Ultrasonic high-precision linear displacement device

A linear displacement, high-precision technology, used in electrical components, piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, etc.

Inactive Publication Date: 2016-01-13
SHENYANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Most of the traditional linear displacement mechanisms are driven by electric motors. It is difficult to have the characteristics of large stroke and high precision at the same time by converting the rotary motion into linear motion through the screw nut or using a linear motor.

Method used

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  • Ultrasonic high-precision linear displacement device
  • Ultrasonic high-precision linear displacement device
  • Ultrasonic high-precision linear displacement device

Examples

Experimental program
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Embodiment Construction

[0016] The ultrasonic high-precision linear workbench of the present invention includes 1. guide rail, 2. workbench, 3. ceramic wear-resistant coating, 4. base, 5. foot, 6. distance measuring instrument, 7. vibrator base, 8. bolt pre- Tightening mechanism, 9. Self-locking nut, 10. Pre-tightening mechanism base fixing nut, 11. Vibrator base fixing nut, 12. Linear micro-motion slide table, 13. Vibrator. The worktable is driven by a unilateral biped longitudinal bending vibrator, and a piezoelectric ceramic sheet is installed inside the vibrator. When a voltage with appropriate frequency and phase difference is applied to the piezoelectric ceramic sheet inside the vibrator, which is used to excite longitudinal vibration and bending vibration respectively, the superposition of these two vibrations will cause the surface particles of the vibrator to drive the foot to produce elliptical motion, and then drive the worktable Make a linear movement along the guide rail in one direction...

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PUM

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Abstract

The invention discloses an ultrasonic high-precision linear displacement device, relating to a precision mechanical platform device. The device comprises a guide rail, a workbench, a ceramic wear-resistant coating, a base, pins, a range finder, a vibrator base, a bolt pre-tightening mechanism, a self-locking nut, a pre-tightening mechanism base fixing nut, a vibrator base fixing nut, a linear micro sliding table and a vibrator; the single-sided double-leg longitudinal flexural vibrator drives the workbench, and piezoelectric ceramic plates are arranged inside the vibrator; the guide rail (1), the vibrator base (7) and the bolt pre-tightening mechanism (8) are arranged on the base (4); the workbench (2) is arranged on the guide rail (1), the linear micro sliding table (12) is arranged on the workbench, and the vibrator (13) is arranged on the side of the workbench (2). The device excites ultrasonic vibration by utilizing the inverse piezoelectric effect of piezoelectric ceramic, amplifies resonance by means of an elastomer, generates linear motion through friction coupling to directly drive the workbench, and realizes nano precision through a laminated piezoelectric element linear micro mechanism on the workbench.

Description

technical field [0001] The invention relates to a precision mechanical platform device, in particular to an ultrasonic high-precision linear displacement device. Background technique [0002] Most of the traditional linear displacement mechanisms are driven by motors, which convert the rotary motion into linear motion through the screw nut or use a linear motor, so it is difficult to have the characteristics of large stroke and high precision at the same time. Contents of the invention [0003] The object of the present invention is to provide an ultrasonic high-precision linear displacement device, which uses the inverse piezoelectric effect of piezoelectric ceramics to excite ultrasonic vibrations, amplifies elastic body resonance, generates linear motion through frictional coupling, and directly drives the workbench. The multilayer piezoelectric element linear micro-motion mechanism installed on the table realizes nanometer precision. [0004] The purpose of the presen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/04
CPCH02N2/04
Inventor 白东哲
Owner SHENYANG UNIV
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