36 results about "Electrostatic actuator" patented technology

A microelectromechanical electrostatic actuator is provided that includes a first layer and a second layer, a first set of comb fingers in the first layer aligned with a second set of comb finger in the second layer. In this aspect, the x-direction width of the comb fingers of the first set is tapered along the vertical direction, such that an electrostatic force between comb fingers is increased by tapering to thereby lower a required actuation voltage.

An electrostatic actuator for translational motion between a stator and a slider in a longitudinal direction (X), comprising a stator driving electrodes and slider driving electrodes arranged with a respective pitch along said direction (X), wherein said actuator is driven by n power supply outputs and the stator and / or slider driving electrodes are interconnected into n stator and / or slider power busses, characterised in that said slider and stator busses are such that the connection of the n stator busses is configured in a predetermined order, while the connection of the n slider busses are configured in a different predetermined order, each of said n power supply outputs are configurable to provide different phases of time-varying power allowing to create a first and a second potential distribution travelling over the pitch of the stator or slider driving electrodes, in the opposite direction to each other.

An electrostatic actuator according to an embodiment of the present invention comprises first to third electrodes, and a plurality of first bag parts and second bag parts. The first electrode is band-shaped. The first bag parts are positioned on a first surface of the first electrode. The first electrode is arranged in the longitudinal direction of the first electrode. Dielectric liquid is sealed on the first electrode. The second bag parts are positioned on a second surface positioned opposite to the first surface of the first electrode. The second bag parts are arranged in the longitudinal direction of the first electrode. The dielectric liquid is sealed in the second bag parts. The second electrode is positioned on the side opposite to the first electrode across the first bag parts. The third electrode is positioned on the side opposite to the first electrode across the second bag parts. The first electrode, the second electrode, and the third electrode have flexibility. The first bag parts each overlap a boundary portion between adjacent second bag parts in a plan transparent view. The second bag parts each overlap a boundary portion between adjacent first bag parts in a plan transparent view.

The present application provides a method and device for real-time online monitoring of an electrostatic hydraulic actuator, which belongs to the field of aviation electromechanical. The method provided in the present application includes: obtaining normal performance data of each working condition, and establishing a nonlinear real-time mapping model based on the normal performance data and a neural network, the nonlinear real-time mapping model is used to receive control instructions and predict the output of the actuator; training an SVDD abnormality detection model according to the predicted output and the output of the actuator after receiving the control instruction; and monitoring the state of the electrostatic hydraulic actuator in real time based on the trained SVDD abnormality detection model. The method and device for real-time online monitoring of an electrostatic hydraulic actuator provided in the present application can establish a detection model based on data under normal working conditions, so as to realize accurate identification of fault conditions under various working conditions.

The invention discloses an on-line testing method for simultaneously measuring characteristic parameters of multiple MEMS materials. The on-line testing method comprises a design and use process of an MEMS on-line testing structure. A required testing structure consists of a V-shaped thermal actuator and two comb-tooth-shaped electrostatic actuators at the front end and the rear end of the V-shaped thermal actuator, and Young modulus, residual stress and thermal expansion coefficient of the silicon material layer can be calculated by analyzing behaviors of the actuators. Therefore, firstly, geometric parameters of two comb-shaped electrostatic actuators with different geometric parameters and a V-shaped thermal actuator are designed by establishing a physical model so as to ensure that the actuators are sufficiently sensitive to the properties of a material layer and are relatively easy to drive; the measurement process is completed by applying electric excitation, analyzing electric signal feedback and performing subsequent data processing, the method does not depend on other complex test equipment or harsh test environment, and the method can be suitable for different MEMS processes without adding extra process steps. The method has practical significance for improving the MEMS test efficiency and the automation degree of the test process.

Devices and methods for measuring the mechanical properties of soft materials, including biological materials, are disclosed. Embodiments include devices and methods wherein sensors and actuators are collocated with one another reducing complexities and uncertainties of traditional devices with separate sensors and actuators that are merely coupled to one another. Additional embodiments include devices and methods capable of applying large strains during the stimulation and sensing (deformation and measurement) process of determining the mechanical properties, which is some embodiments enables the determination of strain-dependent stiffness and viscoelasticity.

