Manufacture of electromechanical element, microelectro mechanical and resonance element and air tightness test method

Abstract

The invention provides a method for making electromechanical component and micro-electromechanical and resonance components and the air density testing method, where it provides a method for making the micro-electromechanical component integrating a packaging step and a testing component setting step into a making technique and including the steps: 1) making a protection cover, comprising a cavity; b) providing a base; c) arranging a plurality of micro-mechanisms on the base, where these microstructures comprise the testing components; d) erecting a lead device at the base to control the action of these microstructures; and e) packaging at vacuum environment, i.e. at vacuum environment integrating the protection cover with the base to compose the micro-electromechanical component, where the cavity is used to contain the testing components.

Description

technical field [0001] The invention relates to a manufacturing technology of micro-electromechanical components, especially electromechanical components, micro-electromechanical components and resonant components, and air density testing methods. Background technique [0002] In the existing manufacturing process of optical components, because the emphasis is on its specific electro-optic (electro-optic), magneto-optic (magneto-optic) and acousto-optic (acoustic-optic) effects (these effects mostly need to pass obtained by using specific materials and special manufacturing methods), so the production cost cannot be effectively reduced. In addition, although it is currently known that it is more efficient to directly modulate light through movable mechanical elements such as mirrors, gratings, and shutters, it is still There is still a lack of technology for manufacturing high-precision, high-reliability, and low-cost movable mechanical parts. [0003] However, because opt...

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Problems solved by technology

[0005] In addition, as far as the testing technology is concerned, since there is no special reliability prediction testing technology and specification for optical micro-electromechanical technology at present, most of them only refer to the testing standards of general electronic and optoelectronic components, such as Telcordia GR 1073 and GR 1221 Passive component test specifications, which include impact, high temperature and high humidity, and drop tests, etc. However, this type of test specification is not designed for electromechanical components with movable components, so it is not easy to measure the actual possible occurrence Destruction phenomenon; in other words, providing a performance testing technology and specification for mechanical components with movable components in order to obtain a correct prediction of component performance is also a topic that needs to be solved at present

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