60 results about "Micro mechanism" patented technology

The present invention which relates to the micro-mechanism electric technology provides a single-shaft and integrated device for measuring the inertia based on the single quality block. And the present solves the problems of the prior single-shaft and integrated assembly for measuring the inertia that the structure is complex, the volume and quality are big, etc. The single-shaft and integrated device for measuring the inertia includes a quality block and a glass cover bottom. The quality block which is hang on the upper of the glass cover bottom through a supporting beam includes a quality chip and four supporting bodies that are fixed with the four sides of the quality chip through the elastic beam. A moveable comb for detecting is fixed on the external of the supporting body relative to the Y direction and a moveable comb for driving is fixed on the external of the supporting body relative to the X direction. A fixed comb for detecting and a fixed comb for driving are fixed on the glass cover bottom, and electrodes for forming the capacitance are fixed on the lower end surface and the glass cover bottom of the quality chip. The device in the present invention has advantages of a reasonable structure, an easy processing, a high reliability, a small volume, a strong ability of resisting the interference, a high precision, a high precision of measuring the paralleling and orthogonality of the vectors, etc.

A translation and rotation mechanism is disclosed, which comprises of one or more bi-directional electrostatic actuators. Each bi-directional electrostatic actuator comprising of fixed electrodes and movable electrodes, where the fixed electrodes of each actuator being attached onto a base. The movable electrodes of each actuator are connected to the translating and rotation unit through a spring system. The movable elements of each said actuator being able to rotate with respect to the base plane by applying voltage signals to the actuator and by controlling the voltage signals applied to each said actuator independently, said translating and rotation unit being able to translate, rotate, or translate and rotate simultaneously.

The invention belongs to the multilayered thin film preparation field; it concretely involves a method that uses the ion peel-off technology to prepare large area layered assembly self-support membrane, including basis processing, layered-assembly membrane preparation, configuration of the peeling solution, preparation layered assembly self-support membrane using ion peel-off technology. The invention is not limited by the basis size, the shape, the type, and always holds true in the plane, the bended surface and the anomalous surface's, it can make the self-support membrane which are tubular or more complex form. This has a vital significance: On one hand, self-support membrane helps to research the layered assembly film's performance expediently, opens out the inner contact between the layered assembly film's performance, the chemical composition of the film and microscopic structure. On the other hand, compared with the layered assembly film which adheres to the solid fundus, self-support membrane will expand the application of the layered assembly film, including separating the membrane, the sensor, the catalyzed function thin film, the micro mechanism, even the man-made apparatus.

The RF switch based on micro electromechanical technology includes micro mechanism (MEMS) part and RF part, and has mobile switch structure for the switching function is set on the MEMS substrate. The MEMS part and RF part are first manufactured separately, and the MEMS substrate and RF substrate are then aligned and bonded together. The switch includes several mobile electrodes and has two kinds of drive states including upward drawing state and downward drawing state. The switch in the technological scheme of the present invention has fast switching speed, low drive voltage, high stability and relatively simple manufacture process with high outer contamination resistance.

The invention provides a microswitch. The microswitch comprises a bottom casing, an upper cover as well as a micro-mechanism arranged between the bottom casing and the upper cover, wherein the micro-mechanism comprises a common terminal, a normally-closed terminal, a normally-open terminal and an elastic piece, one end of the elastic piece is fixedly connected with the common terminal, the other end of the elastic piece is arranged between the normally-closed terminal and the normally-open terminal, the elastic piece is connected with the normally-closed terminal in a normal state, and a button device is arranged at the upper end of a position where the elastic piece and the common terminal are connected. The microswitch comprises a few components, the structure is simple, the production cost is greatly reduced, all the components are in close fit by the aid of simple and precise components and the ingenious design, the sensitivity is high, and the service life is long.

This invention relates to a trailing integrated micro-lens infrared focal plane detector and a preparation method for micro-lenses, in which, said detector includes: infrared photosensitive meta-array chips, a read-out circuit, a blending mutual-connected indium post and a micro-lens array, which is processed by micro-mechanism at the back of the substrate of the array chip applying an etching method to the positive pattern of a memory focal plane detection chip and a plasma combined etching technology, and the optical shafts of the trailing integrated micro-lens are coincident with the photosensitive face central normal of the corresponding photosensitive pixels.

