MEMS in-plane displacement measurement method correlated with mixed fractal interpolation and frequency-domain digital speckle
A frequency-domain digital speckle and fractal interpolation technology, which is applied in the direction of measuring devices, instruments, and optical devices, can solve the problems of large measurement errors, large calculations, and low calculation efficiency, so as to improve test accuracy and repeated search. , the effect of reducing the amount of calculation
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[0041] Below in conjunction with accompanying drawing, the present invention will be further described:
[0042] First, based on the micro-visual stroboscopic system, artificial spraying speckle is used to obtain the moving image of the MEMS microstructure, and its sub-regions f (MEMS microstructure image at zero phase time) and g (MEMS microstructure moving image at a certain phase), and There is only a simple pure translation relationship between them, namely
[0043] g(x,y)=f(x+u,y+v)(1)
[0044] The relative translation size between images f and g is denoted by (u, v).
[0045] Then, the fractal interpolation processing based on the random midpoint is performed on the two sub-region images, and the random midpoint displacement method can use a simple formula to represent the interpolation point (x mi ,y mi )
[0046] x mi =(x i +x i+1 ) / 2+s w rand() (2)
[0047] the y mi =(y i +y i+1 ) / 2+s w rand()
[0048] In formula (2), s and w are parameters controlling the...
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