A neural
microprobe is disclosed. The neural
microprobe comprises a stacked structure having a base layer, a core layer, a
metal layer, and a ceiling layer. The base layer is formed from a first species of biocompatible
polymer. The core layer is formed from a second species of biocompatible
polymer deposited on the base layer. The
metal layer is deposited on the core layer. The ceiling layer is formed from the first species of biocompatible
polymer deposited on the
metal layer and comprises a plurality of trenches etched through the ceiling layer to
expose portions of the metal layer, said exposed portions defining electrodes of an
electrode array of the neural
microprobe. The first species of biocompatible polymer has a lower coefficient of
thermal expansion than the second species. A method of manufacturing a neural microprobe comprises providing a first
mask on the ceiling layer, wherein the first
mask is lithographically patterned to define a plurality of gaps in the first
mask; providing a second mask on the first mask;
etching, with a first etchant, through the second mask and the gaps in the first mask, trenches in the ceiling layer to
expose the portions of the metal layer defining the electrodes of the
electrode array; and
etching, with a second etchant, the stacked structure to remove any remaining portions of the first and second masks, and to release a base layer of the stacked structure from the release layer.