The application provides a free degree decoupling electrostatic accelerometer, belonging to the field of acceleration sensing test, comprising: a sensitive probe, a capacitive displacement sensing circuit, a feedback electrostatic actuator, a PID controller, a DAC circuit and a bias voltage driver; the surface of a proof mass is separated into several independent parts, the DAC circuit applies positive and negative amplitude analog bias voltage to the proof mass respectively; the bias voltage applied on the opposite surfaces of the proof mass is equal in size and opposite in sign; the capacitive displacement sensing circuit tests the position of the proof mass in the sensitive probe; the PID controller calculates a feedback voltage to control the capacitive plate; and the feedback electrostatic actuator applies the feedback voltage to the capacitive plate to generate a feedback force. The conventional electrostatic accelerometer needs to use a plus-minus combination circuit to obtain the free degree information, and the electrostatic accelerometer has the ability of free degree decoupling.

Methods, apparatuses and methods of manufacture are described for a MEMS electrostatic blade actuator with different configurations to allow for improvements to performance. The MEMS electrostatic blade actuator with different configurations can be used in a MEMS mirror to reduce mass or reduce operating voltage.

To provide an electrostatic actuator which can lower even a compact and light-weight existing driver of several hundreds V to achievable driving voltage.SOLUTION: An electrostatic actuator uses electrostatic force generated between a pair of electrodes by a voltage operation on the pair of electrodes as driving force. The electrostatic actuator includes: the pair of electrodes; an insulating layer to be a layer of insulating liquid provided between the pair of electrodes; and a cover layer provided between the pair of electrodes and the insulating layer. The cover layer is a material having a dielectric constant higher than that of polyimide and having small elasticity.SELECTED DRAWING: Figure 4

An electrostatic actuator structure according to one aspect of the present disclosure includes a pump unit, an output unit and a passage unit. The inside of the pump unit is filled with a dielectric liquid 9. The output unit is deformed by an internal pressure change. The passage unit allows the inside of the pump unit and the inside of the output unit to communicate with each other. The output unit has welded parts which are arranged in a first direction and in each of which a first member constituting an upper surface and a second member constituting a lower surface are welded at peripheral edges of the first member and the second member. In the welded part, the welding width in at least a part of a pair of sides arranged in the first direction is larger than the welding width in a pair of sides arranged in a second direction orthogonal to the first direction.

The present invention provides an improved position control method for a direct-drive electrostatic-hydraulic actuator, and belongs to the field of control. The method comprises: firstly, considering the nonlinear characteristics of the direct-drive electrostatic-hydraulic actuator system, establishing a state space model of the system, and reasonably simplifying it into a strict feedback form, wherein the power unit of the direct-drive electrostatic-hydraulic actuator system is a permanent magnet synchronous motor, and the hydraulic pump is a gear pump. Secondly, the obstacle Lyapunov function is combined with the backstepping controller, and the constraint boundary is introduced to ensure the output constraint performance of the system. Finally, the adaptive rate of the uncertain parameters is established to adjust the parameter disturbance in real time online and perform stability analysis. The present invention can solve the problem of system parameter uncertainty in the position control process of the direct-drive electrostatic-hydraulic actuator, and improve the control accuracy and robustness of the direct-drive electrostatic-hydraulic actuator control system.

The present invention relates to the technical field of actuators, and discloses an underwater highly corrosion-resistant electrostatic hydraulic actuator, including a turntable, an actuator, a traction mechanism and a flange, wherein the turntable is rotatably connected to the flange, the actuator is mounted on one side of the turntable, and a plurality of traction mechanisms are arranged between the actuator and the turntable. In the present invention, various components in a traditional actuator are arranged in an axially sealed manner in a housing, and various components of the actuator are protected by an external housing to adapt to the underwater environment and avoid corrosion. At the same time, the accumulator assembly in the actuator is arranged in the form of an energy storage chamber in the actuating piston rod, and the accumulator is no longer directly exposed to the outside, the product structure is optimized, the overall structure of the actuator is more streamlined, and the power-to-weight ratio is greatly improved. At the same time, through the coordinated use of the traction mechanism, turntable, torsion spring and other components, the pressure can be buffered and the actuator can be reset to ensure its axial stability.

