22 results about "Electrostatic actuator" patented technology

A microelectromechanical electrostatic actuator is provided that includes a first layer and a second layer, a first set of comb fingers in the first layer aligned with a second set of comb finger in the second layer. In this aspect, the x-direction width of the comb fingers of the first set is tapered along the vertical direction, such that an electrostatic force between comb fingers is increased by tapering to thereby lower a required actuation voltage.

An electrostatic actuator according to an embodiment of the present invention comprises first to third electrodes, and a plurality of first bag parts and second bag parts. The first electrode is band-shaped. The first bag parts are positioned on a first surface of the first electrode. The first electrode is arranged in the longitudinal direction of the first electrode. Dielectric liquid is sealed on the first electrode. The second bag parts are positioned on a second surface positioned opposite to the first surface of the first electrode. The second bag parts are arranged in the longitudinal direction of the first electrode. The dielectric liquid is sealed in the second bag parts. The second electrode is positioned on the side opposite to the first electrode across the first bag parts. The third electrode is positioned on the side opposite to the first electrode across the second bag parts. The first electrode, the second electrode, and the third electrode have flexibility. The first bag parts each overlap a boundary portion between adjacent second bag parts in a plan transparent view. The second bag parts each overlap a boundary portion between adjacent first bag parts in a plan transparent view.

The invention discloses an on-line testing method for simultaneously measuring characteristic parameters of multiple MEMS materials. The on-line testing method comprises a design and use process of an MEMS on-line testing structure. A required testing structure consists of a V-shaped thermal actuator and two comb-tooth-shaped electrostatic actuators at the front end and the rear end of the V-shaped thermal actuator, and Young modulus, residual stress and thermal expansion coefficient of the silicon material layer can be calculated by analyzing behaviors of the actuators. Therefore, firstly, geometric parameters of two comb-shaped electrostatic actuators with different geometric parameters and a V-shaped thermal actuator are designed by establishing a physical model so as to ensure that the actuators are sufficiently sensitive to the properties of a material layer and are relatively easy to drive; the measurement process is completed by applying electric excitation, analyzing electric signal feedback and performing subsequent data processing, the method does not depend on other complex test equipment or harsh test environment, and the method can be suitable for different MEMS processes without adding extra process steps. The method has practical significance for improving the MEMS test efficiency and the automation degree of the test process.

Devices and methods for measuring the mechanical properties of soft materials, including biological materials, are disclosed. Embodiments include devices and methods wherein sensors and actuators are collocated with one another reducing complexities and uncertainties of traditional devices with separate sensors and actuators that are merely coupled to one another. Additional embodiments include devices and methods capable of applying large strains during the stimulation and sensing (deformation and measurement) process of determining the mechanical properties, which is some embodiments enables the determination of strain-dependent stiffness and viscoelasticity.

The application provides a free degree decoupling electrostatic accelerometer, belonging to the field of acceleration sensing test, comprising: a sensitive probe, a capacitive displacement sensing circuit, a feedback electrostatic actuator, a PID controller, a DAC circuit and a bias voltage driver; the surface of a proof mass is separated into several independent parts, the DAC circuit applies positive and negative amplitude analog bias voltage to the proof mass respectively; the bias voltage applied on the opposite surfaces of the proof mass is equal in size and opposite in sign; the capacitive displacement sensing circuit tests the position of the proof mass in the sensitive probe; the PID controller calculates a feedback voltage to control the capacitive plate; and the feedback electrostatic actuator applies the feedback voltage to the capacitive plate to generate a feedback force. The conventional electrostatic accelerometer needs to use a plus-minus combination circuit to obtain the free degree information, and the electrostatic accelerometer has the ability of free degree decoupling.

Methods, apparatuses and methods of manufacture are described for a MEMS electrostatic blade actuator with different configurations to allow for improvements to performance. The MEMS electrostatic blade actuator with different configurations can be used in a MEMS mirror to reduce mass or reduce operating voltage.

