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35results about How to "Reliably detect" patented technology

Semiconductor Manufacturing Apparatus, Method of Detecting Abnormality, Identifying Cause of Abnormality, or Predicting Abnormality in the Semiconductor Manufacturing Apparatus, and Storage Medium Storing Computer Program for Performing the Method

In order to detect an abnormality of semiconductor manufacturing apparatus, a biaxial coordinate system having first and second axes respectively assigned two different monitoring parameters selected from plural apparatus status parameters representing statuses of semiconductor manufacturing apparatus is prepared. As monitoring parameters, for example, a cumulative film thickness for deposition processes that have previously been performed in deposition apparatus and an opening of the pressure control valve located in a vacuum exhaust path to control the internal pressure of a reaction vessel are selected. Values of monitoring parameters obtained when the semiconductor manufacturing apparatus was normally operating are plotted on the biaxial coordinate system. A boundary between a normal condition and an abnormality status is set around a plot group. Values of monitoring parameters obtained during present operation of the semiconductor manufacturing apparatus are plotted on the biaxial coordinate system to determine whether or not there exists an abnormality and identify a type of abnormality based on a positional relation between the plots and the boundary.
Owner:TOKYO ELECTRON LTD

Image forming apparatus

An image forming apparatus includes an image bearing member for bearing an electrostatic latent image; developing means for developing the latent image on the image bearing member with a developer including toner and carrier particles at a developing position, the developing means including a developer carrying member for carrying the developer, a plurality of developing devices containing toner particles which have colors different from each other, and moving means for carrying the developing devices to move a slected one of the developing devices to the developing position, the apparatus further including density detecting means for detecting a toner density on the developer carrying member of a the devices located at a positioin different from the developing position; control means, responsive to an output of the density detecting means, for controlling toner contents in the devices, wherein when the density detecting means effects its density detecting operaration in an operation mode, in which only one of the devices is used, the control means effects the density detecting operaration after the developer carrying member is rotated through a predetermined period of time, for the device which comes to the detecting a position by way of the developing position.
Owner:CANON KK
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