Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Backward integrated micro-lens infrared focal plane detector and micro-lens producing method

An infrared focal plane and microlens technology, which is applied in the use of electrical radiation detectors for photometry, lens, semiconductor/solid-state device manufacturing, etc., can solve problems such as spatial crosstalk, reduce spatial crosstalk, improve efficiency, The effect of high integration and reliability

Active Publication Date: 2007-03-21
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
View PDF0 Cites 16 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Aiming at the problem of severe spatial crosstalk in the above-mentioned new generation of high-density pixel infrared focal plane detectors, the purpose of the present invention is to propose a method that not only helps to improve the response rate, but also can effectively suppress the spatial crosstalk between adjacent pixels. Infrared focal plane detector facing back to integrated microlens array and preparation method of backing integrated microlens array

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Backward integrated micro-lens infrared focal plane detector and micro-lens producing method
  • Backward integrated micro-lens infrared focal plane detector and micro-lens producing method
  • Backward integrated micro-lens infrared focal plane detector and micro-lens producing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0022] Taking the mercury cadmium telluride infrared focal plane detector facing away from the integrated microlens array as an example, the specific implementation of the present invention will be further described in detail in conjunction with the accompanying drawings:

[0023] As shown in FIG. 1 , the infrared focal plane detector facing away from the integrated microlens array consists of a mercury cadmium telluride infrared photosensitive element array chip 1 , a silicon readout circuit 2 , a hybrid interconnected indium column 3 and a microlens array 4 . The mercury cadmium telluride infrared photosensitive array chip 1 is composed of a gallium arsenide substrate 101 and a photosensitive cell array 102 placed on the gallium arsenide substrate 101 which responds to infrared target radiation. Each photosensitive element is composed of a p-type layer of mercury cadmium telluride and an n-type region formed by boron ion implantation. The microlens array 4 is formed on the b...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

This invention relates to a trailing integrated micro-lens infrared focal plane detector and a preparation method for micro-lenses, in which, said detector includes: infrared photosensitive meta-array chips, a read-out circuit, a blending mutual-connected indium post and a micro-lens array, which is processed by micro-mechanism at the back of the substrate of the array chip applying an etching method to the positive pattern of a memory focal plane detection chip and a plasma combined etching technology, and the optical shafts of the trailing integrated micro-lens are coincident with the photosensitive face central normal of the corresponding photosensitive pixels.

Description

technical field [0001] The invention relates to an infrared focal plane detector and a lens, in particular to an infrared focal plane detector facing away from an integrated microlens array and a preparation method for the facing away from the integrated microlens array. Background technique [0002] Infrared focal plane detector is an advanced imaging sensor with both infrared information acquisition and information processing functions. It has important and extensive applications in military and civilian fields such as space earth observation, photoelectric countermeasures, robot vision, search and tracking, medical and industrial thermal imaging, and missile precision guidance. Because of its irreplaceable status and role, major industrial countries in the world have listed the preparation technology of infrared focal plane detectors as a high-tech project for key development. [0003] Driven by advanced infrared application systems, infrared detectors have entered a dev...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H01L25/00H01L25/18H01L27/14H01L21/00G01J1/42G02B3/00
Inventor 叶振华周文洪胡晓宁王晨飞丁瑞军何力
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com