An electrostatic actuator structure according to one aspect of the present disclosure includes a pump unit, an output unit and a passage unit. The inside of the pump unit is filled with a dielectric liquid 9. The output unit is deformed by an internal pressure change. The passage unit allows the inside of the pump unit and the inside of the output unit to communicate with each other. The output unit has welded parts which are arranged in a first direction and in each of which a first member constituting an upper surface and a second member constituting a lower surface are welded at peripheral edges of the first member and the second member. In the welded part, the welding width in at least a part of a pair of sides arranged in the first direction is larger than the welding width in a pair of sides arranged in a second direction orthogonal to the first direction.

The present application provides a method and device for real-time monitoring of the health status of a hydraulic plunger pump, which belongs to the field of aviation hydraulics. The method includes: determining a first relationship between the total leakage of the hydraulic plunger pump and the operating parameters of the electrostatic actuator, and screening the follow-up parameters based on the dynamic change characteristics of the operating parameters with the working condition and health status of the hydraulic plunger pump; adjusting the first relationship of the total leakage of the plunger pump based on the follow-up parameters to obtain a second relationship; calculating the plunger pump torque based on the second relationship in combination with the law of conservation of energy; optimizing the plunger pump torque calculation formula based on the correlation between the viscous friction torque, the Coulomb friction torque and the follow-up parameters; monitoring the real-time operating parameters of the plunger pump, calculating the first coefficient and the second coefficient based on the real-time operating parameters, and inputting the first coefficient and the second coefficient into a neural network to construct a state monitoring model to evaluate the operating status of the plunger pump. The method and device provided by the present application can realize real-time monitoring of the operating status of the hydraulic plunger pump.

This invention discloses an online testing method for simultaneously measuring multiple MEMS material property parameters. The invention includes the design and application of an online MEMS testing structure. The required testing structure consists of a V-shaped thermal actuator and two comb-shaped electrostatic actuators at its front and rear ends. Analysis of the behavior of these actuators allows for the calculation of the Young's modulus, residual stress, and coefficient of thermal expansion of the silicon material layer. To achieve this, a physical model is first established to design the geometric parameters of the two comb-shaped electrostatic actuators and the V-shaped thermal actuator, ensuring that the actuators are sufficiently sensitive to the properties of the material layer and relatively easy to drive. This invention completes the measurement process by applying electrical excitation, analyzing the electrical signal feedback, and subsequent data processing. It does not rely on other complex testing equipment or harsh testing environments and is applicable to different MEMS processes without requiring additional processing steps. This has practical significance for improving MEMS testing efficiency and the degree of automation in the testing process.

The disclosure relates to microelectromechanical electrostatic actuator comprising a first layer and a second layer, a first set of comb fingers in the first layer aligned with a second set of comb finger in the second layer, wherein the x-direction width of the comb fingers of the first set is tapered along the vertical direction. An advantage of this arrangement is that the electrostatic force between comb fingers is increased by tapering and, therefore, lower actuation voltage is required.

The invention discloses an integrated electro-static pressure actuator, and belongs to the technical field of actuator design. The electro-static pressure actuator comprises an actuating cylinder, an oil immersion type motor pump, an integrated shell, a pump front end cover, an oil tank, a filling valve, a bypass valve, an oil supplementing one-way valve and a motor rear end cover. Wherein the integrated shell and the pump front end cover are designed based on an additive manufacturing process method, an internal flow channel is self-formed, and other parts and components are mounted in the 3D printed integrated shell. Through the design of the invention, the electro-static pressure actuator realizes maximum structural integration, and has the advantages of small size and light weight.

