The objective is to provide a vibration power generation element that can improve reliability by simultaneously solving conventional problems 1 (damage due to compressive force load on the stopper) and 2 (increased manufacturing difficulty due to extremely narrow slits) by devising the arrangement of the deformation limiting means for the stopper. [Solution] The vibration power generation element (100A) comprises a base (7), a movable part (20), a fixed part (10), a fixed support part (30) fixed to the base (7) and having a stopper part (31) that can contact the end face (22a) of the movable part (20), an elastic support part (40), and a stopper part deformation limiting means (25). The stopper part deformation limiting means (25) is provided on the movable part (20) which is positioned opposite the fixed support part (30) and is located on a central axis Lc parallel to the vibration direction of the movable part (20) passing through the stopper contact part (31c), and away from the end face (22a) of the movable part (20).