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Infrared focal plane detector with antireflective convergence microlens and microlens preparing method

A technology of infrared focal plane and converging micromirror, which is applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve problems such as spatial crosstalk, and achieve suppression of spatial crosstalk, high integration and reliability, The effect of improving efficiency

Active Publication Date: 2008-11-12
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0006] Aiming at the problem of severe spatial crosstalk in the above-mentioned new generation of high-density pixel infrared focal plane detectors, the purpose of the present invention is to propose a belt that can effectively collect target information and effectively suppress spatial crosstalk between adjacent pixels. Infrared focal plane detector with antireflection converging micromirror array and preparation method of antireflection converging micromirror array

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  • Infrared focal plane detector with antireflective convergence microlens and microlens preparing method
  • Infrared focal plane detector with antireflective convergence microlens and microlens preparing method
  • Infrared focal plane detector with antireflective convergence microlens and microlens preparing method

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Embodiment Construction

[0022] Taking the mercury cadmium telluride infrared focal plane detector with an anti-reflection converging micromirror array as an example below, the specific implementation of the present invention will be further described in detail in conjunction with the accompanying drawings:

[0023] See figure 1 , the infrared focal plane detector with antireflection converging micromirror array is composed of mercury cadmium telluride infrared photosensitive element array chip 1, silicon readout circuit 2, hybrid interconnected indium column 3 and antireflection converging micromirror array 4 . The mercury cadmium telluride infrared photosensitive array chip 1 is composed of a gallium arsenide substrate 101 on which a photosensitive cell array 102 responding to infrared target radiation is placed. Each photosensitive element is composed of a p-type layer of mercury cadmium telluride and an n-type region formed by boron ion implantation. The converging micromirror array 4 is formed ...

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Abstract

The invention discloses an infrared focal plane detector with antireflex and collecting microlens and the microlens preparing method. And the detector comprises: infrared photosensitive pixel array chip, read circuit, mixed interconnected indium columns, and antireflex and collecting microlens array, where the antireflex and collecting microlens array is formed by growing an antireflex coating on the back of the substrate of the infrared photosensitive pixel array chip and combining and etching by routine plasma; and the microlens preparing method adopts a photoetching process memorizing the front side figure of focal plane detecting chip, where each optical axis of the obtained back-integrated microlens array is spatially superposed with the central normal of photosensitive surface of a corresponding photosensitive pixel. And its advantages: able to strengthen photocurrent signals of new- generation high density pixel infrared focal plane detectors and reduce space crosstalk between adjacent pixels.

Description

technical field [0001] The invention relates to an infrared focal plane detector, in particular to an infrared focal plane detector with an antireflection converging micromirror array and a preparation method of the antireflection converging micromirror array. Background technique [0002] Infrared focal plane detector is an advanced imaging sensor with both infrared information acquisition and information processing functions. It has important and extensive applications in military and civilian fields such as space earth observation, photoelectric countermeasures, robot vision, search and tracking, medical and industrial thermal imaging, and missile precision guidance. Because of its irreplaceable status and role, major industrial countries in the world have listed the preparation technology of infrared focal plane detectors as a high-tech project for key development. [0003] Driven by advanced infrared application systems, infrared detectors have entered a development st...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L25/18H01L27/144H01L21/822
Inventor 叶振华周文洪廖清君胡晓宁王晨飞丁瑞军
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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