The invention discloses an EHA with a quick start function and a voltage stabilization control method, and the EHA comprises a controller, a driver, a quick start module, and a power supply and adjustment module. The quick starting module comprises an energy accumulator and a high-speed switch valve set and is used for being quickly opened or closed when receiving a PWM signal from the controller so as to control release and supplement of high-pressure oil in the energy accumulator, and therefore a piston rod of the hydraulic cylinder is controlled to quickly stretch out. The novel electro-hydrostatic actuator of a loop of an energy accumulator and a high-speed switch valve group is additionally arranged on a piston side pipeline of a hydraulic cylinder, when the electro-hydrostatic actuator is started, high-pressure oil in the energy accumulator can be rapidly released to the hydraulic cylinder, a piston rod of the hydraulic cylinder is made to rapidly stretch out to a to-be-operated position, and rapid starting of the electro-hydrostatic actuator is achieved.

The present application provides a method and device for real-time monitoring of the health status of a hydraulic plunger pump, which belongs to the field of aviation hydraulics. The method includes: determining a first relationship between the total leakage of the hydraulic plunger pump and the operating parameters of the electrostatic actuator, and screening the follow-up parameters based on the dynamic change characteristics of the operating parameters with the working condition and health status of the hydraulic plunger pump; adjusting the first relationship of the total leakage of the plunger pump based on the follow-up parameters to obtain a second relationship; calculating the plunger pump torque based on the second relationship in combination with the law of conservation of energy; optimizing the plunger pump torque calculation formula based on the correlation between the viscous friction torque, the Coulomb friction torque and the follow-up parameters; monitoring the real-time operating parameters of the plunger pump, calculating the first coefficient and the second coefficient based on the real-time operating parameters, and inputting the first coefficient and the second coefficient into a neural network to construct a state monitoring model to evaluate the operating status of the plunger pump. The method and device provided by the present application can realize real-time monitoring of the operating status of the hydraulic plunger pump.

This invention discloses an online testing method for simultaneously measuring multiple MEMS material property parameters. The invention includes the design and application of an online MEMS testing structure. The required testing structure consists of a V-shaped thermal actuator and two comb-shaped electrostatic actuators at its front and rear ends. Analysis of the behavior of these actuators allows for the calculation of the Young's modulus, residual stress, and coefficient of thermal expansion of the silicon material layer. To achieve this, a physical model is first established to design the geometric parameters of the two comb-shaped electrostatic actuators and the V-shaped thermal actuator, ensuring that the actuators are sufficiently sensitive to the properties of the material layer and relatively easy to drive. This invention completes the measurement process by applying electrical excitation, analyzing the electrical signal feedback, and subsequent data processing. It does not rely on other complex testing equipment or harsh testing environments and is applicable to different MEMS processes without requiring additional processing steps. This has practical significance for improving MEMS testing efficiency and the degree of automation in the testing process.

The disclosure relates to microelectromechanical electrostatic actuator comprising a first layer and a second layer, a first set of comb fingers in the first layer aligned with a second set of comb finger in the second layer, wherein the x-direction width of the comb fingers of the first set is tapered along the vertical direction. An advantage of this arrangement is that the electrostatic force between comb fingers is increased by tapering and, therefore, lower actuation voltage is required.

The invention discloses an integrated electro-static pressure actuator, and belongs to the technical field of actuator design. The electro-static pressure actuator comprises an actuating cylinder, an oil immersion type motor pump, an integrated shell, a pump front end cover, an oil tank, a filling valve, a bypass valve, an oil supplementing one-way valve and a motor rear end cover. Wherein the integrated shell and the pump front end cover are designed based on an additive manufacturing process method, an internal flow channel is self-formed, and other parts and components are mounted in the 3D printed integrated shell. Through the design of the invention, the electro-static pressure actuator realizes maximum structural integration, and has the advantages of small size and light weight.

The present invention relates to the technical field of actuators, and discloses an underwater highly corrosion-resistant electrostatic hydraulic actuator, including a turntable, an actuator, a traction mechanism and a flange, wherein the turntable is rotatably connected to the flange, the actuator is mounted on one side of the turntable, and a plurality of traction mechanisms are arranged between the actuator and the turntable. In the present invention, various components in a traditional actuator are arranged in an axially sealed manner in a housing, and various components of the actuator are protected by an external housing to adapt to the underwater environment and avoid corrosion. At the same time, the accumulator assembly in the actuator is arranged in the form of an energy storage chamber in the actuating piston rod, and the accumulator is no longer directly exposed to the outside, the product structure is optimized, the overall structure of the actuator is more streamlined, and the power-to-weight ratio is greatly improved. At the same time, through the coordinated use of the traction mechanism, turntable, torsion spring and other components, the pressure can be buffered and the actuator can be reset to ensure its axial stability.

