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88results about "Electrostatic motors" patented technology

Semiconductor MEMS structure and method for forming the same

The present disclosure, in some embodiments, relates to a MEMS (Microelectromechanical systems) structure. The MEMS structure includes a first comb structure having a first plurality of comb fingers extending outward from a first branch. A second comb structure has a second plurality of comb fingers extending outward from a second branch. The first plurality of comb fingers are laterally interleaved between the second plurality of comb fingers. The first plurality of comb fingers respectively include a weighted core material and one or more peripheral materials. The weighted core material has a larger density than the one or more peripheral materials.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

Rotational and translational micropositioners using deformable microelectromechanical systems

Microelectromechanical systems (MEMS) have found widespread applications across biotechnology, medicine, communications, and consumer electronics. These are typically one-dimensional MEMS (e.g. rotation, linear translation on a single axis) or two-dimensional MEMS (e.g. linear translation in two directions in the plane of the MEMS). It would be beneficial therefore for designers of components, circuits, and systems to exploit MEMS elements that produce both out-of-plane and in-plane motion thereby allowing for novel two-dimensional and three-dimensional MEMS micropositioners.
Owner:ECOLE DE TECH SUPERIEURE

Atmospheric potential energy self-sustaining aircraft

The invention relates to the technical field of micro aircrafts, in particular to an atmospheric potential energy self-sustaining aircraft. Comprising a stator component provided with a positive electrode and a negative electrode which are distributed crosswise in the circumferential direction; a rotor member having a conductive sheet; the conducting strip can obtain charges from the positive electrode or the negative electrode of the stator part, so that the rotor part is driven to rotate; the rotor wing assembly is connected to the rotor component; the positive charge collecting part is electrically connected with the positive electrode and used for collecting positive charges in the atmosphere and supplying the positive charges to the positive electrode; and the grounding part is electrically connected with the negative electrode and is used for grounding the negative electrode. By arranging the positive charge collecting component and the grounding component, the aircraft can directly obtain electric energy from an atmospheric electric field, and the natural potential difference between the high altitude and the ground is used for driving the rotor component to rotate, so that continuous power is provided for the aircraft. The mode does not depend on a traditional storage battery or a solar cell, the problems that an existing micro aircraft is short in endurance time and limited by light conditions are solved, and cross-day and cross-night continuous flight can be achieved.
Owner:BEIHANG UNIV

Chip structure, manufacturing method and related device

The embodiment of the invention provides a chip structure, a manufacturing method and a related device, and the chip structure comprises a functional chip; the heat dissipation chip is bonded to the functional chip; the heat dissipation chip comprises a heat dissipation sheet which is of a symmetrical structure; the connecting parts are located at the two ends of the cooling fins and connected with the frame through rotating shafts; the capacitor structure is located on the outer side of the connecting part and used for providing power for movement of the cooling fins; the frame surrounds the cooling fins and the connecting part, and the frame, the cooling fins and the connecting part are arranged at intervals. According to the embodiment of the invention, the heat dissipation problem of the chip can be solved.
Owner:HYGON INFORMATION TECH CO LTD

Micromechanical arm array for MEMS actuators

A micro-electromechanical system (MEMS) structure is useful as an actuator for moving an image sensor for optical image stabilization. The MEMS actuator includes one or more micromechanical arm arrays. Each arm array includes a first array of spaced-apart fingers formed from a piezoelectric material, and a second array of spaced-apart fingers formed from an electrically conductive material. The distal ends of the first array of fingers and the distal ends of the second array of fingers are interposed between each other. Micro-springs connect the interposed distal ends of each set of adjacent fingers together. A metal cap is present above the distal ends of the first array of fingers and the distal ends of the second array of fingers. Micro-springs connect the metal cap to the distal end of each finger of the first array of fingers. This structure has increased stability and strength.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

Optical device production method

A method for manufacturing an optical device includes: a first step of preparing a semiconductor substrate that includes a portion corresponding to a base, a movable unit, and an elastic support portion; a second step of forming a first resist layer in a region corresponding to the base on a surface of a first semiconductor layer which is opposite to an insulating layer; a third step of forming a depression in the first semiconductor layer by etching the first semiconductor layer up to an intermediate portion in a thickness direction using the first resist layer as a mask; a fourth step of forming a second resist layer in a region corresponding to a rib portion on a bottom surface of the depression, a side surface of the depression, and the surface of the first semiconductor layer which is opposite to the insulating layer; and a fifth step of forming the rib portion by etching the first semiconductor layer until reaching the insulating layer using the second resist layer as a mask.
Owner:HAMAMATSU PHOTONICS KK

