10 results about "Electrostatic actuator" patented technology

An electrostatic actuator according to an embodiment of the present invention comprises first to third electrodes, and a plurality of first bag parts and second bag parts. The first electrode is band-shaped. The first bag parts are positioned on a first surface of the first electrode. The first electrode is arranged in the longitudinal direction of the first electrode. Dielectric liquid is sealed on the first electrode. The second bag parts are positioned on a second surface positioned opposite to the first surface of the first electrode. The second bag parts are arranged in the longitudinal direction of the first electrode. The dielectric liquid is sealed in the second bag parts. The second electrode is positioned on the side opposite to the first electrode across the first bag parts. The third electrode is positioned on the side opposite to the first electrode across the second bag parts. The first electrode, the second electrode, and the third electrode have flexibility. The first bag parts each overlap a boundary portion between adjacent second bag parts in a plan transparent view. The second bag parts each overlap a boundary portion between adjacent first bag parts in a plan transparent view.

The invention discloses an on-line testing method for simultaneously measuring characteristic parameters of multiple MEMS materials. The on-line testing method comprises a design and use process of an MEMS on-line testing structure. A required testing structure consists of a V-shaped thermal actuator and two comb-tooth-shaped electrostatic actuators at the front end and the rear end of the V-shaped thermal actuator, and Young modulus, residual stress and thermal expansion coefficient of the silicon material layer can be calculated by analyzing behaviors of the actuators. Therefore, firstly, geometric parameters of two comb-shaped electrostatic actuators with different geometric parameters and a V-shaped thermal actuator are designed by establishing a physical model so as to ensure that the actuators are sufficiently sensitive to the properties of a material layer and are relatively easy to drive; the measurement process is completed by applying electric excitation, analyzing electric signal feedback and performing subsequent data processing, the method does not depend on other complex test equipment or harsh test environment, and the method can be suitable for different MEMS processes without adding extra process steps. The method has practical significance for improving the MEMS test efficiency and the automation degree of the test process.

Devices and methods for measuring the mechanical properties of soft materials, including biological materials, are disclosed. Embodiments include devices and methods wherein sensors and actuators are collocated with one another reducing complexities and uncertainties of traditional devices with separate sensors and actuators that are merely coupled to one another. Additional embodiments include devices and methods capable of applying large strains during the stimulation and sensing (deformation and measurement) process of determining the mechanical properties, which is some embodiments enables the determination of strain-dependent stiffness and viscoelasticity.

Methods, apparatuses and methods of manufacture are described for a MEMS electrostatic blade actuator with different configurations to allow for improvements to performance. The MEMS electrostatic blade actuator with different configurations can be used in a MEMS mirror to reduce mass or reduce operating voltage.

An electrostatic actuator structure according to one aspect of the present disclosure includes a pump unit, an output unit and a passage unit. The inside of the pump unit is filled with a dielectric liquid 9. The output unit is deformed by an internal pressure change. The passage unit allows the inside of the pump unit and the inside of the output unit to communicate with each other. The output unit has welded parts which are arranged in a first direction and in each of which a first member constituting an upper surface and a second member constituting a lower surface are welded at peripheral edges of the first member and the second member. In the welded part, the welding width in at least a part of a pair of sides arranged in the first direction is larger than the welding width in a pair of sides arranged in a second direction orthogonal to the first direction.

This invention discloses an online testing method for simultaneously measuring multiple MEMS material property parameters. The invention includes the design and application of an online MEMS testing structure. The required testing structure consists of a V-shaped thermal actuator and two comb-shaped electrostatic actuators at its front and rear ends. Analysis of the behavior of these actuators allows for the calculation of the Young's modulus, residual stress, and coefficient of thermal expansion of the silicon material layer. To achieve this, a physical model is first established to design the geometric parameters of the two comb-shaped electrostatic actuators and the V-shaped thermal actuator, ensuring that the actuators are sufficiently sensitive to the properties of the material layer and relatively easy to drive. This invention completes the measurement process by applying electrical excitation, analyzing the electrical signal feedback, and subsequent data processing. It does not rely on other complex testing equipment or harsh testing environments and is applicable to different MEMS processes without requiring additional processing steps. This has practical significance for improving MEMS testing efficiency and the degree of automation in the testing process.

An electrostatic actuator according to one aspect of the present disclosure comprises a flexible shell, a dielectric liquid contained inside the shell, and a plurality of electrodes positioned outside the shell. The shell comprises a junction part positioned at the center, and a plurality of pump parts that communicate with the junction part and are aligned in the circumferential direction centered on the junction part. The pump part has a first side surface positioned at one end in the circumferential direction, and a second side surface positioned at the other end in the circumferential direction. The plurality of electrodes are positioned on the first side surface and the second side surface of each pump part.

An electrostatic actuator for translational movement between a stator and a slider in a longitudinal direction (X), comprising stator drive electrodes and slider drive electrodes arranged at respective pitches in said direction (X), where said actuator is driven by n power supply outputs, the stator drive electrodes and / or the slider drive electrodes are interconnected in n stator power buses and / or slider power buses, characterized in that the slider buses and the stator buses are such that the connections of the n stator buses are arranged in a predetermined order, the connections of the n slider buses are configured in a different predetermined order, each of the n power outputs being configurable to provide time-varying power of different phases, thus, a first potential distribution and a second potential distribution which travel on the pitch of the stator drive electrode or the slider drive electrode in opposite directions from each other are allowed to be generated.

This invention relates to a wavelength-variable interference filter and its driving method, and an optical module, providing a wavelength-variable interference filter that can improve the accuracy of wavelength adjustment in a wide band. As described above, the wavelength-variable interference filter (1) includes: a first reflective film (4) and a second reflective film (5) facing each other; and an electrostatic actuator unit (6) that changes the gap amount (G) between the first reflective film (4) and the second reflective film (5). The electrostatic actuator unit (6) includes: a bias electrode (61) to which a bias voltage corresponding to a target value of the gap amount (G) (i.e., a gap target value (Gt)) is applied; a control electrode (62) to which a control voltage controlled by feedback according to the gap amount (G) is applied; and a variable electrode (63) to which the bias voltage and the control voltage can be switched.

A system includes a set of electrostatic actuators. Each electrostatic actuator of the set of electrostatic actuators includes a high-voltage side and a low-voltage side. The low-voltage side is configured to be driven by a time-varying voltage signal (TVVS). The system includes a set of drive-sense channels. A representative channel of the set of drive-sense channels includes a drive electrical link between (i) a corresponding drive circuit of a set of drive circuits and (ii) the high-voltage side of a corresponding electrostatic actuator of the set of electrostatic actuators. The representative channel is configured to carry, via the drive electrical link, a controllable drive voltage from the corresponding drive circuit to the high-voltage side of the corresponding electrostatic actuator. The representative channel includes a sense electrical link configured to carry a current generated by the TVVS to a sense-measurement circuit.