An electro-hydrostatic actuator (EHA) assembly includes: a power line, and a one-piece, integral housing a hydraulic control block, a power control module, PCM, and a motor-pump assembly, the integral housing comprising a passage through which the power line passes.

The application discloses a synchronous transient force-electric coupling test chip structure and a preparation method thereof. The chip functional area comprises a support beam, a tensile thermal actuator, an electrostatic actuator, a sample table, a strain capacitance sensor, a stress capacitance sensor, an electrode lead pressure welding block and a substrate. The substrate is used for bearing a device layer, the device layer is provided with a substrate hollow structure below, and a connecting piece made of high-resistance silicon or glass is used for mechanically connecting and electrically isolating the actuator and the sensor. The device is provided with an active time judgment algorithm of a stress compensation control part, and synchronous transient force-electric coupling test of a micro-nano material sample is realized.

The present invention discloses an intelligent decoupling diagnosis method for EHA composite faults, comprising the following steps: first, according to the fault type of EHA, a flow meter, a pressure sensor and a grating ruler are used to collect data at a specific position of a hydraulic system to obtain real multi-sensor operation data in various health states; then, the collected multi-sensor data in normal, single fault and composite fault states are sliced ​​and processed to divide the training data set and the test data set; then, the constructed maximum aggregation attention convolution capsule network is trained using the training data set, and the extended loss function is used as the loss function; finally, the trained maximum aggregation attention convolution capsule network is tested using the test data set to obtain the result of EHA composite fault diagnosis. In addition, the present invention is simple and easy to implement, and is suitable for the decoupling and diagnosis of EHA composite faults with high composite fault data collection costs, limited single sensor information perception and unclear fault characteristics.

An accumulator assembly for providing hydraulic fluid to an electrohydrostatic actuator includes an accumulator for containing a supply of hydraulic fluid, the accumulator having an exit port via which hydraulic fluid can flow, in use, to the actuator. The assembly further includes an accumulator refill arrangement fluidly connected to a supply of hydraulic fluid for refilling the accumulator via a fluid line when a level of fluid in the accumulator is below a predetermined value. The accumulator includes a cylinder defining a fluid chamber and an accumulator piston moveable within the cylinder relative to the chamber responsive to the fluid pressure. The refill arrangement includes a spool moveable across the fluid line between an open position, wherein fluid can flow along the fluid line from the supply to the chamber, and a closed position, wherein the spool blocks the flow of fluid from the supply to the chamber.

The portable refueling device comprises a box body (1), an oil storage tank (2) is arranged on one side of the interior of the box body (1), an electric pump (3) is arranged on one side of the oil storage tank (2), and an inlet (4) and an outlet (5) which are provided with quick connectors (12) are formed in the upper side of the oil storage tank (2). One side of the inlet (4) and one side of the outlet (5) are further provided with a pressure sensor (7) used for detecting refueling pressure and an adjusting valve (6) used for adjusting the refueling pressure, one side wall of the oil storage tank (2) is provided with an oil pointer (8) used for displaying the amount of oil in the oil storage tank (2), the front side of the box body (1) is provided with a bayonet (9) corresponding to the oil pointer (8), one side of the bayonet (9) is provided with a control panel (10), and the upper end of the box body (1) is provided with a handle (11). And a cover plate (33) corresponding to the oil storage tank (2) is arranged at the upper end of the box body (1). The portable refueling device has the advantages of being convenient to carry and convenient to regulate refueling amount and refueling pressure.

An electrostatic actuator according to one aspect of the present disclosure comprises a flexible shell, a dielectric liquid contained inside the shell, and a plurality of electrodes positioned outside the shell. The shell comprises a junction part positioned at the center, and a plurality of pump parts that communicate with the junction part and are aligned in the circumferential direction centered on the junction part. The pump part has a first side surface positioned at one end in the circumferential direction, and a second side surface positioned at the other end in the circumferential direction. The plurality of electrodes are positioned on the first side surface and the second side surface of each pump part.