The invention discloses an NMR relaxation semaphore calibrating device and method for an aquo-complex sediment by combining an X-CT technology. The device comprises a reaction kettle, an NMR testing system, an X-CT scanning system, an aquo-complex synthesizing system, a temperature pressure control system and a vacuumizing saturated system. The vacuumizing saturated system is connected to the reaction kettle for vaccumizing saturated treatment of the sediment in the reaction kettle. The NMR testing system and the X-CT scanning system are used for scanning and testing microporous structures ofthe aquo-complex sediment and analyzing the behavior characteristics of the aquo-complex sediment in pore scale in the forming and decomposing processes. By means of the device, calibration of nuclearmagnetism transverse relaxation semaphore and the behavior measurement and analysis in the pore scale can be integrated, thereby laying a technical foundation for discussing a micromechanism of basicphysical parameter change of the aquo-complex sediment.

The invention relates to a flexural vibration modality ultrasonic micro-motor based on the polyhedral piezoelectric pole or piezoelectric pipe, belonging to the field of ultrasonic application. The invention comprises a stator vibrated by actuating ultrasonic, a rotor for putting torque or an axis connecting rotor, and a pre-pressure unit for pressing rotor. Wherein, said stator is mainly formed by a piezoelectric ceramic component for actuating vibration and its matching blocks, which is characterized in that: said piezoelectric ceramic component for actuating flexural vibration is polyhedral piezoelectric pole or piezoelectric pipe, whose surfaces of external wall are plated with a plurality of external electrodes for polarization and actuating vibration. The inventive motor has a wide size to be processed, which improves the minimization of ultrasonic motor. And, when inputting the electrical signal, the rotator can rotate on the surface of stator. Said invention has wider application in the fields of biology, medical treatment, micro-mechanism, precision electronic mechanism and the national defence.

A device for testing dynamical property of high load microcomponent is composed of high speed rotary table , microcomponent driving and clamping , test device of optical vibration and optical fibre rotary connector . It features setting rotary arm at one end of said table and making another end be shaft shape , setting vacuum chamber on rotary arm of said table and optical rotary connector in said shaft sleeve and setting foam for isolating vibration , anti-shock mass , piezoelectric activator , micro-component , optical fibre probe and its clamp device in vacuum chamber.

The invention relates to a micro mechanical testing probe card based on electroplating process and a manufacturing method thereof, and is characterized in that, cantilevers and probe tips are manufactured and formed on a silicon wafer with electroplated metal nickel; the probe tips are manufactured on an (111) inclined surface of the silicon wafer, and each probe tip is connected with a ceramic substrate with one or two probe cantilevers; the probe cantilevers and the probe tips adopt an isostress beam structure; probes on an flip chip substrate are intensively arranged in two directions. The manufacturing is characterized in that: firstly, the upper surface of the (100) silicon wafer is taken as the electroplated working face, and the probe cantilevers of a low stress nickel layer is formed by electroplating; and then a deep groove (111) inclined surface produced by anisotropic etching is taken as the working face, and the probe tips of the low stress nickel layer is formed by electroplating, and then the probes are connected with a package substrate by a flip chip process, and finally the probe structure is released through a method of removing the corrosion of the silicon wafer.

The present invention belongs to the integrated circuit manufacturing superfine engineering. The precise work table includes micro turntable, turntable seat coaxially connected to the turntable, turntable driving support, small X direction table with X and Y direction mirror and capable of reciprocating in X direction, hydrostatic X direction air guide, Y direction stable, hydrostatic Y directionair guide, Y direction micro mechanism, rolling screw bolt to drive the hydrostatic Y direction air guide and elastic shock-proof worktable. The micro mechanism for the turntable driving support and the Y direction stable are driven with piezoelectrics; and both the X direction table and the Y direction stable are T-shaped. The present invention can ensure both scanning precision and photoetchingefficiency.

A sealing system that self-adjusts according to atmospheric conditions is disclosed. The sealing system includes an annular seal casing mounted on a stationary component, the annular seal casing positioned such that a rotating component extends therethrough, at least one annular sealing agent configured to radially move with respect to the rotating component between a sealed position and an unsealed position, at least one sensor for gathering atmospheric data, and at least one micro-mechanism configured to control the at least one annular sealing agent based on the atmospheric data.

The invention provides a zero adjusting device for a magnetic performance parameter test of a torque motor. The zero adjusting device comprises a measuring bar (2), chucks (3), a micro force sensor (4), an inching mechanism (5) and an adjusting screw (6), wherein the measuring bar (2) is rigidly connected with a to-be-zeroed component in the torque motor (1); the measuring bar (2) is inserted between the chucks (3); the chucks (3) are arranged on a chuck installation base (7); the left sides of the chucks (3) can be manually adjusted through the adjusting screw (6); one end of the micro force sensor (4) is fixed on the chuck installation base (7) through threads, and the other end of the micro force sensor (4) is connected with the inching mechanism (5). Fine tuning of the micro mechanism (5) is realized through cooperation of a hand wheel (8), a micrometer screw (9), a big gear (10) and a pinion (11); the two ends of the measuring bar (2) are in point contact with the chucks (3). The zero adjusting device can be used for meeting fine-tuning needs, realizing minimization of zero adjusting errors, and guaranteeing zero adjusting accuracy.

