Method for characterizing metal organic double layer thin film mass transfer microcosmic mechanism
A metal-organic, thin-film technology, applied in measurement devices, material analysis by electromagnetic means, instruments, etc., can solve the problems of complex process, difficult to obtain, and inability to accurately determine the microscopic mechanism of diffusion.
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[0021] Firstly, the physical vapor deposition method is used at a vacuum degree of not less than 2×10 -3 Deposit a double-layer metal M on the substrate under the vacuum condition of Pa 1 , M 2 And use SIMS analysis to determine the metal layer M 1 There is no obvious interdiffusion phenomenon between M2 and M2; under the same conditions, metal / organic thin films with different thickness ratios are evaporated, and electrochemical reactions occur under certain conditions to form metal-organic complex thin films, which are determined by testing their transmission spectra. The optimal thickness ratio of the reaction; under the same vacuum condition, the metal M is sequentially evaporated on the substrate 1 (Heterogeneous Metal) Thin Film, Metal M 2 (Measurement metal) thin film, organic thin film, get M 1 ,M 2 , a three-layer film system of organic matter, wherein the ratio of the total thickness of the metal layer to the thickness of the organic matter is slightly greater t...
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