Microelectromechanical electrostatic actuator apparatus configured to be driven by an attractive aka pulling electrostatic force between electrically isolated electrically conductive elements, to generate motion, the elements comprising: at least three stators fixed to a substrate such as a MEMS handle layer, and (at least one) movable rotor which may be connected to a compliant suspension or spring structure and wherein driving voltage introduces electrical potential difference between the stators and / or rotor to yield the attractive electrostatic force which generates the motion by displacing the rotor toward the stator / s.

The invention discloses a displacement control method and device for a single-degree-of-freedom parallel plate electrostatic actuator, and the method comprises the steps: building a physical model based on the single-degree-of-freedom parallel plate electrostatic actuator; based on the physical model, constructing a control system model to convert an output error constraint tracking problem of the single-degree-of-freedom parallel plate electrostatic actuator into a controller design problem based on an output feedback system; based on an output error needing to be tracked, filter expansion is introduced; designing a controller by using an internal model based on a filter expansion and control system model; in order to convert a security boundary into a mathematical constraint, a barrier Lyapunov function is introduced to be dynamically combined with an error, so that the stability of a closed-loop system is ensured, and an output error is always maintained in a preset security interval in the whole operation period. According to the invention, under the condition that large parameter changes exist, the movable plate can realize full-gap harmonic displacement under the condition that the movable plate is not in contact with the fixed plate.

An electrostatic actuator for translational movement between a stator and a slider in a longitudinal direction (X), comprising stator drive electrodes and slider drive electrodes arranged at respective pitches in said direction (X), where said actuator is driven by n power supply outputs, the stator drive electrodes and / or the slider drive electrodes are interconnected in n stator power buses and / or slider power buses, characterized in that the slider buses and the stator buses are such that the connections of the n stator buses are arranged in a predetermined order, the connections of the n slider buses are configured in a different predetermined order, each of the n power outputs being configurable to provide time-varying power of different phases, thus, a first potential distribution and a second potential distribution which travel on the pitch of the stator drive electrode or the slider drive electrode in opposite directions from each other are allowed to be generated.

The present invention discloses an adaptive control method for an electric hydrostatic actuator that ensures parameter estimation. The method includes: establishing an adaptive backstepping controller; establishing an unknown parameter matrix of the electric hydrostatic actuator, inputting the tracking desired displacement into a first adaptive controller, outputting a first adaptive control law, controlling the displacement tracking of the actuator rod of the electric hydrostatic actuator to track the desired displacement; inputting the first adaptive control law into a second adaptive controller, outputting a second adaptive control law, controlling the output force tracking of the electric hydrostatic actuator to track the first adaptive control law; performing real-time online parameter estimation through adaptive iteration, realizing continuous tracking of the position and force of the actuator rod of the electric hydrostatic actuator, and finally realizing adaptive control of the electric hydrostatic actuator. The present invention solves the problem of poor parameter convergence performance of the existing adaptive control method, can better overcome the influence of model uncertainty in the control process, and improve the control accuracy of the electric hydrostatic actuator.

This invention relates to a wavelength-variable interference filter and its driving method, and an optical module, providing a wavelength-variable interference filter that can improve the accuracy of wavelength adjustment in a wide band. As described above, the wavelength-variable interference filter (1) includes: a first reflective film (4) and a second reflective film (5) facing each other; and an electrostatic actuator unit (6) that changes the gap amount (G) between the first reflective film (4) and the second reflective film (5). The electrostatic actuator unit (6) includes: a bias electrode (61) to which a bias voltage corresponding to a target value of the gap amount (G) (i.e., a gap target value (Gt)) is applied; a control electrode (62) to which a control voltage controlled by feedback according to the gap amount (G) is applied; and a variable electrode (63) to which the bias voltage and the control voltage can be switched.

A system includes a set of electrostatic actuators. Each electrostatic actuator of the set of electrostatic actuators includes a high-voltage side and a low-voltage side. The low-voltage side is configured to be driven by a time-varying voltage signal (TVVS). The system includes a set of drive-sense channels. A representative channel of the set of drive-sense channels includes a drive electrical link between (i) a corresponding drive circuit of a set of drive circuits and (ii) the high-voltage side of a corresponding electrostatic actuator of the set of electrostatic actuators. The representative channel is configured to carry, via the drive electrical link, a controllable drive voltage from the corresponding drive circuit to the high-voltage side of the corresponding electrostatic actuator. The representative channel includes a sense electrical link configured to carry a current generated by the TVVS to a sense-measurement circuit.