The invention relates to a method for preparing three-space micro mechanism of a one-space nanometer material in the field of nanometer technology, which comprises: preparing for the base chip: doing preprocessing to the base chip; steel micro electric molding: forming the photoresist micro casting mold of the mental electrode structure with the needed structure and the displacement characters on the processed base chip, and cladding the mental material on the micro casting mold to form the mental micro mechanism; silk-screen printing one-space nanometer material paste: preparing one-space nanometer material paste and adopting silk-screen printing method to coat the one-space nanometer material paste on the side wall and the surface of the steel micro mechanism; micro mechanism solid shaping: extracting the organics of the one-space nanometer material micro mechanism to stable the nanometer material structure by heating and heat preservation process.

A space curve mesh driving pair and a polyhedral space curve mesh transmission are disclosed. Said space curve mesh driving pair consists of a driving wheel and a driven wheel. Axes of the driving wheel and the driven wheel are intersected at an angle of 0°˜180°, and power transmission is realized by continuous mesh between the driving tines and the driven tines; a number of driving tines are provided on said driving wheel, and a number of driven tines are provided on the driven wheel; the driving tines are uniformly arranged on an end face of a cylinder of the driving wheel, and the driven tines are uniformly arranged on the circumference of a cylindrical surface of the driven wheel. Said polyhedral space curve mesh transmission consists of an above-mentioned space curve mesh driving pair. Motion is input from an input end, and is passed through a number of pace curve mesh driving pairs to realize the speed change, then is output from one or more output ends. Wherein, the space curve mesh driving pair is the core of the transmission. The invention has the advantages of compact structure, small size, light weight, stable transmission and flexible operation, and can be widely used in micro-mechanism field.

The invention discloses a micro rotating mechanism based on shape memory alloy, consisting mainly of a fixed sleeve and a rotating shaft, characterized in that: A first wire and a second wire are respectively arranged on the outer surface of the rotating shaft along the circumferential direction, The first end of the first wire material and the first end of the second wire material are fixed on the rotating shaft respectively and the distance between the two fixing points is less than 5% of the circumference of the rotating shaft. The first wire material and the second wire material are respectively rotated around the rotating shaft backward and led out and fixed through a fixing sleeve so that the first wire material and the second wire material are in a pulled state. The first wire is ashape memory alloy wire working in a shape memory state, and the second wire is a shape memory alloy wire in a superelastic state; A constant current power supply is connected between the two ends ofthe first wire. The invention is suitable for completing small-range rotation in narrow space, and can be applied to medical operation, micro-mechanism control and the like. Easy to control the specific position of the rotation, and no operating noise.

The invention belongs to the technical field of film mass transferring characterization, particularly relating to a method for characterizing the micro mechanism of the mass transferring of a metal organic double-layer film, which is characterized in that the micro mechanism of the metal organic multi-layer film system is obtained by using a heterogeneous element as a mark and analyzing the element distribution of the metal organic multi-layer film system by SMS after the mass transformation is finished. The method can effectively research the micro mechanism of the mass transformation in the process of complexation of metal organics, thus having important scientific values.

The invention relates to a method to calibrate crystal orientation of mono-crystalline silicon wafer used in area of micro mechanism and microelectronics. The crystal orientation of wafer is clearly exposed by means of claborate reference patterns and following pre-etching process. The error calibrating the crystal orientation of wafer is controlled within plus or minus 0.1 degree, by observing the etching results formed from different reference patterns. With the etching results being processed further by using digital image processing technique, the calibrating accuracy can be improved to plus or minus 0.05 degree or even higher.

The invention discloses building wall coating layer additive grinding equipment. The building wall coating layer additive grinding equipment comprises a base, a vertical plate is fixedly arranged at the right end of the top of the base, and a top plate is fixedly arranged at the top of the vertical plate. According to the building wall coating layer additive grinding equipment, in the additive grinding process, large block-shaped additives and small block-shaped additives can be mixed together to be smashed and evenly mixed at the same time, in this way, after the large block-shaped additives are smashed, follow-up grinding is easier, and therefore the overall grinding efficiency of the additives can be improved; a micro mechanism is arranged, so that a mixture is conveniently discharged and ground downwards during grinding, the grinding efficiency is further ensured, and a grinding gap at the grinding body is easier to discharge and grind downwards during grinding; and meanwhile, various additives can be conveniently and uniformly mixed in the smashing process, and finally, the working efficiency during overall grinding is greatly improved.