Bending transducer as actuator, bending transducer as sensor, bending transducer system

A bending transducer includes a deflectable element, a microelectromechanical transducer extending along a centroid fiber of the deflectable element deflecting the deflectable element in a first direction when a first electrical signal is applied, and a second microelectromechanical transducer extending along the centroid fiber deflecting the deflectable element in a second direction opposite to the first direction when a second electrical signal is applied, the centroid fiber being located between sides of the first and second microelectromechanical transducers facing away from each other, and an electrical control configured to vary the first and second electrical signals depending on an input signal such that a change of the first electrical signal and a change of the second electrical signal depends on the electrical input signal, and the phases of the first and second electrical signals are shifted relative to each other. A bending transducer operated as sensor is also presented.
Owner:FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV

Wheel type electric vehicle based on electrostatic motor driving

The invention belongs to the technical field of wheeled electric vehicles, and particularly relates to a wheeled electric vehicle based on electrostatic motor driving. A wheel; the electrostatic motors are installed on the two sides of the chassis frame and used for outputting power to the wheels. Wherein a high-pressure generator is mounted on the chassis frame; the electrostatic motor includes: a stator part including a positive electrode and a negative electrode connected to a high voltage generator; the rotor part comprises a conducting strip; and the conducting strip of the rotating part can obtain charges from the positive electrode and the negative electrode of the stator part, so that the rotor part is rotationally driven by the stator part to drive the wheel to rotate. The wheel type electric vehicle has the beneficial effects that compared with a traditional electromagnetic motor, the energy consumption efficiency of the wheel type electric vehicle driven by the electrostatic motor is obviously improved, particularly, the wheel type electric vehicle is more remarkable under the low-speed operation or frequent starting and stopping working condition, the zero heating characteristic under the low-speed or locked-rotor working condition is achieved, and the energy consumption efficiency is improved. And high efficiency can be maintained at a low rotating speed.
Owner:BEIJING RADIAL WEIZHE TECHNOLOGY CO LTD

A rotary electrostatic adsorption driver

The present invention provides a rotary electrostatic adsorption driver, which includes a driver body. The driver body is a cylinder formed by a first outer frame, a second outer frame and a plurality of electrodes. Both ends of the electrodes are inserted into the holes of the first outer frame and the second outer frame and fixed. The number of electrodes is multiple and they are evenly distributed in the circumferential direction between the first outer frame and the second outer frame. A power supply assembly capable of supplying power to the electrodes. The driver body is placed on a supporting plane, and an electrostatic field is generated between the electrodes and the supporting plane. The electrodes are subjected to electrostatic adsorption force, and the driver body generates a rotational motion on the supporting plane under the action of the electrostatic adsorption force. This driver can directly drive the rotational motion by using the torque generated by adsorption, thereby reducing redundant structures.
Owner:BEIHANG UNIV

Electrostatic machine system and method of operation

An illustrative electrostatic machine includes a shaft that is configured to rotate about an axis, a rotor electrode, and a stator electrode. The rotor electrode and the stator electrode are separated by a gap and form a capacitor. The rotor electrode is fixed to the shaft. The electrostatic machine can also include a housing that is configured to enclose the rotor electrode, the stator electrode, and at least a portion of the shaft. The stator electrode is fixed to the housing. A dielectric fluid fills a void defined by the housing, the rotor electrode, and the stator electrode.
Owner:C MOTIVE TECHNOLOGIES INC

A vibration comfort evaluation platform for pedestrian bridges considering human-bridge interaction

The present invention discloses a pedestrian bridge vibration comfort assessment platform that takes into account human-bridge interaction. The platform comprises a self-powered sensing vibration force measurement platform and an analysis and control system. The self-powered sensing vibration force measurement platform includes multiple self-powered sensing force platforms and servo-controlled motors. The self-powered sensing force platforms are densely packed with friction nanogenerator self-powered three-dimensional force measurement blocks. The analysis and control system comprises three modules: data acquisition, feedback control, and data output. The modules collect the three-dimensional pedestrian load on the self-powered sensing vibration force measurement platform in real time, calculate the bridge dynamic response based on a finite element model of the pedestrian bridge, and then feedback-control the vibration state of the self-powered sensing vibration force measurement platform to simulate the actual bridge vibration. Finally, the bridge vibration comfort is assessed based on the dynamic response characteristics of the bridge throughout the loading process. The present invention enables real-time interaction between a computer and the self-powered sensing vibration force measurement platform, reducing sensing energy consumption while obtaining pedestrian bridge vibration comfort assessment results that are closer to reality.
Owner:ZHEJIANG UNIV