The application discloses a synchronous transient force-electric coupling test chip structure and a preparation method thereof. The chip functional area comprises a support beam, a tensile thermal actuator, an electrostatic actuator, a sample table, a strain capacitance sensor, a stress capacitance sensor, an electrode lead pressure welding block and a substrate. The substrate is used for bearing a device layer, the device layer is provided with a substrate hollow structure below, and a connecting piece made of high-resistance silicon or glass is used for mechanically connecting and electrically isolating the actuator and the sensor. The device is provided with an active time judgment algorithm of a stress compensation control part, and synchronous transient force-electric coupling test of a micro-nano material sample is realized.

An electrostatic actuator according to one aspect of the present disclosure comprises a flexible shell, a dielectric liquid contained inside the shell, and a plurality of electrodes positioned outside the shell. The shell comprises a junction part positioned at the center, and a plurality of pump parts that communicate with the junction part and are aligned in the circumferential direction centered on the junction part. The pump part has a first side surface positioned at one end in the circumferential direction, and a second side surface positioned at the other end in the circumferential direction. The plurality of electrodes are positioned on the first side surface and the second side surface of each pump part.

Microelectromechanical electrostatic actuator apparatus configured to be driven by an attractive aka pulling electrostatic force between electrically isolated electrically conductive elements, to generate motion, the elements comprising: at least three stators fixed to a substrate such as a MEMS handle layer, and (at least one) movable rotor which may be connected to a compliant suspension or spring structure and wherein driving voltage introduces electrical potential difference between the stators and / or rotor to yield the attractive electrostatic force which generates the motion by displacing the rotor toward the stator / s.

The invention discloses a displacement control method and device for a single-degree-of-freedom parallel plate electrostatic actuator, and the method comprises the steps: building a physical model based on the single-degree-of-freedom parallel plate electrostatic actuator; based on the physical model, constructing a control system model to convert an output error constraint tracking problem of the single-degree-of-freedom parallel plate electrostatic actuator into a controller design problem based on an output feedback system; based on an output error needing to be tracked, filter expansion is introduced; designing a controller by using an internal model based on a filter expansion and control system model; in order to convert a security boundary into a mathematical constraint, a barrier Lyapunov function is introduced to be dynamically combined with an error, so that the stability of a closed-loop system is ensured, and an output error is always maintained in a preset security interval in the whole operation period. According to the invention, under the condition that large parameter changes exist, the movable plate can realize full-gap harmonic displacement under the condition that the movable plate is not in contact with the fixed plate.

An electrostatic actuator for translational movement between a stator and a slider in a longitudinal direction (X), comprising stator drive electrodes and slider drive electrodes arranged at respective pitches in said direction (X), where said actuator is driven by n power supply outputs, the stator drive electrodes and / or the slider drive electrodes are interconnected in n stator power buses and / or slider power buses, characterized in that the slider buses and the stator buses are such that the connections of the n stator buses are arranged in a predetermined order, the connections of the n slider buses are configured in a different predetermined order, each of the n power outputs being configurable to provide time-varying power of different phases, thus, a first potential distribution and a second potential distribution which travel on the pitch of the stator drive electrode or the slider drive electrode in opposite directions from each other are allowed to be generated.

This invention relates to a wavelength-variable interference filter and its driving method, and an optical module, providing a wavelength-variable interference filter that can improve the accuracy of wavelength adjustment in a wide band. As described above, the wavelength-variable interference filter (1) includes: a first reflective film (4) and a second reflective film (5) facing each other; and an electrostatic actuator unit (6) that changes the gap amount (G) between the first reflective film (4) and the second reflective film (5). The electrostatic actuator unit (6) includes: a bias electrode (61) to which a bias voltage corresponding to a target value of the gap amount (G) (i.e., a gap target value (Gt)) is applied; a control electrode (62) to which a control voltage controlled by feedback according to the gap amount (G) is applied; and a variable electrode (63) to which the bias voltage and the control voltage can be switched.

