The invention discloses a
force balance voltage modulation method of a Z-axis
accelerometer, and belongs to the technical field of MEMS electrostatic driving. The Z-axis
accelerometer comprises a mover
mass block and a fixed type multifunctional
multiplexing polar plate, a variable-spacing differential
capacitor structure is formed, and displacement detection, driving force control and rigidity adjustment are achieved at the same time by
multiplexing the structure. A PWM driving
signal is generated through a dual PWM modulation method,
sinusoidal modulation is carried out on the PWM driving
signal and bias
voltage together, a variable-spacing differential
capacitor structure is used as a demodulator, a second-order
mechanical vibration system is used as a low-pass filter, and a low-
noise closed-loop driving torque is generated to stabilize the position of a
mass block at a preset position. And meanwhile, low-
noise direct-current static
negative stiffness is generated, so that the
system stiffness is reduced to a preset value. According to the invention, the variable-
pitch differential
capacitor structure can maintain the constant elastic coefficient of the
system while generating the electrostatic driving torque, can provide sufficient control precision while reducing the leakage of driving signals, and can effectively suppress low-
frequency noise.