Optical device and method for manufacturing same

An optical device includes: a base; a movable portion which includes an optical function portion; an elastic support portion which supports the movable portion so that the movable portion is movable along a first direction; a first comb electrode which is provided to the base; and a second comb electrode which includes a plurality of second comb fingers provided to at least one of the movable portion and the elastic support portion. The elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever connected to the torsion bar. The second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar. The first comb finger and the second comb finger which are adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction.
Owner:HAMAMATSU PHOTONICS KK

Electrode pair having a sawtooth configuration and artificial muscle including the same

To provide an electrode pair having a saw-tooth configuration and an artificial muscle including the same.SOLUTION: An electrode pair includes a first electrode and a second electrode. The first electrode and the second electrode each have an outer surface, an inner surface, a first end, a second end, and a lead extending outwardly from the first end. The lead has a first width at the first end. The second end of at least one of the first electrode and the second electrode has a recess that is formed in the second end and that has a first terminal and a second terminal. A second width extends between the first terminal and the second terminal of the recess. The recess is defined by a saw-tooth pattern. When the first electrode is positioned on the second electrode, At least one recess in the first electrode is adjacent to the lead of the other electrode.SELECTED DRAWING: Figure 1
Owner:TOYOTA JIDOSHA KK

Artificial muscle stack with alternating offset artificial muscle layers

To provide an artificial muscle stack that comprises a plurality of artificial muscle layers.SOLUTION: Each artificial muscle layer includes one or more artificial muscles having a housing with an electrode region and an expandable fluid region, a dielectric fluid housed in the housing, and an electrode pair having first and second electrodes positioned in the electrode region. The first and second electrodes each include two or more tab portions and two or more bridge portions. The two or more bridge portions interconnect adjacent tab portions. At least one of the first and second electrodes includes a central opening positioned between the tab portions and encircling the expandable fluid region. The artificial muscle layers are arranged such that the expandable fluid region of the artificial muscles of each artificial muscle layer overlaps at least one tab portion of one or more artificial muscles of an adjacent artificial muscle layer.SELECTED DRAWING: Figure 1
Owner:TOYOTA JIDOSHA KK

Optical device

An optical device includes a base that includes a main surface, a movable unit that includes an optical function unit, an elastic support unit that supports the movable unit so that the movable unit is movable along a predetermined direction perpendicular to the main surface, a fixed comb electrode that includes a plurality of fixed comb fingers, and a movable comb electrode that includes a plurality of movable comb fingers which are disposed alternately with the plurality of fixed comb fingers. At least one of the movable unit and the elastic support unit includes an electrode support portion that supports the movable comb electrode. The electrode support portion includes a rib portion that is formed so that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb fingers in the predetermined direction.
Owner:HAMAMATSU PHOTONICS KK

Artificial muscle assemblies including a central artificial muscle and a plurality of initiating actuators

An artificial muscle assembly includes initiating actuators and an artificial muscle. The artificial muscle includes a housing including an electrode region and an expandable fluid region, and an electrode pair positioned in the electrode region. The electrode pair includes a first electrode and a second electrode fixed to respective first and second surfaces of the housing. At least one of the first electrode and the second electrode includes a central opening defining the expandable fluid region. The electrode pair is actuatable between a non-actuated state and an actuated state such that actuation from the non-actuated state to the actuated state directs a dielectric fluid into the expandable fluid region. Each initiating actuator is actuatable between a non-actuated state and an actuated state such that actuation from the non-actuated state to the actuated state applies a force against the electrode region of the artificial muscle.
Owner:TOYOTA JIDOSHA KK

