9results about "Electrostatic motors" patented technology

A microelectromechanical (MEMS) device is provided. The MEMS device comprises a substrate and a movable structure flexurally connected to the substrate, capable of moving in relation to the substrate, wherein the movable structure further comprising two or more segments having at least one mechanical connection between said segments to provide structural integrity of the moving structure; and wherein the at least one mechanical connection electrically isolates at least two segments.

Provided are a MEMS controller and a MEMS device, including: at least one control unit including: two adjacent anchor structures with a first gap therebetween; and cantilever beam structures respectively corresponding to the two anchor structure, a first end of each cantilever beam structure being located at a top surface of the anchor structure corresponding thereto, and second ends of two adjacent cantilever beam structures directly facing each other and forming a second gap therebetween; and an encapsulation structure including a bottom plate, a side plate and a top plate connected in sequence, the bottom plate directly facing the top plate. The bottom plate is located at the bottom surface of the anchor structure and provided with a first flow channel port. The top plate is spaced from the top surfaces of the two cantilever beam structures and provided with a second flow channel port.

A method of calibrating a resonator having a resonant member that can vibrate in a first mode of vibration, and a calibration electrode that is spaced from a capacitively coupled to the resonant member, the method comprises: applying a polarization voltage to the resonant member and a calibration voltage to the calibration electrode, wherein the polarization voltage is a negative voltage; vibrating the resonant member such that the resonant member vibrates in the first mode of vibration; measuring a frequency parameter of the resonant member; determining if the frequency parameter is in compliance with a predetermined threshold; and if the frequency parameter is not in compliance with the predetermined threshold, adjusting the frequency parameter to be in compliance with the predetermined threshold by adjusting at least one of the polarization voltage and the calibration voltage.

The invention relates to a microelectromechanical drive for moving an object, having electrostatic bending actuators, wherein each electrostatic bending actuator has a cantilever having at least one active element which has a layer stack forming at least one capacitor positioned offset to a center-of-gravity-plane of the cantilever which leads alongside a longitudinal axis of the cantilever from a supported end of the cantilever to a loose end, which is averted from the supported end of the cantilever and which has a contact area for engaging with the object.The microelectromechanical drive can be used to displace any target objects from nanoscopic to macroscopic sizes that are within the force-displacement configurations of the electrostatic bending actuators. The microelectromechanical drive is suited to act as an inchworm drive.

The present invention relates to a pressure generator comprising a film cushion, two expansion-blocking elements, connected to one another, for the film cushion, and two electrically contactable electrode layers. The invention also relates to an actuator system comprising said pressure generator and a useful actuator.

Embodiments of the present application relate to the technical field of imaging, and disclose a focus motor, a closed-loop control method for a focus motor, and an imaging device. 【Solution means】The focus motor includes a first pole plate (10), a second pole plate (20), a hovering conductor plate (30), a mover holder (40), and a processing unit. The first pole plate (10) and the second pole plate (20) are fixedly installed and arranged perpendicular to the focusing direction. The hovering conductor plate (30) is installed opposite to the first pole plate (10) and the second pole plate (20) respectively. The hovering conductor plate (30) is provided on the mover holder (40). The mover holder (40) is movable in the focusing direction. The projection area between the hovering conductor plate (30) and the first pole plate (10), and the projection area between the hovering conductor plate (30) and the second pole plate (20) both change according to the movement of the mover holder (40). A reference capacitance is formed between the first pole plate (10) and the second pole plate (20). The processing unit controls the movement of the mover holder (40) in the focusing direction based on the reference capacitance.

The invention relates to a displacement device (31) for swiveling a mirror element (20) with two degrees of swiveling freedom, comprising an electrode structure having actuator electrodes (37i, 42), said actuator electrodes (37i, 42) being comb electrodes, and all actuator electrodes (37i) being located in a single plane and the actuator electrodes (37i, 42) forming a direct drive for swiveling the mirror element (20).

Provided are a MEMS controller and a MEMS device. The MEMS controller includes: at least one control unit including: two adjacent first anchor structures with a gap formed therebetween; cantilever beam structures respectively corresponding to the two first anchor structure, a first end of each of the cantilever beam structures being located at a top surface of a corresponding first anchor structure, and second ends of two adjacent cantilever beam structures directly facing each other and forming a second gap therebetween; and a diaphragm covering top surfaces of two second anchor point structures; and an encapsulation structure including a bottom plate, a side plate and a top plate connected in sequence. The bottom plate is provided with a first flow channel port, penetrating through the bottom plate, corresponding to the control unit and connected to the first gap of the corresponding control unit.