vibrate in a first mode of vibration, and a calibration electrode that is spaced from a capacitively coupled to the resonant member, the method comprises: applying a polarization voltage to the resonant member and a calibration voltage to the calibration electrode, wherein the polarization voltage is a negative voltage; vibrating the resonant member such that the resonant member vibrates in the first mode of vibration; measuring a frequency parameter of the resonant member; determining if the frequency parameter is in compliance with a predetermined threshold; and if the frequency parameter is not in compliance with the predetermined threshold, adjusting the frequency parameter to be in compliance with the predetermined threshold by adjusting at least one of the polarization voltage and the calibration voltage.

This invention provides an actuator comprising: a flexible electrode having flexibility; and a base electrode, wherein a facing surface opposite the flexible electrode is covered by an insulating layer. The actuator deforms the flexible electrode toward the facing surface by applying a voltage between the two electrodes. The flexible electrode is a rotating body disposed on the facing surface. The base electrode is divided into multiple mutually insulated electrode portions. The multiple electrode portions are arranged along a predetermined direction. When a voltage is sequentially applied to the multiple electrode portions in the predetermined direction, the flexible electrode rotates on the facing surface while moving relative to the base electrode in the predetermined direction.

The invention relates to a microelectromechanical drive for moving an object, having electrostatic bending actuators, wherein each electrostatic bending actuator has a cantilever having at least one active element which has a layer stack forming at least one capacitor positioned offset to a center-of-gravity-plane of the cantilever which leads alongside a longitudinal axis of the cantilever from a supported end of the cantilever to a loose end, which is averted from the supported end of the cantilever and which has a contact area for engaging with the object.The microelectromechanical drive can be used to displace any target objects from nanoscopic to macroscopic sizes that are within the force-displacement configurations of the electrostatic bending actuators. The microelectromechanical drive is suited to act as an inchworm drive.

An apparatus 100 for generating a propulsion force comprises: a laser arrangement 11; an optical device 120 comprising an optical region; and a coupling arrangement 140A comprising coils of optical fi

An example electrostatic machine including a rotor stack comprising a plurality of a rotor plates each including a plurality of rotor electrodes positioned on each side of the rotor plate; and at least one rotor via comprising an electrical connection between the plurality of rotor electrodes on a first side of the rotor plate and the plurality of rotor electrodes on a second side of the rotor plate; and a stator stack comprising a plurality of stator plates, each including a plurality of stator electrodes positioned on each side of the stator plate; and at least one stator via comprising an electrical connection between the plurality of stator electrodes on a first side of the stator plate and the plurality of stator electrodes on a second side of the stator plate.

The present application provides a motor and an electronic device, wherein the motor includes a case, a first electrically actuated oscillator, and a weight, the case has a receiving cavity, the first electrically actuated oscillator and the weight are disposed in the receiving cavity, a first end of the first electrically actuated oscillator is connected to the case, and a second end of the first electrically actuated oscillator is connected to the weight, and when a voltage is applied to the first electrically actuated oscillator, the first electrically actuated oscillator drives the weight to move.

Embodiments of the present disclosure relate to microelectromechanical optical shades with translational shielding structures and manufacturing processes thereof. The MEMS shade includes: a semiconductor substrate with an aperture therethrough; a first semiconductor layer and a second semiconductor layer forming a support structure fixed to the substrate; a plurality of deformable structures, each deformable structure formed from a corresponding portion of at least one of the first and second semiconductor layers; a plurality of actuators; a plurality of shielding structures, each shielding structure formed from a corresponding portion of at least one of the first and second semiconductor layers, the shielding structures angularly arranged about the underlying aperture to provide shielding of the aperture, each shielding structure further coupled to the support structure via a deformable structure. Each actuator can be controlled to translate the corresponding shielding structure between a first position and a second position, thereby varying the shielding of the aperture; the first and second positions of the shielding structures being such that, in at least one operating state, adjacent shielding structures at least partially overlap one another.

This application provides a driving component and related equipment applicable to optical communication scenarios such as OXC, VOA, and WSS, or projection display fields. A first fixed structure, a second fixed structure, and a third fixed structure are fixed to a substrate. A rotating frame is connected to the first fixed structure via a first cantilever beam, and a first comb tooth is formed on the rotating frame. The first and second comb teeth are arranged alternately, with the second comb tooth formed on the second fixed structure. A rotating platform is located inside the rotating frame and is connected to the rotating frame via the second cantilever beam, with a third comb tooth formed on the rotating platform. The third and fourth comb teeth are arranged alternately, with the fourth comb tooth formed on the rotating structure. The rotating structure is connected to the third fixed structure via the third cantilever beam, and the rotating structure is fixed together with the rotating frame. The first and second comb teeth drive the rotating frame and the rotating structure to rotate around a first axis. The third and fourth comb teeth drive the rotating platform to rotate around a second axis.