Electrostatic rolling driver based on dielectric liquid amplification effect

The invention discloses an electrostatic rolling driver based on a dielectric liquid amplification effect, relates to the technical field of electrostatic driving, and solves the problems of complex structure and control strategy, high cost and weak climbing capability of a climbing robot. The device comprises a conductive surface, a conductive circular ring and dielectric liquid, the conductive circular ring is arranged on the conductive surface, and the conductive circular ring and the conductive surface are insulated through a dielectric structure; dielectric liquid is arranged on one radial side of the conductive ring; voltage is applied to the conductive circular ring and the conductive surface; electrostatic forces on the two sides of the conductive ring are asymmetrically distributed through the dielectric liquid, and electrostatic force components in the tangential direction and the normal direction of the conductive surface provide electrostatic driving force and adhesive force for the conductive ring respectively. According to the invention, a parallel electric adhesion effect and an electrostatic driving effect are integrated into an adhesion-driving integrated structure, so that the conductive circular ring can flexibly move on a horizontal surface and a bent surface.
Owner:HARBIN INST OF TECH

Artificial muscle with gradient stiffened electrode pair and artificial muscle assembly including the same

To provide artificial muscles comprising an electrode pair, and a method for actuating the artificial muscles.SOLUTION: Artificial muscles are provided including: a housing having an electrode region and an expandable fluid region; an electrode pair comprising a first electrode and a second electrode that are positioned in the electrode region of the housing; a dielectric fluid housed in the housing; and a stiffening member positioned between the housing and at least one of the first electrode and the second electrode. The stiffening member increases a stiffness of the housing in a direction toward the expandable fluid region from an opposite edge of the electrode region. The electrode pair is actuatable between a non-actuated state and an actuated state such that the actuation from the non-actuated state to the actuated state directs the dielectric fluid into the expandable fluid region.SELECTED DRAWING: Figure 1
Owner:TOYOTA JIDOSHA KK

MEMS electrostatic actuator blade configurations and methods of manufacture

PCT designated stageWO2026096737A1Decorative surface effectsForming microstructural systemsElectrostatic actuatorOperating voltage
Methods, apparatuses and methods of manufacture are described for a MEMS electrostatic blade actuator with different configurations to allow for improvements to performance. The MEMS electrostatic blade actuator with different configurations can be used in a MEMS mirror to reduce mass or reduce operating voltage.
Owner:CALIENT AI INC

Semiconductor MEMS structure and forming method thereof

The invention relates to a semiconductor MEMS structure and a method of forming the same. In some embodiments, the present disclosure relates to a micro electro mechanical system (MEMS) structure, and in some embodiments, the present disclosure relates to a micro electro mechanical system (MEMS) structure. The MEMS structure includes a first comb structure having a first plurality of comb fingers extending outwardly from a first branch. The second comb structure has a second plurality of comb fingers extending outwardly from a second branch. The first plurality of comb fingers are interleaved laterally between the second plurality of comb fingers. The first plurality of comb fingers each include a weighted core material and one or more peripheral materials. The weighted core material has a density greater than the one or more peripheral materials.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

Flexible devices with jamming components

At least some embodiments of the present disclosure direct to a flexible device, comprising a flexible component layer, and a jamming device disposed proximate to the flexible component layer. The jamming device permits the flexible component layer to be bent in a first state. The jamming device is configured to resist bending of the flexible component layer in a second state.
Owner:3M INNOVATIVE PROPERTIES CO

A soft electrostatic torsion drive unit, method and driver

The present invention discloses a soft electrostatic torsion drive unit, method and driver. The soft electrostatic torsion drive unit includes an output part, a torsion deformation structure and a drive base connected in sequence. The torsion deformation structure includes an elastic element and a flexible electrode. The active end and the driven end of the flexible electrode are torsionally set at an angle relative to each other. The driven end of the flexible electrode is connected to the output part, and the active end of the flexible electrode is connected to the drive base. The two ends of the elastic element are respectively connected to the drive base and the output part. A conductive layer and an insulating layer are provided on the drive base, and the active end of the flexible electrode is provided above the insulating layer. A liquid dielectric output device is provided in the drive base, and the outlet of the liquid dielectric output device is located at the edge of the conductive layer and the insulating layer, and the elastic element is in a pre-tightened state. The present invention has the advantages of compact structure, high driving efficiency, fast response speed and large torsion angle, and can provide a new technical solution for the design of complex flexible driving devices.
Owner:XIAN UNIV OF TECH

