4 results about "Electrostatic actuator" patented technology

An electrostatic actuator according to an embodiment of the present invention comprises first to third electrodes, and a plurality of first bag parts and second bag parts. The first electrode is band-shaped. The first bag parts are positioned on a first surface of the first electrode. The first electrode is arranged in the longitudinal direction of the first electrode. Dielectric liquid is sealed on the first electrode. The second bag parts are positioned on a second surface positioned opposite to the first surface of the first electrode. The second bag parts are arranged in the longitudinal direction of the first electrode. The dielectric liquid is sealed in the second bag parts. The second electrode is positioned on the side opposite to the first electrode across the first bag parts. The third electrode is positioned on the side opposite to the first electrode across the second bag parts. The first electrode, the second electrode, and the third electrode have flexibility. The first bag parts each overlap a boundary portion between adjacent second bag parts in a plan transparent view. The second bag parts each overlap a boundary portion between adjacent first bag parts in a plan transparent view.

This invention discloses an online testing method for simultaneously measuring multiple MEMS material property parameters. The invention includes the design and application of an online MEMS testing structure. The required testing structure consists of a V-shaped thermal actuator and two comb-shaped electrostatic actuators at its front and rear ends. Analysis of the behavior of these actuators allows for the calculation of the Young's modulus, residual stress, and coefficient of thermal expansion of the silicon material layer. To achieve this, a physical model is first established to design the geometric parameters of the two comb-shaped electrostatic actuators and the V-shaped thermal actuator, ensuring that the actuators are sufficiently sensitive to the properties of the material layer and relatively easy to drive. This invention completes the measurement process by applying electrical excitation, analyzing the electrical signal feedback, and subsequent data processing. It does not rely on other complex testing equipment or harsh testing environments and is applicable to different MEMS processes without requiring additional processing steps. This has practical significance for improving MEMS testing efficiency and the degree of automation in the testing process.

This invention relates to a wavelength-variable interference filter and its driving method, and an optical module, providing a wavelength-variable interference filter that can improve the accuracy of wavelength adjustment in a wide band. As described above, the wavelength-variable interference filter (1) includes: a first reflective film (4) and a second reflective film (5) facing each other; and an electrostatic actuator unit (6) that changes the gap amount (G) between the first reflective film (4) and the second reflective film (5). The electrostatic actuator unit (6) includes: a bias electrode (61) to which a bias voltage corresponding to a target value of the gap amount (G) (i.e., a gap target value (Gt)) is applied; a control electrode (62) to which a control voltage controlled by feedback according to the gap amount (G) is applied; and a variable electrode (63) to which the bias voltage and the control voltage can be switched.

A system includes a set of electrostatic actuators. Each electrostatic actuator of the set of electrostatic actuators includes a high-voltage side and a low-voltage side. The low-voltage side is configured to be driven by a time-varying voltage signal (TVVS). The system includes a set of drive-sense channels. A representative channel of the set of drive-sense channels includes a drive electrical link between (i) a corresponding drive circuit of a set of drive circuits and (ii) the high-voltage side of a corresponding electrostatic actuator of the set of electrostatic actuators. The representative channel is configured to carry, via the drive electrical link, a controllable drive voltage from the corresponding drive circuit to the high-voltage side of the corresponding electrostatic actuator. The representative channel includes a sense electrical link configured to carry a current generated by the TVVS to a sense-measurement circuit.