A system includes a set of electrostatic actuators. Each electrostatic actuator of the set of electrostatic actuators includes a high-voltage side and a low-voltage side. The low-voltage side is configured to be driven by a time-varying voltage signal (TVVS). The system includes a set of drive-sense channels. A representative channel of the set of drive-sense channels includes a drive electrical link between (i) a corresponding drive circuit of a set of drive circuits and (ii) the high-voltage side of a corresponding electrostatic actuator of the set of electrostatic actuators. The representative channel is configured to carry, via the drive electrical link, a controllable drive voltage from the corresponding drive circuit to the high-voltage side of the corresponding electrostatic actuator. The representative channel includes a sense electrical link configured to carry a current generated by the TVVS to a sense-measurement circuit.

Wearable actuator systems are disclosed herein. The wearable actuator system may include an active layer comprising a plurality of actuators, each actuator having a deformable shell that defines an enclosed internal cavity, a fluid dielectric contained within the enclosed internal cavity, a first electrode disposed over a first side of the enclosed internal cavity, and a second electrode disposed over a second side of the enclosed internal cavity. The system further includes an interface layer and a fastener, wherein the active layer and the fastener form an enclosed shape having an internal area, and wherein a size of the internal area of the enclosed shape is adjustable using the fastener.

The present invention provides a multi-stage driven MEMS electrostatic actuator, the structure of which includes: a substrate, a payload, a plurality of one-dimensional electrostatic drive structures connected in series step by step, an anchor, a wire, and an insulating medium; each one-dimensional electrostatic drive structure of each stage includes an outer frame, at least one electrostatic drive unit, and at least one elastic beam; the payload is connected to the outer frame of the first stage; except that the outer frame of the last stage is suspended and fixed to the substrate through the elastic beam of the last stage, the outer frame of each of the remaining stages is connected to the outer frame of the next stage through the elastic beam of the same stage; the electrostatic drive unit includes two sets of comb teeth opposite in position, which are respectively arranged on the outer frame of the same stage and the substrate or the outer frame of the next stage; the outer frame of each stage realizes one-dimensional movement independently under the action of the electrostatic drive unit of the same stage; under the combined action of the one-dimensional electrostatic drive structures of each stage, the payload realizes multi-dimensional movement or / and large-displacement movement without coupling interference.

The present invention discloses a five-cavity, series-connected, symmetrical, single-rod electrostatic hydraulic actuator and its working method. The actuator includes a dual controller, a dual motor pump unit, and a five-cavity, series-connected, symmetrical single-rod actuator. The actuator cylinder body is provided with ports A, B, C, D, and two T ports. Ports A and B are connected to the hydraulic pump of the first motor pump unit, ports C and D are connected to the hydraulic pump of the second motor pump unit, and the two T ports are connected to the external air. The piston forms three working chambers of equal area and two air chambers between the cylinder body and the inner cylinder barrel, achieving the same force area when extending (oil inlet from ports A / C) and retracting (oil inlet from ports B / D). Both dual motor pump units include bypass valves. When a single unit fails, the bypass valve isolates the faulty oil circuit, and the other unit maintains drive. The present invention compresses the axial size through a five-cavity, symmetrical, single-rod structure, and improves reliability by combining a dual-unit redundant design. It is suitable for electrostatic hydraulic actuator applications with stringent requirements on size and life.

The application discloses an on-orbit automatic elimination device and method of electrostatic effect of an inertial sensor, and belongs to the field of precision measurement, and the method comprises the following steps: placing parallel electrode plates fixed to a grounded frame on both sides of a test mass, wherein the parallel electrode plates are parallel to the surface of the test mass and have the same distance from the test mass; applying a control voltage on the parallel electrode plates by using an electrostatic actuator, and controlling the test mass at the central position of the electrode plates and the frame by the electrostatic force generated between the parallel electrode plates and the test mass; and calculating a compensation voltage according to the control voltage and the electric charge on the test mass, and applying the compensation voltage on the electrode plates to automatically eliminate the electrostatic effect on the test mass. The application can continue to detect a target signal while eliminating the electrostatic force effect on the test mass, and has a wide application prospect.