Soft haptic device and method of local control therein

A soft haptic device and a local control method are disclosed. The soft haptic device includes a soft actuator. The soft actuator includes an electroactive polymer film, a patterned electrode, and a dielectric liquid injected between the electroactive polymer film and the patterned electrode. The soft actuator generates a reconfigurable shape such that a form of an output shape and a number of outputtable shapes are changed depending on the number of electrodes constituting the patterned electrode, a shape of the electrodes, and an arrangement of the electrodes.
Owner:KOREA ADVANCED INST OF SCI & TECH

Artificial muscle including an electrode pair and artificial muscle assembly including the artificial muscle

An artificial muscle comprises: a housing having an electrode region and an expandable fluid region; an electrode pair positioned in the electrode region, the electrode pair comprising a first electrode fixed to a first surface of the housing and a second electrode fixed to a second surface of the housing. The first electrode and the second electrode each have two or more tab portions and two or more bridging portions. Each of the two or more bridging portions interconnects adjacent tab portions, and at least one of the first and second electrodes comprises a central opening positioned between the two or more tab portions and surrounding the expandable fluid region. A dielectric fluid is contained within the housing, and the electrode pair is actuatable between a non-actuated state and an actuated state, such that actuation from the non-actuated state to the actuated state directs the dielectric fluid into the expandable fluid region.
Owner:TOYOTA JIDOSHA KK

Artificial muscle actuator comprising electrodes with insulating double layer

The present invention relates to an artificial muscle actuator including an electrode having an insulating double layer. The artificial muscle actuator includes a housing, a dielectric fluid housed within the housing, and an electrode pair positioned in the housing. The electrode pair includes a first electrode and a second electrode. The first electrode and the second electrode each include a metal film. The first electrode includes an insulating double layer disposed on the metal film of the first electrode in an orientation facing the second electrode. Further, the insulating double layer includes an acrylic and / or acrylate-based polymer layer disposed on the metal film and a biaxially oriented polypropylene (BOPP) layer disposed on the acrylic and / or acrylate-based polymer layer.
Owner:TOYOTA JIDOSHA KK

Focus motor, closed-loop control method for focus motor, and imaging device

Embodiments of the present application relate to the technical field of imaging, and disclose a focus motor, a closed-loop control method for a focus motor, and an imaging device. 【Solution means】The focus motor includes a first pole plate (10), a second pole plate (20), a hovering conductor plate (30), a mover holder (40), and a processing unit. The first pole plate (10) and the second pole plate (20) are fixedly installed and arranged perpendicular to the focusing direction. The hovering conductor plate (30) is installed opposite to the first pole plate (10) and the second pole plate (20) respectively. The hovering conductor plate (30) is provided on the mover holder (40). The mover holder (40) is movable in the focusing direction. The projection area between the hovering conductor plate (30) and the first pole plate (10), and the projection area between the hovering conductor plate (30) and the second pole plate (20) both change according to the movement of the mover holder (40). A reference capacitance is formed between the first pole plate (10) and the second pole plate (20). The processing unit controls the movement of the mover holder (40) in the focusing direction based on the reference capacitance.
Owner:CHIPSEMI SEMICON (NINGBO) CO LTD

MEMS controller and MEMS device

Provided are a MEMS controller and a MEMS device, including: at least one control unit including: two adjacent anchor structures with a first gap therebetween; and cantilever beam structures respectively corresponding to the two anchor structure, a first end of each cantilever beam structure being located at a top surface of the anchor structure corresponding thereto, and second ends of two adjacent cantilever beam structures directly facing each other and forming a second gap therebetween; and an encapsulation structure including a bottom plate, a side plate and a top plate connected in sequence, the bottom plate directly facing the top plate. The bottom plate is located at the bottom surface of the anchor structure and provided with a first flow channel port. The top plate is spaced from the top surfaces of the two cantilever beam structures and provided with a second flow channel port.
Owner:AAC KAITAI TECHNOLOGIES (WUHAN) CO LTD

actuator

The present invention relates to an actuator. The actuator has a flexible electrode and a base electrode, the flexible electrode has flexibility, an opposite surface of the base electrode facing the flexible electrode is covered by an insulating layer, and the actuator is configured such that, when a voltage is applied between the flexible electrode and the base electrode, the flexible electrode deforms to approach the opposite surface. The actuator comprises a constraining member constraining the flexible electrode on the base electrode. The flexible electrode has a deformed portion that deforms when the voltage is applied between the flexible electrode and the base electrode. The deformed portion deforms in a direction approaching the opposite surface with the constraining member acting as a support point.
Owner:TOYOTA JIDOSHA KK